EP2689186A1 - Use of burners with a jet tube in reactors for conversion of chlorosilanes - Google Patents

Use of burners with a jet tube in reactors for conversion of chlorosilanes

Info

Publication number
EP2689186A1
EP2689186A1 EP12707075.3A EP12707075A EP2689186A1 EP 2689186 A1 EP2689186 A1 EP 2689186A1 EP 12707075 A EP12707075 A EP 12707075A EP 2689186 A1 EP2689186 A1 EP 2689186A1
Authority
EP
European Patent Office
Prior art keywords
chlorosilanes
heat
flame
reaction furnace
burner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12707075.3A
Other languages
German (de)
French (fr)
Inventor
Bernd Wehner
Christof Zipper
Guido Stochniol
Ingo Pauli
Norbert Schladerbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Evonik Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Evonik Degussa GmbH filed Critical Evonik Degussa GmbH
Publication of EP2689186A1 publication Critical patent/EP2689186A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12—Radiant burners
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B01J12/007—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor in the presence of catalytically active bodies, e.g. porous plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
    • B01J8/06—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds in tube reactors; the solid particles being arranged in tubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C3/00—Combustion apparatus characterised by the shape of the combustion chamber
    • F23C3/002—Combustion apparatus characterised by the shape of the combustion chamber the chamber having an elongated tubular form, e.g. for a radiant tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F27D99/0033—Heating elements or systems using burners
    • F27D99/0035—Heating indirectly through a radiant surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/0015—Controlling the temperature by thermal insulation means
    • B01J2219/00155—Controlling the temperature by thermal insulation means using insulating materials or refractories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00157—Controlling the temperature by means of a burner

Definitions

  • the present invention relates to the use of burners with a radiant tube for heating a reactor for the reaction of chlorosilanes.
  • heated chemical reactors e.g. Tubular reactors that are heated electrically or by burners using liquid or gaseous fuels.
  • the burners act directly in the space of the reactor, in which the facilities for harboring the chemical substances of the reaction, eg. B. pipe arrangements are housed.
  • the invention accordingly provides for the use of a burner for heating a reactor for reacting chlorosilanes, the burner having a jet pipe, and the jet pipe surrounding the flame and the flame tube in a gastight manner, whereby the combustion air, the gaseous and / or liquid fuel, and flue gases not in the room of
  • Reaction furnace can get.
  • burner with jet pipe In the context of the invention, the described arrangement of the burner is referred to as "burner with jet pipe".
  • the use of burners with jet pipe according to the invention has the advantage, above all, of facilitating the reliable conversion of chlorosilanes, since in reaction furnaces in the reaction with chlorosilanes, for example in the hydrogenation of chlorosilanes, the contact of flue gases with the reaction gas must be avoided at all costs, if that
  • Reaction medium exits through a defect of the harboring arrangement in the furnace chamber. In a contact of the moisture of the flue gas with chlorosilanes otherwise undesirable, violently exothermic reactions would occur.
  • Reaction media is introduced. This prevents local overheating of internals of the reaction furnace by avoiding direct contact with the burner flame. The heating is also very even.
  • the arrangement of the burner according to the invention with a jet pipe in the interior of the reaction furnace is arbitrary and can be done simply or repeatedly, hanging from above, from the bottom upside down or from the sides of the combustion chamber forth.
  • reaction temperatures can be up to 1100 ° C and
  • Fig. 1 shows a preferred embodiment of the burner according to the invention with jet pipe in a schematic representation.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Silicon Compounds (AREA)
  • Combustion Of Fluid Fuel (AREA)

Abstract

The invention provides for the use of a particular burner design to heat reactors for conversion of chlorosilanes, wherein the burner has a jet tube and the jet tube surrounds the flame and the flame tube in a gastight manner, as a result of which the combustion air, the gaseous and/or liquid fuels and the flue gases cannot get into the reaction furnace space. The advantage is the complete separation of the flue gas from the actual interior of the reaction furnace, which prevents critical interactions between flue gas moisture and chlorosilanes in the case of fracture of the arrangement accommodating the chlorosilanes. This in turn makes it possible to use gaseous or liquid fuels to heat such a reaction furnace. Excessive local input of heat as a result of direct flame contact is prevented; heat input is homogenized.

Description

Verwendung von Brennern mit Strahlrohr in Reaktoren zur Umsetzung von Chlorsilanen  Use of burners with radiant tube in reactors for the reaction of chlorosilanes
Die vorliegende Erfindung betrifft die Verwendung von Brennern mit Strahlrohr zur Beheizung eines Reaktors zur Umsetzung von Chlorsilanen. The present invention relates to the use of burners with a radiant tube for heating a reactor for the reaction of chlorosilanes.
Der Stand der Technik kennt beheizte chemische Reaktoren, z.B. Rohrreaktoren, die elektrisch oder über Brenner mittels flüssiger oder gasförmiger Brennstoffe beheizt werden. Die Brenner wirken dabei direkt in den Raum des Reaktors, in dem die Einrichtungen zur Beherbergung der chemischen Stoffe der Reaktion, z. B. Rohranordnungen, untergebracht sind. Durch die Beheizung werden die erforderlichen hohen Reaktionstemperaturen erreicht und/oder The prior art knows heated chemical reactors, e.g. Tubular reactors that are heated electrically or by burners using liquid or gaseous fuels. The burners act directly in the space of the reactor, in which the facilities for harboring the chemical substances of the reaction, eg. B. pipe arrangements are housed. By heating the required high reaction temperatures are achieved and / or
Wärmeverluste wegen der Endothermie der Prozesse aufgebracht. Heat losses due to the endothermic processes applied.
Die in solchen chemischen Reaktoren umgesetzten Stoffe werden üblicherweise in The substances reacted in such chemical reactors are commonly used in
Anordnungen aus Metall oder anderen Werkstoffen geführt. Bei hochkorrosiven Stoffen können auch keramische Werkstoffe zur Anwendung kommen. Arrangements made of metal or other materials. For highly corrosive substances, ceramic materials can also be used.
Beim Versagen der die chemischen Stoffe beherbergenden Anordnungen aus Metall oder anderen Werkstoffen gelangen diese Stoffe in Kontakt mit den Flammengasen, was zu unerwünschten, teils exothermen Reaktionen führen kann. Somit besteht ein Bedarf an einem Konzept für eine Beheizung eines Reaktionsofens, bei dem ein Wärmeeintrag bei gleichzeitiger Medientrennung gegeben ist. Diese Aufgabe wird durch eine Kombination aus Brenner, Flammrohr und Strahlrohr gelöst, bei der die Flammengase keinerlei Kontakt zum Inneren der Brennkammer haben. Gegenstand der Erfindung ist demnach die Verwendung eines Brenners zur Beheizung eines Reaktors zur Umsetzung von Chlorsilanen, wobei der Brenner ein Strahlrohr aufweist, und das Strahlrohr die Flamme und das Flammrohr gasdicht umgibt, wodurch die Verbrennungsluft, der gasförmige und/oder flüssige Brennstoff, und Rauchgase nicht in den Raum des  Failure of the chemical substances harboring arrangements made of metal or other materials, these substances come into contact with the flame gases, which can lead to undesirable, sometimes exothermic reactions. Thus, there is a need for a concept for heating a reaction furnace where there is heat input with simultaneous media separation. This object is achieved by a combination of burner, flame tube and jet pipe in which the flame gases have no contact with the interior of the combustion chamber. The invention accordingly provides for the use of a burner for heating a reactor for reacting chlorosilanes, the burner having a jet pipe, and the jet pipe surrounding the flame and the flame tube in a gastight manner, whereby the combustion air, the gaseous and / or liquid fuel, and flue gases not in the room of
Reaktionsofens gelangen können. Reaction furnace can get.
Im Rahmen der Erfindung wird die beschriebene Anordnung des Brenners mit„Brenner mit Strahlrohr" bezeichnet. Die erfindungsgemäße Verwendung von Brennern mit Strahlrohr hat vor allem den Vorteil, die betriebssichere Umsetzung von Chlorsilanen zu ermöglichen, da in Reaktionsöfen bei der Reaktion mit Chlorsilanen, zum Beispiel bei der Hydrierung von Chlorsilanen, der Kontakt von Rauchgasen mit dem Reaktionsgas unbedingt vermieden werden muß, falls das In the context of the invention, the described arrangement of the burner is referred to as "burner with jet pipe". The use of burners with jet pipe according to the invention has the advantage, above all, of facilitating the reliable conversion of chlorosilanes, since in reaction furnaces in the reaction with chlorosilanes, for example in the hydrogenation of chlorosilanes, the contact of flue gases with the reaction gas must be avoided at all costs, if that
Reaktionsmedium durch einen Defekt der beherbergenden Anordnung in den Ofenraum austritt. Bei einem Kontakt der Feuchte des Rauchgases mit Chlorsilanen würden sonst unerwünschte, heftig exotherme Reaktionen auftreten. Reaction medium exits through a defect of the harboring arrangement in the furnace chamber. In a contact of the moisture of the flue gas with chlorosilanes otherwise undesirable, violently exothermic reactions would occur.
Ein weiterer Vorteil von Brennern mit Strahlrohr ist die damit mögliche wirtschaftliche Another advantage of burners with jet pipe is the possible economic
Beheizung eines Reaktionsofen zur Umsetzung von Chlorsilanen mit einem im Vergleich zu Elektrizität billigen Energieträger, ohne den geschilderten Nachteil in Kauf zu nehmen. Heating a reaction furnace for the implementation of chlorosilanes with a cheap compared to electricity energy, without the disadvantage mentioned in purchasing.
Ebenfalls ein Vorteil der erfindungsgemäßen Verwendung ist, dass die Reaktionswärme weitestgehend in Form von Wärmestrahlung in den Reaktionsofen und damit in die Another advantage of the use according to the invention is that the heat of reaction largely in the form of heat radiation in the reaction furnace and thus in the
Reaktionsmedien eingebracht wird. Dadurch unterbleibt eine lokale Überhitzung von Einbauten des Reaktionsofens durch die Vermeidung eines direkten Kontaktes mit der Brennerflamme. Die Beheizung erfolgt außerdem sehr gleichmäßig. Reaction media is introduced. This prevents local overheating of internals of the reaction furnace by avoiding direct contact with the burner flame. The heating is also very even.
Die Anordnung der erfindungsgemäß verwendeten Brenner mit Strahlrohr im Inneren des Reaktionsofens ist dabei beliebig und kann einfach oder mehrfach, von oben hängend, von unten über Kopf stehend oder von den Seiten der Brennkammer her erfolgen. The arrangement of the burner according to the invention with a jet pipe in the interior of the reaction furnace is arbitrary and can be done simply or repeatedly, hanging from above, from the bottom upside down or from the sides of the combustion chamber forth.
Die erfindungsgemäße Verwendung ist besonders vorteilhaft bei Reaktionen mit Chlorsilanen, besonders bei der Hydrierung von Siliciumtetrachlorid mit Wasserstoff zu Trichlorsilan und Chlorwasserstoff. Die Reaktionstemperaturen können dabei Werte bis zu 1100 °C und The use according to the invention is particularly advantageous in reactions with chlorosilanes, especially in the hydrogenation of silicon tetrachloride with hydrogen to trichlorosilane and hydrogen chloride. The reaction temperatures can be up to 1100 ° C and
Überdrücke bis zu 50 bar erreichen, wobei die Reaktion ohne oder mit Katalysator betrieben werden kann.  Overpressures reach up to 50 bar, the reaction can be operated with or without catalyst.
Die Fig. 1 zeigt eine bevorzugte Ausführungsform des erfindungsgemäß verwendeten Brenners mit Strahlrohr in schematischer Darstellung. Fig. 1 shows a preferred embodiment of the burner according to the invention with jet pipe in a schematic representation.
Die Hinweiszeichen bedeuten: The signs mean:
1 Anordnung zur Fortführung der chemischen Reaktanden  1 arrangement for the continuation of the chemical reactants
2 Flammrohr 3 Strahlrohr2 flame tube 3 jet pipe
4 Reaktionsofen4 reaction furnace
5 Isolierung5 insulation
6 Brenner 6 burners
7 Verbrennungsluft7 combustion air
8 Brennstoff8 fuel
9 Rauchgas 9 flue gas
Q Wärmestrom Q heat flow

Claims

Patentansprüche: claims:
1. Verwendung eines Brenners zur Beheizung eines Reaktors zur Umsetzung von 1. Use of a burner for heating a reactor for the implementation of
Chlorsilanen, wobei  Chlorosilanes, where
der Brenner ein Strahlrohr aufweist und  the burner has a jet pipe and
das Strahlrohr die Flamme und das Flammrohr gasdicht umgibt, wodurch  the jet tube surrounds the flame and the flame tube gas-tight, whereby
die Verbrennungsluft, der gasförmige und/oder flüssige Brennstoff, und Rauchgase nicht in den Raum des Reaktionsofens gelangen können.  the combustion air, the gaseous and / or liquid fuel, and flue gases can not get into the space of the reaction furnace.
EP12707075.3A 2011-03-25 2012-02-27 Use of burners with a jet tube in reactors for conversion of chlorosilanes Withdrawn EP2689186A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011006116A DE102011006116A1 (en) 2011-03-25 2011-03-25 Use of burners with radiant tube in reactors for the reaction of chlorosilanes
PCT/EP2012/053251 WO2012130543A1 (en) 2011-03-25 2012-02-27 Use of burners with a jet tube in reactors for conversion of chlorosilanes

Publications (1)

Publication Number Publication Date
EP2689186A1 true EP2689186A1 (en) 2014-01-29

Family

ID=45808818

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12707075.3A Withdrawn EP2689186A1 (en) 2011-03-25 2012-02-27 Use of burners with a jet tube in reactors for conversion of chlorosilanes

Country Status (8)

Country Link
US (1) US20140086816A1 (en)
EP (1) EP2689186A1 (en)
JP (1) JP2014522354A (en)
KR (1) KR20140066972A (en)
CN (1) CN103620305A (en)
DE (1) DE102011006116A1 (en)
TW (1) TW201250191A (en)
WO (1) WO2012130543A1 (en)

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JPH02259322A (en) * 1988-12-28 1990-10-22 Toshiba Ceramics Co Ltd Radiant tube
US6423279B1 (en) * 2000-10-16 2002-07-23 Harvest Energy Technology, Inc. Compact endothermic catalytic reaction apparatus
US6773256B2 (en) * 2002-02-05 2004-08-10 Air Products And Chemicals, Inc. Ultra low NOx burner for process heating
CN101495408A (en) * 2006-11-14 2009-07-29 三菱麻铁里亚尔株式会社 Process for production of multicrystal silicon and facility for production of multicrystal silicon
JP5435188B2 (en) * 2006-11-14 2014-03-05 三菱マテリアル株式会社 Polycrystalline silicon manufacturing method and polycrystalline silicon manufacturing equipment
JP5316290B2 (en) * 2008-08-05 2013-10-16 三菱マテリアル株式会社 Trichlorosilane production apparatus and production method
DE102008041974A1 (en) * 2008-09-10 2010-03-11 Evonik Degussa Gmbh Device, its use and a method for self-sufficient hydrogenation of chlorosilanes
JP5412447B2 (en) * 2009-01-30 2014-02-12 電気化学工業株式会社 Reactor provided with reaction vessel made of carbon-containing material, corrosion prevention method for the reactor, and method for producing chlorosilanes using the reactor
DE102010007916B4 (en) * 2010-02-12 2013-11-28 Centrotherm Sitec Gmbh Process for the hydrogenation of chlorosilanes and use of a converter for carrying out the process
US20110300050A1 (en) * 2010-06-08 2011-12-08 Memc Electronic Materials, Inc. Trichlorosilane Vaporization System

Non-Patent Citations (1)

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Also Published As

Publication number Publication date
US20140086816A1 (en) 2014-03-27
CN103620305A (en) 2014-03-05
KR20140066972A (en) 2014-06-03
DE102011006116A1 (en) 2012-09-27
TW201250191A (en) 2012-12-16
WO2012130543A1 (en) 2012-10-04
JP2014522354A (en) 2014-09-04

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