EP1907791A4 - Dispositif et procede permettant de mesurer une feuille de verre - Google Patents
Dispositif et procede permettant de mesurer une feuille de verreInfo
- Publication number
- EP1907791A4 EP1907791A4 EP06787404A EP06787404A EP1907791A4 EP 1907791 A4 EP1907791 A4 EP 1907791A4 EP 06787404 A EP06787404 A EP 06787404A EP 06787404 A EP06787404 A EP 06787404A EP 1907791 A4 EP1907791 A4 EP 1907791A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- measuring
- glass sheet
- glass
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C5/00—Measuring height; Measuring distances transverse to line of sight; Levelling between separated points; Surveyors' levels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
- F16C29/045—Ball or roller bearings having rolling elements journaled in one of the moving parts
- F16C29/046—Ball or roller bearings having rolling elements journaled in one of the moving parts with balls journaled in pockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US70332305P | 2005-07-27 | 2005-07-27 | |
PCT/US2006/027492 WO2007015772A2 (fr) | 2005-07-27 | 2006-07-13 | Dispositif et procede permettant de mesurer une feuille de verre |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1907791A2 EP1907791A2 (fr) | 2008-04-09 |
EP1907791A4 true EP1907791A4 (fr) | 2009-12-23 |
Family
ID=37709041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06787404A Withdrawn EP1907791A4 (fr) | 2005-07-27 | 2006-07-13 | Dispositif et procede permettant de mesurer une feuille de verre |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1907791A4 (fr) |
JP (3) | JP5469340B2 (fr) |
KR (1) | KR101294450B1 (fr) |
CN (1) | CN101268356B (fr) |
TW (1) | TWI300838B (fr) |
WO (1) | WO2007015772A2 (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1907791A4 (fr) * | 2005-07-27 | 2009-12-23 | Corning Inc | Dispositif et procede permettant de mesurer une feuille de verre |
JP5654354B2 (ja) * | 2007-11-30 | 2015-01-14 | コーニング インコーポレイテッド | 動いている基板の形状変化を検出する方法および装置 |
CN102721356A (zh) * | 2012-06-12 | 2012-10-10 | 无锡市麦希恩机械制造有限公司 | 汽车玻璃天窗检具结构 |
CN103418644B (zh) * | 2013-09-02 | 2015-02-18 | 苏州赛斯德工程设备有限公司 | 一种具有辅助定位治具的折弯机 |
JP2017501951A (ja) | 2013-11-25 | 2017-01-19 | コーニング インコーポレイテッド | 実質的に柱面を成す鏡面反射面の形状を決定するための方法 |
CN103673915A (zh) * | 2013-12-20 | 2014-03-26 | 苏州精创光学仪器有限公司 | 触摸屏保护玻璃翘曲度快速测量装置 |
CN104006769B (zh) * | 2014-05-13 | 2017-01-18 | 苏州金牛精密机械有限公司 | 一种用于检测翘片管平面度的治具 |
CN104310032A (zh) * | 2014-11-03 | 2015-01-28 | 苏州精创光学仪器有限公司 | 玻璃测量系统的输送装置 |
CN105783794B (zh) * | 2016-03-22 | 2019-03-15 | 阳谷祥光铜业有限公司 | 一种平面检测方法及设备 |
CN105806247A (zh) * | 2016-05-23 | 2016-07-27 | 南京林业大学 | 一种木质板材翘曲的在线检测装置和检测方法 |
CN109737881A (zh) * | 2019-03-22 | 2019-05-10 | 李兆祥 | 一种齿轮监测设备 |
CN112595281B (zh) * | 2020-12-31 | 2022-09-27 | 域鑫科技(惠州)有限公司 | 一种工件的面轮廓度快速测量方法及介质 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1277576A (en) * | 1968-06-27 | 1972-06-14 | Ernest James Price | Conveyors or supports |
JPH06331339A (ja) * | 1993-05-21 | 1994-12-02 | Hitachi Cable Ltd | 薄板の変形測定方法及びその装置 |
US6567169B1 (en) * | 1999-08-31 | 2003-05-20 | Koninklijke Philips Electronics N.V. | Method of and device for determining the warpage of a wafer |
WO2007018902A1 (fr) * | 2005-07-27 | 2007-02-15 | Corning Incorporated | Procede et appareil permettant de mesurer le profile d'un article |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60146807U (ja) * | 1984-03-12 | 1985-09-30 | 河口湖精密株式会社 | デジタルノギスの防塵構造 |
JPH057532Y2 (fr) * | 1986-07-07 | 1993-02-25 | ||
US5291269A (en) * | 1991-12-06 | 1994-03-01 | Hughes Aircraft Company | Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations |
JP2991932B2 (ja) * | 1994-07-12 | 1999-12-20 | 新日本製鐵株式会社 | 鋼板の平坦度測定方法 |
JPH08166226A (ja) * | 1994-12-14 | 1996-06-25 | Casio Comput Co Ltd | 平面度測定装置およびそれを用いた平面度測定方法 |
JPH1070179A (ja) * | 1996-08-28 | 1998-03-10 | Canon Inc | 基板保持装置およびこれを用いた露光装置 |
JPH11351857A (ja) * | 1998-06-08 | 1999-12-24 | Kuroda Precision Ind Ltd | 薄板の表面形状測定方法および薄板の表面形状測定装置 |
JP2000065506A (ja) * | 1998-08-24 | 2000-03-03 | Ngk Insulators Ltd | 厚さ測定用治具 |
US6608689B1 (en) * | 1998-08-31 | 2003-08-19 | Therma-Wave, Inc. | Combination thin-film stress and thickness measurement device |
JP2000314613A (ja) * | 1999-05-06 | 2000-11-14 | Kobe Steel Ltd | 表面形状測定装置 |
JP4218916B2 (ja) * | 1999-07-27 | 2009-02-04 | フジノン株式会社 | 被測定体の支持装置の製造方法 |
JP2001332609A (ja) * | 2000-03-13 | 2001-11-30 | Nikon Corp | 基板保持装置及び露光装置 |
JP2001330430A (ja) * | 2000-05-22 | 2001-11-30 | Daido Steel Co Ltd | 平面度測定方法および平面度測定装置 |
US20020036774A1 (en) * | 2000-08-08 | 2002-03-28 | Emil Kamieniecki | Apparatus and method for handling and testing of wafers |
JP2004087593A (ja) * | 2002-08-23 | 2004-03-18 | Nikon Corp | ステージ装置および露光装置 |
JP2004303923A (ja) * | 2003-03-31 | 2004-10-28 | Shimadzu Corp | 基板アライメント機構、及びそれを用いた基板検査装置 |
US7131211B2 (en) * | 2003-08-18 | 2006-11-07 | Micron Technology, Inc. | Method and apparatus for measurement of thickness and warpage of substrates |
EP1907791A4 (fr) * | 2005-07-27 | 2009-12-23 | Corning Inc | Dispositif et procede permettant de mesurer une feuille de verre |
-
2006
- 2006-07-13 EP EP06787404A patent/EP1907791A4/fr not_active Withdrawn
- 2006-07-13 WO PCT/US2006/027492 patent/WO2007015772A2/fr active Application Filing
- 2006-07-13 JP JP2008523933A patent/JP5469340B2/ja active Active
- 2006-07-13 KR KR1020087004569A patent/KR101294450B1/ko active IP Right Grant
- 2006-07-13 CN CN200680034661XA patent/CN101268356B/zh active Active
- 2006-07-25 TW TW095127223A patent/TWI300838B/zh active
-
2013
- 2013-11-29 JP JP2013247179A patent/JP5676726B2/ja active Active
-
2014
- 2014-11-11 JP JP2014228754A patent/JP6169063B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1277576A (en) * | 1968-06-27 | 1972-06-14 | Ernest James Price | Conveyors or supports |
JPH06331339A (ja) * | 1993-05-21 | 1994-12-02 | Hitachi Cable Ltd | 薄板の変形測定方法及びその装置 |
US6567169B1 (en) * | 1999-08-31 | 2003-05-20 | Koninklijke Philips Electronics N.V. | Method of and device for determining the warpage of a wafer |
WO2007018902A1 (fr) * | 2005-07-27 | 2007-02-15 | Corning Incorporated | Procede et appareil permettant de mesurer le profile d'un article |
Also Published As
Publication number | Publication date |
---|---|
JP2015062023A (ja) | 2015-04-02 |
TW200722705A (en) | 2007-06-16 |
TWI300838B (en) | 2008-09-11 |
JP6169063B2 (ja) | 2017-07-26 |
EP1907791A2 (fr) | 2008-04-09 |
KR101294450B1 (ko) | 2013-08-07 |
JP2009503504A (ja) | 2009-01-29 |
CN101268356A (zh) | 2008-09-17 |
KR20080036118A (ko) | 2008-04-24 |
JP2014066721A (ja) | 2014-04-17 |
WO2007015772A3 (fr) | 2007-04-12 |
JP5676726B2 (ja) | 2015-02-25 |
CN101268356B (zh) | 2012-07-25 |
JP5469340B2 (ja) | 2014-04-16 |
WO2007015772A2 (fr) | 2007-02-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20080214 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): DE FR |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G01N 21/01 20060101AFI20080519BHEP |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20091123 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G01B 11/06 20060101ALI20091117BHEP Ipc: G01B 11/30 20060101AFI20091117BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20100104 |