EP1934992A1 - Resistance hf a valeur reglee ayant une structure en couches plane - Google Patents
Resistance hf a valeur reglee ayant une structure en couches planeInfo
- Publication number
- EP1934992A1 EP1934992A1 EP06806115A EP06806115A EP1934992A1 EP 1934992 A1 EP1934992 A1 EP 1934992A1 EP 06806115 A EP06806115 A EP 06806115A EP 06806115 A EP06806115 A EP 06806115A EP 1934992 A1 EP1934992 A1 EP 1934992A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- incision
- layer
- resistive layer
- resistor
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 25
- 239000004020 conductor Substances 0.000 claims description 24
- 238000009826 distribution Methods 0.000 claims description 8
- 230000002349 favourable effect Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/24—Terminating devices
- H01P1/26—Dissipative terminations
- H01P1/268—Strip line terminations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/24—Terminating devices
- H01P1/26—Dissipative terminations
Definitions
- the present invention relates to an RF resistor, in particular an RF termination, having a planar layer structure comprising on a substrate a resistance layer for converting RF energy into heat, an input line for supplying RF energy, and a grounding line for electrically connecting to a ground contact, wherein the input conductor is electrically connected to a first end of the resistive layer, the grounding conductor is electrically connected to a second end of the resistive layer opposite the first end, and the resistive layer between the first end and the second end is perpendicular to a direction of propagation of the resistive layer RF energy is limited to the resistive layer and perpendicular to a normal to the planar layer structure by lateral surfaces, wherein the resistance layer for balancing the characteristic impedance to a predetermined value at least one, the Querschnit According to the preamble of claim 1, the invention further relates to a method for matching the characteristic impedance of an HF resistor, in particular of an RF termination resistor, with a planar layer
- the structure of the resistive layer is adapted to the high frequency relevant environmental conditions.
- HF terminating resistors of the o.g. It is known, at the edge of the resistive layer, to electrically deactivate a planar region by incision or to form deep cuts in the cross section of the structure.
- this results in the problem that locally high current densities occur in the region of the incisions, which lead to high temperatures in the resistance layer.
- the RF resistor can be used only narrowband or possibly must be sorted out as unusable as rejects of production.
- the invention is based on the object, an RF resistance o.g. To improve the type such that at the highest possible yield of the manufacturing process and maintaining best RF properties, using increased power dissipation, the heat is optimally distributed on the resistance layer by balancing the characteristic impedance.
- the incision is formed spaced from the lateral surfaces of the resistive layer.
- the incision is formed such that it completely interrupts the cross section of the resistance layer in the direction of the normal to the planar layer structure.
- a portion of the resistance layer in the propagation direction of the RF energy behind the incision is completely deactivated and no longer contributes to power conduction from the input conductor at the first end of the resistive layer to the grounding interconnect at the second end of the resistive layer, causing the electronic ohmic resistance (sheet resistance ) is changed accordingly over the entire resistance layer.
- the incision in the plane of the resistance layer is formed U-shaped with two legs and a base connecting the legs and with an open side of the U-shaped notch facing the second end of the resistance layer, wherein the legs of the U-shaped notch essential are formed longer than the base of the U-shaped incision, a current density on the resistive layer is uniformly distributed over a length of the resistive layer in the propagation direction of the RF energy and thereby distributes heat development on the resistive layer in the region of the incision over a larger area.
- the incision is arranged centrally between the lateral surfaces of the resistance layer.
- the incision is formed spaced from the lateral surfaces of the resistive layer.
- the incision is formed such that it completely interrupts the cross section of the resistance layer in the direction of the normal to the planar layer structure.
- a portion of the resistance layer in the propagation direction of the RF energy behind the incision is completely deactivated and no longer contributes to power conduction from the input conductor at the first end of the resistive layer to the grounding interconnect at the second end of the resistive layer, thereby correspondingly increasing the characteristic impedance across the resistive layer is changed.
- the incision in the plane of the resistance layer is formed U-shaped with two legs and a base connecting the legs and with an open side of the U-shaped notch facing the second end of the resistive layer, wherein the
- a current density on the resistive layer is uniform over a length of the resistive layer in the propagation direction of
- an extension of the incision is formed in each case in a method of the aforementioned type at free ends of the limbs of the U-shaped incision facing away from the base. Conveniently, these extensions are formed symmetrically to each other.
- the incision is formed centrally between the lateral surfaces of the resistance layer.
- FIG. 2 shows a graph of the adaptation of the characteristic impedance over the frequency for the HF resistor according to FIG. 1 without adjustment by means of an incision
- FIG. 3 is a graphical representation of the adjustment of the characteristic impedance over the frequency for the RF resistor of FIG. 1 with adjustment by means of the incision according to the invention
- Fig. 5 shows the RF resistor of FIG. 4 with adjustment by means of the incision according to the invention according to a first preferred
- FIG. 6 shows the HF resistor according to FIG. 4 with adjustment by means of the incision according to the invention according to a second preferred embodiment in plan view.
- the preferred embodiment of an RF termination resistor comprises a resistance layer 10, an input conductor 12 and a grounding conductor 14.
- the resistance layer 10, the input conductor 12 and the grounding conductor 14 are formed as respective layers on a substrate 16 and form a planar layer structure.
- the input conductor 12 is electrically connected to a first end 18 of the resistive layer 10, and the grounding conductor 14 is electrically connected to a second end 20 of the resistive layer 10 opposite the first end 18.
- the resistive layer 10 is for converting RF energy to heat
- the input trace 12 is for supplying RF energy
- the bulk launch trace 14 is for electrical connection to a ground contact (not shown).
- the resistive layer 10 is delimited between the first end 18 and the second end 20 in the direction perpendicular to a propagation direction 22 of the RF energy on the resistive layer 10 and perpendicular to a normal 24 to the planar layer structure by lateral surfaces 26.
- a U-shaped incision 28 which at least partially narrows the cross-section of the resistance layer is formed to balance the characteristic impedance to a predetermined value on the resistive layer 10, which is arranged centrally between the lateral surfaces 26 such that an open end 30 of the U-shaped Incision 28 facing the second end 20 of the resistive layer 10.
- the U-shaped incision 28 is formed with two parallel legs 32 and a leg connecting the legs 32 34, wherein the legs 32 extend parallel to the propagation direction 22 of the RF energy on the resistive layer 10 and formed substantially longer than the base 34th.
- the current density is distributed over a large cross-sectional area and locally narrow areas with high current density are avoided. This distributes the resulting heat energy to a larger area, thus avoiding locally high-temperature localized areas.
- the alignment in the longitudinal direction in the center of the structure is made at a favorable location for the heat distribution and at the same time maintained the influence on the adjustment to the best possible fitting values is.
- the current density is uniformly distributed over the length of the resistor structure 10 in the propagation direction 22 of the RF energy in the incision 28 formed according to the invention.
- the current-carrying resistance surface is much wider.
- FIGS. 2 and 3 illustrate the advantageous effect of the incision 28 according to the invention on the characteristic impedance of the resistive layer 10. The values in FIGS. 2 and 3 are determined from simulations.
- FIG. 4 to 6 show experimentally determined temperature values at various points of the resistance structure 10 without adjustment (FIG. 4), with adjustment by means of a first embodiment of the incision 28 (FIG. 5) and with adjustment by means of a second embodiment of the incision 28 (FIG 6).
- this is formed purely U-shaped with legs 32 and base 34.
- this is U-shaped as in FIG.
- the adjustment with the incision 28 according to the invention is technologically very easy to implement and causes homogeneous temperature distribution also or just for very large adjustment slots.
- the temperature is even lowered by the uniform distribution with a high level of balance. Due to the high power losses, dimensionally large resistance structures result compared to the wavelength.
- the resistance structure 10 on the substrate 16, in particular that of the resistance surface in the longitudinal direction 22, is adapted by a changing structure width.
- the possibility of making the incision 28 relatively long for the adjustment also has a positive effect on the reflection factor. Overall, the following advantages are achieved: Constant heat distribution (no hot spots), ensuring very good reflection factors over the entire bandwidth and cost reduction due to high production yield.
- the favorable properties of the new adjustment method have a direct effect on the use of a resistance substrate. According to the practical application, boundary conditions must be adhered to. This could be, for example, maximum temperature loads of solder joints or maximum permissible temperature tolerances of resistance layers. Due to its advantageous properties, the invention is particularly suitable for the production of high-resistance HF resistors (mass production, assembly line production).
- a method for balancing the characteristic impedance of an RF resistor, in particular an RF termination resistor, with a planar layer structure comprising on a substrate a resistance layer for converting RF energy into heat, an input conductor for supplying RF energy and a grounding conductor to the electrical Connecting to a ground contact, wherein the input conductor is electrically connected to a first end of the resistive layer, the bulk starting conductor is electrically connected to a first end opposite the second end of the resistive layer and the resistive layer between the first end and the second end in the direction perpendicular to a Spreading direction of the RF energy on the resistive layer and perpendicular to a normal to the planar layer structure is limited by lateral surfaces, wherein for balancing the characteristic impedance to a predetermined value at least one, the cross section of the W At least partially narrowing incision is formed on the resistance layer, characterized in that the incision is formed at a distance from the lateral surfaces of the resistance layer.
- the incision is formed such that it completely interrupts the cross section of the resistance layer in the direction of the normal to the planar layer structure.
- a portion of the resistance layer in the propagation direction of the RF energy behind the incision is completely deactivated and no longer contributes to power conduction from the input conductor at the first end of the resistive layer to the grounding interconnect at the second end of the resistive layer, whereby the sheet resistance correspondingly over the entire resistive layer is changed.
- an extension of the incision is formed in each case in a method of the aforementioned type at free ends of the limbs of the U-shaped incision facing away from the base.
- these extensions are formed symmetrically to each other.
- the incision is formed centrally between the lateral surfaces of the resistance layer.
Landscapes
- Non-Adjustable Resistors (AREA)
- Non-Reversible Transmitting Devices (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Details Of Resistors (AREA)
- Semiconductor Integrated Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Materials For Photolithography (AREA)
- Electric Double-Layer Capacitors Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202005015927U DE202005015927U1 (de) | 2005-10-11 | 2005-10-11 | Abgeglichener HF-Widerstand mit einer planaren Schichtstruktur |
PCT/EP2006/009736 WO2007042243A1 (fr) | 2005-10-11 | 2006-10-09 | Resistance hf a valeur reglee ayant une structure en couches plane |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1934992A1 true EP1934992A1 (fr) | 2008-06-25 |
EP1934992B1 EP1934992B1 (fr) | 2009-01-28 |
Family
ID=35530599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06806115A Active EP1934992B1 (fr) | 2005-10-11 | 2006-10-09 | Resistance hf a valeur reglee ayant une structure en couches plane |
Country Status (10)
Country | Link |
---|---|
US (1) | US8063731B2 (fr) |
EP (1) | EP1934992B1 (fr) |
JP (1) | JP2009512293A (fr) |
CN (1) | CN101288134B (fr) |
AT (1) | ATE422096T1 (fr) |
CA (1) | CA2624472C (fr) |
DE (2) | DE202005015927U1 (fr) |
HK (1) | HK1124954A1 (fr) |
NO (1) | NO337881B1 (fr) |
WO (1) | WO2007042243A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5419088B2 (ja) * | 2010-01-07 | 2014-02-19 | アルパイン株式会社 | 基板減衰回路 |
CN101923928B (zh) * | 2010-03-25 | 2012-05-23 | 四平市吉华高新技术有限公司 | 一种高频贴片电阻器及其制造方法 |
KR102709957B1 (ko) * | 2022-08-03 | 2024-09-25 | (주) 알엔투테크놀로지 | 개구 영역을 구비한 전극을 포함하는 광대역 터미네이션 |
KR102699882B1 (ko) * | 2022-08-03 | 2024-08-29 | (주) 알엔투테크놀로지 | 공통 전극을 포함하는 고출력 터미네이션 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1945839B2 (de) | 1969-09-10 | 1978-03-30 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Abschlusswiderstand in Streifenleitungstechnik |
DE2634812C2 (de) | 1976-08-03 | 1983-05-05 | Spinner-GmbH Elektrotechnische Fabrik, 8000 München | HF-Leistungsabschlußwiderstand |
US4148005A (en) * | 1977-10-14 | 1979-04-03 | The United States Of America As Represented By The Secretary Of The Army | Thermometric transducer device |
JPH01304705A (ja) * | 1988-06-01 | 1989-12-08 | Murata Mfg Co Ltd | 膜抵抗体のトリミング方法 |
DE3843600C1 (en) | 1988-12-23 | 1990-03-22 | Rohde & Schwarz Gmbh & Co Kg, 8000 Muenchen, De | High-frequency power terminating impedance |
US6007755A (en) * | 1995-02-21 | 1999-12-28 | Murata Manufacturing Co., Ltd. | Resistor trimming method |
US6148502A (en) * | 1997-10-02 | 2000-11-21 | Vishay Sprague, Inc. | Surface mount resistor and a method of making the same |
FI106414B (fi) * | 1999-02-02 | 2001-01-31 | Nokia Networks Oy | Laajakaistainen impedanssisovitin |
-
2005
- 2005-10-11 DE DE202005015927U patent/DE202005015927U1/de not_active Expired - Lifetime
-
2006
- 2006-10-09 CN CN2006800379577A patent/CN101288134B/zh not_active Expired - Fee Related
- 2006-10-09 EP EP06806115A patent/EP1934992B1/fr active Active
- 2006-10-09 CA CA2624472A patent/CA2624472C/fr active Active
- 2006-10-09 AT AT06806115T patent/ATE422096T1/de not_active IP Right Cessation
- 2006-10-09 WO PCT/EP2006/009736 patent/WO2007042243A1/fr active Application Filing
- 2006-10-09 JP JP2008534913A patent/JP2009512293A/ja not_active Withdrawn
- 2006-10-09 US US12/089,146 patent/US8063731B2/en not_active Expired - Fee Related
- 2006-10-09 DE DE502006002761T patent/DE502006002761D1/de active Active
-
2008
- 2008-05-06 NO NO20082123A patent/NO337881B1/no not_active IP Right Cessation
-
2009
- 2009-03-03 HK HK09102000.5A patent/HK1124954A1/xx not_active IP Right Cessation
Non-Patent Citations (1)
Title |
---|
See references of WO2007042243A1 * |
Also Published As
Publication number | Publication date |
---|---|
NO20082123L (no) | 2008-05-06 |
EP1934992B1 (fr) | 2009-01-28 |
CN101288134A (zh) | 2008-10-15 |
ATE422096T1 (de) | 2009-02-15 |
CA2624472A1 (fr) | 2007-04-19 |
JP2009512293A (ja) | 2009-03-19 |
NO337881B1 (no) | 2016-07-04 |
DE202005015927U1 (de) | 2005-12-29 |
US20090206981A1 (en) | 2009-08-20 |
WO2007042243A1 (fr) | 2007-04-19 |
CA2624472C (fr) | 2013-06-04 |
US8063731B2 (en) | 2011-11-22 |
HK1124954A1 (en) | 2009-07-24 |
DE502006002761D1 (de) | 2009-03-19 |
CN101288134B (zh) | 2011-02-09 |
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