EP2031606B1 - Superconducting thin film material and method for producing the same - Google Patents

Superconducting thin film material and method for producing the same Download PDF

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Publication number
EP2031606B1
EP2031606B1 EP07742092.5A EP07742092A EP2031606B1 EP 2031606 B1 EP2031606 B1 EP 2031606B1 EP 07742092 A EP07742092 A EP 07742092A EP 2031606 B1 EP2031606 B1 EP 2031606B1
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Prior art keywords
layer
thin film
superconducting thin
metal organic
film material
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EP07742092.5A
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German (de)
English (en)
French (fr)
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EP2031606A1 (en
EP2031606A4 (en
Inventor
Shuji Hahakura
Kazuya Ohmatsu
Munetsugu Ueyama
Katsuya Hasegawa
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B12/00—Superconductive or hyperconductive conductors, cables, or transmission lines
    • H01B12/02—Superconductive or hyperconductive conductors, cables, or transmission lines characterised by their form
    • H01B12/06—Films or wires on bases or cores
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/20—Permanent superconducting devices
    • H10N60/203—Permanent superconducting devices comprising high-Tc ceramic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0324—Processes for depositing or forming copper oxide superconductor layers from a solution
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0521—Processes for depositing or forming copper oxide superconductor layers by pulsed laser deposition, e.g. laser sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/812—Stock
    • Y10S505/813—Wire, tape, or film
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Definitions

  • the present invention relates to a superconducting thin film material and a method of manufacturing the same, and more particularly to a superconducting thin film material having a superconductor film formed on a substrate and a method of manufacturing the same.
  • superconducting thin film materials such as a superconducting tape wire having a superconductor film formed on a metal substrate by a Physical Vapor Deposition (PVD) method such as a Pulsed Laser Deposition (PLD) method as well as a Metal Organic Deposition (MOD) method such as a Trifluoroacetate-Metal Organic Deposition (TFA-MOD) method.
  • PVD Physical Vapor Deposition
  • PLD Pulsed Laser Deposition
  • MOD Metal Organic Deposition
  • TSA-MOD Trifluoroacetate-Metal Organic Deposition
  • the oxide superconducting wire is produced by setting a transfer speed of a metal tape as well as a distance between the metal tape and a target for generating an oxide to prescribed values respectively when an oxide superconductor layer is formed on the metal tape by a PLD method or the like ( JP 2005-38632 A ).
  • EP 1 990 809 A and JP 2002-075079 A show a superconducting thin film material according to the preamble of claim 1.
  • a superconductor is manufactured by forming a superconducting layer on a base layer by applying twice film formation, wherein the formation is to be 0.3 ⁇ m or smaller, wherein the superconductor is composed of a superconducting layer having a thickness of 0.75 ⁇ m to 3.0 ⁇ m formed by applying not less than three times film formation on the base layer, where the thickness of the superconducting film at every film formation is 0.3 ⁇ m or smaller.
  • a superconductor film is formed by employing a PVD method, particularly a PLD method
  • a PVD method particularly a PLD method
  • a superconducting thin film material having a composition of the superconductor film close to that of a target and having a high J C and a high critical current (I C ) can be obtained. It is required, however, to form the film under a reduced pressure if the PVD method is employed. Therefore, efficient mass production is difficult and manufacturing costs increase.
  • the superconductor film is formed by employing the PVD method, there is also a problem that an increased film thickness leads to a reduction in a surface smoothness of the film.
  • a superconductor film is formed by employing an MOD method, it is relatively easy to simplify production facilities. Therefore, as compared to the case where the PVD method is employed, there is an advantage that costs related to production facilities can be reduced with relative ease and an inexpensive superconducting thin film material can be produced.
  • the superconductor film formed by the MOD method has also an advantage of having an excellent surface smoothness.
  • crystals of the superconductor film grow while fluorine separates from within the superconductor film in a film formation process. Therefore, the growth rate of the crystals of the superconductor film is slow and it is not necessarily easy to improve production efficiency.
  • the above-described problems of the TFA-MOD method can be solved by employing a non-fluorine-containing MOD method in which a fluorine-containing organometallic salt solution is not used.
  • the non-fluorine-containing MOD method however, has a problem that the nucleus growth of the superconductor film from a substrate and an intermediate layer formed on the substrate is not easily accomplished.
  • an object of the present invention is to provide a superconducting thin film material that can realize attainment of an excellent property such as a high J C and a high I C and reduction of costs at the same time, and a method of manufacturing the same.
  • a superconducting thin film material according to the present invention is defined in claim 1.
  • a physical vapor deposition film as a superconductor film having its composition close to that of a target and having a high orientation is first formed by a physical vapor deposition method (PVD method), and then a metal organic deposition layer as a superconductor film is formed on the physical vapor deposition film by a metal organic deposition method (MOD method), and thus a superconductor film having a high orientation and a high surface smoothness can be formed at low cost.
  • PVD method physical vapor deposition method
  • MOD method metal organic deposition method
  • a low-cost superconducting thin film material having an excellent property such as a high J C and a high I C can be manufactured. That is, if the superconductor film is formed only by the PVD method as described above, the surface smoothness tends to be reduced as the superconductor film becomes thick. Formation of the overall superconductor film by the PVD method in combination with the MOD method providing an excellent surface smoothness rather than only by the PVD method leads to an improvement in the surface smoothness of the superconductor film. If the metal organic deposition layer is formed by using the physical vapor deposition layer as a seed film, the nucleus growth of the metal organic deposition layer is more easily accomplished.
  • the superconducting thin film material there can be provided a superconducting thin film material that can realize attainment of an excellent property such as a high J C and a high I C and reduction of costs at the same time because respective disadvantages of the PVD method and the MOD method are compensated for each other and their advantages are maximized.
  • Orientation herein means to what extent a crystal orientation of crystal grains is aligned.
  • Surface smoothness means the flatness of a film surface.
  • the above-described superconducting thin film material further includes an intermediate layer between the substrate and the superconductor film. Since the intermediate layer is interposed between the substrate and the superconductor film, the orientation of the superconductor film can be improved. In addition, the diffusion and reaction of atoms between the substrate and the superconductor film can be suppressed. As a result, the property of the superconducting thin film material can be improved and the range of choices about the substrate can be extended.
  • the superconductor films are formed on both main surfaces of the substrate.
  • a condition for the film formation needs to be exactly controlled because it becomes difficult to ensure the surface smoothness and to suppress internal defects such as voids in the superconductor film.
  • the film thickness of the superconductor film on each main surface required to ensure a desired I C across the superconducting thin film material can be reduced. As a result, it is easy to ensure the surface smoothness and to suppress the internal defects such as voids in the superconductor film on each main surface, and it is possible to ensure a sufficient I C by the superconductor films on both main surfaces.
  • a plurality of structures made up of a combination of the physical vapor deposition layer and the metal organic deposition layer are stacked in the superconductor film.
  • the physical vapor deposition layer formed by the PVD method it becomes difficult to ensure the surface smoothness as the film thickness is increased.
  • the metal organic deposition layer formed by the MOD it becomes difficult to suppress the internal defects such as voids as the film thickness is increased.
  • the surface smoothness can be improved.
  • the film thickness of the metal organic deposition layer is limited to such a degree that it is easy to suppress the internal defects such as voids, a physical vapor deposition layer is again formed on the superconductor film having an improved surface smoothness, and an additional metal organic deposition layer is formed on the physical vapor deposition layer, the film thickness of the superconductor film can be increased and the surface smoothness of the superconductor film is again improved.
  • a superconducting thin film material in which it is easy to ensure the surface smoothness and to suppress the internal defects such as voids, the superconductor film having a sufficient film thickness is formed, and a desired superconducting property such as I C and J C can be ensured.
  • the metal organic deposition layer has a thickness of not more than 1 ⁇ m.
  • the internal defects such as voids are likely to be created as the film thickness is increased. If the metal organic deposition layer has a thickness of not more than 1 ⁇ m, the creation of the internal defects such as voids can be suppressed with relative ease.
  • the physical vapor deposition layer has a thickness of not more than 2 ⁇ m.
  • the physical vapor deposition layer formed by the PVD method it becomes difficult to ensure the surface smoothness as the film thickness is increased. If the physical vapor deposition layer has a thickness of not more than 2 ⁇ m, a good surface smoothness can be ensured with relative ease.
  • the above-described physical vapor deposition method is any vapor deposition method selected from the group consisting of a pulsed laser deposition method, a sputtering method and an electron beam method.
  • PVD physical vapor deposition
  • the metal organic deposition method is a non-fluorine-containing metal organic deposition method in which a fluorine-containing organometallic salt solution is not used.
  • the non-fluorine-containing metal organic deposition method is not a deposition method in which crystals of the superconductor film grow while fluorine separates from within the superconductor film in a film formation process. Therefore, the growth rate of the crystals of the superconductor film is fast and production efficiency can be improved.
  • the above-described separation of the fluorine dose not need to be promoted uniformly, a wide superconducting thin film material, for example, can easily be manufactured, which can also contribute to the improvement in the production efficiency.
  • the cost of processing hydrogen fluorine is unnecessary because the hydrogen fluorine which requires careful handling is not generated during the film formation process.
  • the metal organic deposition layer can be formed without damaging the physical vapor deposition layer that was previously formed when the non-fluorine-containing metal organic deposition method is applied to the superconducting thin film material of the present invention. As a result, manufacturing costs can be suppressed and a property of the superconducting thin film material of the present invention can further be improved.
  • the non-fluorine-containing metal organic deposition method is a metal organic deposition method in which the fluorine-containing organometallic salt solution is not used.
  • the superconducting thin film material of the present invention that can realize attainment of an excellent property such as a high J C and a high I C and reduction of costs at the same time can be manufactured because respective disadvantages of the PVD method and the MOD method are compensated for each other and their advantages are maximized.
  • the method of manufacturing the superconducting thin film material of the present invention further includes an intermediate layer formation step for forming an intermediate layer between the substrate and the superconductor film after the substrate preparation step and before the superconductor film formation step.
  • the intermediate layer is interposed between the substrate and the superconductor film, the orientation of the superconductor film can be improved, and the diffusion and reaction of atoms between the substrate and the superconductor film can be suppressed.
  • the physical vapor deposition layers are formed on both main surfaces of the substrate in the physical vapor deposition step, and the metal organic deposition layers are formed on the physical vapor deposition layers on both main surfaces of the substrate.
  • the film thickness of the superconductor film on each main surface is reduced, and thus it is easy to ensure the surface smoothness and to suppress internal defects such as voids. In addition, it is possible to ensure a sufficient I C by the superconductor films on both main surfaces.
  • the physical vapor deposition step and the metal organic deposition step are alternately performed more than once.
  • the superconducting thin film material that can ensure a desired superconducting property such as I C and J C can easily be manufactured.
  • the metal organic deposition layer having a thickness of not more than 1 ⁇ m is formed in the metal organic deposition step. Consequently, the creation of the internal defects such as voids in the metal organic deposition layer can be suppressed with relative ease.
  • the physical vapor deposition layer having a thickness of not more than 2 ⁇ m is formed in the physical vapor deposition step. Consequently, a good surface smoothness of the physical vapor deposition layer can be ensured with relative ease.
  • the above-described physical vapor deposition method is any vapor deposition method selected from the group consisting of a pulsed laser deposition method, a sputtering method and an electron beam method.
  • PVD physical vapor deposition
  • the above-described metal organic deposition method is a non-fluorine-containing metal organic deposition method in which the fluorine-containing organometallic salt solution is not used.
  • the growth rate of the crystals of the superconductor film is fast and production efficiency can be improved.
  • the above-described separation of the fluorine dose not need to be promoted uniformly, which can contribute to the improvement in the production efficiency.
  • the cost of processing hydrogen fluorine is unnecessary because the hydrogen fluorine which requires careful handling is not generated during the film formation process.
  • the metal organic deposition layer can be formed without damaging the physical vapor deposition film that was previously formed when the non-fluorine-containing metal organic deposition method is applied to the superconducting thin film material of the present invention. As a result, manufacturing costs can be suppressed and a property of the superconducting thin film material of the present invention can further be improved.
  • a superconducting thin film material of the present invention and a method of manufacturing the same, there can be provided a superconducting thin film material that can realize attainment of an excellent property such as a high J C and a high I C and reduction of costs at the same time, and a method of manufacturing the same.
  • 1 superconducting thin film material 10 orientated metal substrate, 10A main surface, 20 intermediate layer, 21 first CeO 2 layer, 22 YSZ layer, 23 second CeO 2 layer, 30 oxide superconductor film, 30A superconductor film surface, 30B stacked structure, 31 physical vapor deposition HoBCO layer, 31A physical vapor deposition HoBCO layer surface, 32 metal organic deposition HoBCO layer, 32A metal organic deposition HoBCO layer surface, 40 Ag stabilizing layer
  • a superconducting thin film material 1 of the first embodiment includes an orientated metal substrate 10 as a substrate, an intermediate layer 20 formed on orientated metal substrate 10, an oxide superconductor film 30 as a superconductor film formed on intermediate layer 20, and an Ag (silver) stabilizing layer 40 as a stabilizing layer formed on oxide superconductor film 30 in order to protect oxide superconductor film 30.
  • a rare-earth-containing oxide superconducting material such as HoBCO (a holmium-containing high temperature superconducting material; HoBa 2 Cu 3 O x ) can be selected as a material of oxide superconductor film 30.
  • Oxide superconductor film 30 includes a physical vapor deposition HoBCO layer 31 as a physical vapor deposition layer formed by a physical vapor deposition method, and a metal organic deposition HoBCO layer 32 as a metal organic deposition layer formed on physical vapor deposition HoBCO layer 31 by a metal organic deposition method.
  • an orientated Ni (nickel) substrate, an Ni alloy-containing orientated substrate or the like can be selected as orientated metal substrate 10.
  • Intermediate layer 20 can include at least one of, for example, CeO 2 (ceria) and YSZ (yttria-stabilized zirconia), more specifically, a first CeO 2 layer 21, a YSZ layer 22 formed on first CeO 2 layer 21, and a second CeO 2 layer 23 formed on YSZ layer 22.
  • the stabilizing layer is not limited to above-described Ag stabilizing layer 40.
  • a Cu stabilizing layer made from Cu (copper) may be used instead of Ag stabilizing layer 40.
  • a substrate preparation step is performed first. Specifically, orientated metal substrate 10 such as a substrate in the form of a tape made from an orientated nickel alloy is prepared. Then, an intermediate layer formation step for forming intermediate layer 20 on orientated metal substrate 10 is performed as shown in Fig. 2 . Specifically, referring to Figs. 2 and 4 , a first CeO 2 layer formation step, a YSZ layer formation step and a second CeO 2 layer formation step are in turn performed so that first CeO 2 layer 21, YSZ layer 22 and second CeO 2 layer 23 are in turn formed on orientated metal substrate 10. Although these first CeO 2 layer formation step, YSZ layer formation step and second CeO 2 layer formation step can be performed by a physical vapor deposition method, for example a PLD method or the like, they may be performed by an MOD method.
  • a superconductor film formation step for forming oxide superconductor film 30 on intermediate layer 20 is performed as shown in Fig. 2 .
  • a physical vapor deposition step for forming physical vapor deposition HoBCO layer 31 on intermediate layer 20 by a physical vapor deposition method is performed first as shown in Figs. 2 and 5 .
  • this physical vapor deposition step it is preferable to use any vapor deposition method selected from the group consisting of a pulsed laser deposition (PLD) method, a sputtering method and an electron beam method.
  • PLD pulsed laser deposition
  • the composition of physical vapor deposition HoBCO layer 31 forming oxide superconductor film 30 can be close to that of a target and a high orientation can be ensured, which can contribute to an improvement in J C and I C of superconducting thin film material 1.
  • a metal organic deposition step for forming metal organic deposition HoBCO layer 32 on physical vapor deposition HoBCO layer 31 by a metal organic deposition method is performed as shown in Figs. 2 and 6 .
  • a dipping method, a die coating method or the like can be selected as a method of applying the organometallic salt solution in this non-fluorine-containing solution application step.
  • a preliminary firing step for removing a solvent component or the like from the applied organometallic salt solution is performed as shown in Fig. 3 .
  • orientated metal substrate 10 where the organometallic salt solution has been applied is heated in the air having a temperature range not less than 400°C and not more than 600°C, for example, 500°C.
  • the applied organometallic salt solution is thermally decomposed.
  • CO 2 (carbon dioxide) and H 2 O (water) separate and the solvent component or the like are removed from the applied organometallic salt solution.
  • a main firing step is performed as shown in Fig. 3 .
  • orientated metal substrate 10 where the organometallic salt solution has been applied is heated in a mixed atmosphere of Ar (argon) and O 2 (oxygen) having a temperature range not less than 600°C and not more than 800°C, for example, 750°C.
  • Ar argon
  • O 2 oxygen
  • a physical vapor deposition HoBCO layer 31 formed by the physical vapor deposition as described above, the surface smoothness of a physical vapor deposition HoBCO layer surface 31A that is a surface of physical vapor deposition HoBCO layer 31 tends to be reduced as the film thickness is increased.
  • a metal organic deposition HoBCO layer surface 32A that is a surface of metal organic deposition HoBCO layer 32 having a high surface smoothness forms a superconductor film surface 30A that is a surface of oxide superconductor film 30.
  • oxide superconductor film 30 having an excellent surface smoothness is formed and I C , J C or the like of superconducting thin film material 1 is improved. Furthermore, by using as a seed film physical vapor deposition HoBCO layer 31 having its composition close to that of the target and having a high orientation to perform the metal organic deposition step, the nucleus growth of metal organic deposition HoBCO layer 32 is more easily accomplished.
  • an Ag stabilizing layer formation step for forming Ag stabilizing layer 40 as a stabilizing layer is then performed.
  • Ag stabilizing layer 40 can be formed by, for example, a vapor deposition method. By performing the above-described steps, superconducting thin film material 1 of the first embodiment is manufactured.
  • superconducting thin film material 1 of the present first embodiment and the method of manufacturing the same, there can be provided superconducting thin film material 1 that can realize attainment of an excellent property such as a high J C and a high I C and reduction of costs at the same time because respective disadvantages of a PLD method and a non-fluorine-containing MOD method are compensated for each other and their advantages are maximized.
  • metal organic deposition HoBCO layer 32 has a thickness of not more than 1 ⁇ m.
  • metal organic deposition HoBCO layer 32 formed by an MOD method internal defects such as voids are likely to be created as the film thickness is increased. If metal organic deposition HoBCO layer 32 has a thickness of not more than 1 ⁇ m, the creation of the internal defects such as voids can be suppressed with relative ease.
  • physical vapor deposition HoBCO layer 31 has a thickness of not more than 2 ⁇ m.
  • physical vapor deposition HoBCO layer 31 formed by a PLD method it is difficult to ensure the surface smoothness as the film thickness is increased. If physical vapor deposition HoBCO layer 31 has a thickness of not more than 2 ⁇ m, a good surface smoothness can be ensured with relative ease.
  • superconducting thin film material 1 of the second embodiment has a configuration basically similar to that of superconducting thin film material 1 of the first embodiment described above.
  • superconducting thin film material 1 of the second embodiment differs from superconducting thin film material 1 of the first embodiment in that intermediate layers 20, oxide superconductor films 30 and Ag stabilizing layers 40 are formed on both main surfaces of orientated metal substrate 10.
  • oxide superconductor film 30 as the film thickness is increased, a condition for the film formation needs to be exactly controlled because it becomes difficult to ensure the surface smoothness and to suppress internal defects such as voids.
  • oxide superconductor films 30 are formed on both main surfaces 10A of orientated metal substrate 10, the film thickness of oxide superconductor film 30 on each main surface 10A required to ensure a desired I C can be reduced. As a result, it is easy to ensure the surface smoothness and to suppress the internal defects such as voids in oxide superconductor film 30 on each main surface 10A, and it is possible to ensure a sufficient I C by oxide superconductor films 30 on both main surfaces 10A.
  • the method of manufacturing the superconducting thin film material of the second embodiment has a configuration basically similar to that of the method of manufacturing the superconducting thin film material of the first embodiment as described based on Figs. 1 to 6 .
  • the second embodiment differs from the first embodiment in that intermediate layers 20, oxide superconductor films 30 and Ag stabilizing layers 40 are formed on both main surfaces 10A of orientated metal substrate 10 respectively in the intermediate layer formation step, the superconductor film formation step and the Ag stabilizing layer formation step.
  • intermediate layers 20 made up of first CeO 2 layers 21, YSZ layers 22 and second CeO 2 layers 23 are formed on both main surfaces 10A of orientated metal substrate 10 as shown in Fig. 8 .
  • oxide superconductor films 30 are formed on both intermediate layers 20 respectively as shown in Fig. 9 .
  • Ag stabilizing layers 40 are formed on both oxide superconductor films 30 respectively.
  • intermediate layers 20, oxide superconductor films 30 and Ag stabilizing layers 40 on both main surfaces 10A of orientated metal substrate 10 may be formed separately on each side, or may be formed simultaneously on both sides.
  • physical vapor deposition HoBCO layers 31 are formed simultaneously on both main surfaces 10A by a physical vapor deposition method, they can be formed, for example, from both sides of orientated metal substrate 10 by a laser deposition method.
  • metal organic deposition HoBCO layers 32 are formed simultaneously on both physical vapor deposition HoBCO layers 31 by a non-fluorine-containing metal organic deposition method, they can be formed by immersing orientated metal substrate 10 where physical vapor deposition HoBCO layers 31 have been formed into the organometallic salt solution by, for example, a dipping method.
  • superconducting thin film material 1 of the third embodiment has a configuration basically similar to that of superconducting thin film material 1 of the first embodiment described above.
  • superconducting thin film material 1 of the third embodiment differs from superconducting thin film material 1 of the first embodiment in that a plurality of structures made up of a combination of physical vapor deposition HoBCO layer 31 and metal organic deposition HoBCO layer 32 are stacked in oxide superconductor film 30.
  • a plurality of stacked structures 30B having metal organic deposition HoBCO layer 32 formed on physical vapor deposition HoBCO layer 31 are stacked and oxide superconductor film 30 is formed.
  • Fig. 10 shows a configuration in which two stacked structures 30B are stacked, three or more stacked structures 30B may be stacked so that the desired film thickness of oxide superconductor film 30 is achieved.
  • metal organic deposition HoBCO layer 32 is limited to such a degree that it is easy to suppress the internal defects such as voids
  • physical vapor deposition HoBCO layer 31 is again formed on the superconductor film having an improved surface smoothness, and additional metal organic deposition HoBCO layer 32 is formed on the physical vapor deposition HoBCO layer 31, the surface smoothness of oxide superconductor film 30 is again improved.
  • a plurality of structures made up of a combination of physical vapor deposition HoBCO layer 31 and metal organic deposition HoBCO layer 32 are stacked, it is easy to ensure the surface smoothness and to suppress the internal defects such as voids, and it is possible to form oxide superconductor film 30 having a sufficient film thickness.
  • superconducting thin film material 1 that can ensure a desired superconducting property such as I C and J C can be obtained easily.
  • the method of manufacturing the superconducting thin film material of the third embodiment has a configuration basically similar to that of the method of manufacturing the superconducting thin film material of the first embodiment described based on Figs. 1 to 6 .
  • the third embodiment differs from the first embodiment in that the physical vapor deposition step and the metal organic deposition step are alternately performed more than once in the superconductor film formation step.
  • intermediate layer 20 made up of first CeO 2 layer 21, YSZ layer 22 and second CeO 2 layer 23 is formed on orientated metal substrate 10 as shown in Fig. 12 .
  • stacked structure 30B having metal organic deposition HoBCO layer 32 formed on physical vapor deposition HoBCO layer 31 is formed on intermediate layer 20 as shown in Fig. 13 .
  • a method of forming physical vapor deposition HoBCO layer 31 and metal organic deposition HoBCO layer 32 is similar to that of the first embodiment.
  • additional stacked structure 30B is formed on stacked structure 30B as shown in Fig. 14 . Formation of these stacked structures 30B is repeated until the desired film thickness of oxide superconductor film 30 is achieved.
  • Ag stabilizing layer 40 is formed on oxide superconductor film 30.
  • superconducting thin film material 1 of the third embodiment shown in Fig. 10 is completed.
  • each metal organic deposition HoBCO layer 32 has a thickness of not more than 1 ⁇ m. If each metal organic deposition HoBCO layer 32 has a thickness of not more than 1 ⁇ m, the creation of the internal defects such as voids can be suppressed with relative ease. Furthermore, in the third embodiment, each physical vapor deposition HoBCO layer 31 has a thickness of not more than 2 ⁇ m. If each physical vapor deposition HoBCO layer 31 has a thickness of not more than 2 ⁇ m, a good surface smoothness can be ensured with relative ease.
  • superconducting thin film materials 1 of the first to third embodiments of the present invention described above are, for example, wires in the form of a tape, they may be in the form of a sheet or may have a hollow or solid cylindrical shape.
  • Example 1 will be described below. A superconducting thin film material was actually fabricated and a test was conducted to evaluate the property thereof. A procedure of the test was as follows.
  • the sample was fabricated by the manufacturing method shown in Fig. 2 .
  • an intermediate layer with a three-layer structure (CeO 2 layer/YSZ layer/CeO 2 layer; these layers have thicknesses of 0.3 ⁇ m, 1.0 ⁇ m and 0.1 ⁇ m respectively) was formed on an Ni alloy-containing orientated metal tape having a thickness of 100 ⁇ m and a width of 10 mm, and then, a physical vapor deposition HoBCO layer having a film thickness of 1.0 ⁇ m was formed on the intermediate layer by a PLD method.
  • a metal organic deposition HoBCO layer having a film thickness of 0.2-3.0 ⁇ m was epitaxially grown on the physical vapor deposition HoBCO layer by a non-fluorine-containing MOD method. Then, an Ag stabilizing layer having a film thickness of 10 ⁇ m was formed on the metal organic deposition HoBCO layer.
  • a wire having a width of 10 mm and a length of 1 m was fabricated.
  • a short sample having a width of 10 mm and a length of 10 cm was taken from this wire and a test was conducted to examine a relationship between the film thickness of the metal organic deposition HoBCO layer (MOD film thickness) and an I C .
  • the horizontal axis indicates the film thickness of the metal organic deposition HoBCO layer formed on the physical vapor deposition HoBCO layer (MOD film thickness), and the vertical axis indicates a critical current (I C ).
  • I C critical current
  • the dipping method is a method of adhering the organometallic salt solution onto the Ni alloy-containing orientated metal tape by immersing the Ni alloy-containing orientated metal tape into the organometallic salt solution in an MOD method.
  • the die coating method is a method of adhering the organometallic salt solution onto the Ni alloy-containing orientated metal tape by coating the Ni alloy-containing orientated metal tape with the organometallic salt solution supplied from a solution tank in an MOD method.
  • a result given by the die coating method is shown by a hollow rhombus, and a result given by the dipping method is shown by a solid square. Referring to Fig. 15 , a relationship between an MOD film thickness and an I C in the superconducting thin film material of this Example 1 will be described.
  • the I C is about 35-80 A/cm-width regardless of a method of forming the MOD layer. Therefore, it is seen that the MOD layer having a good property can be formed if the MOD film thickness is in a range up to 1 ⁇ m as in case of the present invention.
  • a peak corresponding to a (103) surface of the MOD layer has a half width of 6.5-6.9°. This shows that the MOD layer in the superconducting thin film material of Example 1 has a good in-plane orientation.
  • the crystal grains of the surface of the MOD layer in the superconducting thin film material of Example 1 have a diameter of 0.5-1 ⁇ m. As described above, it is seen that the crystal growth of good quality is realized in the MOD layer in the superconducting thin film material.
  • a long wire was fabricated as a prototype by using a continuous application and firing device that can continuously apply and fire the organometallic salt solution in the metal organic deposition step to take up the superconducting thin film material by a continuous reel take-up method.
  • a long wire having a property similar to that of the above-described wire was able to be fabricated. This shows that there can be provided a long superconducting wire having an excellent superconducting property, for example a high J C and a high I C , as described above according to the superconducting thin film material.
  • Example 2 will be described below.
  • a superconducting thin film material was actually fabricated and an experiment was conducted to examine a relationship between a state at the formation of the MOD layer and an I C .
  • a procedure of the experiment was as follows.
  • an intermediate layer similar to that of Example 1 was formed on an orientated Ni alloy tape having a width of 3 cm and a thickness of 100 ⁇ m by a PLD method, and then an HoBCO layer (a physical vapor deposition HoBCO layer) having a thickness of 1.5 ⁇ m was formed on the intermediate layer by a PLD method. Furthermore, an HoBCO layer (a metal organic deposition HoBCO layer) having a thickness of 0.3-3.0 ⁇ m was formed on the physical vapor deposition HoBCO layer by a non-fluorine-containing MOD method. Then, an Ag stabilizing layer having a thickness of 10 ⁇ m was formed on the metal organic deposition HoBCO layer. As a result, the superconducting thin film material was fabricated.
  • metal organic deposition HoBCO layer 32 formed on physical vapor deposition HoBCO layer 31 had a thickness of 0.3 ⁇ m
  • metal organic deposition HoBCO layer 32 was dense.
  • the measured I C was 81 A/cm-width (J C was 2.5 MA/cm 2 ) and an excellent superconducting property was obtained.
  • metal organic deposition HoBCO layer 32 had a thickness of 0.9 ⁇ m, very few voids and different phases were observed in metal organic deposition HoBCO layer 32, but the measured I C was 74 A/cm-width and an excellent superconducting property was obtained.
  • metal organic deposition HoBCO layer 32 had a thickness of 1.8 ⁇ m, voids and different phases were clearly observed in metal organic deposition HoBCO layer 32.
  • the measured I C was 39 A/cm-width and a superconducting property was clearly reduced as compared to that of the above-described Figs. 18 and 19 in which metal organic deposition HoBCO layer 32 had a thickness of not more than 1 ⁇ m.
  • metal organic deposition HoBCO layer 32 had a thickness of 3.0 ⁇ m, many voids and different phases were clearly observed in metal organic deposition HoBCO layer 32.
  • the measured I C was 1 A/cm-width and a superconducting property was significantly reduced.
  • the greatest advantage of a non-fluorine-containing MOD method is that a large-area film can be formed easily.
  • the intermediate layer, the superconductor film and the Ag stabilizing layer were formed on the wide orientated Ni alloy tape and the thickness of the MOD layer was set to not more than 1 ⁇ m as in case of the invention, and thus a large-area superconducting thin film material having a good superconducting property was able to be fabricated.
  • Example 3 of the present invention will be described below.
  • a superconducting thin film material as an example of the present invention including a superconductor film with a metal organic deposition layer formed on a physical vapor deposition layer, and a superconducting thin film material as a comparative example including a superconductor film formed only of a physical vapor deposition layer were fabricated and a test was conducted to compare their superconducting properties.
  • a superconducting thin film material similar to that of Example 1 was fabricated similarly to Example 1 by the manufacturing method shown in Fig. 2 .
  • the thickness of a physical vapor deposition HoBCO layer was set to 0.8 ⁇ m and a metal organic deposition HoBCO layer having a thickness of not more than 1 ⁇ m was deposited on the physical vapor deposition HoBCO layer, so that the superconductor film was formed.
  • a superconducting thin film material whose superconductor film was only different from that of the superconducting thin film material of the example was fabricated.
  • the superconductor film was formed only of the physical vapor deposition HoBCO layer as described above.
  • the I C rises approximately in proportion to an increase in the film thickness.
  • the rise in the I C relative to the increase in the film thickness tends to become small as the film thickness is increased, and for the film thickness of not less than 2 ⁇ m, the rise in the I C is clearly small. It is assumed that this is because the surface smoothness becomes worse as the film thickness is increased when the superconductor film is formed by a PLD method as described above.
  • the I C rises approximately in proportion to an increase in the film thickness even though the film thickness exceeds 1 ⁇ m as in case of the invention.
  • the I C is 196 A/cm-width and the J C is 1.5 MA/cm 2 at the maximum.
  • the physical vapor deposition layer has a thickness of not more than 2 ⁇ m as in case of the invention, and more preferably not more than 1 ⁇ m, in the superconducting thin film material of the present invention as well in order to suppress a worsening of the surface smoothness of the physical vapor deposition layer.
  • Example 4 A superconducting thin film material having superconductor films formed on both main surfaces of an Ni alloy substrate was fabricated and a test was conducted to examine I C .
  • a superconducting thin film material was fabricated similarly to Example 1 by the manufacturing method shown in Fig. 2 .
  • physical vapor deposition HoBCO layers having thicknesses of 0.4 ⁇ m and metal organic deposition HoBCO layers having thicknesses of 0.4 ⁇ m were formed on intermediate layers formed on both main surfaces of an Ni alloy substrate respectively.
  • I C of the superconducting thin film material was measured under a condition similar to that of Example 3.
  • the I C was 82 A/cm-width on one surface side of the Ni alloy substrate and 109 A/cm-width on the other surface side. Therefore, when both surfaces were combined together, the I C of the superconducting thin film material of the present example was 191 A/cm-width. Since the superconductor films are formed on both main surfaces of the Ni alloy substrate as in the present example, it is possible to reduce the thickness of the superconductor film on each main surface required to ensure a desired I C and it is easy to ensure the surface smoothness and to suppress internal defects such as voids in the superconductor film on each main surface. It is seen from the above-described test result that it is possible to ensure a sufficient I C by the superconductor films on both main surfaces.
  • Example 5 A superconducting thin film material was fabricated in the form of a wide wire as a prototype. Specifically, the superconducting thin film material was fabricated by a method similar to that of Example 1 by using an Ni alloy tape having a width of 5 cm as a substrate. Then, J C of the superconducting thin film material was measured under a condition similar to that of Example 3.
  • a superconducting thin film material of the present invention and a method of manufacturing the same can be especially advantageously applied to a superconducting thin film material having a superconductor film formed on a substrate and a method of manufacturing the same.

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