GB1389119A - Electron-beam microanalyser apparatus - Google Patents

Electron-beam microanalyser apparatus

Info

Publication number
GB1389119A
GB1389119A GB4720672A GB4720672A GB1389119A GB 1389119 A GB1389119 A GB 1389119A GB 4720672 A GB4720672 A GB 4720672A GB 4720672 A GB4720672 A GB 4720672A GB 1389119 A GB1389119 A GB 1389119A
Authority
GB
United Kingdom
Prior art keywords
electron beam
lattice
voltage
oct
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4720672A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1389119A publication Critical patent/GB1389119A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB4720672A 1971-10-14 1972-10-12 Electron-beam microanalyser apparatus Expired GB1389119A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2151167A DE2151167C3 (de) 1971-10-14 1971-10-14 Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis

Publications (1)

Publication Number Publication Date
GB1389119A true GB1389119A (en) 1975-04-03

Family

ID=5822311

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4720672A Expired GB1389119A (en) 1971-10-14 1972-10-12 Electron-beam microanalyser apparatus

Country Status (5)

Country Link
US (1) US3760180A (de)
CH (1) CH547530A (de)
DE (1) DE2151167C3 (de)
FR (1) FR2157476A5 (de)
GB (1) GB1389119A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2215907A (en) * 1987-07-14 1989-09-27 Jeol Ltd Charged particle apparatus
US10319578B2 (en) 2016-01-21 2019-06-11 Japan Synchrotron Radiation Research Institute Retarding potential type energy analyzer

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3921078A (en) * 1971-04-20 1975-11-18 Jeol Ltd Breakdown protection for field emission electron gun
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
DE2751277C2 (de) * 1977-11-16 1980-01-03 Bosch-Siemens Hausgeraete Gmbh, 7000 Stuttgart Schaltungsanordnung zum Steuern einer Wäschetrockner-Programmschalteinrichtung
FR2410271A1 (fr) * 1977-11-29 1979-06-22 Anvar Perfectionnements aux procedes de micro-analyse faisant intervenir un rayonnement x
GB1596105A (en) * 1978-02-20 1981-08-19 Nat Res Dev Electrostatic engergy analysis
DE2842527C3 (de) * 1978-09-29 1981-12-17 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Elektrostatische Emissionslinse
US4179604A (en) * 1978-09-29 1979-12-18 The United States Of America As Represented By The Secretary Of The Navy Electron collector for forming low-loss electron images
DE2922325A1 (de) * 1979-06-01 1980-12-11 Philips Patentverwaltung Rasterelektronenmikroskop
KR850001390B1 (ko) * 1980-07-31 1985-09-24 니혼 덴시 가부시끼 가이샤 2차 전자 검출장치
DE3138929A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verbessertes sekundaerelektronen-spektrometer fuer die potentialmessung an einer probe mit einer elektronensonde
JPS5932145A (ja) * 1982-08-16 1984-02-21 Hitachi Ltd 電位検出装置
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
JPH0766772B2 (ja) * 1983-11-30 1995-07-19 株式会社日立製作所 多段加速方式電界放射形電子顕微鏡
US4713543A (en) * 1984-08-13 1987-12-15 Siemens Aktiengesellschaft Scanning particle microscope
DE3570012D1 (en) * 1985-01-29 1989-06-08 Ibm Field-emission scanning auger electron microscope
US4680468A (en) * 1985-08-05 1987-07-14 Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee Particle detector
JP3101539B2 (ja) * 1994-06-24 2000-10-23 インターナショナル・ビジネス・マシーンズ・コーポレ−ション 電子線ナノメトロジー・システム
FR2837931B1 (fr) * 2002-03-29 2004-12-10 Cameca Dispositif de mesure de l'emission de rayons x produite par un objet soumis a un faisceau d'electrons
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy
US20110294071A1 (en) * 2010-05-28 2011-12-01 Canon Kabushiki Kaisha Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3461306A (en) * 1967-04-27 1969-08-12 Gen Electric Electron probe microanalyzer for measuring the differential energy response of auger electrons
US3582649A (en) * 1968-10-21 1971-06-01 Varian Associates Retarding field electron diffraction spectrometer having improved resolution
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2215907A (en) * 1987-07-14 1989-09-27 Jeol Ltd Charged particle apparatus
GB2215907B (en) * 1987-07-14 1992-04-15 Jeol Ltd Apparatus using a charged-particle beam
US10319578B2 (en) 2016-01-21 2019-06-11 Japan Synchrotron Radiation Research Institute Retarding potential type energy analyzer

Also Published As

Publication number Publication date
DE2151167C3 (de) 1974-05-09
FR2157476A5 (de) 1973-06-01
DE2151167A1 (de) 1973-05-10
CH547530A (de) 1974-03-29
US3760180A (en) 1973-09-18
DE2151167B2 (de) 1973-10-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee