ES2180854T3 - Procedimiento y dispositivo para la carburacion, el enfriado rapido y temple. - Google Patents

Procedimiento y dispositivo para la carburacion, el enfriado rapido y temple.

Info

Publication number
ES2180854T3
ES2180854T3 ES97109037T ES97109037T ES2180854T3 ES 2180854 T3 ES2180854 T3 ES 2180854T3 ES 97109037 T ES97109037 T ES 97109037T ES 97109037 T ES97109037 T ES 97109037T ES 2180854 T3 ES2180854 T3 ES 2180854T3
Authority
ES
Spain
Prior art keywords
carburization
camera
temple
machining
carried out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97109037T
Other languages
English (en)
Inventor
Keiji Yokose
Fumitaka Abukawa
Hidetoshi Juryosawa
Jun Takahashi
Shinichi Takemoto
Hideki Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa Holdings Co Ltd
Original Assignee
Dowa Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa Mining Co Ltd filed Critical Dowa Mining Co Ltd
Application granted granted Critical
Publication of ES2180854T3 publication Critical patent/ES2180854T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/18Hardening; Quenching with or without subsequent tempering
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34Methods of heating
    • C21D1/42Induction heating
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/78Combined heat-treatments not provided for above
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20Carburising
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D2261/00Machining or cutting being involved
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0037Rotary furnaces with vertical axis; Furnaces with rotating floor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Tunnel Furnaces (AREA)
  • Heat Treatment Of Articles (AREA)

Abstract

SE PRESENTA UN METODO Y UN APARATO PARA LA CARBURIZACION, TEMPLE Y REVENIDO DE PIEZAS, MEDIANTE EL CUAL LA FASE DE CARBURIZACION PUEDE INCORPORARSE A UN PROCESO DE MECANIZADO Y FABRICACION A REALIZAR EN UN SISTEMA DE MECANIZADO Y FABRICACION EN LINEA COMO UNA ETAPA DEL MISMO, Y MEDIANTE EL CUAL EL TRATAMIENTO O PROCESAMIENTO DE ALTA CALIDAD PUEDE CONSEGUIRSE SIN QUE SE PRODUZCAN VARIACIONES DE CALIDAD ENTRE LOS PRODUCTOS TERMOTRATADOS. EN ESTE APARATO, UNA CAMARA DE PRECALENTAMIENTO (2), SEIS CAMARAS DE CARBURIZACION (5A A 5F), UNA CAMARA DE ENFRIAMIENTO (6), UNA CAMARA DE RECALENTAMIENTO (7), UNA CAMARA DE TEMPLE (8) SE COLOCAN ALREDEDOR DE UNA CAMARA INTERMEDIA (4) QUE TIENE UN DISPOSITIVO DE TRANSPORTE (12). ADEMAS, SE UTILIZA UNA TECNICA DE CALENTAMIENTO POR INDUCCION DE ALTA FRECUENCIA PARA CALENTAR CADA UNA DE LAS CAMARAS PRINCIPALES DE PROCESAMIENTO O TRATAMIENTO. ASIMISMO, SE REALIZA UN METODO DE CARBURIZACION POR PLASMA EN LA CAMARA DE CARBURIZACION. ADEMAS, LAS PIEZAS, QUE SON TRANSPORTADAS SUCESIVAMENTE AL INTERIOR DE ESTE APARATO A TRAVES DE UNA LINEA DE MECANIZADO Y FABRICACION, SON ASIGNADAS Y DISTRIBUIDAS A LAS CAMARAS RESPECTIVAMENTE, Y LUEGO TRATADAS O PROCESADAS EN LAS MISMAS. DE ESTA FORMA, EL PROCESO DE CARBURIZACION, TEMPLE Y REVENIDO PUEDE REALIZARSE SIN PARALIZACIONES.
ES97109037T 1996-06-06 1997-06-04 Procedimiento y dispositivo para la carburacion, el enfriado rapido y temple. Expired - Lifetime ES2180854T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14411396 1996-06-06
JP07810897A JP3895000B2 (ja) 1996-06-06 1997-03-28 浸炭焼入焼戻方法及び装置

Publications (1)

Publication Number Publication Date
ES2180854T3 true ES2180854T3 (es) 2003-02-16

Family

ID=26419186

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97109037T Expired - Lifetime ES2180854T3 (es) 1996-06-06 1997-06-04 Procedimiento y dispositivo para la carburacion, el enfriado rapido y temple.

Country Status (6)

Country Link
US (1) US5868871A (es)
EP (1) EP0811697B1 (es)
JP (1) JP3895000B2 (es)
KR (1) KR100338118B1 (es)
DE (1) DE69713963T2 (es)
ES (1) ES2180854T3 (es)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19829825C2 (de) * 1997-07-07 2002-10-10 Ntn Toyo Bearing Co Ltd Karburierungs- und Abschreckungsvorrichtung und Verfahren zum Abschrecken dünner Plattenteile
JP3894635B2 (ja) * 1997-08-11 2007-03-22 株式会社小松製作所 浸炭部材とその製造方法並びに浸炭処理システム
US6620262B1 (en) * 1997-12-26 2003-09-16 Nsk Ltd. Method of manufacturing inner and outer races of deep groove ball bearing in continuous annealing furnace
DE19834133C1 (de) * 1998-07-29 2000-02-03 Daimler Chrysler Ag Verfahren zur Herstellung von Hohlwellen
JP4041602B2 (ja) * 1998-10-28 2008-01-30 Dowaホールディングス株式会社 鋼部品の減圧浸炭方法
JP4537522B2 (ja) * 2000-02-07 2010-09-01 中外炉工業株式会社 間欠駆動式真空浸炭炉
JP3524037B2 (ja) * 2000-04-26 2004-04-26 電気興業株式会社 クランクシャフトの高周波焼戻方法及び装置
CN1291057C (zh) * 2001-11-30 2006-12-20 光洋热系统株式会社 真空热处理方法及装置
JP2003183728A (ja) * 2001-12-14 2003-07-03 Jh Corp 真空熱処理装置
US6902635B2 (en) * 2001-12-26 2005-06-07 Nitrex Metal Inc. Multi-cell thermal processing unit
EP1361437A1 (en) * 2002-05-07 2003-11-12 Centre National De La Recherche Scientifique (Cnrs) A novel biological cancer marker and methods for determining the cancerous or non-cancerous phenotype of cells
JP4163681B2 (ja) * 2002-05-08 2008-10-08 レオナード クルツ シュティフトゥング ウント コンパニー カーゲー 大型のプラスチック製三次元物体の装飾方法
US7445817B2 (en) * 2002-05-08 2008-11-04 Btu International Inc. Plasma-assisted formation of carbon structures
US7465362B2 (en) * 2002-05-08 2008-12-16 Btu International, Inc. Plasma-assisted nitrogen surface-treatment
US7560657B2 (en) * 2002-05-08 2009-07-14 Btu International Inc. Plasma-assisted processing in a manufacturing line
US7638727B2 (en) * 2002-05-08 2009-12-29 Btu International Inc. Plasma-assisted heat treatment
US20060228497A1 (en) * 2002-05-08 2006-10-12 Satyendra Kumar Plasma-assisted coating
US20060233682A1 (en) * 2002-05-08 2006-10-19 Cherian Kuruvilla A Plasma-assisted engine exhaust treatment
US20060237398A1 (en) * 2002-05-08 2006-10-26 Dougherty Mike L Sr Plasma-assisted processing in a manufacturing line
US7497922B2 (en) * 2002-05-08 2009-03-03 Btu International, Inc. Plasma-assisted gas production
US20060062930A1 (en) * 2002-05-08 2006-03-23 Devendra Kumar Plasma-assisted carburizing
US7498066B2 (en) * 2002-05-08 2009-03-03 Btu International Inc. Plasma-assisted enhanced coating
US7494904B2 (en) * 2002-05-08 2009-02-24 Btu International, Inc. Plasma-assisted doping
US6870124B2 (en) * 2002-05-08 2005-03-22 Dana Corporation Plasma-assisted joining
US20060057016A1 (en) * 2002-05-08 2006-03-16 Devendra Kumar Plasma-assisted sintering
US20050233091A1 (en) * 2002-05-08 2005-10-20 Devendra Kumar Plasma-assisted coating
JP2005009702A (ja) * 2003-06-17 2005-01-13 Jh Corp 多室型真空熱処理装置
FR2863629B1 (fr) * 2003-12-12 2006-12-08 Etudes Const Mecaniques Procede et dispositif de traitement physicochimique a chaud de pieces mecaniques
FR2874079B1 (fr) * 2004-08-06 2008-07-18 Francis Pelissier Machine de traitement thermochimique de cementation
DE112004002944T5 (de) * 2004-08-23 2007-08-02 Koyo Thermo Systems Co., Ltd., Tenri Karburiervorrichtung und Karburierverfahren
WO2006127037A2 (en) * 2004-11-05 2006-11-30 Dana Corporation Atmospheric pressure processing using microwave-generated plasmas
US8262387B2 (en) * 2005-02-03 2012-09-11 Dowa Thermotech Co., Ltd. Atmosphere heat treatment apparatus and method of operating the same
JP5358875B2 (ja) * 2005-04-28 2013-12-04 アイシン・エィ・ダブリュ株式会社 鋼部材の冷却方法
US7597964B2 (en) * 2005-08-02 2009-10-06 Guardian Industries Corp. Thermally tempered coated article with transparent conductive oxide (TCO) coating
US20070029186A1 (en) * 2005-08-02 2007-02-08 Alexey Krasnov Method of thermally tempering coated article with transparent conductive oxide (TCO) coating using inorganic protective layer during tempering and product made using same
US7744955B2 (en) * 2005-08-02 2010-06-29 Guardian Industries Corp. Method of thermally tempering coated article with transparent conductive oxide (TCO) coating using flame(s) in tempering furnace adjacent TCO to burn off oxygen and product made using same
RU2374335C1 (ru) 2005-09-26 2009-11-27 Аисин Ав Ко., Лтд. Стальной элемент, способ его термической обработки и способ его получения
US8298380B2 (en) * 2006-05-23 2012-10-30 Guardian Industries Corp. Method of making thermally tempered coated article with transparent conductive oxide (TCO) coating in color compression configuration, and product made using same
JP4947783B2 (ja) * 2007-03-26 2012-06-06 株式会社Ihi機械システム 真空熱処理装置
KR100996285B1 (ko) * 2008-06-23 2010-11-23 조선대학교산학협력단 피처리물 진공 침탄 방법
DE102012013576A1 (de) * 2012-07-11 2014-01-16 Oerlikon Trading Ag, Trübbach DLC Beschichtungen mit erhöhter Korrosionsbeständigkeit
US9458519B2 (en) 2012-09-28 2016-10-04 Ipsen, Inc. Process for cooling a metal workload in a multimedia quench system
DE102012221152A1 (de) * 2012-11-20 2014-06-05 Thyssenkrupp System Engineering Gmbh System zum Temperieren von Werkstücken
JP2014118622A (ja) * 2012-12-19 2014-06-30 Ipsen Inc 一体型アクセスドアを備えた焼入れチャンバ
DE102013006589A1 (de) * 2013-04-17 2014-10-23 Ald Vacuum Technologies Gmbh Verfahren und Vorrichtung für das thermochemische Härten von Werkstücken
CN103740903B (zh) * 2013-12-27 2015-06-03 浦江县科创进出口有限公司 工件热处理方法
CN104775009A (zh) * 2014-01-14 2015-07-15 宝山钢铁股份有限公司 一种大型支承辊淬火时的加热方法
JP6403959B2 (ja) 2014-03-06 2018-10-10 Dowaサーモテック株式会社 浸炭焼入れ設備
PL228193B1 (pl) * 2014-10-06 2018-02-28 Seco/Warwick Społka Akcyjna Urzadzenie do jednostkowego hartowania czesci urzadzen technicznych
JP6297471B2 (ja) * 2014-11-10 2018-03-20 中外炉工業株式会社 熱処理設備
PL228603B1 (pl) 2015-02-04 2018-04-30 Seco/Warwick Spolka Akcyjna Piec wielokomorowy do nawęglania próżniowego i hartowania kół zębatych, wałków, pierścieni i tym podobnych detali
JP6256388B2 (ja) 2015-03-10 2018-01-10 トヨタ自動車株式会社 ワークの処理システムと処理方法
CN105316454A (zh) * 2015-11-20 2016-02-10 靖江市佳佳工程机械制造有限公司 一种旋梭梭床的热处理方法
JP6477609B2 (ja) * 2016-06-20 2019-03-06 トヨタ自動車株式会社 表面処理方法および表面処理装置
WO2018221465A1 (ja) * 2017-05-29 2018-12-06 株式会社Ihi 多室型熱処理装置
PL422596A1 (pl) * 2017-08-21 2019-02-25 Seco/Warwick Spółka Akcyjna Sposób nawęglania podciśnieniowego (LPC) elementów wykonanych ze stopów żelaza i innych metali
CN108004383A (zh) * 2018-01-23 2018-05-08 江苏石川岛丰东真空技术有限公司 高低温炉内转化装置及工件高低温炉内转化方法
CN108950167B (zh) * 2018-07-13 2019-10-11 燕山大学 一种管材滚切刀具感应加热装置及方法
CN111349761B (zh) * 2020-05-11 2021-09-21 南京红宝机械刀具有限公司 一种刀具高频热处理工艺

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855524A (ja) * 1981-09-29 1983-04-01 High Frequency Heattreat Co Ltd 焼入装置の運転方法および焼入装置
FR2537260B3 (fr) * 1982-12-02 1985-11-22 Traitement Sous Vide Four multicellulaire pour le traitement thermique, thermochimique ou electrothermique de metaux sous atmosphere rarefiee
JPS60138065A (ja) * 1983-12-27 1985-07-22 Chugai Ro Kogyo Kaisha Ltd ガス浸炭焼入方法およびその連続式ガス浸炭焼入設備
FR2594102B1 (fr) * 1986-02-12 1991-04-19 Stein Heurtey Installation flexible automatisee de traitement thermochimique rapide
JPS62297453A (ja) * 1986-06-17 1987-12-24 Sumitomo Heavy Ind Ltd プラズマ浸炭炉における予備加熱方法
DE4005956C1 (es) * 1990-02-26 1991-06-06 Siegfried Dipl.-Ing. Dr. 5135 Selfkant De Straemke
US5225144A (en) * 1990-07-03 1993-07-06 Tokyo Heat Treating Company Gas-carburizing process and apparatus
JPH0466658A (ja) * 1990-07-04 1992-03-03 Seiko Epson Corp プラズマ浸炭方法及びプラズマ浸炭装置
DE59208341D1 (de) * 1992-01-15 1997-05-15 Aichelin Gmbh Vorrichtung zur wärmebehandlung metallischer werkstücke
JP3239432B2 (ja) * 1992-03-25 2001-12-17 大同特殊鋼株式会社 高強度の被削性に優れた高周波焼入歯車用鋼
JPH0657403A (ja) * 1992-08-14 1994-03-01 Daido Steel Co Ltd 連続式プラズマ熱処理炉
JPH06136509A (ja) * 1992-10-27 1994-05-17 Daido Steel Co Ltd プラズマ浸炭炉
JPH06174377A (ja) * 1992-12-04 1994-06-24 Komatsu Ltd 多目的雰囲気熱処理装置
JPH083720A (ja) * 1994-06-16 1996-01-09 Sumitomo Metal Ind Ltd 転動疲労寿命に優れた鋼製部品とその製造方法
JP3448789B2 (ja) * 1995-01-20 2003-09-22 同和鉱業株式会社 ガス浸炭方法
DE29505496U1 (de) * 1995-03-31 1995-06-01 Ipsen Industries International GmbH, 47533 Kleve Vorrichtung zur Wärmebehandlung metallischer Werkstücke unter Vakuum

Also Published As

Publication number Publication date
DE69713963D1 (de) 2002-08-22
JPH1053809A (ja) 1998-02-24
EP0811697A3 (en) 1999-01-27
KR100338118B1 (ko) 2002-10-25
EP0811697B1 (en) 2002-07-17
DE69713963T2 (de) 2002-11-07
US5868871A (en) 1999-02-09
JP3895000B2 (ja) 2007-03-22
KR19980079257A (ko) 1998-11-25
EP0811697A2 (en) 1997-12-10

Similar Documents

Publication Publication Date Title
ES2180854T3 (es) Procedimiento y dispositivo para la carburacion, el enfriado rapido y temple.
CN101371331B (zh) 磁性退火工具热交换系统及处理工艺
TW201116492A (en) Device and treatment chamber for thermal treatment of substrates
TR26217A (tr) GAZ üRETME MADDELERINDEN GAZ üRETILMESI ICIN VE VEYA BIR GAZIN ISLAH EDILMESI ICIN ISLEM VE AYGIT VE BU ISLEMIN GERCEKLESTIRILMESI ICIN YüKSEK SICAKLIK ISI ESANJÖRü.
TW363086B (en) A CVD apparatus and CVD method
TW345705B (en) Laser processing method
ES2090893T3 (es) Aparato de tratamiento en vacio que tiene una capacidad de produccion mejorada.
KR920700468A (ko) 기판상의 층 용착 방법 및 그 처리 시스템
ES2080966T3 (es) Metodo y aparato para conservar productos biologicos.
TW357414B (en) Method and apparatus for heat-treating substrates
FI884513A0 (fi) Foerfarande foer vaermebehandling av metallkroppar.
JPS5665938A (en) Continuous annealing unit for hoop
DE50112495D1 (de) Vorrichtung und Verfahren zum Transportieren metallischer Werkstücke sowie Anlage zur Wärmebehandlung dieser Werkstücke
ATE481741T1 (de) Vorrichtung und verfahren zum gleichzeitigen temperieren mehrerer prozessiergüter
HUP0301255A2 (en) Heat/sound insulation product based on mineral wool
UA82989C2 (ru) Обработка органического материала
CA2326061A1 (en) Apparatus and method for inline testing of electrical components
JPS6436085A (en) Method and apparatus for forming functional deposition film by microwave plasma cvd method
KR970072120A (ko) 기판 처리방법 및 처리장치
AR014524A1 (es) Metodo y aparato para manufacturar tubos termoplasticos a partir de camisas termoplasticas
BR0009004A (pt) Dispositivo e processo para o tratamento dematerial sintético
RU2733126C1 (ru) Способ утилизации сбросной теплоты центров обработки данных в сушильных камерах
TWI538747B (zh) 鏡片除膠裝置及鏡片除膠方法
ES2048997T3 (es) Procedimiento y dispositivo de obtencion de hojas de vidrio abombadas y/o esmaltadas.
JP2000084506A (ja) 脱脂洗浄方法及び装置