CN1085382C - Electrodeposition of low temperature, high conductivity, powder materials for electrically conductive paste formulations - Google Patents

Electrodeposition of low temperature, high conductivity, powder materials for electrically conductive paste formulations Download PDF

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Publication number
CN1085382C
CN1085382C CN98108096A CN98108096A CN1085382C CN 1085382 C CN1085382 C CN 1085382C CN 98108096 A CN98108096 A CN 98108096A CN 98108096 A CN98108096 A CN 98108096A CN 1085382 C CN1085382 C CN 1085382C
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electrically conductive
conductive paste
dendritic crystal
dendritic
coating
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CN1202405A (en
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S·K·康
S·普鲁索塔曼
R·S·莱
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International Business Machines Corp
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International Business Machines Corp
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • C09J9/02Electrically-conducting adhesives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D1/00Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member

Abstract

The invention relates to a method and apparatus for casting particularly non-ferrous wires, bars and tubes continuously upwards, but the casting is not carried out vertically but in an inclined position. After the primary cooler, the cooling of the cast product takes place as direct water cooling.

Description

The method of electrically conductive paste material syndeton and manufacturing electrically conductive paste dendritic crystal material
The present invention relates between conductive component, form the electrically conductive paste material that conduction connects, and the method for producing this electrically conductive paste material.In addition, the present invention endeavours Environmental security material and technical process, its alternative leaded solder technology.
The most of electric conductors that are used for electronic equipment are made of metal, as copper, aluminium, gold, silver, lead/tin (scolder), molybdenum or other metals.Use the solder technology of lead/ashbury metal, the soldered ball connection, the IC package assembling that connect in (or C4), the ball grid array (BGA) as flip-chip are connected to printed circuit board (PCB) (PCB) etc., play key effect in various Electronic Packaging.The pad that produces in the Electronic Packaging has important function in electric interconnection and machinery/physical connection.When arbitrary disabler, think that then pad breaks down, its frequent prestige assists whole electronic system to shut down.
When microelectronics Packaging was assembled in printed circuit board (PCB), the most widely used was the lead/tin quick solder that has minimum fusing point (183 ℃) in lead/ashbury metal, 63%Sn-37%Pb.In these are used, adopt two kinds of solder technology in the batch process: plated-through hole (PTH) and surface mounting technology (SMT) welding.Basic difference between two kinds of technology is different on PCB design and its interconnection mechanism.
In the SMT welding, microelectronics Packaging directly invests the surface of PCB.The major advantage of SMT is high packaging density, and it is by eliminating the most of PTH among the PCB, and utilizes the two sides installation elements of PCB and realize.In addition, the SMT encapsulation has thinner lead-in wire line-spacing and littler package dimension than traditional PTH encapsulation.Thereby SMT reduces in the size that reduces Electronic Packaging to have played great role in the long-pending body of whole system thus.
In the SMT welding, soldering paste is applied on the PCB by silk screen printing.Soldering paste comprises thin solder powder, solder flux, and organic solvent.In reflux course, semiconductor particles is melted, and solder flux is activated, and molten material material is evaporated, and the scolder of fusing condenses and final curing simultaneously.On the contrary, in the fluctuation welding process, PCB is above at first coated with flux and element are installed in.Be moved to then in the solder wave of fusing.
Welding process is usually by making pad finish to remove residual flux through cleaning step.For environmental consideration, eliminated CFC (CFC) and other harmful cleaning agents, and replaced water-soluble or rinse-free flux.
New development in the microelectronic device requires the connection (at the order of magnitude of hundreds of micron line-spacing) of very little line-spacing between Electronic Packaging and the printed circuit board (PCB).Be used at present SMT soldering paste because as the weld defect of weldering bridge or soldered ball, and can't handle the interconnection of this very fine line-spacing.Use another Technical Board of Pb-Sn quick solder to be limited to the high reflux temperature that it is approximately 215 ℃.This temperature has been higher than the glass transition temperature of the epoxy resin that uses in most of polymerization printed circuit board materials.Heat under this reflux temperature operates in the welding back and produce significant thermal strain in printed circuit board (PCB), particularly in the direction perpendicular to the PCB surface, does not carry out structure-reinforced in this direction.Thereby the residual heat strain in assembling PCB will reduce the reliability of electronic system.
Be environmental problem about a more serious problem using solder containing pb, plumbous by removing from gasoline and coating in other industry, we have experienced this trend and influence.
In electronics industry, about substituting the possibility of solder containing pb, people study two groups of different materials at present: leadless welding alloy and electrically conductive paste (ECP).The present invention discusses the development and the application of electrically conductive paste.Electrically conductive paste (or binding agent) is made by the metallic stuffing particle that loads in the polymeric material matrix.The epoxy resin of filling silver particles is the modal example that summary is shown in the electrically conductive paste 6 of Fig. 1.The silver particles 2 that is generally sheet is offeed telex by infiltration mechanism and is led, and epoxy resin-base 4 provides the bonding gummed between element 8 and the substrate 10.For a long time, the epoxide resin material that this kind filled silver has been used for electronic applications, as die-bond material, utilized its heat conduction here more but not conductive characteristic.Yet this material is not required that as yet height conducts electricity and the application of tiny line-spacing connection is accepted; The epoxide resin material of filling silver has several restrictions, and as low conductivity, contact resistance increased when heat exposed, low Joint Strength, and the silver migration is difficult to process or the like again.Because this epoxide resin material of filling silver all conducts electricity in all directions, it is classified as " isotropism " on conductivity.Have another kind of electricity to lead binding agent (or film), it only provides conductivity in a direction.This type of material is so-called " anisotropy " conductive adhesive 12 or film, shows as summary among Fig. 2.Anisotropic conductive adhesive 12 or film be conduction when it is pressed between two conductive gaskets 22 and 24 only.This crosses range request normal temperature and normal pressure.Anisotropic conductive film mainly be applied as being connected of display panels and its electronic printing circuit board.Conducting particles 14 is normally deformable, as soldered ball, or the baton round of nickel plating or gold.Binding material 16 mostly is thermosetting resin greatly.
In our nearest invention (YO893-0292), a kind of electrically conductive paste (ECP) material is disclosed, it comprises: be coated with skim low-melting, such as the copper powder of the non-lead metal of Sn, In, Bi, Sb and its alloy, mixing is with environmentally safe solder flux, and is scattered in thermoplastic or thermosetting polymer matrix.The ECP microstructure that contains the Cu powder 62 that plates Sn64 is shown among Fig. 3 with its cutaway view form.
The ECP that is made by the plating Cu powder of Sn and polyimides-silicone resin is for being good selection such as C4 with the high temperature solder joint that is connected (SBC) with the soldered ball of ceramic substrate.Yet to polymerization printed circuit board applications occasion, this ECP is just not much of that, because much higher such as the glass transition temperature of the polymer resin of 250 ℃ reflux temperature ratio such as FR-4.One to this purpose is chosen as the plating indium Cu powder of forming with polyimides-siloxanes.The reflux temperature of plating indium Cu soldering paste estimates about 180 ℃, it in addition be lower than 215 ℃ the reflux temperature of Pb/Sn.
Our nearest invention (YO994-280, YO994-281) in, the structure and the manufacture method of the dendritic crystal dusty material that is used for high electrically conductive paste application scenario are disclosed, as shown in Figure 4.Copper dendritic crystal structure 44 is deposited on the space base sheet 40, is at the another kind of low-melting-point metal 42 (In, Sn, Zn, Bi and Sb and alloy thereof) of copper dendritic crystal structure top electrolytic deposition subsequently.Collect the dendritic crystal powder from substrate then, and mix the formation electrically conductive paste with thermoplastic or thermoset polymer resin.
In the prior art, in U.S. Patent No. 5,062, a kind of scolder/polymer composite solder paste material is disclosed among 896 (the Huang et.al.), comprise Main Ingredients and Appearance as the fusible scolder powdery inserts of Bi-Sn, Pb-Sn, Bi-Sn-Pb alloy, the thermoplastic polymer of sub-fraction such as polyimides-siloxanes and sub-fraction solder flux.Obtained anaerobic, partially polymerized (coalesced) solder alloy and connected, it be strengthen with polymer and can processing again under low reflux temperature, or have under the situation of polymer solvent all the more so.
In similar prior art U.S. Patent No. 5,286, among 417 (the Mahmoud et.al.), a kind of fusible conductive adhesive is disclosed, it comprises the metal alloy inserts as Sn-Au and Bi-Au, and has the thermoplastic polymer of the glass transition temperature of the fusion temperature that surpasses metal filled material alloy.The loading of electric conducting material is by weight in 15% to 20% scope in the polymer.
Another prior art, U.S. Patent No. 5,136, among 365 (the Pennisi et.al.), disclose a binder material, it contains solder flux and as the metallic that is used for reflow soldering of Sn, Pb, In, Bi, Sb, Ag and other materials in epoxy resin-base.When reflow soldering, described binding agent forms anisotropic conduction between electronic component and substrate.
In another prior art, the U.S. Patent No. 5,213,715 (Pennisi et.al.), disclose a kind of directivity conducting polymer, it includes the metal filled material of Ni or Cu powder.Metal powder is by the polymer treatment that is different from as matrix resin.During pressurization, the polymer of coating is formed conductivity by displacement between the inserts particle.
The object of the present invention is to provide environmentally safe and electrically conductive paste material cheaply.
The object of the present invention is to provide generation to have the more electrically conductive paste material of high conductivity than the epoxy resin of traditional filling silver.
The object of the present invention is to provide the electrically conductive paste material that to handle under than the lower temperature of the reflux temperature of the meltable soldering paste of Pb-Sn.
The object of the present invention is to provide than the more erosion-resisting electrically conductive paste material of the epoxy resin soldering paste of traditional filling silver.
In a special embodiment, we disclose the mealy structure of the electrolytic deposition of a kind of Sn of comprising (undercoating)/Cu (dendritic crystal)/Sn (barrier layer)/In (external coating).Sequentially electrolytic deposition is on such as titanium or stainless space base sheet for this mealy structure, and the electrolytic deposition material can separate at an easy rate from it.Undercoating Sn layer provides anti-oxidant or erosion-resisting protection to the Cu surface, and when they contact control described on the composition of coating bonding so that between powder particle, form metallographic.Sn slows down on the barrier layer Cu-In compound formation fast, and it can prevent particle and interparticle bonding.The In external coating makes it possible to give birth to particle and interparticle bonding 150 ℃ occurs at low temperatures with Sn undercoating and barrier.The thickness of undercoating, barrier layer and external coating is about 1 micron or littler scope.The size of Cu dendritic crystal is 1 to 50 micron long scope.
In a special embodiment, we disclose the electrolytic deposition mealy structure of a kind of Sn of comprising (undercoating)/Cu (dendritic crystal)/Bi-Sn (external coating).Do not need the barrier layer between Cu and the Bi-Sn metal in this structure.The Bi-Sn external coating utilizes the commodity electroplate liquid to form with the form electrolytic deposition of nearly meltable mixture.The particle diameter of the electrolytic deposition powder of collecting has very big-difference.In order to obtain consistent particle diameter, carry out jet grinding technology or the reduction of ultrasonic wave particle diameter when requiring with microscreening (micro-sieve screening) technology.Optimum grain-diameter is distributed as 5 to 10 microns.
Then, the electrolytic deposition powder with unanimity and optimum grain-diameter mixes formation aforementioned (YO994-280, electrically conductive paste YO994-281) of the present invention with thermoplastic or thermosetting resin.
Fig. 1 is for to comprising the brief description as the electrically conductive paste of the silver strip particle of inserts in the epoxy resin-base.This electrically conductive paste is isotropism on conductivity.(prior art)
Fig. 2 is for when being pressed between two contacts or the bond pad when adhensive membrane, only the brief description of the conductive adhesive that conducts electricity direction.This conductive adhesive (or film) is classified as anisotropic.(prior art)
Fig. 3 is the brief description to a kind of conductive adhesive materials, and it comprises the spherical copper powder that is filled in the thermoplastic polymer resin.Copper particle is coated with such as the low melting point of tin, indium, bismuth and other materials does not have noxious metals.
Fig. 4 is for to the dendritic crystal copper powder that is deposited on the space base sheet, the brief description of electrolytic deposition skim indium metal on the dendritic crystal powder subsequently.
Fig. 5 is to being deposited on the brief description of the new electrolytic deposition mealy structure of space base sheet: Sn (undercoating)/Cu (dendritic crystal)/Sn (barrier layer)/In (external coating).
Fig. 6 is to being deposited on the brief description of the new electrolytic deposition mealy structure of space base sheet: Sn (undercoating)/Cu (dendritic crystal)/Bi-Sn (external coating).
In foregoing invention YO994-280 and YO994-281, we disclose the dendritic crystal copper powder that is deposited on the space base sheet, subsequently at the thin indium metal of copper dendritic crystal structure top electrolytic deposition.The copper dendritic crystal powder of plating indium can be collected by scraping the space base sheet at an easy rate.Disclosed detailed conditions about copper dendritic crystal electrolytic deposition is the plating mechanism of three phases: (i) the initial plating of high-density copper, (ii) the dendritic crystal karyomorphism becomes stage and (iii) dendrite formation stage.
Also disclose indium and electroplated condition and plating bath.
Fig. 5 is to being deposited on the new electrolytic deposition mealy structure of space base sheet 50: the brief description of Sn (undercoating) 52/Cu (dendritic crystal) 54/Sn (barrier layer) 56/In (external coating) 58.Undercoating Sn52 and barrier layer Sn layer 56 utilize LeaRonal, the Solderon TinConcentrate electrolysis of solutions deposition of Inc company.The Sn barrier layer can be by other metals and the alloy replacing such as Ni, Co, Cr, Fe, Pd and alloy thereof.
Fig. 6 is to being deposited on the new electrolytic deposition mealy structure of space base sheet 60: the brief description of Sn (undercoating) 62/Cu (dendritic crystal) 64/Bi-Sn (external coating) 66.With the form deposit external coating Bi-Sn layer 66 of Bi-Sn alloy, its composition is nearly lyotrope, 60%Bi-40%Sn by weight.The Bi-Sn alloy-layer is to be used to from LeaRonal, the plating bath deposit that comprises SolderonTin Concentrate, Solderon Bi Concentrate, Solderon Acid, SolderonBi Primary and Solderon Bi Secondary of Inc company.The typical electrolysis sedimentary condition of Sn/Cu/Bi-Sn dusty material is as follows:
(i) Sn (undercoating): to 100 area in square inches be 2A, 0.5V, 3 minutes,
(ii) Cu (dendritic crystal): to 100 area in square inches be 20A, 2.5V, 3 minutes,
(iii) Bi-Sn (external coating): to 100 area in square inches be 14A, 2.0V, 2 minutes.
The anode material that Cu electroplates is the oxygen-free copper metal, and the anode material that Sn and Bi-Sn electroplate is the pure tin metal.
The particle diameter of the electrolytic deposition powder of collecting has very big-difference.In order to obtain consistent particle diameter, carry out jet grinding technical process or the reduction of ultrasonic wave particle diameter when requiring with microscreening (micro-sieve screening) technical process.Optimum grain-diameter is distributed as 5 to 10 microns.
Electrolytic deposition powder with unanimity and optimum grain-diameter is stored among " exempting to clean " solder flux Qualitek#305, until being used for the soldering paste manufacturing.As mentioned above, in thermoplastic or thermosetting resin matrix, make foregoing invention (YO994-280, electrically conductive paste YO994-281) by the described inserts disperse that will have consistent and required particle diameter.
In order to illustrate electric and mechanical performance, by two L shaped copper samples.Utilize described low temperature, unleaded electrically conductive paste to make the contact sample.Operate in succession under the condition of 180 ℃, 15 minutes, 25 pounds/square inch (psi) and carry out.The sample contact of being made by Sn/Cu/Bi-Sn and polyimides-silicone resin and phase of solder joint are than demonstrating good electric and mechanical performance.

Claims (73)

1. electrically conductive paste material syndeton comprises:
Many material dendritic crystals;
Described dendritic crystal has core and from the dendritic filament of the outwardly directed branch of described core; And
Described dendritic crystal has at first coating of the first of described dendritic crystal with at second coating of the second portion of described dendritic crystal.
2. the electrically conductive paste material syndeton of claim 1 is characterized in that described racemosus shape crystal is a powder.
3. the electrically conductive paste material syndeton of claim 1 is characterized in that described material comprises Cu.
4. the electrically conductive paste material syndeton of claim 1, it is characterized in that described first coating is selected material from the one group of material that comprises In, Sn, Zn, Bi and Sb, and second coating is selected different materials from the one group of material that comprises In, Sn, Zn, Bi and Sb.
5. the electrically conductive paste material syndeton of claim 3 is characterized in that in the described dendritic crystal that at least some dendritic crystals merge mutually by other dendritic crystals in conductive coating and the described dendritic crystal.
6. the electrically conductive paste material syndeton of claim 1 is characterized in that described racemosus shape crystal embedded polymer thing material.
7. the electrically conductive paste material syndeton of claim 1 is characterized in that described structure is an electrical interconnection arrangement.
8. the electrically conductive paste material syndeton of claim 1 is characterized in that described conductive coating has the fusion temperature lower than described dendritic crystal.
9. the electrically conductive paste material syndeton of claim 1 is characterized in that also comprising first and second surfaces, and described structure is arranged between the two so that interconnection between described first and second surfaces is provided.
10. the electrically conductive paste material syndeton of claim 6 is characterized in that described polymeric material is through supersolidification or bake.
11. the structure that claim 6 electrically conductive paste material connects is characterized in that described polymeric material is to select from one group of material of the biological poly resin that comprises polyimides, siloxanes, polyimides-siloxanes, epoxy resin and made by lignin, cellulose, tung oil and crop oil.
12. the structure that claim 6 electrically conductive paste material connects is characterized in that described polymeric material is solvent-laden thermoplastic adhesive.
13. the structure that claim 6 electrically conductive paste material connects is characterized in that described polymeric material is not solvent-laden thermoplastic adhesive.
14. the structure that claim 9 electrically conductive paste material connects is characterized in that described many dendritic crystals embed in the polymeric material of formation described first and the gluing joint of described second surface.
15. the electrically conductive paste material syndeton of claim 9 it is characterized in that described first surface is the first electronic installation contact position, and described second surface is the second electronic device contact position.
16. the electrically conductive paste material syndeton of claim 15 is characterized in that described first electronic installation is a semiconductor chip and described second electronic device is an enclosed chip.
17. the electrically conductive paste material syndeton of claim 9 is characterized in that one of described first surface and described second surface are solder surface.
18. the electrically conductive paste material syndeton of claim 9 is characterized in that described structure is an electronic installation.
19. the electrically conductive paste material syndeton of claim 9 is characterized in that described structure is a calculation element.
20. an electrically conductive paste material syndeton comprises:
The network that has the interconnection dendritic crystal in space therebetween;
In the described dendritic crystal each has first and second coating of soluble material on the second portion of described dendritic crystal;
The adjacent dendritic crystal that in described each network, is bonded together by described fusible material.
21. the electrically conductive paste material syndeton of claim 20 is characterized in that described space comprises polymeric material.
22. the electrically conductive paste material syndeton of claim 20 is characterized in that described dendritic crystal has core and from the dendritic filament of the outwardly directed branch of described core.
23. the electrically conductive paste material syndeton of claim 1 is characterized in that described dendritic crystal has the aspect ratio of length and width and described length and the ratio of described width.
24. the electrically conductive paste material syndeton of claim 23 is characterized in that described aspect ratio is between about 1 to about 10.
25. the electrically conductive paste material syndeton of claim 23 is characterized in that described aspect ratio is between about 1 to about 5.
26. the electrically conductive paste material syndeton of claim 20 is characterized in that described material conducts electricity.
27. the electrically conductive paste material syndeton of claim 6 is characterized in that described dendritic crystal accounts for about 10% to about 90% of described structure by weight.
28. the electrically conductive paste material syndeton of claim 6 is characterized in that described material selects from the one group of material that comprises polyimides, siloxanes, polyimides-siloxanes, epoxy resin and biological poly resin.
29. the electrically conductive paste material syndeton of claim 9, it is characterized in that described coating form to described first and the metallographic of described second surface bonding.
30. the electrically conductive paste material syndeton of claim 9, it is characterized in that described first and described second surface conduct electricity.
31. the electrically conductive paste material syndeton of claim 1 is characterized in that described coating conducts electricity.
32. the electrically conductive paste material syndeton of claim 6 is characterized in that it also comprises solution, butyric acid and ethylene glycol.
33. the electrically conductive paste material syndeton of claim 6 is characterized in that it also comprises solution and comprises " exempt from clean " solder flux of low residue, halogen catalyst.
34. the electrically conductive paste material syndeton of claim 6 is characterized in that described polymeric material is the solvent-free thermal cured binders.
35. the electrically conductive paste material syndeton of claim 6 is characterized in that described polymeric material is a solubility epoxy resin.
36. the electrically conductive paste material syndeton of claim 35 is characterized in that described solubility epoxy resin selects from the one group of material that comprises ketal and acetal diepoxides.
37. an electrically conductive paste material syndeton comprises:
Many copper dendritic crystals;
Described dendritic crystal has the core of copper and from the filament of the outwardly directed branch of described core; And
Described dendritic crystal has first coating and second coating on described dendritic crystal second portion in described dendritic crystal first, described first coating is Sn, and described second coating has at ground floor tin on the described copper dendritic crystal and the top layer In on described Sn layer.
38. a method of making electrically conductive paste dendritic crystal material may further comprise the steps:
Be provided with and the contacted surface of plating of first plating bath;
The dendritic crystal of from described plating bath, growing on described surface; And
Forming the dendritic crystal that formation second coating applies with formation on first coating and the second portion at described dendritic crystal in the first of described dendritic crystal.
39. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 38 is characterized in that described first plating bath is an electroplate liquid.
40., it is characterized in that described second plating bath selects from the one group of plating bath that comprises chemical plating fluid, immersion plating plating bath and electroplate liquid according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 38.
41., it is characterized in that the described surface of plating conducts electricity according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 38.
42. according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 38, it is characterized in that it also comprise from the described dendritic crystal of described surface removal and on described conductive coating.
43. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 38 is characterized in that described dendritic crystal has core and divides outwardly directed branch dendritic filament from central division.
44., it is characterized in that described removal step comprises from described surface to scrape off described dendritic crystal according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 42.
45. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 38 is characterized in that described dendritic crystal is formed by electric conducting material.
46. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 45 is characterized in that described electric conducting material comprises Cu.
47. according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 38, it is characterized in that described coating be conduction and form by described dendritic crystal is immersed second plating bath.
48. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 47 is characterized in that described second plating bath is an electroplate liquid.
49., it is characterized in that described second plating bath selects from the one group of plating bath that comprises chemical plating fluid and immersion plating plating bath according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 47.
50., it is characterized in that when described surface is exposed to described first plating bath, first voltage is added on described surface described lip-deep dendritic crystal being electroplated according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 38; And when described dendritic crystal is exposed to described second plating bath, second voltage is added on described dendritic crystal the coat on the described dendritic crystal is electroplated.
51. method according to the manufacturing electrically conductive paste dendritic crystal material of claim 38, it is characterized in that described first coating selects from the one group of material that comprises Sn, Zn, In, Bi and Sb, and the different materials of described second coating for from the one group of material that comprises Sn, Zn, In, Bi and Sb, selecting.
52. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 42 is characterized in that making a kind of powder by the dendritic crystal of described coating.
53., it is characterized in that also comprising that dendritic crystal with described coating adds in the polymeric material makes soldering paste according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 52.
54., it is characterized in that also comprising solvent, butyric acid, ethylene glycol and " exempting to clean " solder flux to make soldering paste according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 53.
55., it is characterized in that described polymeric material selects from one group of material of the bio-based resin that comprises polyimides, siloxanes, polyimides-siloxanes, epoxy resin, made by lignin, cellulose, tung oil and crop oil according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 53.
56. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 53 is characterized in that described soldering paste is placed between first and second conductive surfaces.
57. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 53 it is characterized in that described first conductive surface is the chip contact site, and described second conductive surface is the substrate contact site.
58. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 56 is characterized in that described first conductive surface is the LCDs contact site, and described second conductive surface is chip bearing belt lead-in wire position.
59. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 56 is characterized in that described soldering paste is heated to first temperature to melt the coating on the adjacent dendritic crystal.
60. according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 56, it is characterized in that described soldering paste is heated to is enough to second temperature that described polymer is solidified.
61. a method of making electrically conductive paste dendritic crystal material may further comprise the steps:
The dendritic crystal of growing from the teeth outwards;
In the first of described dendritic crystal, apply described dendritic crystal, and on the second portion of described dendritic crystal, apply described dendritic crystal, to form the dendritic crystal that applies with second coat with first coating; And
Dendritic crystal from the described coating of described surface removal.
62. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 61 is characterized in that described first coat and described second coat conduct electricity.
63. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 53 is characterized in that described polymeric material is a solubility epoxy resin.
64., it is characterized in that described solubility epoxy resin selects from the one group of material that comprises ketal and acetal diepoxides according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 63.
65. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 64 is characterized in that the dendritic crystal of described coating is scattered between first and second conductive surfaces.
66., it is characterized in that described first coating and described second coating conduct electricity according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 38.
67. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 61 is characterized in that also comprising solvent, butyric acid and ethylene glycol.
68., it is characterized in that also comprising solvent and contain " exempting to clean " solder flux of low residue, halogen catalyst according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 61.
69. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 61 is characterized in that also comprising that polymeric material is no solution hot setting adhesive.
70. the method according to the manufacturing electrically conductive paste dendritic crystal material of claim 69 is characterized in that described polymeric material is a solubility epoxy resin.
71., it is characterized in that described solubility epoxy resin selects from the one group of material that comprises ketal and acetal diepoxides according to the method for the manufacturing electrically conductive paste dendritic crystal material of claim 70.
72. a method of making electrically conductive paste dendritic crystal material may further comprise the steps:
The contacted surface of plating of first plating bath is set;
Described surface is on-chip Sn;
From described plating bath at the described surface growth Cu dendritic crystal that plates; With
On described dendritic crystal, form coating to form the dendritic crystal that applies;
On the exposed surface of described Cu dendritic crystal, form the Sn layer, and on the Sn layer, form the In layer;
Remove described dendritic crystal from described substrate, described substrate formation has the first of coating Sn and the dendritic crystal Cu particle that Sn goes up the second portion that applies the In layer.
73. a method of making electrically conductive paste dendritic crystal material may further comprise the steps:
Be provided with and the contacted surface of plating of first plating bath;
Described surface is on-chip Sn;
From described plating bath at the described surface growth Cu dendritic crystal that plates;
On described dendritic crystal, form coating to form the dendritic crystal that applies;
On the exposed surface of described Cu dendritic crystal, form the Sn-Bi alloy-layer; And
Remove described dendritic crystal from described substrate, described substrate forms has first that applies Sn and the dendritic crystal Cu particle that applies the second portion of Sn-Bi alloy-layer.
CN98108096A 1997-06-04 1998-05-04 Electrodeposition of low temperature, high conductivity, powder materials for electrically conductive paste formulations Expired - Fee Related CN1085382C (en)

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KR100347139B1 (en) * 1999-12-31 2002-08-03 주식회사 하이닉스반도체 Filler of epoxy resin compositions for semiconductor package
KR100746330B1 (en) * 2005-11-24 2007-08-03 한국과학기술원 Method for bonding between electrical devices using ultrasonication
WO2008099940A1 (en) * 2007-02-16 2008-08-21 Sumitomo Bakelite Co., Ltd. Circuit board manufacturing method, semiconductor manufacturing apparatus, circuit board and semiconductor device
CN102184905A (en) * 2011-04-26 2011-09-14 哈尔滨工业大学 Micro-interconnection welding spot structure of single intermetallic compounds
EP2557571B1 (en) * 2011-08-08 2014-07-02 Tyco Electronics Corporation Electrically conductive metal/plastic hybrid comprising a polymer material, a first metal and metal particles of a second metal embedded in the first metal and method of producing such
JP6132716B2 (en) * 2013-09-10 2017-05-24 株式会社東芝 Metal particle paste, cured product using the same, and semiconductor device
KR101678514B1 (en) 2015-08-31 2016-12-06 전북대학교산학협력단 Cellulose thin film electrode comprising silver nanodendrites and fabrication method for the same

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MY128103A (en) 2007-01-31

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