FR2157476A5 - - Google Patents

Info

Publication number
FR2157476A5
FR2157476A5 FR7236341A FR7236341A FR2157476A5 FR 2157476 A5 FR2157476 A5 FR 2157476A5 FR 7236341 A FR7236341 A FR 7236341A FR 7236341 A FR7236341 A FR 7236341A FR 2157476 A5 FR2157476 A5 FR 2157476A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7236341A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2157476A5 publication Critical patent/FR2157476A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
FR7236341A 1971-10-14 1972-10-13 Expired FR2157476A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2151167A DE2151167C3 (de) 1971-10-14 1971-10-14 Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis

Publications (1)

Publication Number Publication Date
FR2157476A5 true FR2157476A5 (de) 1973-06-01

Family

ID=5822311

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7236341A Expired FR2157476A5 (de) 1971-10-14 1972-10-13

Country Status (5)

Country Link
US (1) US3760180A (de)
CH (1) CH547530A (de)
DE (1) DE2151167C3 (de)
FR (1) FR2157476A5 (de)
GB (1) GB1389119A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2409342A1 (fr) * 1977-11-16 1979-06-15 Bosch Siemens Hausgeraete Circuit de commande pour le mecanisme de commutation a programme d'un sechoir a linge
US10319578B2 (en) 2016-01-21 2019-06-11 Japan Synchrotron Radiation Research Institute Retarding potential type energy analyzer

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3921078A (en) * 1971-04-20 1975-11-18 Jeol Ltd Breakdown protection for field emission electron gun
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
FR2410271A1 (fr) * 1977-11-29 1979-06-22 Anvar Perfectionnements aux procedes de micro-analyse faisant intervenir un rayonnement x
GB1596105A (en) * 1978-02-20 1981-08-19 Nat Res Dev Electrostatic engergy analysis
DE2842527C3 (de) * 1978-09-29 1981-12-17 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Elektrostatische Emissionslinse
US4179604A (en) * 1978-09-29 1979-12-18 The United States Of America As Represented By The Secretary Of The Navy Electron collector for forming low-loss electron images
DE2922325A1 (de) * 1979-06-01 1980-12-11 Philips Patentverwaltung Rasterelektronenmikroskop
KR850001390B1 (ko) * 1980-07-31 1985-09-24 니혼 덴시 가부시끼 가이샤 2차 전자 검출장치
DE3138929A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verbessertes sekundaerelektronen-spektrometer fuer die potentialmessung an einer probe mit einer elektronensonde
JPS5932145A (ja) * 1982-08-16 1984-02-21 Hitachi Ltd 電位検出装置
GB8327737D0 (en) * 1983-10-17 1983-11-16 Texas Instruments Ltd Electron detector
JPH0766772B2 (ja) * 1983-11-30 1995-07-19 株式会社日立製作所 多段加速方式電界放射形電子顕微鏡
US4713543A (en) * 1984-08-13 1987-12-15 Siemens Aktiengesellschaft Scanning particle microscope
EP0189498B1 (de) * 1985-01-29 1989-05-03 International Business Machines Corporation Feldemissions-Auger-Rasterelektronenmikroskop
US4680468A (en) * 1985-08-05 1987-07-14 Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee Particle detector
GB2215907B (en) * 1987-07-14 1992-04-15 Jeol Ltd Apparatus using a charged-particle beam
JP3101539B2 (ja) * 1994-06-24 2000-10-23 インターナショナル・ビジネス・マシーンズ・コーポレ−ション 電子線ナノメトロジー・システム
FR2837931B1 (fr) * 2002-03-29 2004-12-10 Cameca Dispositif de mesure de l'emission de rayons x produite par un objet soumis a un faisceau d'electrons
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy
US20110294071A1 (en) * 2010-05-28 2011-12-01 Canon Kabushiki Kaisha Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3461306A (en) * 1967-04-27 1969-08-12 Gen Electric Electron probe microanalyzer for measuring the differential energy response of auger electrons
US3582649A (en) * 1968-10-21 1971-06-01 Varian Associates Retarding field electron diffraction spectrometer having improved resolution
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2409342A1 (fr) * 1977-11-16 1979-06-15 Bosch Siemens Hausgeraete Circuit de commande pour le mecanisme de commutation a programme d'un sechoir a linge
US10319578B2 (en) 2016-01-21 2019-06-11 Japan Synchrotron Radiation Research Institute Retarding potential type energy analyzer

Also Published As

Publication number Publication date
CH547530A (de) 1974-03-29
DE2151167C3 (de) 1974-05-09
US3760180A (en) 1973-09-18
GB1389119A (en) 1975-04-03
DE2151167B2 (de) 1973-10-11
DE2151167A1 (de) 1973-05-10

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Legal Events

Date Code Title Description
ST Notification of lapse