GB1269605A - Improvements in or relating to field-effect transistors - Google Patents
Improvements in or relating to field-effect transistorsInfo
- Publication number
- GB1269605A GB1269605A GB1892270A GB1892270A GB1269605A GB 1269605 A GB1269605 A GB 1269605A GB 1892270 A GB1892270 A GB 1892270A GB 1892270 A GB1892270 A GB 1892270A GB 1269605 A GB1269605 A GB 1269605A
- Authority
- GB
- United Kingdom
- Prior art keywords
- aluminium
- gate
- source
- april
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005669 field effect Effects 0.000 title 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 3
- 229910052782 aluminium Inorganic materials 0.000 abstract 3
- 239000004411 aluminium Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005566 electron beam evaporation Methods 0.000 abstract 2
- 238000009413 insulation Methods 0.000 abstract 2
- 238000011109 contamination Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Weting (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Junction Field-Effect Transistors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19691920400 DE1920400A1 (de) | 1969-04-22 | 1969-04-22 | Verfahren zur Herstellung von Feldeffekttransistoren |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1269605A true GB1269605A (en) | 1972-04-06 |
Family
ID=5731935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1892270A Expired GB1269605A (en) | 1969-04-22 | 1970-04-21 | Improvements in or relating to field-effect transistors |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS4826971B1 (de) |
| AT (1) | AT305378B (de) |
| CH (1) | CH501313A (de) |
| DE (1) | DE1920400A1 (de) |
| FR (1) | FR2039341B1 (de) |
| GB (1) | GB1269605A (de) |
| NL (1) | NL7003476A (de) |
| SE (1) | SE355897B (de) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3445924A (en) * | 1965-06-30 | 1969-05-27 | Ibm | Method for fabricating insulated-gate field effect transistors having controlled operating characteristics |
| US3426422A (en) * | 1965-10-23 | 1969-02-11 | Fairchild Camera Instr Co | Method of making stable semiconductor devices |
| US3474310A (en) * | 1967-02-03 | 1969-10-21 | Hitachi Ltd | Semiconductor device having a sulfurtreated silicon compound thereon and a method of making the same |
-
1969
- 1969-04-22 DE DE19691920400 patent/DE1920400A1/de active Pending
-
1970
- 1970-03-11 NL NL7003476A patent/NL7003476A/xx unknown
- 1970-04-16 FR FR7013781A patent/FR2039341B1/fr not_active Expired
- 1970-04-17 CH CH571370A patent/CH501313A/de not_active IP Right Cessation
- 1970-04-20 AT AT358170A patent/AT305378B/de active
- 1970-04-21 GB GB1892270A patent/GB1269605A/en not_active Expired
- 1970-04-21 SE SE550770A patent/SE355897B/xx unknown
- 1970-04-22 JP JP3393470A patent/JPS4826971B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| AT305378B (de) | 1973-02-26 |
| FR2039341B1 (de) | 1975-01-10 |
| NL7003476A (de) | 1970-10-26 |
| FR2039341A1 (de) | 1971-01-15 |
| CH501313A (de) | 1970-12-31 |
| JPS4826971B1 (de) | 1973-08-17 |
| DE1920400A1 (de) | 1970-11-12 |
| SE355897B (de) | 1973-05-07 |
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