TW200724272A - Method for bonding between electrical devices using ultrasonic vibration - Google Patents

Method for bonding between electrical devices using ultrasonic vibration

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Publication number
TW200724272A
TW200724272A TW095143148A TW95143148A TW200724272A TW 200724272 A TW200724272 A TW 200724272A TW 095143148 A TW095143148 A TW 095143148A TW 95143148 A TW95143148 A TW 95143148A TW 200724272 A TW200724272 A TW 200724272A
Authority
TW
Taiwan
Prior art keywords
bonding
electrical devices
ultrasonic vibration
electrical device
adhesives
Prior art date
Application number
TW095143148A
Other languages
Chinese (zh)
Other versions
TWI306423B (en
Inventor
Kyung-Wook Paik
Myung-Jin Yim
Hyoung-Joon Kim
Ki-Won Lee
Original Assignee
Korea Advanced Inst Sci & Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Advanced Inst Sci & Tech filed Critical Korea Advanced Inst Sci & Tech
Publication of TW200724272A publication Critical patent/TW200724272A/en
Application granted granted Critical
Publication of TWI306423B publication Critical patent/TWI306423B/en

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    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15788Glasses, e.g. amorphous oxides, nitrides or fluorides

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

The present invention is to provide a method for bonding between electrical devices, including the steps of: aligning electrodes on a bonded area of an upper electrical device and a lower electrical device to be bonded; and curing of adhesives by applying ultrasonic energy to the adhesives between the upper electrical device and the lower electrical device.
TW095143148A 2005-11-24 2006-11-22 Method for bonding between electrical devices using ultrasonic vibration TWI306423B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050113105A KR100746330B1 (en) 2005-11-24 2005-11-24 Method for bonding between electrical devices using ultrasonication

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TW200724272A true TW200724272A (en) 2007-07-01
TWI306423B TWI306423B (en) 2009-02-21

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KR (1) KR100746330B1 (en)
CN (1) CN101322233B (en)
DE (1) DE112006003181T5 (en)
TW (1) TWI306423B (en)
WO (1) WO2007061216A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI492342B (en) * 2011-10-12 2015-07-11 Novatek Microelectronics Corp Ic chip package and chip-on-glass structure using the same
US9236360B2 (en) 2011-10-12 2016-01-12 Novatek Microelectronics Corp. IC chip package and chip-on-glass structure using the same

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4364928B2 (en) * 2007-04-13 2009-11-18 積水化学工業株式会社 Conductive fine particles, anisotropic conductive material, and conductive connection structure
KR100844430B1 (en) * 2007-08-24 2008-07-08 (주)에이앤아이 Method for bonding between electrical devices
DE102008050000A1 (en) * 2008-09-30 2010-04-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for the simultaneous mechanical and electrical connection of two parts
KR20100053016A (en) * 2008-11-12 2010-05-20 한국과학기술원 (method for bonding between electrical devices by adjusting the heating temperature of adhesive and apparatus for bonding between electrical devices by adjusting the heating temperature of adhesive
KR101046590B1 (en) 2009-02-16 2011-07-05 한국과학기술원 Electronic component joining method using vibration energy and vibration energy application device
KR101051045B1 (en) * 2009-06-02 2011-07-21 중앙대학교 산학협력단 Terminal connection method using conductive adhesive
KR101025620B1 (en) * 2009-07-13 2011-03-30 한국과학기술원 Anisotropic Conductive Adhesives for UltraSonic Bonding and Electrical Interconnection Method of Electronic Components Using Thereof
US8129220B2 (en) 2009-08-24 2012-03-06 Hong Kong Polytechnic University Method and system for bonding electrical devices using an electrically conductive adhesive
KR101582943B1 (en) * 2009-10-15 2016-01-08 삼성디스플레이 주식회사 Manufacturing method of flat panel display
DE102010039339A1 (en) 2010-08-16 2012-08-09 Steffen Möglich Adhesive system, useful for a workpiece, comprises microcapsules in which a coupling agent or a component of a coupling agent is encapsulated
CN102157406A (en) * 2011-01-20 2011-08-17 中南大学 Method for bonding chip with resin substrate through ultrasonic vibration
KR101908501B1 (en) * 2011-12-07 2018-10-17 엘지디스플레이 주식회사 Integrated Touch Screen With Organic Emitting Display Device and Method for Manufacturing the Same
DE102013009234B4 (en) 2012-06-01 2019-10-02 Technische Universität Dresden Process for the preparation of electrically conductive compounds between joining partners as well as a use of a polymer or polymer mixture
KR101348127B1 (en) 2012-06-18 2014-01-07 손재설 Maunfacturing method for circuit pattern on heat sink
JP2014053597A (en) * 2012-08-09 2014-03-20 Hitachi Chemical Co Ltd Chip type electronic component and connection structure
US9603580B2 (en) 2013-05-24 2017-03-28 Fujifilm Sonosite, Inc. High frequency ultrasound probe
GB2520511A (en) 2013-11-21 2015-05-27 Surf Technology As Ultrasound transducer
EP2884242B1 (en) * 2013-12-12 2021-12-08 ams International AG Sensor Package And Manufacturing Method
CN104051281B (en) * 2014-06-13 2016-08-31 武汉理工大学 Filling device and method under ultrasonic activation auxiliary flip-chip plastic packaging molding
CN104157617B (en) * 2014-07-29 2017-11-17 华为技术有限公司 Integrated chip module, chip-packaging structure and integrated chip method
CN109803812A (en) * 2016-10-07 2019-05-24 多种材料焊接股份公司 The method for activating adhesive
KR101740006B1 (en) * 2016-11-23 2017-06-09 지스마트 주식회사 Flexible circuit board for transparent display board improved durability and the assembling method thereof
KR101932337B1 (en) 2017-04-12 2018-12-26 한국과학기술원 Anisotropic conductive film including polymer layer for suppressing movement of conductive particles and manufacturing method thereof using vertical ultrasonic wave
WO2018207547A1 (en) * 2017-05-12 2018-11-15 コニカミノルタ株式会社 Light-emitting device
GB2584106B (en) * 2019-05-21 2024-03-27 Pragmatic Printing Ltd Flexible electronic structure
KR20210038760A (en) * 2019-09-30 2021-04-08 삼성디스플레이 주식회사 Ultrasonic bonding apparatus and ultrasonic bonding method using the same
JP7406955B2 (en) * 2019-10-29 2023-12-28 セイコーインスツル株式会社 2-layer single-sided flexible board and method for manufacturing a 2-layer single-sided flexible board
KR20220016364A (en) 2020-07-30 2022-02-09 삼성디스플레이 주식회사 Electronic device
GB2601325B (en) * 2020-11-25 2023-12-13 Pragmatic Semiconductor Ltd Support structures for flexible electronic circuits
TWI787685B (en) * 2020-12-11 2022-12-21 力成科技股份有限公司 Three-dimensional integrated circuit assembly and manufacturing method thereof
CN112867288B (en) 2021-01-05 2021-08-17 江苏特丽亮镀膜科技有限公司 ACF conductive adhesive film structure, hot pressing method thereof and hot pressing assembly
KR102520768B1 (en) * 2021-04-21 2023-04-12 주식회사 경신전선 Method for ultrasonic bonding for circuit device using anisotropic conductive film

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07137042A (en) * 1993-11-17 1995-05-30 San Giken Kk Curing method of curing resin
JPH10199935A (en) * 1997-01-06 1998-07-31 Matsushita Electric Ind Co Ltd Method of mounting works
TW396471B (en) * 1997-06-04 2000-07-01 Ibm Electrodeposition of low temperature, high conductivity, powder materials for electrically conductive paste formulations
JP4097379B2 (en) * 1999-01-29 2008-06-11 松下電器産業株式会社 Electronic component mounting method and apparatus
JP3339450B2 (en) * 1999-03-02 2002-10-28 株式会社村田製作所 Method for manufacturing surface acoustic wave device
JP3351402B2 (en) * 1999-04-28 2002-11-25 株式会社村田製作所 Electronic element, surface acoustic wave element, mounting method thereof, electronic component or surface acoustic wave device manufacturing method, and surface acoustic wave device
KR100367407B1 (en) * 2000-03-31 2003-01-14 학교법인 한양학원 low contact resistance chip bonding method
JP2002222405A (en) * 2001-01-26 2002-08-09 Toppan Forms Co Ltd Tag for baggage and its manufacturing method
JP4526195B2 (en) * 2001-01-26 2010-08-18 トッパン・フォームズ株式会社 Baggage tag and its manufacturing method
JP2002288612A (en) * 2001-03-27 2002-10-04 Toppan Forms Co Ltd Manufacturing method for tag for loading
JPWO2003012863A1 (en) * 2001-07-31 2004-12-09 株式会社ルネサステクノロジ Semiconductor device and manufacturing method thereof
JP4059497B2 (en) * 2003-06-24 2008-03-12 日東電工株式会社 Die bonding adhesive film, dicing die bonding adhesive film, and semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI492342B (en) * 2011-10-12 2015-07-11 Novatek Microelectronics Corp Ic chip package and chip-on-glass structure using the same
US9236360B2 (en) 2011-10-12 2016-01-12 Novatek Microelectronics Corp. IC chip package and chip-on-glass structure using the same

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KR20070025889A (en) 2007-03-08
WO2007061216A1 (en) 2007-05-31
CN101322233B (en) 2011-04-20
JP2009517861A (en) 2009-04-30
KR100746330B1 (en) 2007-08-03
DE112006003181T5 (en) 2008-11-06
TWI306423B (en) 2009-02-21
CN101322233A (en) 2008-12-10

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