SU1829818A1 - Способ получения высокотемпературных сверхпроводящих пленок - Google Patents
Способ получения высокотемпературных сверхпроводящих пленокInfo
- Publication number
- SU1829818A1 SU1829818A1 SU4936942/25A SU4936942A SU1829818A1 SU 1829818 A1 SU1829818 A1 SU 1829818A1 SU 4936942/25 A SU4936942/25 A SU 4936942/25A SU 4936942 A SU4936942 A SU 4936942A SU 1829818 A1 SU1829818 A1 SU 1829818A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- sputtering unit
- sputtering
- superconducting films
- manufacture
- distance
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000004544 sputter deposition Methods 0.000 abstract 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000001556 precipitation Methods 0.000 abstract 2
- 229910052786 argon Inorganic materials 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Сущность изобретения: способ включает осаждение сверхпроводниковых пленок путем распыления керамической мишени в катодном распылительном узле. Подложки размещают параллельно оси симметрии катодного распылительного узла между входным отверстием вакуумной откачкой системы и выходным отверстием системы напуска аргонаи кислорода на расстоянии l (4 - 20) D от катодного распылительного узла, где D расстояние между осью симметрии распылительного узла и распыляемой мишенью. Осаждение пленки проводят при величине газового потока через зону распыления 0,2 150 мм рт.ст.л./с. 1 ил.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU4936942/25A SU1829818A1 (ru) | 1991-05-20 | 1991-05-20 | Способ получения высокотемпературных сверхпроводящих пленок |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU4936942/25A SU1829818A1 (ru) | 1991-05-20 | 1991-05-20 | Способ получения высокотемпературных сверхпроводящих пленок |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU1829818A1 true SU1829818A1 (ru) | 1995-07-09 |
Family
ID=60537412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU4936942/25A SU1829818A1 (ru) | 1991-05-20 | 1991-05-20 | Способ получения высокотемпературных сверхпроводящих пленок |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU1829818A1 (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7858558B2 (en) | 2006-05-19 | 2010-12-28 | Sumitomo Electric Industries, Ltd. | Superconducting thin film material and method of manufacturing the same |
-
1991
- 1991-05-20 SU SU4936942/25A patent/SU1829818A1/ru active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7858558B2 (en) | 2006-05-19 | 2010-12-28 | Sumitomo Electric Industries, Ltd. | Superconducting thin film material and method of manufacturing the same |
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