NL7013403A - - Google Patents

Info

Publication number
NL7013403A
NL7013403A NL7013403A NL7013403A NL7013403A NL 7013403 A NL7013403 A NL 7013403A NL 7013403 A NL7013403 A NL 7013403A NL 7013403 A NL7013403 A NL 7013403A NL 7013403 A NL7013403 A NL 7013403A
Authority
NL
Netherlands
Application number
NL7013403A
Other versions
NL141582B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7013403A publication Critical patent/NL7013403A/xx
Publication of NL141582B publication Critical patent/NL141582B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7013403A 1969-09-19 1970-09-10 Werkwijze en inrichting voor het afzetten van een dunne laag op een oppervlak. NL141582B (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4618569A GB1263582A (en) 1969-09-19 1969-09-19 Improvements in or relating to thin film deposition

Publications (2)

Publication Number Publication Date
NL7013403A true NL7013403A (de) 1971-03-23
NL141582B NL141582B (nl) 1974-03-15

Family

ID=10440203

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7013403A NL141582B (nl) 1969-09-19 1970-09-10 Werkwijze en inrichting voor het afzetten van een dunne laag op een oppervlak.

Country Status (5)

Country Link
CH (1) CH532128A (de)
DE (1) DE2045198B2 (de)
FR (1) FR2062402A5 (de)
GB (1) GB1263582A (de)
NL (1) NL141582B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4061800A (en) * 1975-02-06 1977-12-06 Applied Materials, Inc. Vapor desposition method
DE3518197A1 (de) * 1985-05-21 1986-11-27 Heinrich 7413 Gomaringen Grünwald Verfahren zur entfernung von metallionen aus koerpern aus glas, keramischen werkstoffen und sonstigen amorphen werkstoffen sowie kristallinen werkstoffen
US6254746B1 (en) 1996-05-09 2001-07-03 Applied Materials, Inc. Recessed coil for generating a plasma
JP3175835B2 (ja) * 1996-05-09 2001-06-11 アプライド マテリアルズ， インコーポレイテッド プラズマ発生用埋込み形コイル

Also Published As

Publication number Publication date
NL141582B (nl) 1974-03-15
DE2045198B2 (de) 1972-06-22
FR2062402A5 (de) 1971-06-25
CH532128A (de) 1972-12-31
GB1263582A (en) 1972-02-09
DE2045198A1 (de) 1971-04-01

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