JPS5710989A - Pattern manufacture for jusephson-junction element - Google Patents

Pattern manufacture for jusephson-junction element

Info

Publication number
JPS5710989A
JPS5710989A JP8620780A JP8620780A JPS5710989A JP S5710989 A JPS5710989 A JP S5710989A JP 8620780 A JP8620780 A JP 8620780A JP 8620780 A JP8620780 A JP 8620780A JP S5710989 A JPS5710989 A JP S5710989A
Authority
JP
Japan
Prior art keywords
layers
projections
ultraconductive
thin films
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8620780A
Other languages
Japanese (ja)
Inventor
Koji Yamada
Yoshinobu Taruya
Mikio Hirano
Ushio Kawabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8620780A priority Critical patent/JPS5710989A/en
Publication of JPS5710989A publication Critical patent/JPS5710989A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To compose ultraconductive metal in predetermined shape by performing the etching for upper layer metal thin films for forming reverse pattern photo sensitive resin by ion milling wherein projections are formed at the metal thin films. CONSTITUTION:Photo sensitive resin layers 2 are formed on a substrate 1 and then Al layers 7 are evaporated. Next, a patterning resist having sufficiently thicker thickness compared to the necessary thickness for selective etching for the Al layers 7 is applied to form a resist pattern by exposure and development. Next, the Al layers 7 except the resist pattern is removed by leaving the Al layers 7 as it is and by ion milling without applying post baking treatment. Projections 8 are formed by re-adhesion of the Al during this process. Next, a part of patterning and spacing resists 2 is removed. And then, ultraconductive metals 3 are covered and coated on the projections 8 and the Al layers 7.
JP8620780A 1980-06-25 1980-06-25 Pattern manufacture for jusephson-junction element Pending JPS5710989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8620780A JPS5710989A (en) 1980-06-25 1980-06-25 Pattern manufacture for jusephson-junction element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8620780A JPS5710989A (en) 1980-06-25 1980-06-25 Pattern manufacture for jusephson-junction element

Publications (1)

Publication Number Publication Date
JPS5710989A true JPS5710989A (en) 1982-01-20

Family

ID=13880324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8620780A Pending JPS5710989A (en) 1980-06-25 1980-06-25 Pattern manufacture for jusephson-junction element

Country Status (1)

Country Link
JP (1) JPS5710989A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6233485A (en) * 1985-08-07 1987-02-13 Agency Of Ind Science & Technol Fabrication of flat josephson junction element
CN111200056A (en) * 2018-11-16 2020-05-26 清华大学 Josephson junction device and method of making the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6233485A (en) * 1985-08-07 1987-02-13 Agency Of Ind Science & Technol Fabrication of flat josephson junction element
JPH0513395B2 (en) * 1985-08-07 1993-02-22 Kogyo Gijutsuin
CN111200056A (en) * 2018-11-16 2020-05-26 清华大学 Josephson junction device and method of making the same
CN111200056B (en) * 2018-11-16 2022-03-08 清华大学 Josephson junction device and method of making the same

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