ES2149754T3 - Metodo de grabado con mascara portadora de imagen y pelicula estratificada fotosensible para dicha mascara portadora de imagen. - Google Patents

Metodo de grabado con mascara portadora de imagen y pelicula estratificada fotosensible para dicha mascara portadora de imagen.

Info

Publication number
ES2149754T3
ES2149754T3 ES90915189T ES90915189T ES2149754T3 ES 2149754 T3 ES2149754 T3 ES 2149754T3 ES 90915189 T ES90915189 T ES 90915189T ES 90915189 T ES90915189 T ES 90915189T ES 2149754 T3 ES2149754 T3 ES 2149754T3
Authority
ES
Spain
Prior art keywords
image mask
image carrier
image
laminate film
carrier mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90915189T
Other languages
English (en)
Inventor
Tsutomu Suzuki
Ikuo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aicello Chemical Co Ltd
Original Assignee
Aicello Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aicello Chemical Co Ltd filed Critical Aicello Chemical Co Ltd
Application granted granted Critical
Publication of ES2149754T3 publication Critical patent/ES2149754T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/34—Imagewise removal by selective transfer, e.g. peeling away
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/12—Production of screen printing forms or similar printing forms, e.g. stencils
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/34—Imagewise removal by selective transfer, e.g. peeling away
    • G03F7/346—Imagewise removal by selective transfer, e.g. peeling away using photosensitive materials other than non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/11—Vinyl alcohol polymer or derivative

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Printing Plates And Materials Therefor (AREA)

Abstract

METODO DE GRABADO CON FILTRO DE IMAGEN Y PELICULA LAMINAR FOTOSENSIBLE PARA DICHO FILTRO DE IMAGEN. UNA PELICULA LAMINAR FOTOSENSIBLE (10) QUE COMPRENDE UNA LAMINA DE SOPORTE (11), UNA CAPA DE SUJECION DEL FILTRO DE IMAGEN (12) PEGADA A LA LAMINA DE SOPORTE Y UNA CAPA DE COMPOSICION DE RESINA SOLUBLE AL AGUA (13) DISPUESTA EN LA CAPA DE SUJECION DEL FILTRO DE IMAGEN (12), SIENDO DICHA CAPA (13) RETICULABLE POR LA LUZ. UN METODO DE GRABADO QUE COMPRENDE LAS FASES DE (A) IRRADIACION DE LA PELICULA LAMINAR CON LUZ DE DECORACION PARA FORMAR EN LA MISMA UN AREA RETICULABLE CORRESPONDIENTE AL MODELO DE LA CAPA DE COMPOSICION DE RESINA (13), (B) TRATAMIENTO DE LA CAPA DE COMPOSICION DE RESINA RESULTANTE (13) CON AGUA PARA DISOLVER UN AREA NO RETICULABLE Y DESARROLLAR UN FILTRO DE IMAGEN QUE COMPRENDA EL AREA RETICULABLE QUE PERMANECE EN LA CAPA DE SUJECION DEL FILTRO DE IMAGEN (12), (C) PEGADO DE FORMA QUE SE PUEDE DESPRENDER A UN MATERIAL PARA TRABAJAR LA PELICULA LAMINAR FOTOSENSIBLE (10) HABIENDO FORMADO EL FILTRO DE IMAGEN EN LA MISMA, (D) DESPRENDIMIENTO DE LA LAMINA DE SOPORTE (11) DE LA PELICULA LAMINAR (10) Y (E) GRABADO DEL FILTRO DE IMAGEN Y A CONTINUACION EL MATERIAL A TRAVES DEL FILTRO DE IMAGEN. LA CONSTITUCION ANTERIOR HACE POSIBLE CREAR UNA IMAGEN FINA, ELABORADA EN LA SUPERFICIE DE UN MATERIAL A TRABAJAR, COMO CRISTAL, METAL O PLASTICO.
ES90915189T 1990-10-22 1990-10-22 Metodo de grabado con mascara portadora de imagen y pelicula estratificada fotosensible para dicha mascara portadora de imagen. Expired - Lifetime ES2149754T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1990/001360 WO1992007303A1 (en) 1990-10-22 1990-10-22 Method of engraving with image mask and photosensitive laminate film for said image mask

Publications (1)

Publication Number Publication Date
ES2149754T3 true ES2149754T3 (es) 2000-11-16

Family

ID=13986771

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90915189T Expired - Lifetime ES2149754T3 (es) 1990-10-22 1990-10-22 Metodo de grabado con mascara portadora de imagen y pelicula estratificada fotosensible para dicha mascara portadora de imagen.

Country Status (7)

Country Link
US (1) US5427890B1 (es)
EP (1) EP0506959B1 (es)
AT (1) ATE196200T1 (es)
CA (1) CA2041521C (es)
DE (1) DE69033623T2 (es)
ES (1) ES2149754T3 (es)
WO (1) WO1992007303A1 (es)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629132B1 (en) * 1991-03-28 2000-02-08 Aicello Chemical Method for engraving and/or etching with image-carrying mask and photo-sensitive laminate film for use in making the mask
JP2901129B2 (ja) * 1994-03-14 1999-06-07 アイセロ化学株式会社 サンドブラストレジストインキ
NL1004603C2 (nl) * 1996-11-22 1998-05-27 Michael Van Gerwen Werkwijze voor het vormen van een afbeelding op een door zandstralen te bewerken drager en een aldus verkregen drager voorzien van een foto.
FR2770434A1 (fr) * 1997-11-05 1999-05-07 Jean Michel Hostein Procede de gravure a l'aide d'un masque de sablage - masque obtenu selon le procede
WO1999028535A1 (en) * 1997-11-28 1999-06-10 Gravutex Eschmann International Limited Etching methods
GB9725102D0 (en) * 1997-11-28 1998-01-28 Gravutex Limited Rapid texture prototyping
US6558496B1 (en) 1997-11-28 2003-05-06 Eschmann-Stahl Gmbh & Co., Kg Rapid texture prototyping
US6140006A (en) * 1998-06-15 2000-10-31 The Chromaline Corporation Integral membrane layer formed from a photosensitive layer in an imageable photoresist laminate
US6248498B1 (en) 1998-12-08 2001-06-19 The Chromaline Corporation Photosensitive resin composition
US6235449B1 (en) 1999-11-16 2001-05-22 Rayzist Photomask Inc. Non-stick photoresist laminate
US7074358B2 (en) 2001-12-13 2006-07-11 Alexander Sergeievich Gybin Polymer casting method and apparatus
US7211656B2 (en) * 2002-01-30 2007-05-01 Abbott Laboratories Desaturase genes, enzymes encoded thereby, and uses thereof
US7964335B2 (en) 2002-01-30 2011-06-21 Ikonics Corporation Ink receptive photosensitive laminate
US20040062896A1 (en) * 2002-09-26 2004-04-01 Picone Terrence F. Fractionally-releasable bonding layer for use in photo-sensitive laminate films
SG184460A1 (en) * 2010-04-12 2012-11-29 Ikonics Corp Photoresist film and methods for abrasive etching and cutting
WO2012008686A2 (en) * 2010-07-15 2012-01-19 Lg Innotek Co., Ltd. Printing plate and method of manufacturing the same
JP6742711B2 (ja) * 2015-10-09 2020-08-19 株式会社アイセロ 凹凸表面貼付用フィルムを用いた表面凹凸被処理物への微細パターン転写方法
US11707815B2 (en) * 2019-07-09 2023-07-25 General Electric Company Creating 3D mark on protective coating on metal part using mask and metal part so formed
DE102019211858A1 (de) * 2019-08-07 2021-02-11 Audi Ag Verfahren zum Maskieren von zu mattierenden Oberflächen
CN112264281A (zh) * 2020-10-28 2021-01-26 哈尔滨电机厂有限责任公司 一种发电机组加工面喷砂防护方法
CN113829242A (zh) * 2021-09-14 2021-12-24 杭州之芯半导体有限公司 一种晶圆基座表面喷砂加工工艺

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4530896A (en) * 1970-03-03 1985-07-23 Shipley Company Inc. Photosensitive laminate
JPS511550B1 (es) * 1971-02-20 1976-01-19
JPS5420719A (en) * 1977-07-15 1979-02-16 Fuji Photo Film Co Ltd Photosensitive material for image formation and image formation method
US4272620A (en) * 1978-08-09 1981-06-09 Agency Of Industrial Science And Technology Polyvinyl alcohol-styrylpyridinium photosensitive resins and method for manufacture thereof
US4430416A (en) * 1980-06-27 1984-02-07 Asahi Kasei Kogyo Kabushiki Kaisha Transfer element for sandblast carving
US4444868A (en) * 1981-08-06 1984-04-24 Agency Of Industrial Science & Technology Photosensitive composition
JPS58159530A (ja) * 1982-03-12 1983-09-21 Nippon Synthetic Chem Ind Co Ltd:The 画像形成方法
JPS60104939A (ja) * 1983-11-14 1985-06-10 Asahi Chem Ind Co Ltd サンドブラスト用マスク転写材
JPS60104938A (ja) * 1982-05-13 1985-06-10 Asahi Chem Ind Co Ltd 固体表面加工用マスク転写材
JPS58196971A (ja) * 1982-05-13 1983-11-16 Asahi Chem Ind Co Ltd サンドブラスト用マスクの製造方法
US4587186A (en) * 1982-05-13 1986-05-06 Asahi Kasei Kogyo Kabushiki Kaisha Mask element for selective sandblasting and a method
JPS61160748A (ja) * 1985-01-10 1986-07-21 Asahi Chem Ind Co Ltd 感光性樹脂版の製版方法
US4764449A (en) * 1985-11-01 1988-08-16 The Chromaline Corporation Adherent sandblast photoresist laminate
JPH07113773B2 (ja) * 1986-07-04 1995-12-06 株式会社日立製作所 パタ−ン形成方法
JP2618719B2 (ja) * 1989-10-11 1997-06-11 富士写真フイルム株式会社 画像形成材料
US5057394A (en) * 1989-11-01 1991-10-15 Sanyo-Kokusaku Pulp Co., Ltd. Method of forming an image

Also Published As

Publication number Publication date
US5427890A (en) 1995-06-27
WO1992007303A1 (en) 1992-04-30
DE69033623D1 (de) 2000-10-12
CA2041521A1 (en) 1992-04-23
ATE196200T1 (de) 2000-09-15
EP0506959A1 (en) 1992-10-07
EP0506959B1 (en) 2000-09-06
US5427890B1 (en) 2000-02-01
CA2041521C (en) 1998-10-27
DE69033623T2 (de) 2001-05-23
EP0506959A4 (en) 1993-03-31

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