EP2056365A4 - Élément électroluminescent aux ultraviolets et semi-conducteurs, à transition indirecte et forte efficacité - Google Patents

Élément électroluminescent aux ultraviolets et semi-conducteurs, à transition indirecte et forte efficacité

Info

Publication number
EP2056365A4
EP2056365A4 EP07792454.6A EP07792454A EP2056365A4 EP 2056365 A4 EP2056365 A4 EP 2056365A4 EP 07792454 A EP07792454 A EP 07792454A EP 2056365 A4 EP2056365 A4 EP 2056365A4
Authority
EP
European Patent Office
Prior art keywords
emitting element
ultraviolet light
semiconductor ultraviolet
indirect transition
transition semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07792454.6A
Other languages
German (de)
English (en)
Other versions
EP2056365A1 (fr
Inventor
Satoshi Yamasaki
Toshiharu Makino
Hideyo Ookushi
Norio Tokuda
Hiromitsu Kato
Masahiko Ogura
Hideyuki Watanabe
Sung-Gi Ri
Daisuke Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Publication of EP2056365A1 publication Critical patent/EP2056365A1/fr
Publication of EP2056365A4 publication Critical patent/EP2056365A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/34—Materials of the light emitting region containing only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02376—Carbon, e.g. diamond-like carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/02433—Crystal orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02527—Carbon, e.g. diamond-like carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02576—N-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02579—P-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Led Devices (AREA)
EP07792454.6A 2006-08-25 2007-08-13 Élément électroluminescent aux ultraviolets et semi-conducteurs, à transition indirecte et forte efficacité Withdrawn EP2056365A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006228583 2006-08-25
JP2007114981A JP5273635B2 (ja) 2006-08-25 2007-04-25 高効率間接遷移型半導体紫外線発光素子
PCT/JP2007/065811 WO2008023592A1 (fr) 2006-08-25 2007-08-13 Élément électroluminescent aux ultraviolets et semi-conducteurs, à transition indirecte et forte efficacité

Publications (2)

Publication Number Publication Date
EP2056365A1 EP2056365A1 (fr) 2009-05-06
EP2056365A4 true EP2056365A4 (fr) 2014-06-04

Family

ID=39106678

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07792454.6A Withdrawn EP2056365A4 (fr) 2006-08-25 2007-08-13 Élément électroluminescent aux ultraviolets et semi-conducteurs, à transition indirecte et forte efficacité

Country Status (4)

Country Link
US (1) US8592824B2 (fr)
EP (1) EP2056365A4 (fr)
JP (1) JP5273635B2 (fr)
WO (1) WO2008023592A1 (fr)

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JP5419101B2 (ja) * 2008-07-01 2014-02-19 独立行政法人産業技術総合研究所 ダイヤモンド半導体装置及びその製造方法
US7989261B2 (en) 2008-12-22 2011-08-02 Raytheon Company Fabricating a gallium nitride device with a diamond layer
US7888171B2 (en) * 2008-12-22 2011-02-15 Raytheon Company Fabricating a gallium nitride layer with diamond layers
JP2010182961A (ja) * 2009-02-06 2010-08-19 National Institute Of Advanced Industrial Science & Technology 発光素子
JP5354622B2 (ja) 2009-02-18 2013-11-27 独立行政法人産業技術総合研究所 半導体発光ダイオード
US7892881B2 (en) * 2009-02-23 2011-02-22 Raytheon Company Fabricating a device with a diamond layer
US8525198B2 (en) * 2009-03-31 2013-09-03 Xidian University Ultraviolet light emitting diode devices and methods for fabricating the same
CN102185066A (zh) * 2011-04-26 2011-09-14 中国科学院苏州纳米技术与纳米仿生研究所 具有改良结构的大功率发光二极管
JP6236609B2 (ja) * 2011-07-29 2017-11-29 国立大学法人京都大学 光子出力装置、及び光子出力方法
WO2014142338A1 (fr) 2013-03-15 2014-09-18 独立行政法人産業技術総合研究所 Élément émettant une lumière blanche
EP2851696B1 (fr) * 2013-09-24 2016-04-20 Imec Procédé pour l'extraction de caractéristiques de recombinaison au niveau de surfaces métallisées de semi-conducteurs
CN106574399B (zh) * 2014-08-01 2019-05-07 株式会社德山 n型氮化铝单晶基板
US10566193B2 (en) * 2015-08-07 2020-02-18 North Carolina State University Synthesis and processing of Q-carbon, graphene, and diamond
JP2017092075A (ja) * 2015-11-02 2017-05-25 株式会社ソディック 発光素子
JP2017092076A (ja) * 2015-11-02 2017-05-25 株式会社ソディック 発光素子
US10240251B2 (en) 2016-06-28 2019-03-26 North Carolina State University Synthesis and processing of pure and NV nanodiamonds and other nanostructures for quantum computing and magnetic sensing applications
CN108321271A (zh) * 2018-03-06 2018-07-24 西安交通大学 一种准垂直结构p-金刚石/i-SiC/n-金刚石LED及其制作方法
CN108321262A (zh) * 2018-03-06 2018-07-24 西安交通大学 一种垂直结构p-金刚石/i-SiC/n-金刚石LED及其制作方法
DE102018209549A1 (de) 2018-06-14 2019-12-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. UV-Strahlungssensor auf Basis von Diamant
JP7327920B2 (ja) 2018-09-28 2023-08-16 株式会社ディスコ ダイヤモンド基板生成方法
CN110600366B (zh) * 2019-09-20 2021-06-18 西安交通大学 (100)晶向金刚石n沟道结型场效应晶体管及其制备方法
CN110600554B (zh) * 2019-09-20 2021-06-04 西安交通大学 一种（100）晶向金刚石n-i-p结二极管及其制备方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0440344A1 (fr) * 1990-01-19 1991-08-07 Sumitomo Electric Industries, Ltd. Dispositif à haute fréquence

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JPH03122093A (ja) * 1989-10-04 1991-05-24 Sumitomo Electric Ind Ltd 発光素子
US5284525A (en) * 1990-12-13 1994-02-08 Canon Kabushiki Kaisha Solar cell
JPH05140550A (ja) * 1991-11-22 1993-06-08 Hitachi Ltd ダイヤモンド発光層及び表示装置
JPH0799318A (ja) * 1993-09-28 1995-04-11 Kobe Steel Ltd ダイヤモンド薄膜電界効果トランジスタ及びその製造方法
US5751752A (en) * 1994-09-14 1998-05-12 Rohm Co., Ltd. Semiconductor light emitting device and manufacturing method therefor
SE9801881D0 (sv) * 1998-05-28 1998-05-28 Asea Brown Boveri A switching device
JP3144387B2 (ja) * 1998-08-17 2001-03-12 日本電気株式会社 半導体装置の製造方法
JP2000277798A (ja) * 1999-03-26 2000-10-06 Kobe Steel Ltd ダイヤモンド電子素子
JP3138705B1 (ja) * 1999-08-31 2001-02-26 工業技術院長 ダイヤモンドｐｎ接合ダイオードおよびその作製方法
JP3411989B2 (ja) 2000-03-28 2003-06-03 独立行政法人産業技術総合研究所 ダイヤモンド半導体発光素子
JP3576963B2 (ja) * 2000-11-24 2004-10-13 三菱電線工業株式会社 半導体発光素子
JP4019136B2 (ja) * 2000-12-01 2007-12-12 独立行政法人物質・材料研究機構 ダイヤモンド紫外光発光素子
JP2003051609A (ja) * 2001-08-03 2003-02-21 Tokyo Gas Co Ltd ダイヤモンド高輝度紫外線発光素子
TW508845B (en) * 2001-11-05 2002-11-01 Epitech Technology Corp Light emitting diode structure
US6995401B2 (en) * 2002-10-23 2006-02-07 Shin-Etsu Handotai Co., Ltd. Light emitting device and method of fabricating the same
JP3986432B2 (ja) * 2002-12-20 2007-10-03 株式会社神戸製鋼所 ダイヤモンド電子素子
KR100452751B1 (ko) * 2003-06-03 2004-10-15 삼성전기주식회사 그물망 전극이 적용된 ⅲ-질화물 반도체 발광소자
JP2005116794A (ja) * 2003-10-08 2005-04-28 Mitsubishi Cable Ind Ltd 窒化物半導体発光素子
JP4426254B2 (ja) 2003-11-04 2010-03-03 ユニバーサルテクノロジー有限会社 三次元モデル作成方法
KR20060122868A (ko) * 2003-11-25 2006-11-30 스미토모덴키고교가부시키가이샤 다이아몬드 ｎ형 반도체, 그의 제조 방법, 반도체 소자 및전자 방출 소자
JP2005229079A (ja) * 2004-02-16 2005-08-25 Tokyo Gas Co Ltd 発光素子
US7821019B2 (en) * 2004-10-04 2010-10-26 Svt Associates, Inc. Triple heterostructure incorporating a strained zinc oxide layer for emitting light at high temperatures
JP4592439B2 (ja) * 2005-02-14 2010-12-01 株式会社神戸製鋼所 ダイヤモンド紫外線発光素子

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0440344A1 (fr) * 1990-01-19 1991-08-07 Sumitomo Electric Industries, Ltd. Dispositif à haute fréquence

Also Published As

Publication number Publication date
US8592824B2 (en) 2013-11-26
JP5273635B2 (ja) 2013-08-28
US20100001292A1 (en) 2010-01-07
JP2008078611A (ja) 2008-04-03
EP2056365A1 (fr) 2009-05-06
WO2008023592A1 (fr) 2008-02-28

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RIN1 Information on inventor provided before grant (corrected)

Inventor name: WATANABE, HIDEYUKI

Inventor name: MAKINO, TOSHIHARU

Inventor name: RI, SUNG-GI

Inventor name: OGURA, MASAHIKO

Inventor name: TAKEUCHI, DAISUKE

Inventor name: OOKUSHI, HIDEYO

Inventor name: KATO, HIROMITSU

Inventor name: YAMASAKI, SATOSHI

Inventor name: TOKUDA, NORIO

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