TW396471B - Electrodeposition of low temperature, high conductivity, powder materials for electrically conductive paste formulations - Google Patents

Electrodeposition of low temperature, high conductivity, powder materials for electrically conductive paste formulations Download PDF

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TW396471B
TW396471B TW087103284A TW87103284A TW396471B TW 396471 B TW396471 B TW 396471B TW 087103284 A TW087103284 A TW 087103284A TW 87103284 A TW87103284 A TW 87103284A TW 396471 B TW396471 B TW 396471B
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item
dendrimer
coating
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TW087103284A
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Chinese (zh)
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Sung Kwon Kang
Sampath Purushothaman
Pajinder Singh Rai
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Ibm
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • C09J9/02Electrically-conducting adhesives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D1/00Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Conductive Materials (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

What is described is new electrodeposited powder materials to be used for the electrically conductive paste formulations, in several types of their structures as follows: Electrodeposited powder consisting of Sn(undercoat)/Cu(dendrite)/Sn(barrier)/In(overcoat). The Sn (barrier) layer can be replaced by one of the following metals and their alloys; Sn, Ni, Co, Cr, Fe, and Pd. The undercoat Sn layer can be replaces by one of the following metals and their alloys; Sn, In, Zn, Sb, Bi, and Ag. Electrodeposited powder consisting of Sn(undercoat)/Cu(dendrite)/Bi-Sn(overcoat). What is additionally claimed is the usage of this electrodeposited powder materials to make filled polymer pastes for making conducting lines, ground planes, and via fills in the conventional printed circuit boards by replacing either the additive or subtractive Cu technology. This will facilitate the elimination of process steps and chemicals thus reducing cost and the environmental impact associated with printed circuit board manufacturing. It is also claimed that the paste can be used to attach electronic components such as chips and chip carrier tapes to substrates such as chip carriers that panel display glass and printer wiring boards.

Description

A7 A7 B7 經濟部中央標準局員工消費合作社印聚 中 此 及 五、發明説明(1 ) 、本發财關-種用以於導電性元件之間㈣導電性連接 :新禎連接材料’及-種製造該導電性連接之方法。此 外、,本發明有關-種具有環境安全性之材料及方法,其可 用以取代含鉛(Pb)焊料連接技術。 背景 用於電子錢之大部料體㈣由金屬製造,諸如銅、 叙、金、銀、錯/錫(焊料)、銷等。使用錯/鎖合金之焊科 連接技術於各種層面之電子封裝中扮演了關鍵性之角色, 諸却倒裝片接合(或C4)、球柵陣列(BGa)中之焊球接 ^印刷電路板(PCBk IC封裝物組裝。電子封裝中之 坪料接點同時爲決定性之電聯點及機械/物理性接點。當 任何-個功能故障時,則該焊料接點被視爲損壞,而通; 會有整體電子系統停機之後果。 將微好封裝馳裝於㈣電路料,大部分廣泛使用 在Pb-Sn合金中具有最低熔點(183。〇之鉛錫共熔焊料_ ㈣Sn-37%pb。於此等應用中,有兩種焊料連接技術 用於大量生產:電鍍通孔(PTH)及表面裝置技術(SMT)焊 接。·該兩技術之基本差異在於PCB設計及其連接流程之 差異。 於SMT焊接中,微電子封裝物直接黏著於之表 面。SMT之主要優點係爲高封裝密度,因爲消除pcB 之大部分PTH,且利用PCB之兩個表面以調節组件。 外,SMT封裝物具有較習用PTH封裝物細之,線間距 -4" 本紙張尺度適昂中國國家標準(CNS ) A4规格(2丨OX297公釐) (請先閱讀背面之注意事項再填寫本頁)A7 A7 B7 Printed in the Consumers 'Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs and V. Invention Descriptions (1), this financial pass-a kind of conductive connection between conductive elements: new connection materials' and- A method of manufacturing the conductive connection. In addition, the present invention relates to an environmentally safe material and method that can be used to replace lead (Pb) solder connection technology. Background Most materials used in electronic money are made of metal, such as copper, silver, gold, silver, tin / tin (solder), pins, and so on. The solder connection technology using the wrong / lock alloy plays a key role in various levels of electronic packaging. Flip-chip bonding (or C4), ball-grid array (BGa), and ball-bond printed circuit boards (PCBk IC package assembly. The solder contact in the electronic package is both the decisive electrical connection and the mechanical / physical contact. When any one of the functions fails, the solder contact is considered damaged, and the There will be after-effects of the overall electronic system shutdown. The micro-package is mounted on the ㈣circuit material, most of which are widely used in Pb-Sn alloys with the lowest melting point (183.〇 lead-tin eutectic solder _ nSn-37% pb In these applications, there are two types of solder connection technology used for mass production: PTH and SMT soldering. The basic difference between the two technologies is the difference in PCB design and connection process. In SMT soldering, the microelectronic package is directly adhered to the surface. The main advantage of SMT is the high packaging density, because most of the PTH of pcB is eliminated, and the two surfaces of the PCB are used to adjust the component. In addition, the SMT package has More familiar with PTH seals Was fine, the line spacing -4 " This paper suitable scale Aung Chinese National Standard (CNS) A4 size (2 Shu OX297 mm) (Please read the back of the precautions to fill out this page)

經濟部中央橾準局員工消費合作社印製 A7 ——_________B7___ 五、發明説明(2 ) 較小之封裝物大小。因此,SMT使電子封裝物之大小巨 幅降低,而縮小整體系統之體積。 於SMT焊接中,焊糊係藉網版印刷法施加spcb上。 焊糊係由焊料細粉、助熔劑及有機媒質所叙成。於回流過 程中’焊料粒子熔化,使助熔劑活化,蒸發溶劑材料,同 時溶化之焊料疑聚,最後熟化。相對地,於波狀焊接過程 中’ PCB先以助熔劑處理,於彼上層裝置組件。之棱隨 溶化焊料之波動移動。 該焊接方法通常係使該焊料接點進行清洗步驟以去除殘 留助熔劑材料而完成。因爲環境之考量’不使用CFC及 其他有害之清潔劑,而以水溶性或非清洗性助溶劑材料 取代。 目前高階微電子裝置之電子封裝物及印刷電路板之間需 要極細之間距連接(數百毫米間距之大小)。目前Smt所 使用之焊漿技術因爲諸如橋接或焊料結球之焊接缺陷而無 法處理此種極細間距。使用p b - S η共熔焊料之另—個技 術限制爲其流溫度高’約2 1 5 °C。此溫度已.高於大部分 聚合物印刷電路板材料所使用之環氧樹脂之玻璃化溫度。 熱曝於該回流溫度下,使焊接後之印刷電路板中產生極高 之熱應變,尤其是與PCB表面垂直之方向,此岁向内: 具結構強化。疋故,組裝P C B中之殘留熱應變將對電子 系統之可信度造成影響。 使用含鉛(Pb)焊料更嚴重之問題在於環境之問題,如 同於其他工業中自汽油及塗料去除鉛所遭遇之趨勢及衝擊。 本紙浪尺度適用中國國家標準(CNS ) A4規格(210χ297公釐) (請先閱讀背面之注意事項再填寫本頁) > 訂 n . B7 發明説明( 科之可能性^ 檢視兩類材料取代含pb焊料材 係討論該·導♦ w,科"金,及導電性糊(Ecp)。本發明 .劑)係由於聚/物科材之發展及應用。導電性糊(或黏著 成。充填銀梦之/备科基質中之金濃度填料粒子所組 如圖、所示脂係爲導電性糊6之最常見實例, 性,而環氧樹脂=2之該銀粒1 2 3 4 5 6藉渗出機構提供導電 性。此種充… 件7與基板1〇之間提供黏著 粒黏合樹脂材料長期於電子應用中充作晶 料無法應用於需導而非電導性質。然而,此種材 氧樹脂材料具核種限制,諸 2 0銀^ ^接觸性電阻增高、連接強度低、銀滲移、= 性,故八續^ 氧樹脂材料於所有方向皆具導電 :二=Γ向同性,,…外-種導電性黏著 ‘(或厚膜)僅於單-方向提供導電性。此類材料Ρ 各向異性”導電性黏著劑12或薄膜,如圖;所亍舟馬 各向異性導電性黏著劑12或薄膜僅於壓縮於二; 1 力1及=間時變成導電性。此種方法-般需要= 2 力。孩各向異性薄膜之主要應用係將液晶顯示面板於 3 其電子印刷電路板。該導電性粒子14通常可變步、 4 焊料球或塗有鎳及金之塑料球。黏合 荽σ 5 大多係爲熱固性樹脂、 黏者劑材科16 6 於吾人新近之發明⑽8 93 _0292)t ’揭示—種導電 7 性糊(ECP)材料,其係由塗有低熔點無鉛金屬諸如s 經濟部中央標準局貝Η消費合作社印褽 Μ Β7 -五、發明説明(4Printed by the Employees' Cooperatives of the Central Procurement Bureau of the Ministry of Economic Affairs A7 ——_________ B7___ V. Description of the invention (2) Smaller package size. Therefore, SMT significantly reduces the size of electronic packages and reduces the overall system size. In SMT welding, the solder paste is applied to the spcb by screen printing. Solder paste is composed of fine solder powder, flux and organic medium. During the reflow process, the solder particles are melted to activate the flux, evaporate the solvent material, and at the same time dissolve the molten solder, and finally mature. In contrast, during the corrugated soldering process, the PCB is first treated with a flux and placed on top of the device assembly. The edges move with the waves of the molten solder. The soldering method is usually performed by subjecting the solder joint to a cleaning step to remove residual flux material. Because of environmental considerations, 'CFC and other harmful cleaning agents are not used, but are replaced by water-soluble or non-cleaning co-solvent materials. At present, the electronic packages and printed circuit boards of high-end microelectronic devices require extremely fine pitch connections (height of several hundred millimeters). The solder paste technology currently used by Smt cannot handle such extremely fine pitches due to welding defects such as bridging or solder balls. Another technique that uses p b -S η eutectic solder is limited to a high flow temperature 'of about 2 1 5 ° C. This temperature is already higher than the glass transition temperature of epoxy resins used in most polymer printed circuit board materials. Heat exposure to this reflow temperature causes extremely high thermal strain in the printed circuit board after soldering, especially in a direction perpendicular to the PCB surface. This age is inward: with structural strengthening. Therefore, the residual thermal strain in the assembly PCB will affect the credibility of the electronic system. The more serious problem with the use of lead (Pb) solders is environmental issues, like the trends and impacts of lead removal from gasoline and coatings in other industries. The paper scale is applicable to China National Standard (CNS) A4 specification (210 x 297 mm) (Please read the notes on the back before filling out this page) > Order n. B7 Invention Description (The possibility of Section ^ Check the two types of materials instead of containing The pb solder material is discussed in this article. The "metal" and conductive paste (Ecp. The invention. Agent) is due to the development and application of polymer / material materials. Conductive paste (or sticky. Filled with gold concentration filler particles in silver dream / preparation matrix as shown in the picture, the lipid system is the most common example of conductive paste 6, and epoxy resin = 2 The silver particles 1 2 3 4 5 6 provide conductivity through the exudation mechanism. This filling ... provides adhesive particles between the 7 and the substrate 10 adhesive resin material for a long time in electronic applications as crystals can not be used to guide and Non-conductive properties. However, this kind of oxygen resin material has nuclear restrictions. The 20 silver ^ ^ has increased contact resistance, low connection strength, silver migration, and properties. Therefore, the oxygen resin material has all directions in all directions. Conductive: two = Γ isotropic ,, ... outer-a kind of conductive adhesive '(or thick film) only provides conductivity in a single-direction. Such materials P anisotropic "conductive adhesive 12 or thin film, as shown in the figure; The so-called anisotropic conductive adhesive 12 or film is only compressed in two; 1 force 1 and = become conductive in time. This method-generally requires = 2 force. The main application of the anisotropic film is The liquid crystal display panel is mounted on an electronic printed circuit board. The conductive particles 14 are usually variable in steps. 4 Solder balls or plastic balls coated with nickel and gold. Adhesion 荽 σ 5 is mostly thermosetting resin, adhesive agent material family 16 6 In my recent invention ⑽ 8 93 _0292) t 'Revelation-a conductive 7 paste (ECP ) Material, which is made of low-melting lead-free metal such as s printed by the Central Bureau of Standards of the Ministry of Economic Affairs, Behr Consumer Cooperatives, BM 7-V. Description of the invention (4

In、Bi、Sb及其合金薄層之銅粉所組成,混合有具有 環境安全性之助熔劑,而分散於熱塑性或熱固性聚合物 中。塗有含Sn之ECP之64 Cu粉末62之剖面圖表示於 圖3 〇 由鍍錫Cu粉及聚醯亞胺-矽氧烷樹脂所製造之ECP針 對陶瓷基板而言,係良好之高溫焊科接點諸如C4及焊球 連接(S B C)。然而,就聚合物印刷電路板應用而言,該 ECP並不適用,因爲回流溫度諸如250 X:大幅高於聚合 物樹脂例如FR-4之玻璃化溫度。適於此種應用之材料係 爲由鍍銦Cu粉調配聚醯亞胺-矽氧烷樹脂所製造之 ECP。鍍銦Cu粉糊之回流溫度預測應約1 8 0。(:,甚至低 於P b / S η共熔焊料之回流溫度2丨5。 於吾人新近之發明(Υ〇994-280 , Υ〇994-281)中, 吾人揭示一種製造供高導電性糊使用之樹枝狀粉末材料之 結構及方法,如圖4所示。該銅樹枝狀結構44係沉積於 虛設基板40上,之後另外於銅樹枝狀結構頂部電沉積低 熔點金屬42(In、Six、Zn、Bi、及Sb及其合金)。自 孩基板收集樹枝狀粉末,與熱塑性或熱固性聚合物樹脂混 合形成導電性特)。 ..。 於先前技藝中,焊料/聚合物複合糊狀材料係揭示於美 國專利第5,〇62,896號(Huang等人),主要比例爲可户 化蛘料粉末填料諸如In, Bi, Sb and its alloy thin copper powder, mixed with environmentally safe flux, dispersed in thermoplastic or thermosetting polymers. The cross-section of 64 Cu powder coated with ECP containing Sn is shown in Fig. 3. The ECP made of tin-plated Cu powder and polyimide-silicone resin is a good high-temperature soldering branch for ceramic substrates. Contacts such as C4 and solder ball connection (SBC). However, for polymer printed circuit board applications, this ECP is not suitable because the reflow temperature such as 250 X: significantly higher than the glass transition temperature of polymer resins such as FR-4. A suitable material for this application is ECP made from indium-plated Cu powder blended with polyimide-silicone resin. The reflow temperature prediction of the indium-plated Cu powder paste should be about 180. (:, Even lower than the reflow temperature of P b / S η eutectic solder 2 丨 5. In my recent inventions (Υ〇994-280, Υ〇994-281), I have disclosed a method for manufacturing a highly conductive paste The structure and method of the dendritic powder material used is shown in Fig. 4. The copper dendritic structure 44 is deposited on the dummy substrate 40, and then a low melting point metal 42 (In, Six, Zn, Bi, and Sb and their alloys). Collect dendritic powder from the substrate and mix it with thermoplastic or thermosetting polymer resin to form conductive properties). .. In the prior art, a solder / polymer composite paste material was disclosed in U.S. Patent No. 5,062,896 (Huang et al.), The main proportion of which is a customizable filler powder filler such as

Bi_Sn、Pb-Sn、Bi-Sn_Pb 人 金,次要比例之熱塑性聚合物諸如聚醯亞胺-矽氧烷,及 /人要比例之助熔劑。得到無氧化物而部分凝集之烊料人金 ㈤度適用中 (請先閏讀背面之注意事項再填寫本頁)Bi_Sn, Pb-Sn, Bi-Sn_Pb are human gold, thermoplastic polymers in minor proportions such as polyimide-siloxane, and fluxes in minor proportions. Obtained oxide-free and partially agglomerated consumer gold. Applicable degrees (Please read the precautions on the back before filling this page)

-五、發明説明(5 連接’其係經聚合物強彳μ 1 叱. 強化’而自身或於聚合物溶劑存在下 可於低回流溫度下再作用。 於相同之先前技蓺击 .A/r , 』 w中’美國專利第5,286,417號 (Mahmoud等人)揾子 不—種可熔化之導電性黏著劑,其包 «金屬口金填料諸如Sa 客A思pm人 Au及Bi-Au,及玻瑪化溫度涵 :ίί: 之熔點之熱塑性聚合物。該導電性材料於 聚合物中之充填量係介於約15重量百分比至约2量 分比之範圍内。 先前技藝美國專利第5,1 3 6,3 65號⑴ ㈣4 v —㈣著劑材料’其環氧樹脂基質中含有助 落劑及用相流焊接之金屬粒子諸如Sn、Pb、In、 B\、Sb、Ag等。於回流焊接時,該黏著劑於電子组件 及基板&間形成各向異性導電性。 於另—個先前技藝美國專利第5,213,715號 atterson等人)中,揭示_種方向導電性聚合物,其含 有Ni或Cu (金屬填料粉末。該金屬粉末以異於充作基 質樹脂之聚合物處理。經塗覆之聚合物於壓縮時移位,而 於填料粒于中得到導電性。 經濟部中央榡準局員工消費合作社印聚 簡述 +本發明之目的係提供—種具有環境安全性及低成本之導 電性糊射料。 、本發明另一個目的係提供一種導電性翔材料,其產生高 於習用充填銀之環氧樹脂之電導係數。 门 本發明另一個目的係提供一種導電性糊材料,其可於較 8- 本紙張尺度適用準(CNS )八4雜(210X297公釐) :----— A7 A7 工 經濟部中央標準局員工消費合作社印裝 五、發明説明(6-Fifth, the description of the invention (5 connection 'It is strengthened by the polymer 彳 μ 1 叱. Strengthened' and can work at low reflux temperature by itself or in the presence of a polymer solvent. Strike in the same prior technology. A / r, "W", US Patent No. 5,286,417 (Mahmoud et al.), a fusible conductive adhesive, which includes metal fillers such as Sa, Au, Bi, Au, and glass. Martens temperature culm: ί: melting point of the thermoplastic polymer. The amount of the conductive material in the polymer is in the range of about 15% by weight to about 2% by weight. Prior art US Patent No. 5,1 3 6,3 65 ⑴ ㈣ 4 v —Chesive material 'whose epoxy resin matrix contains a drop aid and metal particles such as Sn, Pb, In, B \, Sb, Ag, etc. which are welded by phase flow. During soldering, the adhesive forms anisotropic conductivity between the electronic component and the substrate & in another prior art US Patent No. 5,213,715 (atterson et al.), A directional conductive polymer is disclosed which contains Ni Or Cu (metal filler powder. The metal powder is different from filling the matrix Polymer treatment of resin. The coated polymer shifts during compression and gets conductivity in the filler particles. Printed by the Consumers' Cooperative of the Central Economic and Technical Bureau of the Ministry of Economic Affairs + Brief description of the present invention is to provide—species A conductive paste material with environmental safety and low cost. Another object of the present invention is to provide a conductive material which produces a higher conductivity than the conventional silver-filled epoxy resin. Another object of the present invention is Provide a conductive paste material, which can be more than 8- this paper size (CNS) 8 4 miscellaneous (210X297 mm): A7 A7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Industry and Economics Invention Description (6

Pb-Sn共溶焊料糊之回流溫度低之溫度下加— ,發明另—個目的係提供—種導電性糊材料,其抗腐银 性高於習用充填銀之環氧樹脂糊。 於-特定具體實例中,吾人揭示一種電沉積粉末結構, 由Sn(底塗層)/Cu(樹枝狀體)/Sn(障壁層)/in(頂塗層)所 、且成此種粉末結構依序電沉積於虛擬基板諸如鈦或不銹 =上,可自彼處輕易分離電沉積材料。該底塗層Sn層保 濩Cu表面防止氧化或腐蝕,並於接觸而於粉末粒子之間 形成冶金鍵結時控制頂塗層之组成。該Sn障壁層使快速 C u - In複合物形成速度減慢,而防止粒子對粒子之鍵結。 孩In頂塗層與該Sn底塗層及障壁層於諸如ΐ5〇 π之低 下製迨粒予對粒子鍵結。而該底塗層、障壁層及頂塗層 之厚度係介於約i毫米或較薄之範園卜該以樹枝狀體 之長度係介於1至50毫米範圍内。 於另個特疋具體實例中,吾人揭示一種電沉積粉末結 構,由Sn(底塗層)/Cu(樹枝狀體)/Bi_Sn合金(頂塗層) 所組成。此結構中不需要介sCu&Bi_Sn金屬之間之障 壁層。該B1 - S η頂塗層係使用市售電鍍溶液而於近共熔 組成下電沉積。 初收集之電沉積粉末粒子之粒徑變化極大。爲了得到均 勻之粒徑,於微分子篩篩選過程中需同時使用噴射研磨法 或起音波粒fe縮減法^較佳粒徑分佈係介於5至丨〇臺 範圍内。 具有均勻而較佳粒徑之電沉積粉末與熱塑性或熱固性聚 -9 f紙張尺度適用中國國家標準(CNS ) A4規格(210Χ.297公瘦) (讀先閱讀背面之注意事項再填寫本頁)Pb-Sn eutectic solder paste is added at a low reflow temperature, and another object of the invention is to provide a conductive paste material that has a higher anti-corrosive silver resistance than the conventional silver-filled epoxy paste. In a specific specific example, we have disclosed an electrodeposited powder structure composed of Sn (undercoat layer) / Cu (dendritic body) / Sn (barrier layer) / in (top coating) and formed into such a powder structure Sequential electrodeposition on a dummy substrate such as titanium or stainless steel can easily separate the electrodeposition material from there. The Sn layer of the undercoat layer protects the Cu surface from oxidation or corrosion, and controls the composition of the top coat when metallurgical bonds are formed between the powder particles upon contact. The Sn barrier layer slows down the formation of the fast Cu-In complex and prevents particle-to-particle bonding. The In top coating and the Sn undercoat layer and the barrier layer are bonded to the particles at a particle diameter as low as ΐ50 π. The thickness of the undercoat layer, the barrier layer and the top coating layer is between about 1 mm or thinner. The length of the dendrimer is in the range of 1 to 50 mm. In another specific example, we have disclosed an electrodeposited powder structure composed of Sn (undercoat) / Cu (dendritic body) / Bi_Sn alloy (top coating). No barrier layer between sCu & Bi_Sn metal is required in this structure. The B1-Sn top coating was electrodeposited with a near eutectic composition using a commercially available plating solution. The particle size of the initially collected electrodeposited powder particles varies greatly. In order to obtain a uniform particle size, it is necessary to simultaneously use a jet milling method or an ultrasonic particle reduction method during the screening process of the micromolecular sieve. The preferred particle size distribution is in the range of 5 to 10 units. Electrodeposited powder with uniform and better particle size and thermoplastic or thermosetting poly-9 f paper size is applicable to Chinese National Standard (CNS) A4 specifications (210 × .297 male thin) (read the precautions on the back before filling in this page)

A7 B7 -五、發明説明( 合物樹脂混合,以調配導電性糊,如吾人先前發明 (YO994-280,γ〇994-281)所述。 附圖簡述 、圖1係爲導電性糊之説明圖,其包含於環氧樹脂基質中 充作填料之«粒子。該導電性糊之導電性係分類爲各向 同性(先前技藝)。 圖2A及2B係爲導電性黏著劑之説明圖,其於該黏著 劑薄膜壓縮於兩接點或結合片之間時,僅於單一方向變成 導電性。該導電性黏著劑(或薄膜)係分類爲各向異性(先 前技藝)。 圖3係爲導電性糊材料之説明圖,其包含充填於熱塑性 聚合物樹脂基質中之球形铜粉。該銅粒係塗覆低熔點、無 毒性金屬諸如踢、姻、叙等。 圖4係爲樹枝狀體銅粉之説明圖,沉積於虛設基板上, 之後於樹枝狀體粉末上電解沉積鋼金屬薄層。 圖5係爲沉積於虛擬基板上之新穎電沉積粉末結構之説 明圖;Sn(底塗層)/Cu(樹枝狀體)/sn(障壁層)/ιη(頂塗 層)。 經濟部中央標準局員工消費合作社印m (請先閣讀背面之注意事項再填寫本頁) 圖6係爲沉積於虛擬基板上之新穎電沉積粉末結構之說 明圖;Sn(底塗層)/Cu(樹枝狀體)/Bi-Sn(頂塗層)。 詳述 於先前發明YO994-28 0及Y0 9 94-281中,吾人揭示 一種銅樹枝狀體結構,其沉積於虛擬基板上,之後於該鋼 樹枝狀體結構頂部電沉積銦金屬薄層。該塗覆銦之納樹枝 -10- 本紙張尺度適用中國國家標準(.CNS ) A4規格(210X297公釐). A7 B7 經濟部中央標準局員工消費合作社印掣 五、發明説明(8 ) 狀鍾粉末可藉著自該虚擬基板括除而輕易收集。銅樹枝狀 體電沉積所用之詳細條件經揭示係爲三階電鍍流程;(j )致 密銅之初期電鍍,(ii)樹枝狀體核化階段,及(iii)樹枝狀 體生長階段。 亦揭示銦電鍍條件及浸浴。 圖5係爲沉積於虛擬基板5 0上之新穎電沉積粉末結構 之説明圖;Sn(底塗層)52/(:11(樹枝狀體)54/31!(障壁 層)56/In(頂塗層)58。底塗層Sn 52及障壁層Sn層56 係使用得自 LeaRonal,Inc.之 Solderon Tin Concentrate溶液電沉積。該Six障壁層可由其他金屬及 合金諸如Ni、Co、Cr、Fe、Pd及其合金所取代。 圖6係爲沉積於虛擬基板6 0上之新穎電沉積粉末結構 之説明圖;Sn(底塗層)62/Cu(樹枝狀體)64/Bi-Sn(頂 塗層)66。頂塗層Bi-Sn層66係以Bi-Sn合金之狀態沉 積’其組成接近共熔,60重量百分比Bi-40重量百分比 Sn 。孩Bi-Sn合金層係使用得自LeaRonal,Inc.之 Solderon Tin Concentrate 、 Solderon BiA7 B7-V. Description of the invention (composite resin is mixed to formulate conductive paste, as described in my previous invention (YO994-280, γ 994-281). Brief description of the drawings, Figure 1 is the conductive paste Explanatory diagram, which contains «particles filled as filler in the epoxy resin matrix. The conductivity of the conductive paste is classified as isotropic (previous technique). Figures 2A and 2B are explanatory diagrams of conductive adhesives, When the adhesive film is compressed between two contacts or a bonding sheet, it becomes conductive in only one direction. The conductive adhesive (or film) is classified as anisotropic (previous technique). Figure 3 is An illustration of a conductive paste material, which contains spherical copper powder filled in a thermoplastic polymer resin matrix. The copper particles are coated with low-melting, non-toxic metals such as kicks, marriages, Syria, etc. Figure 4 is a dendrimer An illustration of copper powder is deposited on a dummy substrate, and then a thin layer of steel metal is electrolytically deposited on the dendritic powder. Figure 5 is an illustration of a novel electrodeposition powder structure deposited on a dummy substrate; Sn (undercoating) ) / Cu (Dendrite) / sn (Bundle ) / Ιη (top coating). Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) Figure 6 is a description of the novel electrodeposition powder structure deposited on the virtual substrate Figure; Sn (undercoat) / Cu (dendritic body) / Bi-Sn (top coating). Detailed description in the previous inventions YO994-28 0 and Y0 9 94-281, we reveal a copper dendritic structure It is deposited on a virtual substrate, and then a thin layer of indium metal is electrodeposited on top of the steel dendritic structure. The indium-coated nano-branch-10- This paper size applies to Chinese National Standard (.CNS) A4 (210X297) %). A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the invention (8) The bell powder can be easily collected by removing it from the virtual substrate. The detailed conditions used for the electrodeposition of copper dendrimers have been revealed. It is a three-stage plating process; (j) the initial plating of dense copper, (ii) the dendritic nucleation stage, and (iii) the dendritic growth stage. The indium plating conditions and immersion bath are also revealed. Figure 5 shows the deposition Novel electrodeposition powder junction on virtual substrate 50 Explanation of the structure; Sn (undercoat layer) 52 / (: 11 (dendritic body) 54/31! (Barrier layer) 56 / In (top coat) 58. Undercoat layer Sn 52 and barrier layer Sn layer 56 Electrodeposition using a Soleron Tin Concentrate solution from LeaRonal, Inc. The Six barrier layer can be replaced by other metals and alloys such as Ni, Co, Cr, Fe, Pd, and their alloys. Figure 6 shows the deposition on the dummy substrate 6 An illustration of the structure of a novel electrodeposited powder on 0; Sn (base coat) 62 / Cu (dendritic body) 64 / Bi-Sn (top coat) 66. The top coating Bi-Sn layer 66 is deposited in the state of a Bi-Sn alloy 'and its composition is close to eutectic, 60 wt% Bi to 40 wt% Sn. The Bi-Sn alloy layer uses Solderon Tin Concentrate, Solderon Bi from LeaRonal, Inc.

Concentrate > Solderon Acid、Solderon Bi Primary 及 Solderon Bi Secondary 溶液沉積。用於 Sn/Cu/Bi-Sn粉末材料之典型電沉積條件如下: i) Sn(底塗層);2埃,〇.5伏特’ 3分鐘,1〇〇平方英 咕面積·, ii) Cu(樹枝狀體);2〇埃,2.5伏特,2分鐘,1〇〇 平方英吋面積, 11 Μ氏張尺度適用中國國家標準(CNS )八顿洛(2ι〇χ297公釐 (請先閱讀背面之ii意事項再填寫本頁) -.ii ^~. 訂----- A7 -:__ 〜 B7 五、發明説明(9 ) ii〇Bi-Sn(頂塗層);14埃,2 〇伏特,2分鐘,1 〇〇 平方英吋面積。 用於CU電鍍之陽極材料係爲無氧銅金屬,而及 Bi-Sn電鍍則使用純錫金屬。 初收集之電沉積粉末粒子之粒徑變化極大。爲丁得到均 勻之粒杈’於微分子篩篩選過程中需同時使用嘴射研磨法 或超音波粒徑縮減法。較佳粒徑分佈係介於5至1〇毫米 範園内。 ’ 具有均勻而最佳粒徑範圍之電沉積粉末係儲存於“非清 潔性助溶劑Q u a 1 i t e k # 3 0 5中’直至用於糊調配物。導 電性糊係藉將具有均勻而需要之粒徑之填料粉末分散於熱 塑性或熱固性聚合物樹脂基質中而調配,如先前發明 (YO994-280,Y0994-281)所述。 爲了針對電及機械性質進行定性,藉著連接兩個“L形,, 銅標籤而製造低溫、無鉛導電性糊之連接試樣。該連接操 作係於180Ό、15分鐘、25psi下進行。使用聚酿亞胺 硬氧燒樹脂自Sn/Cu/m-Sn製造之模型連接點顯示較焊 料接點優越之電及機械性質。 ----^----~.1' 一衣--- (請先閱讀背面之注意事項再填寫本頁) 、11 丨©- 經濟部中央橾準局員工消背合作社印製 -12- 本紙張尺度適^"中國國家標準(CNS ) Μ規格(2 6x297公嫠)Concentrate > Solderon Acid, Solderon Bi Primary, and Solderon Bi Secondary solution deposition. Typical electrodeposition conditions for Sn / Cu / Bi-Sn powder materials are as follows: i) Sn (undercoat); 2 angstroms, 0.5 volts' for 3 minutes, 100 square feet area, ii) Cu (Dendritic body); 20 angstroms, 2.5 volts, 2 minutes, 100 square inches area, 11 μM scale applicable to Chinese National Standard (CNS) Badun Luo (2 × 297 mm (please read the back first) Please fill in this page again for the meaning of ii) -.ii ^ ~. Order ----- A7-: __ ~ B7 V. Description of the invention (9) ii〇 Bi-Sn (top coating); 14 angstrom, 2 〇 Volt, 2 minutes, area of 100 square inches. The anode material used for CU plating is oxygen-free copper metal, and Bi-Sn plating uses pure tin metal. The particle size change of the initially collected electrodeposited powder particles Very large. In order to obtain uniform grains, it is necessary to use mouth-shot grinding or ultrasonic particle size reduction in the screening process of micromolecular sieves. The preferred particle size distribution is within the range of 5 to 10 mm. The electrodeposition powder with the optimal particle size range is stored in "non-cleaning co-solvent Q ua 1 itek # 3 0 5 'until it is used for paste formulation. Conductive The paste is formulated by dispersing filler powder having a uniform and desired particle size in a thermoplastic or thermosetting polymer resin matrix, as described in the previous invention (YO994-280, Y0994-281). In order to characterize electrical and mechanical properties , By connecting two "L-shaped, copper labels," a connection sample of a low-temperature, lead-free conductive paste was produced. The connection operation was performed at 180 ° F, 15 minutes, and 25 psi. Using polyimide hard oxygen resin The connection points of the model made of Sn / Cu / m-Sn show superior electrical and mechanical properties than solder joints. ---- ^ ---- ~ .1 'Yiyi --- (Please read the precautions on the back first (Fill in this page again), 11 丨 ©-Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs -12-This paper is suitable for ^ " China National Standard (CNS) Μ size (2 6x297 cm)

Claims (1)

时年修正j !補充_丨 A8Revise j over time! Supplemental 丨 A8 第87103284號專利申請案 中文申請專利範圍修正本⑽年9月劈 ---D8 六、申請專利範圍 !•-種用以形成導電性連接之 多個材料之樹枝狀體; T、,,。構,其包括: 該樹枝狀體具有中心部分及 之分枝狀纖絲;且 τ#分向外哭出 該樹枝狀體之第一個部位上且 個部位上具有第二種塗層。^弗—種塗層而第二 2. 根據申請專利範圍帛!項之結構 一、 體係為粉末。 ”中邊多個樹枝狀 3. 根據申請專利範圍第」项 包括…n Ag“u:-材料係選自 4. 根據申請專利範圍第1項之結構,其中該第一種塗斧 係為選自包括In,Sn,Zn,Ph 曰 乙n,Pb ,Βι及Sb之材 料,而第二種塗層係為選自包括In , Sn ,Zn , Pb,Bi及Sb之相異材料。 5 ·根據申請專利範圍第3項之結構,其中該樹枝狀體至 少一部分係經由該導電性塗層而與該樹枝狀體之其他 部分熔合。 6.根據申請專利範圍第1項之結構,其中該多個樹枝狀 體係包埋於聚合物材料中。 7 .根據申凊專利範圍第1項之結構,其中該結構係為電 連裝置。 8 .根據申請專利範圍第1項之結構,其中該導電性塗層 之熔點低於該樹枝狀體。 9.根據申請專利範圍第1項之結構,其另外包括第一個 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (讀先閔讀背面之注意事項再填寫本買) 訂 經濟部中央標隼局員工消費合作社印製 时年修正j !補充_丨 A8Patent application No. 87103284 Chinese amendments to the scope of patent application in September of the following year --- D8 VI. Application scope of patents! • A dendrimer of multiple materials used to form conductive connections; T ,,,. The dendritic body includes: the dendritic body has a central portion and branched filaments; and τ # 分 后 出 出 The dendritic body has a second coating on the first part and the second part. ^ Fu—a kind of coating and the second 2. According to the scope of patent application 帛! Item structure 1. The system is powder. "Middle side of multiple dendritic shapes 3. According to the scope of the patent application, the item" includes ... nAg "u:-The material is selected from 4. The structure according to the scope of the patent application, the first type of axe system is selected Since the material including In, Sn, Zn, Ph is Bn, Pb, Bm, and Sb, the second coating is selected from dissimilar materials including In, Sn, Zn, Pb, Bi, and Sb. 5 · The structure according to item 3 of the scope of patent application, wherein at least a part of the dendrimer is fused with other parts of the dendrimer through the conductive coating. 6. The structure according to item 1 of the scope of patent application, wherein the multiple Each dendritic system is embedded in a polymer material. 7. The structure according to item 1 of the patent application scope, wherein the structure is an electrical connection device. 8. The structure according to item 1 of the patent application scope, wherein the conductivity is The melting point of the coating is lower than that of the dendrimer. 9. According to the structure of the first patent application scope, it also includes the first paper size applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (read Xianmin (Read the notes on the back and fill in this purchase) J amended in the economy of the central office staff Falcon standard consumer cooperatives printed! Replenish _ Shu A8 第87103284號專利申請案 中文申請專利範圍修正本⑽年9月劈 ---D8 六、申請專利範圍 !•-種用以形成導電性連接之 多個材料之樹枝狀體; T、,,。構,其包括: 該樹枝狀體具有中心部分及 之分枝狀纖絲;且 τ#分向外哭出 該樹枝狀體之第一個部位上且 個部位上具有第二種塗層。^弗—種塗層而第二 2. 根據申請專利範圍帛!項之結構 一、 體係為粉末。 ”中邊多個樹枝狀 3. 根據申請專利範圍第」项 包括…n Ag“u:-材料係選自 4. 根據申請專利範圍第1項之結構,其中該第一種塗斧 係為選自包括In,Sn,Zn,Ph 曰 乙n,Pb ,Βι及Sb之材 料,而第二種塗層係為選自包括In , Sn ,Zn , Pb,Bi及Sb之相異材料。 5 ·根據申請專利範圍第3項之結構,其中該樹枝狀體至 少一部分係經由該導電性塗層而與該樹枝狀體之其他 部分熔合。 6.根據申請專利範圍第1項之結構,其中該多個樹枝狀 體係包埋於聚合物材料中。 7 .根據申凊專利範圍第1項之結構,其中該結構係為電 連裝置。 8 .根據申請專利範圍第1項之結構,其中該導電性塗層 之熔點低於該樹枝狀體。 9.根據申請專利範圍第1項之結構,其另外包括第一個 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (讀先閔讀背面之注意事項再填寫本買) 訂 經濟部中央標隼局員工消費合作社印製 申請專利範圍 A8 B8 C8 D8 經濟部t央標準局員工消費合作社印製 及第二個表面,其中夾置該結構以 個表面之間提供互連。 10·根據申請專利範圍第6項之結構, 係經熟化或洪烤。 n.根據申請專利範圍第6項之結構’ 係選自包括聚酸亞胺、石夕氧境1、.聚 氧樹脂及自木質素、纖維素、木油 生物性聚合物樹脂。 12. 根據申請專利範圍第6項之結構, 係為含溶劑熱塑性黏著劑。 13. 根據申請專利範圍第6項之結構, 係為無溶劑熱塑性黏著劑。 根據申請專利範圍第9項之結構, 體係包埋於聚合物材料内,針對該 面提供黏著連接。 15. 根據申請專利範圍第9項之結構, 係為第一個電子裝置接點位置,而 第二個電子裝置接點位置。 16. 根據申請專利範圍第Η項之結構, 裝置係為半導體晶片,而該第二 基板。 17. 根據申請專利範圍第9項之結構, 二個表面係為焊料表面。 18. 根據申請專利範圍第9項之結構,其中該結構係為電 於該第一個及第二 其中該聚合物材料 其中該聚合物材料 醯亞胺發氧燒、環 及作物油所衍化之 其中該聚合物材料 其中該聚合物材料 其中該多個樹枝狀 第一個及第二個表 其中該弟一個表面 該第二個表面係為 其中該第一個電子 電子裝置係為封裝 其中該第一個及第 -2Patent application No. 87103284 Chinese amendments to the scope of patent application in September of the following year --- D8 VI. Application scope of patents! • A dendrimer of multiple materials used to form conductive connections; T ,,,. The dendritic body includes: the dendritic body has a central portion and branched filaments; and τ # 分 后 出 出 The dendritic body has a second coating on the first part and the second part. ^ Fu—a kind of coating and the second 2. According to the scope of patent application 帛! Item structure 1. The system is powder. "Middle side of multiple dendritic shapes 3. According to the scope of the patent application, the item" includes ... nAg "u:-The material is selected from 4. The structure according to the scope of the patent application, the first type of axe system is selected Since the material including In, Sn, Zn, Ph is Bn, Pb, Bm, and Sb, the second coating is selected from dissimilar materials including In, Sn, Zn, Pb, Bi, and Sb. 5 · The structure according to item 3 of the scope of patent application, wherein at least a part of the dendrimer is fused with other parts of the dendrimer through the conductive coating. 6. The structure according to item 1 of the scope of patent application, wherein the multiple Each dendritic system is embedded in a polymer material. 7. The structure according to item 1 of the patent application scope, wherein the structure is an electrical connection device. 8. The structure according to item 1 of the patent application scope, wherein the conductivity is The melting point of the coating is lower than that of the dendrimer. 9. According to the structure of the first patent application scope, it also includes the first paper size applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (read Xianmin (Read the notes on the back and fill in this purchase) Printed by the Consumers 'Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs for the application of patents A8 B8 C8 D8 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs and the second surface, which sandwiches the structure to provide interconnection between the surfaces. · The structure according to item 6 of the scope of patent application is matured or baked. N. The structure according to item 6 of the scope of patent application is selected from the group consisting of polyimide, stone oxosphere 1, polyoxy resin and From lignin, cellulose, wood oil biopolymer resin. 12. The structure according to item 6 of the scope of patent application is a solvent-containing thermoplastic adhesive. 13. The structure according to item 6 of the scope of patent application is none. Solvent thermoplastic adhesive. According to the structure of the scope of the patent application, the system is embedded in a polymer material to provide an adhesive connection to the surface. 15. According to the structure of the scope of the patent application, the system is the first electronic device. Contact position, and the second electronic device contact position. 16. According to the structure of item (1) of the scope of patent application, the device is a semiconductor wafer and the second substrate. 17. According to the application In the structure of the scope item 9, the two surfaces are solder surfaces. 18. The structure according to the scope of the patent application item 9, wherein the structure is electrically connected to the first and second one of the polymer material and the polymer. The material is derived from oxidized fever, ring and crop oil, among which is the polymer material, wherein the polymer material includes the plurality of dendritic first and second tables, wherein the first surface of the younger and the second surface system. Where the first electronic electronic device is a package in which the first and second -2 ------------- (請先閲讀背面之注意事項再填寫本頁} 訂 _9 ABCD 經濟部中央標準局員工消費合作社印製 六、申請專利範圍 ~' 子裝置。 19. 根據申請專利範圍第9項之結構’其中該結構係為計 算裝置。 20. —種用以形成導電性連接之連接材料結構,其包括. 一個中間具有間隙之互連樹枝狀體網絡; 每個樹枝狀體之第二個部分上皆具有由可溶合材料 製造之第一種塗層及第二種塗層; 該網絡中之相鄰樹枝狀體係經由該可熔合材料而黏 著。 . 21. 根據申請專利範圍第2 0項之結構,其中該間隙含有聚 合物材料。 22. 根據申請專利範圍第2 0項之結構,其中該樹枝狀體具 有中心部分.,及自該中心部分向外突出之分枝狀纖 絲。 23. 根據申請專利範圍第1項之結構,其中該樹枝狀體具 有一長度及寬度,及該長度相對於該寬度之比例的寬高 比〇 24_根據申請專利範圍第23項之結構,其中該寬高比介於 約1至約1 0之間。 25. 根據申請專利範圍第2 3項之結構,其中該寬高比介於 約1至約5之間。 26. 根據申請專利範圍第2 0項之結構,其中該材料係為導 電性。 27. 根據申請專利範園第6項之結構,其中该樹枝狀體係 -3- 本紙張尺度適财關家鮮(CNS ) A4^ ( 21GX297讀ί ^ (請先閱讀背面之注意事項再填寫本頁) -裝- 訂 六 圍範利請 t· ABCD 為該結構之約10重量百分比至約90重量百分比。 8.根據中料利範圍第6㊉之結構,其中該聚合物材料 !選自包括聚醯亞胺、矽氧烷、聚醯亞胺矽氧烷、環 氧樹脂及生物性聚合物樹脂。 29.根據申請專利_ 9項之結構,其中該塗層對該第 一個及第二個表面形成冶金鍵結。 3〇.根據申請專利範園第9項 v 的 '、疋〜構,其中该罘一個及該 弟二個表面.係為導電性。 31 ^據中請專利範園第^項之結構,其中該塗層 電性。 32. 根據申請專利範圍帛6項之結構,其另外包括落劑' 丁酸及乙二醇。 33. 根據申請專利範圍第、項之結構,其另外包括溶劑、 34 f非清潔性”助炫劑,含有低殘留性無#素活化劑。 據^ 4專利範圍第6項之結構,其中該聚合物材料 係為無溶劑熱固性黏著劑。 35.根據申請專利範圍第6項夕处 甘山.w人 ..,. ^ … < 結構,其中該聚合物材料 係為可溶性環氧樹脂。 據中$專利範圍第35項之結構,其中該可溶性環氧 树脂係選自包括縮嗣及縮越 37·-種用以形成導電性連接之速垃: % r生運接 < 連接材料結構,其包括: 多個銅樹枝狀體; 該樹枝狀體具有中心銅部分及自該中心部分向外突 出《分枝狀纖絲;且 [紙張尺細中國 (請先閲讀背面之注意事項再填寫本頁} 裝· 、-ιτ 經濟部中央檩隼局員工消費合作社印製 -4- A8 Βδ C8 D8 申請專利範圍 該樹枝狀體之第一個部位上具有第一種塗層而第二 個邵位上具有第二種塗層,該第一種塗層係為Sn ,而 孩第二種塗層於該銅樹枝狀體上具有第一層錫而於該 Sn層上具有in頂層。 38. —種用以製造導電性連接之方法,其具有以下步驟: 使可電鐘表面與第—種電鍍溶液接觸; 於該表面上自該電鍍溶液生長樹枝狀體;及 於該樹枝狀體之第一個部分上形成第一種塗層,而 於該樹枝狀體之第二個部分上形成第二種塗層,以形 成經塗覆之樹枝狀體。 39. 根據申請專利範圍第3 8項之方法,其中該第—種電鐘 溶液係為電鍍溶液。 4〇·根據申請專利範圍第3 8項之方法,其中該第二種電鐘 溶液係選自包括無電電鍍溶液及浸潰電鍍溶液及電益度 溶·液。 41.根據申請專利範圍第3 8項之方法’其中該可電鍍表面 係為導電性。 42·根據申請專利範圍第3 8項之方法’其另外包括自該表 面取除具有導電性塗層之樹枝狀體。 43·根據申請專利範圍第3 8項之方法,其中該樹枝狀體具 有一中心部分,及自該中心部分向外延伸之分枝狀部 分。 44.根據申請專利範圍第4 2項之方法’其中該取除步驟包 括自該表面刮除該樹枝狀體。 5- )八顿潘(210X297公釐) ---------㈣裝-- 先Ja#嘴滴之泣意事項存填寫本育) 、1T 經濟部中央標準局員工消費合作社中製 ABCD 45.根據申請專利範圍第38項之方法,其中該樹枝狀體係 自導電性材料形成。 46·根據申請專利範圍第4 5項之方法,其中該導電性材科 係選自包括Cu,Pd,Pt,Ni , Ag,及Au。 47. 根據申請專利範圍第3 8項之方法,其中該塗層係為導 電性,而係藉著將該樹枝狀體浸潰於第二個電鍍溶液 中而形成。 48. 根據申請專利範圍第4 7項之方法,其中該第二種電鍍 溶液係為電鍍溶液。 49·根據申請專利範圍第4 7項之方法,其中該第二種電鍍 /么液係選自包括無電電鍍溶液及浸潰電鍵溶液。 訂 5〇·根據申請專利範圍第3 8項之方法,其中當該表面曝露 万;第一種電鍵溶液時,於該表面施加第一個電壓,以 =孩表面上鍍上該樹枝狀體;當該樹枝狀體曝露於該 第二種電鍍溶液時,於該樹枝狀體施加第二個電壓, 以於該樹枝狀體上鍍上該塗層。 51·根據申請專利範圍第3 8項之女a 伤[強“ 呔’其中該第-種塗層 係為選自包括Sn,Zn,ln, 、…, βι,Pb,Au 及 Sb 經濟部中央標隼局員工消費合作社印製 足材料,而第二種塗層係為選自 j Zn > In J Bi,Pb,Au及Sb之相異材科。 52.根據申請專利範圍第4 2项之 L 万法’其中自該經塗覆樹 枝狀體形成一粉末。 53·根據申請專利範圍第5 2項之太、土 . 万击,其另外包括添加該 經塗覆樹枝狀體於聚合物材料_成糊料。 -6- ’根據申請專利範圍第 丁駿、,、又万法其另外包括溶劑、 55·根據二:非清潔性,,助溶劑,以形成糊料。 利範圍第53項之方法,其中該聚二材料 、選自包括聚醯亞胺、矽氧 氧樹脂及自木質 ⑽夕氧燒、環 生物性聚合物H 木油及作物油所衍化之 A::申請專利範園第53項之方法,其中該糊料 於苐—個與第二個導電性表面之間。 置 57. =申請專利範圍第56項之方法,其中該第—個導電 面係為晶片接觸位置’而第二個導電性表面係 基板接觸位置。 、'’ 58. 根據申請專利範圍第56項之方法,其中該第—個導電 性表面係為液晶顯示面板接觸位置,而該第二個導電 性表面係為晶片載體帶導線位置。 % 59. 根,申請專利範圍第56項之方法,其中該糊料係加熱 至第一個溫度,以熔合位於相鄰樹枝狀體上之塗層。 60. 根據申請專利範圍第5 6項之方法’其中該糊料係加執 至足以使該聚合物熟化之第二個溫度。 61. —種用以製造導電性連接之方法,其包括以下步驟: 於一表面上生長樹枝狀體; 於該樹枝狀體之第一個部分上塗覆第—種塗層,而 於該樹枝狀體之第二個部分上塗覆第二種塗層; 自該表面取下該經塗覆之樹枝狀體。 62. 根據申請專利範圍第6 1項之方法,其中該第_種塗層 本紙張尺度適用中國國家標準(CNS ) A4規格(2丨0 X 297公董) -->請先閲讀背面之注意事項再填寫本I·} ϊ裝- -訂 經濟部中央標準局員工消費合作社印製------------- (Please read the precautions on the back before filling out this page} Order_9 Printed by ABCD Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. 6. Scope of Patent Application ~ 'Sub-device. 19. The structure according to item 9 of the scope of the patent application, wherein the structure is a computing device. 20. A connecting material structure for forming a conductive connection, comprising: a network of interconnected dendrimers with a gap in the middle; The second part of each dendrimer has a first coating and a second coating made of a soluble material; adjacent dendritic systems in the network are adhered via the fusible material. 21. The structure according to item 20 of the scope of patent application, wherein the gap contains a polymer material. 22. The structure according to item 20 of the scope of patent application, wherein the dendrimer has a central portion. Outstanding branched filaments. 23. The structure according to item 1 of the scope of patent application, wherein the dendrimer has a length and a width, and an aspect ratio of the ratio of the length to the width. 24_ according to the application patent The structure surrounding item 23, wherein the aspect ratio is between about 1 to about 10. 25. The structure according to item 23 of the scope of patent application, wherein the aspect ratio is between about 1 to about 5 26. The structure according to item 20 of the scope of patent application, wherein the material is conductive. 27. The structure according to item 6 of the patent application park, wherein the dendritic system Fresh (CNS) A4 ^ (21GX297 Reading ί ^ (Please read the precautions on the back before filling out this page)-Packing-Order Liu Wai Fan Li, please t · ABCD for the structure of about 10% by weight to about 90% by weight. 8. The structure according to No. 6 of the material range, wherein the polymer material! Is selected from the group consisting of polyimide, siloxane, polyimide siloxane, epoxy resin and biopolymer resin. 29. According to the structure of the applied patent _9, wherein the coating forms a metallurgical bond to the first and second surfaces. 30. According to the ', 疋 ~ structure of the applied patent field No. 9 v, where 罘One and the other two surfaces are conductive. 31 ^ According to the patent, please ask for the conclusion of item ^ in the patent garden. Among them, the coating is electrically conductive. 32. According to the structure of the scope of the application for the patent, item 6, which also includes the agent 'butyric acid and ethylene glycol. 33. According to the structure of the scope, the application for the scope of the patent, which further includes a solvent, 34 f non-cleaning "dazzling aid, containing low residual non-primary activator. According to the structure of item 4 of the patent scope, wherein the polymer material is a solvent-free thermosetting adhesive. 35. According to the scope of patent application Item 6: Ganshan .w people .., ^… < structure, where the polymer material is a soluble epoxy resin. According to the structure of item 35 of the patent scope, the soluble epoxy resin is selected from the group consisting of shrinkage and shrinkage, which are used to form conductive connections:% r 生 运 接 < Connection material structure , Which includes: a plurality of copper dendrimers; the dendrimer has a central copper portion and protrudes outward from the central portion; "branches are filaments; and [paper rule fine in China (please read the notes on the back before filling in This page}, printed by-ιτ Printed by the Consumer Cooperatives of the Central Government Bureau of the Ministry of Economic Affairs -4- A8 Βδ C8 D8 Application scope of the patent The first part of the dendrimer has the first coating and the second one There is a second coating on the bit, the first coating is Sn, and the second coating has a first layer of tin on the copper dendrimer and a top layer of in on the Sn layer. 38. -A method for manufacturing a conductive connection, which has the following steps: contacting an electric clock surface with a first plating solution; growing a dendrimer from the plating solution on the surface; and The first coating is formed on one part, and A second coating is formed on the second part of the dendrimer to form a coated dendrimer. 39. The method according to item 38 of the scope of patent application, wherein the first electric clock solution is 40. The method according to item 38 of the scope of patent application, wherein the second electric clock solution is selected from the group consisting of an electroless plating solution, an impregnated plating solution, and a degree of profitability solution. 41. According to the patent application The method of the item 38 of the scope 'where the electroplatable surface is conductive. 42. The method of the item 38 of the scope of the patent application' further includes removing a dendrimer having a conductive coating from the surface. 43 The method according to item 38 of the scope of patent application, wherein the dendrimer has a central portion and a branched portion extending outward from the center portion. 44. The method according to item 42 of the scope of patent application 'wherein The removing step includes scraping off the dendritic body from the surface. 5-) Eight Dunpan (210X297 mm) --------- Outfit-first Ja # mouth drip crying matters to fill in This education), 1T Consumer spending cooperation of the Central Standards Bureau of the Ministry of Economic Affairs The prepared ABCD 45. Method 38 The patentable scope of the application, wherein the dendritic system is formed from a conductive material. 46. The method according to item 45 of the scope of patent application, wherein the conductive material family is selected from the group consisting of Cu, Pd, Pt, Ni, Ag, and Au. 47. The method according to item 38 of the scope of patent application, wherein the coating is conductive and is formed by immersing the dendrimer in a second plating solution. 48. The method according to item 47 of the scope of patent application, wherein the second plating solution is a plating solution. 49. The method according to item 47 of the scope of patent application, wherein the second electroplating solution is selected from the group consisting of an electroless plating solution and an immersion bond solution. Order 50. The method according to item 38 of the scope of patent application, wherein when the surface is exposed to 10,000; when the first key solution is applied, the first voltage is applied to the surface to coat the dendrimer on the surface of the child; When the dendrimer is exposed to the second plating solution, a second voltage is applied to the dendrimer to plate the coating on the dendrimer. 51. Female a wound according to item 38 of the scope of patent application [Strong "呔" where the first coating is selected from the group consisting of Sn, Zn, ln, ..., β, Pb, Au and Sb. Standards Bureau employees consume cooperatives to print foot materials, and the second coating is a dissimilar material department selected from j Zn > In J Bi, Pb, Au and Sb. 52. According to item 42 of the scope of patent application L Wanfa 'wherein a powder is formed from the coated dendrimer. 53. According to claim 52 of the scope of application for patent, soil. Wan strike, which additionally includes adding the coated dendrimer to a polymer material _ 成 糊料. -6- 'According to the scope of the patent application, Ding Jun, and Wan Fa also include a solvent, 55 · According to the second: non-cleaning, and a solvent to form a paste. The scope of benefit of the 53rd item The method, wherein the poly-dimeric material is selected from the group consisting of polyimide, silicone resin, and A :: derived from a wood-derived polymer, wood bio-polymer, wood oil, and crop oil. The method according to item 53, wherein the paste is between the first conductive surface and the second conductive surface. 57. = The method of the 56th scope of the patent application, wherein the first conductive surface is the wafer contact position 'and the second conductive surface is the substrate contact position. Method, wherein the first conductive surface is the contact position of the liquid crystal display panel, and the second conductive surface is the position of the wire on the wafer carrier.% 59. Method of applying for the scope of patents, wherein The paste is heated to the first temperature to fuse the coatings located on adjacent dendrimers. 60. The method according to item 56 of the patent application 'wherein the paste is treated sufficiently to ripen the polymer 61. — A method for making a conductive connection, comprising the steps of: growing a dendrimer on a surface; applying a first coating on the first part of the dendrimer And applying a second coating on the second part of the dendrimer; removing the coated dendrimer from the surface. 62. The method according to item 61 of the scope of patent application, wherein the first _Coated books Zhang scale is applicable to China National Standard (CNS) A4 specification (2 丨 0 X 297 public directors)-> Please read the notes on the back before filling in this I ·} Outfit--Order Staff Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs Print 申q專利範圍 經濟部中央標準局員工消費合作社印製 及孩第二種塗層係為導電性。 63’柜據申請專利範圍第 係為可溶性環氧二 法,其中該聚合物材料 64·Ξ2請專利範圍第63項之方法,其中該可溶性環氧 相係選自包括縮酮及二環氧樹脂。 ’根據申請專利範圍第6 4項之古 枯舳旬,\ 其中該經塗覆之樹 66 2 於該第—個及第"個導電性表面之間。 .申請專利範圍第38項之方法,其中該第一種塗層 孩第一種塗層係為導電性。 67’根據申請專利範圍第61項之方法 丁酸及乙二醇。 68·根據申請專利範圍第6 1項之方法 及“非清潔性,,助溶劑,含有低殘留性無商素活化劑。 .根據:請專利範圍第61項之方法,其中該聚合物材料 係為無溶劑熱固性黏著劑。 7〇.根據申請專利範圍第69項之方法,其中該聚合物材料 係為可溶性環氧樹脂。 ,據申6B專利|& UJ第7 Q項之方法,其中該可溶性環氧 樹脂係選自包括縮酮及縮醛二環氧化物。 72.-種用以製造導電性連接之方法,其包括以下步驟: 使可電鍍表面與第一種電鍍溶液接觸; 遠基板表面係為S η ; 於蔹可電鍍表面上自該電鍍溶液生長Cu樹枝狀體; 及 其另外包括溶劑 其另外包括溶劑 (請先閎讀背面之注意事項再填寫本頁) .裝 訂· -8- 家標準(CnI) Α4·Τϋ〇Χ297公釐Scope of patent application q Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs and the second coating system is conductive. According to the 63 'cabinet, the scope of patent application is the second method of soluble epoxy, wherein the polymer material 64 · Ξ2 is the method of claim 63, wherein the soluble epoxy phase is selected from the group consisting of ketal and second epoxy . ’According to the ancient dry season of item 64 of the scope of the patent application, where the coated tree 66 2 is between the first and the " conductive surface. The method of claim 38, wherein the first coating and the first coating are conductive. 67 'Method according to item 61 of the scope of patent application Butyric acid and ethylene glycol. 68 · According to the method of the scope of the patent application No. 61 and "non-cleaning, co-solvent, containing a low residual non-compliance activator. According to: the method of the scope of patent No. 61, wherein the polymer material It is a solvent-free thermosetting adhesive. 70. The method according to item 69 of the scope of patent application, wherein the polymer material is a soluble epoxy resin. According to the application of 6B patent | & UJ item 7 Q method, wherein The soluble epoxy resin is selected from the group consisting of ketals and acetals diepoxides. 72. A method for making a conductive connection, comprising the steps of: contacting a plateable surface with a first plating solution; a remote substrate The surface is S η; Cu dendritic bodies are grown from the plating solution on the surface that can be plated; and it also includes a solvent which also includes a solvent (please read the precautions on the back before filling this page). Binding · -8 -Home Standard (CnI) Α4 · Τϋ〇 × 297mm 於該树枝狀體上形成塗層以形成經塗覆之樹枝狀 Άφ . 月豆 , 於該Cu樹枝狀體之曝露表面上形成^層,而於該 Sn層上形成In層; 自該基板取下該樹枝狀體’形成樹枝狀體Cu粒,其 第-個部分塗覆Sn ’而第二個部分於“上塗覆㈣。 73· 一 ^用—以製造導電译連接之方法,其包括以下步驟: 使可電鍍表面與第一種電鐘溶液接觸; 該基板表面係為S η ; 於該可電鍵表面上自該電鍍溶液生長Cu樹枝狀體;及 於該樹枝狀體上形成塗層以形成經塗覆之樹 於MCu樹枝狀體之曝露表面上形成Sn_Bi合金層; 自該基板取下該樹枝狀ft,形成樹枝狀體^粒,其 第一個部分塗覆Sn,而第二個部分於塗覆Sn_Bi合金 層。 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局負工消費合作社印製 本紙張尺度適用中國國家標準(CNS ) A4規格(2丨〇X297公釐)A coating is formed on the dendrimer to form a coated dendritic Ά. Moon beans, a ^ layer is formed on the exposed surface of the Cu dendrimer, and an In layer is formed on the Sn layer; taken from the substrate The dendritic body 'forms dendritic Cu grains, the first part of which is coated with Sn' and the second part is coated with "㈣." 73. A method for manufacturing a conductive connection, which includes the following: Steps: bringing the electroplatable surface into contact with the first electric clock solution; the substrate surface is S η; growing a Cu dendrimer from the electroplating solution on the surface of the key bond; and forming a coating on the dendrimer to A coated tree is formed to form an Sn_Bi alloy layer on the exposed surface of the MCu dendrimer; the dendritic ft is removed from the substrate to form dendritic particles, the first part of which is coated with Sn, and the second Part is coated with Sn_Bi alloy layer. (Please read the notes on the back before filling this page) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Consumer Cooperatives This paper is printed in accordance with the Chinese National Standard (CNS) A4 specification (2 丨 〇297297) %)
TW087103284A 1997-06-04 1998-03-06 Electrodeposition of low temperature, high conductivity, powder materials for electrically conductive paste formulations TW396471B (en)

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