EP2109219A3 - Piezoelektrische Vibrationsvorrichtungen und Verfahren zu deren Herstellung - Google Patents
Piezoelektrische Vibrationsvorrichtungen und Verfahren zu deren Herstellung Download PDFInfo
- Publication number
- EP2109219A3 EP2109219A3 EP20090157763 EP09157763A EP2109219A3 EP 2109219 A3 EP2109219 A3 EP 2109219A3 EP 20090157763 EP20090157763 EP 20090157763 EP 09157763 A EP09157763 A EP 09157763A EP 2109219 A3 EP2109219 A3 EP 2109219A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- connection electrode
- piezoelectric vibrating
- methods
- supporting member
- vibrating piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 230000005284 excitation Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
- H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
- H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008102256A JP2009253883A (ja) | 2008-04-10 | 2008-04-10 | 圧電振動デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2109219A2 EP2109219A2 (de) | 2009-10-14 |
EP2109219A3 true EP2109219A3 (de) | 2011-03-09 |
Family
ID=40834335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20090157763 Withdrawn EP2109219A3 (de) | 2008-04-10 | 2009-04-09 | Piezoelektrische Vibrationsvorrichtungen und Verfahren zu deren Herstellung |
Country Status (4)
Country | Link |
---|---|
US (1) | US20090256449A1 (de) |
EP (1) | EP2109219A3 (de) |
JP (1) | JP2009253883A (de) |
CN (1) | CN101557207A (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5183718B2 (ja) * | 2009-12-22 | 2013-04-17 | 日本電波工業株式会社 | 水晶デバイス |
JP5479931B2 (ja) * | 2010-02-03 | 2014-04-23 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動子、発振器、電子機器および電波時計 |
US20110227458A1 (en) * | 2010-03-17 | 2011-09-22 | Seiko Epson Corporation | Piezoelectric resonator element, piezoelectric device, and electronic apparatus |
US8368476B2 (en) * | 2010-03-19 | 2013-02-05 | Seiko Epson Corporation | Resonator element, resonator device and electronic device |
JP2011205425A (ja) * | 2010-03-25 | 2011-10-13 | Seiko Epson Corp | 電子部品及び電子部品の製造方法 |
JP5636933B2 (ja) * | 2010-12-14 | 2014-12-10 | セイコーエプソン株式会社 | 発振器 |
JP2012169879A (ja) * | 2011-02-15 | 2012-09-06 | Nippon Dempa Kogyo Co Ltd | 圧電デバイス |
US8704428B2 (en) * | 2011-04-20 | 2014-04-22 | Qualcomm Mems Technologies, Inc. | Widening resonator bandwidth using mechanical loading |
JP2013098814A (ja) * | 2011-11-02 | 2013-05-20 | Nippon Dempa Kogyo Co Ltd | 圧電振動片及び圧電デバイス |
JP5980530B2 (ja) * | 2012-03-15 | 2016-08-31 | 日本電波工業株式会社 | 圧電デバイス及び圧電デバイスの製造方法 |
JP2015039162A (ja) | 2013-07-19 | 2015-02-26 | 日本電波工業株式会社 | 表面実装型水晶デバイス |
JP2016015757A (ja) * | 2013-07-19 | 2016-01-28 | 日本電波工業株式会社 | 表面実装型水晶デバイス |
JP6206664B2 (ja) | 2013-10-30 | 2017-10-04 | セイコーエプソン株式会社 | 発振回路、発振器、発振器の製造方法、電子機器及び移動体 |
JP2015088931A (ja) | 2013-10-30 | 2015-05-07 | セイコーエプソン株式会社 | 発振回路、発振器、発振器の製造方法、電子機器及び移動体 |
JP2015088930A (ja) | 2013-10-30 | 2015-05-07 | セイコーエプソン株式会社 | 発振回路、発振器、発振器の製造方法、電子機器及び移動体 |
JP6226127B2 (ja) | 2013-10-30 | 2017-11-08 | セイコーエプソン株式会社 | 発振回路、発振器、発振器の製造方法、電子機器及び移動体 |
JP2015088876A (ja) | 2013-10-30 | 2015-05-07 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、電子機器及び移動体 |
CN107533082A (zh) * | 2015-03-12 | 2018-01-02 | 株式会社村田制作所 | 加速度检测装置及其制造方法 |
JP6590529B2 (ja) * | 2015-05-26 | 2019-10-16 | 京セラ株式会社 | 圧電デバイス |
JP2017192047A (ja) * | 2016-04-14 | 2017-10-19 | 日本電波工業株式会社 | 水晶デバイス |
JP6829109B2 (ja) * | 2017-03-01 | 2021-02-10 | 日本電波工業株式会社 | 水晶デバイス |
JP2018164126A (ja) | 2017-03-24 | 2018-10-18 | セイコーエプソン株式会社 | 振動デバイス、発振器、ジャイロセンサー、電子機器および移動体 |
JP6839014B2 (ja) * | 2017-03-28 | 2021-03-03 | 京セラ株式会社 | 水晶デバイス |
JP6849553B2 (ja) * | 2017-07-31 | 2021-03-24 | 京セラ株式会社 | 水晶デバイス |
WO2019230383A1 (ja) * | 2018-05-28 | 2019-12-05 | 日本電波工業株式会社 | 振動素子用の台座、振動子及び発振器 |
JP7094777B2 (ja) * | 2018-05-28 | 2022-07-04 | 日本電波工業株式会社 | 振動素子用の台座、振動子及び発振器 |
JP2021057651A (ja) * | 2019-09-27 | 2021-04-08 | 日本電波工業株式会社 | ブランクを搭載する台座、振動子及び発振器 |
JP7365182B2 (ja) | 2019-10-04 | 2023-10-19 | 日本電波工業株式会社 | 振動子及び発振器 |
JP7396858B2 (ja) * | 2019-11-01 | 2023-12-12 | 日本電波工業株式会社 | 圧電デバイス及びその製造方法 |
JP2021117070A (ja) * | 2020-01-24 | 2021-08-10 | セイコーエプソン株式会社 | 振動デバイス、電子機器、及び移動体 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0654315U (ja) * | 1993-01-08 | 1994-07-22 | セイコーエプソン株式会社 | 圧電振動子 |
US20020125041A1 (en) * | 2001-03-06 | 2002-09-12 | Citizen Watch Co., Ltd. | Package base for mounting electronic element, electronic device and method of producing the same |
US20070120614A1 (en) * | 2005-11-30 | 2007-05-31 | Kouichi Moriya | Surface mount type crystal oscillator |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02261211A (ja) * | 1989-03-31 | 1990-10-24 | Nippon Dempa Kogyo Co Ltd | 多重モード型水晶振動子 |
JPH07235854A (ja) * | 1994-02-23 | 1995-09-05 | Miyota Kk | 圧電振動子の容器 |
US5585687A (en) * | 1994-02-23 | 1996-12-17 | Citizen Watch Co., Ltd. | Piezolelectric oscillator |
JPH08204489A (ja) * | 1995-01-30 | 1996-08-09 | Kinseki Ltd | 圧電振動子 |
JP2000278079A (ja) * | 1999-03-24 | 2000-10-06 | Toyo Commun Equip Co Ltd | 圧電デバイス |
US8338887B2 (en) | 2005-07-06 | 2012-12-25 | Infineon Technologies Ag | Buried gate transistor |
JP4552916B2 (ja) * | 2005-12-21 | 2010-09-29 | 株式会社大真空 | 圧電振動デバイス |
-
2008
- 2008-04-10 JP JP2008102256A patent/JP2009253883A/ja active Pending
-
2009
- 2009-04-08 US US12/420,781 patent/US20090256449A1/en not_active Abandoned
- 2009-04-09 EP EP20090157763 patent/EP2109219A3/de not_active Withdrawn
- 2009-04-09 CN CNA2009101178994A patent/CN101557207A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0654315U (ja) * | 1993-01-08 | 1994-07-22 | セイコーエプソン株式会社 | 圧電振動子 |
US20020125041A1 (en) * | 2001-03-06 | 2002-09-12 | Citizen Watch Co., Ltd. | Package base for mounting electronic element, electronic device and method of producing the same |
US20070120614A1 (en) * | 2005-11-30 | 2007-05-31 | Kouichi Moriya | Surface mount type crystal oscillator |
Also Published As
Publication number | Publication date |
---|---|
JP2009253883A (ja) | 2009-10-29 |
EP2109219A2 (de) | 2009-10-14 |
CN101557207A (zh) | 2009-10-14 |
US20090256449A1 (en) | 2009-10-15 |
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Ipc: H03H 9/21 20060101ALN20100930BHEP Ipc: H03H 9/05 20060101ALI20100930BHEP Ipc: H03H 9/10 20060101AFI20100930BHEP |
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18D | Application deemed to be withdrawn |
Effective date: 20110910 |