GB1263582A - Improvements in or relating to thin film deposition - Google Patents
Improvements in or relating to thin film depositionInfo
- Publication number
- GB1263582A GB1263582A GB4618569A GB4618569A GB1263582A GB 1263582 A GB1263582 A GB 1263582A GB 4618569 A GB4618569 A GB 4618569A GB 4618569 A GB4618569 A GB 4618569A GB 1263582 A GB1263582 A GB 1263582A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chamber
- discharge
- evaporant
- source
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB4618569A GB1263582A (en) | 1969-09-19 | 1969-09-19 | Improvements in or relating to thin film deposition |
NL7013403A NL141582B (nl) | 1969-09-19 | 1970-09-10 | Werkwijze en inrichting voor het afzetten van een dunne laag op een oppervlak. |
CH1352170A CH532128A (de) | 1969-09-19 | 1970-09-11 | Verfahren zum Aufdampfen einer dünnen Schicht |
DE19702045198 DE2045198B2 (de) | 1969-09-19 | 1970-09-12 | Verfahren und vorrichtung zur erzeugung duenner schichten auf oberflaechen durch verdampfen des die schicht bildenden stoffes in vakuum |
FR7034073A FR2062402A5 (de) | 1969-09-19 | 1970-09-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB4618569A GB1263582A (en) | 1969-09-19 | 1969-09-19 | Improvements in or relating to thin film deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1263582A true GB1263582A (en) | 1972-02-09 |
Family
ID=10440203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB4618569A Expired GB1263582A (en) | 1969-09-19 | 1969-09-19 | Improvements in or relating to thin film deposition |
Country Status (5)
Country | Link |
---|---|
CH (1) | CH532128A (de) |
DE (1) | DE2045198B2 (de) |
FR (1) | FR2062402A5 (de) |
GB (1) | GB1263582A (de) |
NL (1) | NL141582B (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4061800A (en) * | 1975-02-06 | 1977-12-06 | Applied Materials, Inc. | Vapor desposition method |
WO1997042648A1 (en) * | 1996-05-09 | 1997-11-13 | Applied Materials, Inc. | Recessed coil for generating a plasma |
US6254746B1 (en) | 1996-05-09 | 2001-07-03 | Applied Materials, Inc. | Recessed coil for generating a plasma |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3518197A1 (de) * | 1985-05-21 | 1986-11-27 | Heinrich 7413 Gomaringen Grünwald | Verfahren zur entfernung von metallionen aus koerpern aus glas, keramischen werkstoffen und sonstigen amorphen werkstoffen sowie kristallinen werkstoffen |
-
1969
- 1969-09-19 GB GB4618569A patent/GB1263582A/en not_active Expired
-
1970
- 1970-09-10 NL NL7013403A patent/NL141582B/xx unknown
- 1970-09-11 CH CH1352170A patent/CH532128A/de not_active IP Right Cessation
- 1970-09-12 DE DE19702045198 patent/DE2045198B2/de active Pending
- 1970-09-21 FR FR7034073A patent/FR2062402A5/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4061800A (en) * | 1975-02-06 | 1977-12-06 | Applied Materials, Inc. | Vapor desposition method |
WO1997042648A1 (en) * | 1996-05-09 | 1997-11-13 | Applied Materials, Inc. | Recessed coil for generating a plasma |
US6254746B1 (en) | 1996-05-09 | 2001-07-03 | Applied Materials, Inc. | Recessed coil for generating a plasma |
Also Published As
Publication number | Publication date |
---|---|
FR2062402A5 (de) | 1971-06-25 |
DE2045198A1 (de) | 1971-04-01 |
DE2045198B2 (de) | 1972-06-22 |
NL141582B (nl) | 1974-03-15 |
CH532128A (de) | 1972-12-31 |
NL7013403A (de) | 1971-03-23 |
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