EP2689186A1 - Verwendung von brennern mit strahlrohr in reaktoren zur umsetzung von chlorsilanen - Google Patents

Verwendung von brennern mit strahlrohr in reaktoren zur umsetzung von chlorsilanen

Info

Publication number
EP2689186A1
EP2689186A1 EP12707075.3A EP12707075A EP2689186A1 EP 2689186 A1 EP2689186 A1 EP 2689186A1 EP 12707075 A EP12707075 A EP 12707075A EP 2689186 A1 EP2689186 A1 EP 2689186A1
Authority
EP
European Patent Office
Prior art keywords
chlorosilanes
heat
flame
reaction furnace
burner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12707075.3A
Other languages
German (de)
English (en)
French (fr)
Inventor
Bernd Wehner
Christof Zipper
Guido Stochniol
Ingo Pauli
Norbert Schladerbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Evonik Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Evonik Degussa GmbH filed Critical Evonik Degussa GmbH
Publication of EP2689186A1 publication Critical patent/EP2689186A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12—Radiant burners
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B01J12/007—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor in the presence of catalytically active bodies, e.g. porous plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
    • B01J8/06—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds in tube reactors; the solid particles being arranged in tubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C3/00—Combustion apparatus characterised by the shape of the combustion chamber
    • F23C3/002—Combustion apparatus characterised by the shape of the combustion chamber the chamber having an elongated tubular form, e.g. for a radiant tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F27D99/0033—Heating elements or systems using burners
    • F27D99/0035—Heating indirectly through a radiant surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/0015—Controlling the temperature by thermal insulation means
    • B01J2219/00155—Controlling the temperature by thermal insulation means using insulating materials or refractories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00157—Controlling the temperature by means of a burner

Definitions

  • the present invention relates to the use of burners with a radiant tube for heating a reactor for the reaction of chlorosilanes.
  • heated chemical reactors e.g. Tubular reactors that are heated electrically or by burners using liquid or gaseous fuels.
  • the burners act directly in the space of the reactor, in which the facilities for harboring the chemical substances of the reaction, eg. B. pipe arrangements are housed.
  • the invention accordingly provides for the use of a burner for heating a reactor for reacting chlorosilanes, the burner having a jet pipe, and the jet pipe surrounding the flame and the flame tube in a gastight manner, whereby the combustion air, the gaseous and / or liquid fuel, and flue gases not in the room of
  • Reaction furnace can get.
  • burner with jet pipe In the context of the invention, the described arrangement of the burner is referred to as "burner with jet pipe".
  • the use of burners with jet pipe according to the invention has the advantage, above all, of facilitating the reliable conversion of chlorosilanes, since in reaction furnaces in the reaction with chlorosilanes, for example in the hydrogenation of chlorosilanes, the contact of flue gases with the reaction gas must be avoided at all costs, if that
  • Reaction medium exits through a defect of the harboring arrangement in the furnace chamber. In a contact of the moisture of the flue gas with chlorosilanes otherwise undesirable, violently exothermic reactions would occur.
  • Reaction media is introduced. This prevents local overheating of internals of the reaction furnace by avoiding direct contact with the burner flame. The heating is also very even.
  • the arrangement of the burner according to the invention with a jet pipe in the interior of the reaction furnace is arbitrary and can be done simply or repeatedly, hanging from above, from the bottom upside down or from the sides of the combustion chamber forth.
  • reaction temperatures can be up to 1100 ° C and
  • Fig. 1 shows a preferred embodiment of the burner according to the invention with jet pipe in a schematic representation.
EP12707075.3A 2011-03-25 2012-02-27 Verwendung von brennern mit strahlrohr in reaktoren zur umsetzung von chlorsilanen Withdrawn EP2689186A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011006116A DE102011006116A1 (de) 2011-03-25 2011-03-25 Verwendung von Brennern mit Strahlrohr in Reaktoren zur Umsetzung von Chlorsilanen
PCT/EP2012/053251 WO2012130543A1 (de) 2011-03-25 2012-02-27 Verwendung von brennern mit strahlrohr in reaktoren zur umsetzung von chlorsilanen

Publications (1)

Publication Number Publication Date
EP2689186A1 true EP2689186A1 (de) 2014-01-29

Family

ID=45808818

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12707075.3A Withdrawn EP2689186A1 (de) 2011-03-25 2012-02-27 Verwendung von brennern mit strahlrohr in reaktoren zur umsetzung von chlorsilanen

Country Status (8)

Country Link
US (1) US20140086816A1 (zh)
EP (1) EP2689186A1 (zh)
JP (1) JP2014522354A (zh)
KR (1) KR20140066972A (zh)
CN (1) CN103620305A (zh)
DE (1) DE102011006116A1 (zh)
TW (1) TW201250191A (zh)
WO (1) WO2012130543A1 (zh)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664216A (en) * 1979-10-29 1981-06-01 Kawasaki Steel Corp Combustion control of radiant tube burner
JPH02259322A (ja) * 1988-12-28 1990-10-22 Toshiba Ceramics Co Ltd ラジアントチューブ
US6423279B1 (en) * 2000-10-16 2002-07-23 Harvest Energy Technology, Inc. Compact endothermic catalytic reaction apparatus
US6773256B2 (en) * 2002-02-05 2004-08-10 Air Products And Chemicals, Inc. Ultra low NOx burner for process heating
JP5435188B2 (ja) * 2006-11-14 2014-03-05 三菱マテリアル株式会社 多結晶シリコンの製造方法および多結晶シリコン製造設備
CN101495408A (zh) * 2006-11-14 2009-07-29 三菱麻铁里亚尔株式会社 多晶硅的制备方法及多晶硅的制备设备
JP5316290B2 (ja) * 2008-08-05 2013-10-16 三菱マテリアル株式会社 トリクロロシラン製造装置及び製造方法
DE102008041974A1 (de) * 2008-09-10 2010-03-11 Evonik Degussa Gmbh Vorrichtung, deren Verwendung und ein Verfahren zur energieautarken Hydrierung von Chlorsilanen
WO2010087001A1 (ja) * 2009-01-30 2010-08-05 電気化学工業株式会社 炭素含有材料からなる反応容器を備える反応装置、その反応装置の腐食防止方法およびその反応装置を用いたクロロシラン類の生産方法
DE102010007916B4 (de) * 2010-02-12 2013-11-28 Centrotherm Sitec Gmbh Verfahren zur Hydrierung von Chlorsilanen und Verwendung eines Konverters zur Durchführung des Verfahrens
US20110300050A1 (en) * 2010-06-08 2011-12-08 Memc Electronic Materials, Inc. Trichlorosilane Vaporization System

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2012130543A1 *

Also Published As

Publication number Publication date
KR20140066972A (ko) 2014-06-03
DE102011006116A1 (de) 2012-09-27
TW201250191A (en) 2012-12-16
US20140086816A1 (en) 2014-03-27
JP2014522354A (ja) 2014-09-04
CN103620305A (zh) 2014-03-05
WO2012130543A1 (de) 2012-10-04

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