ES2140496T3 - Sustrato de metal duro con una capa de diamante de alta adherencia. - Google Patents
Sustrato de metal duro con una capa de diamante de alta adherencia.Info
- Publication number
- ES2140496T3 ES2140496T3 ES94200716T ES94200716T ES2140496T3 ES 2140496 T3 ES2140496 T3 ES 2140496T3 ES 94200716 T ES94200716 T ES 94200716T ES 94200716 T ES94200716 T ES 94200716T ES 2140496 T3 ES2140496 T3 ES 2140496T3
- Authority
- ES
- Spain
- Prior art keywords
- substrate surface
- metal substrate
- diamond
- hard metal
- high adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/274—Diamond only using microwave discharges
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Abstract
LA INVENCION SE REFIERE A UN PROCESO MEJORADO PARA LA MEJORA DE ADHERENCIA ENTRE UN SUBSTRATO METALICO ENDURECIDO Y UNA CAPA DE DIAMANTE DEPOSITADA SOBRE ELLA MEDIANTE LA ELIMINACION DE LA FASE DE ENLACE DE METAL ENDURECIDO DE LA SUPERFICIE DEL SUBSTRATO ANTES DEL RECUBRIMIENTO CON DIAMANTE. EL PROCESO DE LA INVENCION UTILIZA UN EQUIPO DEL TIPO DE APLICACION CVD DE CAPAS DE DIAMANTE COMO SE UTILIZA DE FORMA HABITUAL EN CONFIGURACIONES DISTINTAS. CON ELLO SE CAMBIAN LOS PARAMETROS DEL PROCESO EN CONTRA DE LOS RECUBRIMIENTO DE LOS DIAMANTES HABITUALES, DE FORMA QUE EL METAL DE ENLACE SE EVAPORA A PARTIR DE UNA ZONA DEL BORDE ESTRECHA DE LA SUPERFICIE DEL SUBSTRATO, Y CIERTAMENTE EN UTILIZACION DEL CALOR DE REACCION A PARTIR DE LA RECOMBINACION DEL GAS DE HIDROGENO DOSIFICADO DE FORMA INMEDIATA EN LA SUPERFICIE DEL SUBSTRATO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0061293A AT400041B (de) | 1993-03-26 | 1993-03-26 | Hartmetall-substrat mit diamantschicht hoher haftfestigkeit |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2140496T3 true ES2140496T3 (es) | 2000-03-01 |
Family
ID=3495207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES94200716T Expired - Lifetime ES2140496T3 (es) | 1993-03-26 | 1994-03-22 | Sustrato de metal duro con una capa de diamante de alta adherencia. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5415674A (es) |
EP (1) | EP0617140B1 (es) |
JP (1) | JPH06322543A (es) |
AT (2) | AT400041B (es) |
DE (1) | DE59408777D1 (es) |
ES (1) | ES2140496T3 (es) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3452615B2 (ja) * | 1992-10-26 | 2003-09-29 | 三菱マテリアル神戸ツールズ株式会社 | 超硬合金、硬質炭素膜被覆超硬合金および超硬合金の製造方法並びにこれらの合金を応用した工具 |
US5677372A (en) * | 1993-04-06 | 1997-10-14 | Sumitomo Electric Industries, Ltd. | Diamond reinforced composite material |
US5560839A (en) * | 1994-06-27 | 1996-10-01 | Valenite Inc. | Methods of preparing cemented metal carbide substrates for deposition of adherent diamond coatings and products made therefrom |
US5635256A (en) * | 1994-08-11 | 1997-06-03 | St. Gobain/Norton Industrial Ceramics Corporation | Method of making a diamond-coated composite body |
US5891522A (en) * | 1995-05-24 | 1999-04-06 | Saint-Gobain Industrial Ceramics, Inc. | Composite article with adherent CVD diamond coating and method of making |
AT411070B (de) * | 1996-03-25 | 2003-09-25 | Electrovac | Verfahren zur herstellung eines substrates mit einer polykristallinen diamantschicht |
EP0975820B1 (en) * | 1997-02-05 | 2004-04-28 | CemeCon AG | Hard material coating of a cemented carbide or carbide containing cermet substrate |
US6267867B1 (en) * | 1998-05-26 | 2001-07-31 | Saint-Gobain Industrial Ceramics, Inc. | Composite article with adherent CVD diamond coating and method of making |
US6214247B1 (en) | 1998-06-10 | 2001-04-10 | Tdy Industries, Inc. | Substrate treatment method |
JP4824232B2 (ja) * | 1999-06-16 | 2011-11-30 | ティーディーワイ・インダストリーズ・インコーポレーテッド | 基板処理方法 |
DE10130590B4 (de) * | 2001-05-16 | 2011-06-30 | Widia GmbH, 45145 | Verbundwerkstoff und Verfahren zu dessen Herstellung |
JP2003251503A (ja) * | 2001-12-26 | 2003-09-09 | Sumitomo Electric Ind Ltd | 表面被覆切削工具 |
US20040187979A1 (en) * | 2003-03-31 | 2004-09-30 | Material Technologies, Inc. | Cutting tool body having tungsten disulfide coating and method for accomplishing same |
US7581906B2 (en) * | 2004-05-19 | 2009-09-01 | Tdy Industries, Inc. | Al2O3 ceramic tools with diffusion bonding enhanced layer |
JP5286528B2 (ja) * | 2010-10-01 | 2013-09-11 | トーカロ株式会社 | 半導体加工装置用部材の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0374923B2 (en) * | 1988-12-21 | 1999-06-23 | Mitsubishi Materials Corporation | Diamond-coated tool member, substrate thereof and method for producing same |
DE68910302T2 (de) * | 1989-02-23 | 1994-04-21 | Toshiba Tungaloy Co Ltd | Diamantbeschichteter Sinterkörper mit hervorragender Adhäsion und Verfahren zu seiner Herstellung. |
SE9002136D0 (sv) * | 1990-06-15 | 1990-06-15 | Sandvik Ab | Cement carbide body for rock drilling, mineral cutting and highway engineering |
JP3191878B2 (ja) * | 1991-02-21 | 2001-07-23 | 三菱マテリアル株式会社 | 気相合成ダイヤモンド被覆切削工具の製造法 |
US5236740A (en) * | 1991-04-26 | 1993-08-17 | National Center For Manufacturing Sciences | Methods for coating adherent diamond films on cemented tungsten carbide substrates |
JP3353335B2 (ja) * | 1991-07-22 | 2002-12-03 | 住友電気工業株式会社 | ダイヤモンド被覆硬質材料およびその製造法 |
-
1993
- 1993-03-26 AT AT0061293A patent/AT400041B/de not_active IP Right Cessation
-
1994
- 1994-03-22 EP EP94200716A patent/EP0617140B1/de not_active Expired - Lifetime
- 1994-03-22 DE DE59408777T patent/DE59408777D1/de not_active Expired - Fee Related
- 1994-03-22 ES ES94200716T patent/ES2140496T3/es not_active Expired - Lifetime
- 1994-03-22 AT AT94200716T patent/ATE185169T1/de not_active IP Right Cessation
- 1994-03-24 JP JP6077989A patent/JPH06322543A/ja active Pending
- 1994-03-24 US US08/217,257 patent/US5415674A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH06322543A (ja) | 1994-11-22 |
AT400041B (de) | 1995-09-25 |
EP0617140A1 (de) | 1994-09-28 |
DE59408777D1 (de) | 1999-11-04 |
US5415674A (en) | 1995-05-16 |
ATE185169T1 (de) | 1999-10-15 |
ATA61293A (de) | 1995-01-15 |
EP0617140B1 (de) | 1999-09-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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