FR2280924A1 - Procede de protection de masques de photogravure et masques obtenus - Google Patents
Procede de protection de masques de photogravure et masques obtenusInfo
- Publication number
- FR2280924A1 FR2280924A1 FR7426951A FR7426951A FR2280924A1 FR 2280924 A1 FR2280924 A1 FR 2280924A1 FR 7426951 A FR7426951 A FR 7426951A FR 7426951 A FR7426951 A FR 7426951A FR 2280924 A1 FR2280924 A1 FR 2280924A1
- Authority
- FR
- France
- Prior art keywords
- mask
- layer
- protection
- deposition
- transparent layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/48—Protective coatings
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7426951A FR2280924A1 (fr) | 1974-08-02 | 1974-08-02 | Procede de protection de masques de photogravure et masques obtenus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7426951A FR2280924A1 (fr) | 1974-08-02 | 1974-08-02 | Procede de protection de masques de photogravure et masques obtenus |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2280924A1 true FR2280924A1 (fr) | 1976-02-27 |
FR2280924B3 FR2280924B3 (fr) | 1977-06-03 |
Family
ID=9142054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7426951A Granted FR2280924A1 (fr) | 1974-08-02 | 1974-08-02 | Procede de protection de masques de photogravure et masques obtenus |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2280924A1 (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2364495A1 (fr) * | 1976-09-09 | 1978-04-07 | Philips Nv | Masques de projection d'images electroniques |
EP0068012A1 (fr) * | 1981-01-05 | 1983-01-05 | Western Electric Co | Photomasque et procede de fabrication. |
EP0107331A2 (fr) * | 1982-09-27 | 1984-05-02 | Western Electric Company, Incorporated | Masque photographique |
EP1128211A1 (fr) * | 2000-02-21 | 2001-08-29 | Motorola, Inc. | Lithographie par contact utilisant une couche à énergie de surface basse |
US6300042B1 (en) | 1998-11-24 | 2001-10-09 | Motorola, Inc. | Lithographic printing method using a low surface energy layer |
-
1974
- 1974-08-02 FR FR7426951A patent/FR2280924A1/fr active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2364495A1 (fr) * | 1976-09-09 | 1978-04-07 | Philips Nv | Masques de projection d'images electroniques |
EP0068012A1 (fr) * | 1981-01-05 | 1983-01-05 | Western Electric Co | Photomasque et procede de fabrication. |
EP0068012A4 (fr) * | 1981-01-05 | 1983-07-04 | Western Electric Co | Photomasque et procede de fabrication. |
EP0107331A2 (fr) * | 1982-09-27 | 1984-05-02 | Western Electric Company, Incorporated | Masque photographique |
EP0107331A3 (en) * | 1982-09-27 | 1985-07-03 | Western Electric Company, Incorporated | Photomask |
US4537813A (en) * | 1982-09-27 | 1985-08-27 | At&T Technologies, Inc. | Photomask encapsulation |
US6300042B1 (en) | 1998-11-24 | 2001-10-09 | Motorola, Inc. | Lithographic printing method using a low surface energy layer |
US6562553B2 (en) | 1998-11-24 | 2003-05-13 | Motorola, Inc. | Lithographic printing method using a low surface energy layer |
EP1128211A1 (fr) * | 2000-02-21 | 2001-08-29 | Motorola, Inc. | Lithographie par contact utilisant une couche à énergie de surface basse |
Also Published As
Publication number | Publication date |
---|---|
FR2280924B3 (fr) | 1977-06-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |