FR2337358A1 - Technique d'elimination de couches par soulevement - Google Patents

Technique d'elimination de couches par soulevement

Info

Publication number
FR2337358A1
FR2337358A1 FR7636405A FR7636405A FR2337358A1 FR 2337358 A1 FR2337358 A1 FR 2337358A1 FR 7636405 A FR7636405 A FR 7636405A FR 7636405 A FR7636405 A FR 7636405A FR 2337358 A1 FR2337358 A1 FR 2337358A1
Authority
FR
France
Prior art keywords
mask
photolacquer
windows
small dimensions
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7636405A
Other languages
English (en)
French (fr)
Other versions
FR2337358B1 (enExample
Inventor
Lubomyr T Romankiw
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2337358A1 publication Critical patent/FR2337358A1/fr
Application granted granted Critical
Publication of FR2337358B1 publication Critical patent/FR2337358B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
    • H05K3/143—Masks therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Heads (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
FR7636405A 1975-12-31 1976-11-29 Technique d'elimination de couches par soulevement Granted FR2337358A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64585275A 1975-12-31 1975-12-31

Publications (2)

Publication Number Publication Date
FR2337358A1 true FR2337358A1 (fr) 1977-07-29
FR2337358B1 FR2337358B1 (enExample) 1982-01-08

Family

ID=24590741

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7636405A Granted FR2337358A1 (fr) 1975-12-31 1976-11-29 Technique d'elimination de couches par soulevement

Country Status (3)

Country Link
JP (1) JPS5857908B2 (enExample)
DE (1) DE2645081C2 (enExample)
FR (1) FR2337358A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009038992A1 (en) * 2007-09-20 2009-03-26 Fry's Metals, Inc. Electroformed stencils for solar cell front side metallization

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102146A (ja) * 1981-12-14 1983-06-17 Fuji Photo Film Co Ltd 銀／ハロゲン化銀電極の製造方法
DE3715431A1 (de) * 1987-05-08 1988-11-17 Siemens Ag Verfahren zur herstellung eines strukturierten metallkontaktes auf einer halbleiterscheibe
JPH0666290B2 (ja) * 1987-12-29 1994-08-24 日本電気株式会社 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009038992A1 (en) * 2007-09-20 2009-03-26 Fry's Metals, Inc. Electroformed stencils for solar cell front side metallization
US7749883B2 (en) 2007-09-20 2010-07-06 Fry's Metals, Inc. Electroformed stencils for solar cell front side metallization

Also Published As

Publication number Publication date
JPS5285033A (en) 1977-07-15
JPS5857908B2 (ja) 1983-12-22
DE2645081A1 (de) 1977-07-14
FR2337358B1 (enExample) 1982-01-08
DE2645081C2 (de) 1985-10-03

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Legal Events

Date Code Title Description
ST Notification of lapse