EP1735651A2 - Element optique - Google Patents

Element optique

Info

Publication number
EP1735651A2
EP1735651A2 EP05733315A EP05733315A EP1735651A2 EP 1735651 A2 EP1735651 A2 EP 1735651A2 EP 05733315 A EP05733315 A EP 05733315A EP 05733315 A EP05733315 A EP 05733315A EP 1735651 A2 EP1735651 A2 EP 1735651A2
Authority
EP
European Patent Office
Prior art keywords
contact
optical
holding
area
element body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05733315A
Other languages
German (de)
English (en)
Inventor
Thomas Schletterer
Franz Sorg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of EP1735651A2 publication Critical patent/EP1735651A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

Definitions

  • the present invention relates to an optical element and an optical arrangement comprising such an optical element.
  • the invention can be used in connection with the microlithography used in the manufacture of microelectronic circuits. It therefore further relates to a lens barrel which is particularly suitable for use in a microlithography device, and to a microlithography device comprising such a lens barrel.
  • this design has the disadvantage that a comparatively complex mounting of the respective holding element is required.
  • a comparatively large area of the lens has to be machined with a correspondingly high outlay in order to produce the contact areas in order to ensure sufficient accuracy of the contact areas.
  • a holder for a lens in which three holding elements distributed on the periphery of the lens engage radially in a V-shaped annular groove running around the periphery of the lens.
  • the holding elements bear against the lens with a certain preload and thereby hold the lens both in the direction of the optical axis and in the circumferential direction and in the radial direction.
  • the defined preload is achieved by a resilient design of one of the holding elements in the radial direction.
  • This design also has the disadvantage, on the one hand, that for the circumferential V-shaped annular groove, a comparatively large area of the lens has to be machined with a correspondingly high outlay in order to ensure sufficient accuracy of the contact areas.
  • Another disadvantage of the design lies in the fact that, on the one hand, it is only of limited suitability for thin lenses and, on the other hand, an increased production outlay is required because of the risk of breakouts on the lens.
  • the present invention is therefore based on the object of providing an optical element or an optical arrangement of the type mentioned at the outset which does not have the disadvantages mentioned above, or at least to a lesser extent, and in particular one that is as stress-free as possible, while being easy to manufacture Bracket allows.
  • the present invention achieves this object by means of an optical element with the features of claim 1. It also achieves this object by means of an optical arrangement with the features of claim 14.
  • the present invention is based on the finding that a low-stress mounting of the optical element is possible with simple manufacturability if the processing of the optical element for producing the contact areas with the associated holding device is limited in circumferential view and additionally or alternatively limited in the direction of the optical axis the easy-to-edit circumferential outer edges of the optical element. In this case, only the contact areas actually used for the contact then have to be subjected to correspondingly complex processing, as a result of which the effort for producing the holding area on the optical element is significantly reduced.
  • An object of the present invention is therefore an optical element, in particular a lens, comprising an element body with an optically active first region, which has an optical axis, and an edge region which runs in a circumferential direction of the element body and in which at least one first holding region is arranged.
  • the first holding area has at least one first contact area which is designed to interact with a first holding device for holding the element body.
  • the edge area forms the first contact area in the circumferential direction of the element body, limited only at a first circumferential area limited in the circumferential direction.
  • the edge area forms the first contact area limited in the direction of the optical axis only at two contact surfaces of the element body spaced apart in the direction of the optical axis, which are each arranged in the area of a circumferential outer edge of the element body and at least one of which is partially in Extends direction of the optical axis.
  • the limitation of the first contact area in the circumferential direction means that the first contact area does not have to be produced over the entire circumference of the element body. For example, a corresponding processing of the element body to produce the first contact area does not have to cover its entire circumference respectively. This may significantly reduce the effort required to produce the first contact area.
  • the same is achieved by delimiting the first contact area in the direction of the optical axis and limiting it to two contact areas arranged in the area of a circumferential outer edge of the element body.
  • the extension of at least one of the contact surfaces partially in the direction of the optical axis enables the contact zone between the first holding device and the lens to be designed as a self-adjusting clamping pair, in which a holding force directed primarily in the radial direction is introduced into the lens. Due to the self-adjusting clamping pair z. B. level differences between the first holding devices already compensated for in the contact zone between the first holding device and the lens, so that there is no need for expensive storage of the first holding devices. In other words, this enables a simple, as tension-free mounting of the lens as possible.
  • Another object of the present invention is an optical arrangement with an optical element according to the invention and a first holding device which interacts with a first holding area of the optical element.
  • Another object of the present invention is a lens barrel, in particular a lens barrel for a microlithography device, with at least one optical module, which comprises an optical arrangement according to the invention.
  • the present invention furthermore relates to a microlithography device for transferring a pattern formed on a mask to a substrate with an optical projection system which comprises a lens barrel according to the invention.
  • FIG. 1 is a schematic perspective illustration of a preferred embodiment of the optical arrangement according to the invention with a preferred embodiment of the optical element according to the invention;
  • Figure 2 is a schematic perspective view of the optical element of Figure 1;
  • FIG. 3 is a schematic perspective illustration of a first holding device from FIG. 1;
  • FIG. 4 is a schematic illustration of a preferred embodiment of the microlithography device according to the invention with a lens barrel according to the invention
  • FIG. 5 is a schematic perspective illustration of a further preferred embodiment of the optical element according to the invention.
  • FIG. 6 is a schematic perspective illustration of a further preferred embodiment of the optical element according to the invention.
  • FIG. 7 is a schematic perspective illustration of a further preferred embodiment of the optical element according to the invention.
  • FIG. 8 is a schematic perspective illustration of a further preferred embodiment of the optical element according to the invention.
  • FIG. 9 is a schematic perspective illustration of a further preferred embodiment of the optical arrangement according to the invention with the optical element from FIG. 2;
  • FIG. 10 is a schematic perspective illustration of a further preferred embodiment of the optical arrangement according to the invention with a preferred embodiment of the optical element according to the invention
  • FIG. 11 is a schematic partial section through the optical arrangement from FIG. 10 along line Xl-Xl;
  • FIG. 12 is a schematic perspective illustration of a first holding device from FIG. 10;
  • FIG. 13 is a schematic perspective illustration of a first holding device for a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 14 is a schematic partial section through a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 15 is a schematic partial section through a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 16 is a schematic partial section through a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 17 is a schematic partial section through a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 18 is a schematic partial section through a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 19 is a schematic partial section through a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 20 is a schematic partial section through a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 21 is a schematic partial section through a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 22 is a schematic partial section through a first holding device for a further preferred embodiment of the optical arrangement according to the invention
  • FIG. 23 is a schematic partial section through a first holding device for a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 24 is a schematic perspective illustration of a first holding device for a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 25 is a schematic perspective illustration of a first holding device for a further preferred embodiment of the optical arrangement according to the invention.
  • FIG. 26 is a schematic sectional illustration of a further preferred embodiment of the optical arrangement according to the invention with a preferred embodiment of the optical element according to the invention.
  • FIGS. 1 to 3 A preferred embodiment of the optical arrangement 1 according to the invention with a preferred embodiment of the optical element 2 according to the invention is first described below with reference to FIGS. 1 to 3.
  • FIG. 1 shows a schematic perspective illustration of the optical arrangement 1 with the optical element in the form of a lens 2.
  • the lens 2 is supported on a frame device in the form of a holder 4 by means of three first holding devices 3 evenly distributed over its circumference.
  • the lens 2 has an element body in the form of a lens body 2.1.
  • the lens body 2.1 comprises an optically effective first region 2.2 with an optical axis 2.3.
  • This optically effective region 2.2 which is rotationally symmetrical with respect to the optical axis 2.3, is defined on both sides of the lens 2 by a corresponding optically active surface 2.4 or 2.5 of the lens body 2.1.
  • the lens 2 has an edge region 2.6 which extends radially outward and adjoins the optically active first region 2.2 in the circumferential direction of the lens 2.
  • the circumferential direction of the lens 2 lies in a plane oriented perpendicular to the optical axis 2.3.
  • first holding areas 2.7 are evenly distributed over the circumference of the lens body 2.1.
  • Each holding area 2.7 has a first contact area 2.8, which interacts with the associated first holding device 3 in order to hold the lens 2.
  • the respective first contact region 2.8 is formed on a first projection 2.9 which extends radially away from the optical axis.
  • This first projection 2.9 extends in the circumferential direction of the lens 2 over a limited first circumferential region.
  • This first circumferential area extends over an angular area of approximately 15 °. The first circumferential region thus only extends over approximately 4.2% of the circumference of the lens body 2.1.
  • the first projections 2.9 are produced by removing material of the lens body lying between them in the circumferential direction. This can be done, for example, by milling, grinding or other machining of the lens body 2.1. In this case, a method can advantageously be used which produces surfaces with a lower surface quality than is required for the first contact area.
  • the first projections which could also be referred to as retaining lugs, can thus be produced relatively quickly with little effort.
  • the transition between the cylindrical edge region of the lens and the respective first projection is rounded in order to achieve a favorable stress distribution. It goes without saying, however, that it can also be designed with sharp edges and / or with a multiple offset.
  • the contact area then to be formed on the respective first projection 2.9 does indeed require a higher surface quality.
  • the effort for this is considerably reduced.
  • the first contact region 2.8 has a first contact surface 2.10 and a second contact surface 2.11 on the first projection 2.9.
  • the first contact surface 2.10 continues the first optically active surface 2.4 on the top of the lens 2, while the second contact surface 2.11 continues the second optically active surface 2.5 on the underside of the lens 2. Since both the first optically active surface 2.4 and the second optically active surface 2.5 are curved twice, the first contact surface 2.0 and the second contact surface 2.11 are also curved twice.
  • the first contact surface 2.10 and the second contact surface 2.11 face away from each other.
  • the first holding device 3 has a first holding element 3.1.
  • the first holding element 3.1 has a second contact area 3.2, which cooperates with the first contact area 2.8 on the first projection 2.9 of the lens 2.
  • the second contact area 3.2 is designed as a symmetrical V-shaped groove with a flat third contact surface 3.3, a flat fourth contact surface 3.4 and a rounded groove base 3.5.
  • the third contact surface 3.3 and the fourth contact surface 3.4 face each other. It goes without saying that the groove in other variants of the invention cannot be formed symmetrically due to the consideration of the gravitational force
  • the first holding element 3.1 is resiliently arranged on a first holding body 3.6. It can spring in a direction 3.7 which is at least approximately perpendicular to the optical axis 2.3. In the direction of the optical axis 2.3, the first holding element 3.1 is arranged essentially rigidly on the first holding body 3.6. This is achieved by the central arrangement of the first holding element 3.1 on a bilaterally clamped bending beam 3.8. This bending beam 3.8 is in turn formed by an elongated slot 3.9 in the first holding body 3.6 which extends in the direction of the optical axis 2.3.
  • the respective first holding element 3.1 rests with its second contact area 3.2 with a defined bias in the direction of the optical axis 2.3 against the associated first contact area 2.8 of the lens 2. Due to the resilient design, this preload remains essentially constant even during thermal expansion of the components during operation. In other words, this design achieves thermal decoupling from deformation. Another advantage of this design lies in the compensation of manufacturing tolerances, which is thereby achieved.
  • the rounding radius in the groove bottom 3.5 of the holding element 3.1 is smaller than the radius at the outer end 2.12 of the first projection 2.9 at the transition between the first contact surface 2.10 and the second contact surface 2.11.
  • the first contact surface 2.10 of the lens 2 contacts the third contact surface 3.3 of the first holding element 3.1.
  • an essentially point-shaped contact point results.
  • the second contact surface 2.11 of the lens 2 contacts the fourth contact surface 3.4 of the first holding element 3.1.
  • the double curvature of the second contact surface 2.11 and the planar design of the fourth contact surface 3.4 result in an essentially point-shaped contact point.
  • the term “essentially point-like contact point” is to be understood in such a way that point-like contact would result with ideally rigid contact partners with ideal geometry. In fact, depending on the stiffness of the contact partners and their deviation from the ideal geometry, there is of course a small point-like contact area.
  • This contact surface pairing with two essentially point-shaped contact points per holding device results in a self-adjusting clamping pairing.
  • Level differences between the first holding devices 3 are already compensated for in the contact zone between the first holding device 3 and the lens 2, without any significant introduction of tension into the lens 2. This eliminates the need for complex mounting of the first holding devices 3.
  • the holding devices 3 hold the lens 2 both positively and non-positively in the direction of its optical axis 2.1 and in the radial direction and also frictionally in the circumferential direction of the lens 2.
  • the described design of the contact surfaces and the resilient mounting of the holding elements 3.1 result in a resulting holding force, which is mainly directed in the direction of the optical axis 2.3 and is introduced into the lens 2.
  • the deformations of the lens are essentially limited to the respective protrusion 2.9, and therefore do not significantly influence the optically effective area 2.2.
  • the holding body 3.6 are supported by support elements 5 on a circumferential ring flange 4.1 of the socket 4.
  • the relative position of the holding bodies 3.6 with respect to the flange 4 in the direction of the optical axis 2.3 can be changed via these support elements 5.
  • the lens 2 can be displaced in the direction of the optical axis 2.3.
  • the optical axis 2.3 can also be tilted with respect to the plane of the ring flange 4.1.
  • the holder 4 consists of a material which has at least approximately the same coefficient of thermal expansion as the optical element. Ideal would be B. the pairing quartz-Invar. As a result, there are no thermal expansion differences.
  • the radial spring action of the holding devices then only serves to compensate for the manufacturing tolerances.
  • the level of force required to achieve the force connection within the mount can thus be reduced, which has a positive effect on the deformations of the optical element.
  • the optical element is then largely held in a positive manner in all spatial directions.
  • the respective support element 5 comprises one or more interchangeable spacer elements, so-called spacers, the thickness of which is selected depending on the desired positioning of the lens 2.
  • the respective support element 5 can comprise any passive and / or active actuating devices.
  • the passive actuating devices can be differential screws, etc., for example.
  • the active actuating devices can be, for example, piezo actuators, etc.
  • connection between the holding body 3.6 and the support element 5 can be made in any manner known per se, for example by means of a screw connection, an adhesive connection, a soldered connection, a welded connection, etc.
  • the holding body 3.6 and the support element 5 can be monolithic.
  • the adjustment device can then be integrated in a manner known per se into such a monolithic structure with corresponding solid-state joints.
  • a rotation of the lens 2 about its optical axis 2.3 is possible on the one hand to a certain degree by a corresponding rotation of the lens 2 with respect to the first holding devices 3.
  • the dimension of the projections 2.9 in the circumferential direction of the lens 2 exceeds the dimension of the holding elements in this direction.
  • the first holding devices 3 are monolithic.
  • the material of the respective component can be selected to be function-oriented.
  • the holding element can be made from a material with a high surface hardness in order to ensure permanent absorption of the high contact pressure.
  • the bending beam which ensures the springing of the holding element can then consist of a material with a correspondingly high elasticity, while the material of the holding body is designed for easy coupling to the flange or the supporting element.
  • the individual components can be connected to one another in a manner known per se, for example by means of a screw connection, an adhesive connection, a soldered connection, a welded connection, etc.
  • FIG. 4 shows a schematic representation of a preferred embodiment of the microlithography device 6 according to the invention.
  • the microlithography device 6 comprises an optical projection system 7 with an illumination system 8, a mask 9 and a lens barrel 10.
  • the illumination system 8 illuminates a mask 9.
  • the lens barrel 10 comprises a series of optical modules with optical elements.
  • the optical module 10.1 comprises the optical arrangement 1 from FIG. 1.
  • the support elements 5 comprise active adjusting elements in the form of piezo actuators 5.1.
  • the lens 2 can be displaced with respect to the flange 4 in the direction of the optical axis 7.1 of the projection system 7 via these piezo actuators 5.1 in order to change its distance from the optical elements of the adjacent optical modules.
  • the optical axis of the lens 2 can hereby also with respect to the optical Axis 7.1 can be tilted. Both are controlled by a control device 7.2 connected to the piezo actuators 5.1 and are used in a known manner to influence the imaging properties of the projection system 7.
  • FIG. 5 is a schematic perspective illustration of a further preferred embodiment of the optical element according to the invention in the form of a lens 12.
  • the lens 12 has an element body in the form of a lens body 1 .1.
  • the lens body 12.1 comprises an optically active first area 12.2 with an optical axis 12.3.
  • the lens 12 has an edge region 12.6 which runs radially outward and adjoins the optically active first region 12.2 in the circumferential direction of the lens 12.
  • the circumferential direction of the lens 12 lies in a plane oriented perpendicular to the optical axis 12.1.
  • first holding areas 12.7 are arranged distributed uniformly on the circumference of the lens body 12.1.
  • Each holding area 12.7 has a first contact area 12.8, which interacts with an associated first holding device in order to hold the lens 12.
  • the respective first contact area 12.8 is formed on a first projection 12.9 which extends radially away from the optical axis.
  • This first projection 12.9 extends in the circumferential direction of the lens 12 over a limited first circumferential region.
  • This first circumferential area extends over an angular area of approximately 72 °. The first circumferential region thus extends only over approximately 20% of the circumference of the lens body 12.1.
  • the first projections 12.9 are produced by removing material of the lens body lying between them in the circumferential direction.
  • FIG. 6 is a schematic perspective illustration of a further preferred embodiment of the optical element according to the invention in the form of a lens 22 with a lens body 22.1.
  • the lens body 22.1 comprises an optically active first area 22.2 with an optical axis 22.3.
  • the lens 22 has an edge region 22.6 which runs radially outward and adjoins the optically active first region 22.2 in the circumferential direction of the lens 22.
  • first holding areas 22.7 are arranged distributed uniformly on the circumference of the lens body 22.1.
  • Each holding area 22.7 has a first contact area 22.8, which interacts with the associated first holding device in order to hold the lens 22.
  • the respective first contact region 22.8 is formed on a first projection 22.9 which extends radially away from the optical axis 22.3.
  • the first contact area 22.8 on the first projection 22.9 has a first contact area 22.10 and a second contact area 22.11.
  • the first contact surface 22.10 is conical, while the second contact surface 22.11 lying on the underside of the lens 22 and perpendicular to the optical axis 22.3 is flat.
  • the first contact surface 22.10 and the second contact surface 22.11 face away from each other.
  • the first projection 22.9 extends in the circumferential direction of the lens 2 over a limited first circumferential area. This extends over an angular range of approximately 15 °. The first circumferential region thus only extends over approximately 4.2% of the circumference of the lens body 22.1.
  • the dimension of the first projection 22.9 in the direction of the optical axis 22.3 is further approximately one third of the dimension which the element body 22.1 has in the region adjacent to the first projection 22.9 in the direction of the optical axis.
  • the first projections 22.9 are produced by removing material of the lens body 22.1 lying between them in the circumferential direction and material lying above them in the direction of the optical axis 22.3, as has already been described above.
  • the transition between the cylindrical edge region of the lens and the respective first projection is rounded in order to achieve a favorable stress distribution.
  • the lens material can be removed up to close to the optically effective region 22.2, which results in a considerable reduction in the thickness of lenses in particular Mass of the lens 22 results. This mass reduction has a positive effect on the dynamic behavior of an optical arrangement with the lens 22 thanks to the associated increase in the natural frequencies.
  • FIG. 7 is a schematic perspective illustration of a further preferred embodiment of the optical element according to the invention in the form of a lens 32 with a lens body 32.1.
  • the lens body 32.1 comprises an optically active first region 32.2 with an optical axis 32.3.
  • the lens 32 has an edge region 32.6 which extends radially outward and adjoins the optically active first region 32.2 in the circumferential direction of the lens 32.
  • first holding areas 32.7 are arranged distributed uniformly on the circumference of the lens body 32.1.
  • Each holding area 32.7 has a first contact area 32.8, which interacts with the associated first holding device in order to hold the lens 32.
  • the respective first contact region 32.8 is formed on a first projection 32.9 which extends radially away from the optical axis 32.3.
  • the first contact area 32.8 on the first projection 32.9 has a V-shaped groove running in the circumferential direction with a first contact surface 32.10 and a second contact surface 32.11.
  • the first contact surface 32.10 and the second contact surface 32.11 are flat.
  • the first contact surface 32.10 and the second contact surface 32.11 face each other.
  • the first projection 32.9 extends in the circumferential direction of the lens 2 over a limited first circumferential region. This extends over an angular range of approximately 15 °. The first circumferential region thus only extends over approximately 4.2% of the circumference of the lens body 2.1.
  • the dimension of the first projection 32.9 in the direction of the optical axis 32.3 is still approximately 37% of the dimension which the element body 32.1 has in the region adjacent to the first projection 32.9 in the direction of the optical axis.
  • the first projections 32.9 are produced by first producing base elements 32.13 on the circumference of the lens body 22.1 by removing material from the lens body 22.1, as has already been described above. The transition between the cylindrical edge region of the lens and the respective first projection 32.9 is rounded off in order to achieve a favorable stress distribution.
  • a contact block 32.14, which forms the first contact area 32.8, is then placed on the respective base element 32.13.
  • the contact block 32.14 can be fastened in any suitable manner, for example by welding, soldering, gluing, fusion bonding, etc. It can consist of the same material as the lens body 32.1. It is also possible to use a different material. A material is preferably used which has at least approximately the same coefficient of thermal expansion as the material of the lens body 32.1. In the case of a lens body made of quartz, a material such as Invar or the like can be used for the contact block, for example.
  • This design has the advantage that the starting body of the lens 32 can have a relatively small diameter — which, if at all, only exceeds the diameter in the region of the base elements 32, 13 by a small amount. Only a little expensive lens material then has to be removed to produce the holding regions, which reduces the manufacturing outlay.
  • the contact surfaces 32.10 and 32.11 can simply be created in advance on the contact block 32.14.
  • the lens material can be removed close to the optically effective region 32.2, which results in a considerable reduction in the mass of the lenses, in particular with such thick lenses Lens 32 and thus an improvement in the dynamic behavior of an optical arrangement with the lens 32 results.
  • FIG. 8 is a schematic perspective illustration of a further preferred embodiment of the optical element according to the invention in the form of a lens 42 with a lens body 42.1.
  • the lens body 42.1 comprises an optically active first area 42.2 with an optical axis 42.3.
  • the lens 42 has an edge region 42.6 which runs radially outward and adjoins the optically active first region 42.2 in the circumferential direction of the lens 42.
  • three identical first holding areas 42.7 are evenly distributed over the circumference of the lens body 42.1.
  • Each holding area 42.7 has a first contact area 42.8, which cooperates with an associated first holding device in order to hold the lens 42.
  • the respective first contact area 42.8 extends in the circumferential direction of the lens 42 over a limited first circumferential area. This first circumferential region extends over an angular region of approximately 24 ° and thus only over approximately 6.7% of the circumference of the lens body 42.1.
  • the first contact area 42.8 has a first contact area 42.10 and a second contact area 42.11.
  • the first contact surface 42.10 and the second contact surface 42.11 are flat. They each run inclined to the optical axis 42.3, so that they also extend in the direction of the optical axis 42.3. They face away from each other and are spaced apart in the direction of the optical axis 42.3.
  • the first contact surface 42.10 is arranged in the region of a first circumferential outer edge 42.16 of the lens body 42.1.
  • the second contact surface 42.11 is arranged in the region of a second circumferential outer edge 42.17 of the lens body 42.1.
  • the contact surfaces 42.10 and 42.11 are produced particularly simply in a single operation, in which material of the lens body 42.1 is removed
  • FIG. 9 is a schematic perspective illustration of a further preferred embodiment of the optical arrangement 1 'according to the invention with the lens 2 from FIG. 2.
  • the structure and function of the optical arrangement 1' is basically the same as that of the arrangement 1 from FIG. 1, so that here only the differences are dealt with.
  • the same components are provided with the same reference numbers.
  • the support elements 5 with the piezo actuators 5.1 which adjust the holding devices 3 in the direction of the optical axis 2.3 are not arranged and fastened on an annular flange of the mount but on the inner circumference of the annular mount 4 '.
  • the lens 52 has an element body in the form of a lens body 52.1.
  • the lens body 52.1 comprises an optically active first area 52.2 with an optical axis 52.3.
  • This optically active region 52.2 which is rotationally symmetrical with respect to the optical axis 52.3, is defined on both sides of the lens 52 by a corresponding optically active surface 52.4 or 52.5 of the lens body 52.1.
  • the lens 52 has an edge area 52.6 which runs radially outward and adjoins the optically active first area 52.2 in the circumferential direction of the lens 52.
  • the circumferential direction of the lens 52 lies in a plane oriented perpendicular to the optical axis 52.1.
  • a peripheral contact area 52.8 is arranged in the edge area 52.6 on the circumference of the lens body 52.1. This has two peripheral contact surfaces 52.10 and 52.11. The first contact area 52.8 interacts with the three holding devices 13 and 14 evenly distributed on the circumference in order to hold the lens 52.
  • the first contact area 52.8 has a first contact area 52.10 and a second contact area 52.11 spaced apart in the direction of the optical axis.
  • the first contact surface 52.10 is arranged in the region of a first circumferential outer edge 52.16 of the lens body 52.1.
  • the second contact surface 52.11 is arranged in the region of a second circumferential outer edge 52.17 of the lens body 52.1.
  • the first contact surface 52.10 continues the first optically active surface 52.4 on the top of the lens 52, while the second contact surface 52.11 continues the second optically active surface 52.5 on the bottom of the lens 52.
  • the contact surfaces 52.10 and 52.11 are separated by a cylindrical edge section 52.18.
  • the contact surfaces 52.10 and 52.11 represent a rounding of the respective outer edge 52.16 and 52.17, which extends in the section shown in FIG. 11 over a rounding angle of less than 90 °. They are produced particularly simply in a single operation, in which material of the lens body 52.1 is removed. This can be done, for example, by milling, grinding or other material-removing machining of the lens body 52.1. Only the contact surfaces 52.10 and 52.11 have to have a corresponding surface quality, while the cylindrical edge section 52.18 can be produced using a method which produces surfaces with a lower surface quality than is required for the first contact region 52.8. The contact surfaces 52.10 and 52.11 can be equally quickly generate with little effort with conventional manufacturing facilities that can edit a solid angle of 90 °.
  • first contact surface 52.10 and the second contact surface 52.11 are also curved twice.
  • the first contact surface 52.10 and the second contact surface 52.11 face away from each other.
  • the first holding device 13 has a first holding element 13.1.
  • the first holding element 13.1 has a second contact area 13.2, which interacts with the first contact area 52.8 of the lens 52.
  • the second contact area 13.2 is designed as a V-shaped groove with a flat third contact surface 13.3, a flat fourth contact surface 13.4.
  • the third contact surface 13.3 and the fourth contact surface 13.4 face each other.
  • the first holding element 13.1 is resiliently arranged on a first holding body 13.6. It can spring in a direction 13.7 which is at least approximately perpendicular to the optical axis 52.3. In the direction of the optical axis 52.3, the first holding element 13.1 is arranged essentially rigidly on the first holding body 13.6. This is achieved by the central arrangement of the first holding element 13.1 on a bilaterally clamped bending beam 13.8. This bending beam 13.8 is in turn formed by an elongated slot 13.9 in the first holding body 13.6 which is continuous in the direction of the optical axis 52.3.
  • the second holding devices 14 differ from the first holding device 14 only in that their holding element extends over the entire width in the circumferential direction and is not spring-mounted. This increases the natural frequency of the system in an advantageous manner.
  • the first holding element 13.1 lies with its second contact area 13.2 with a defined bias in the direction of the optical axis 52.3 on the associated first contact area 52.8 of the lens 52. Due to the resilient design, this preload remains essentially constant even when the components are thermally expanded. In other words, this design achieves thermal decoupling from deformation. Another advantage of this design lies in the compensation of manufacturing tolerances, which is thereby achieved.
  • the first contact surface 52.10 of the lens 52 contacts the third contact surface 13.3 of the first holding element 13.1.
  • an essentially point-shaped contact point results.
  • the second contact surface 52.11 of the lens 52 contacts the fourth contact surface 13.4 of the first holding element 13.1.
  • the double curvature of the second contact surface 52.11 and the flat design of the fourth contact surface 13.4 result in an essentially point-shaped contact point.
  • This contact surface pairing with two essentially point-shaped contact points per holding device results in a self-adjusting clamping pairing.
  • Level differences between the first holding device 13 and the second holding devices 14 are already compensated for in the respective contact zone between the holding device 13 or 14 and the lens 52 without there being any substantial introduction of tension into the lens 52. This eliminates the need for expensive mounting of the holding devices 13 and 14.
  • the holding devices 13 and 14 hold the lens 52 both positively and non-positively in the direction of its optical axis 52.1 and in the radial direction and also frictionally in the circumferential direction of the lens 52.
  • the holding devices 13 and 14 are supported by support elements 5 "on the socket 4".
  • the relative position of the holding bodies 13.6 with respect to the flange 4 in the direction of the optical axis 52.3 can be changed via these support elements 5 ′′. This allows the lens 52 to be displaced in the direction of the optical axis 52.3.
  • the optical axis 52.3 can also be shifted with respect to the plane the 4 "version.
  • the respective support element 5 ′′ comprises one or more interchangeable spacer elements, so-called spacers, the thickness of which is selected depending on the desired positioning of the lens 52.
  • the respective support element 5 can comprise any passive and / or active actuating devices Actuators can be, for example, differential screws, etc.
  • the active actuators can be, for example, piezo actuators, etc.
  • connection between the holding devices 13 or 14 and the support element 5 can be made in any manner known per se, for example by means of a screw Connection, an adhesive connection, a soldered connection, a welded connection, etc.
  • the holding devices 13 or 14 and the support element 5 can be monolithic.
  • the adjusting device can then be integrated in a manner known per se into such a monolithic structure with corresponding solid-state joints.
  • Rotation of the lens 52 about its optical axis 52.3 is possible on the one hand by a corresponding rotation of the lens 52 with respect to the holding devices 13 and 14. It goes without saying that such a rotation of the lens 52 about its optical axis 52.3 is also possible by a corresponding rotation of the holding devices 13 and 14 with respect to the flange 4 "and, additionally or alternatively, also by a rotation of the flange 4".
  • all of the first holding devices 13 are monolithic.
  • a different number of holding devices may also be provided. In particular, more than three holding devices can be provided.
  • FIG. 13 is a schematic perspective illustration of a first holding device 23 for a further preferred embodiment of the optical arrangement according to the invention.
  • the first holding device 23 differs from the first holding device 3 from FIG. 3 only in that the first holding element 23.1 is resiliently arranged on the first holding body 23.6 by means of a bending beam 23.8 which is only clamped on one side.
  • the bending beam 23.8 is in turn formed by an elongated slot 23.9 in the first holding body 23.6.
  • FIGS. 14 to 21 show, based on schematic partial sections, different possibilities of the contact surface pairing between the optical element 62, 72, 82, 92, 102, 112, 122 and 132 and the respective first holding device 53, 33, 43, 23, 63, 73, 83 and 93 respectively.
  • the contact surface pairings from FIGS. 14 and 15 are the same as the contact surface pairings that can be used with the lens 32 from FIG. 7. They are also suitable for optical elements with the appropriate thickness.
  • the contact surface pairings from FIGS. 17, 18 and 20 are identical to the contact surface pairing for a plane-parallel plate 92, 102 and 112, as can be used with the lens 52 from FIG. 10. They are also particularly suitable for thin optical elements. It goes without saying that in the sense of the present invention, in the case of such plane-parallel plates or the like, the optical axis of the optical element should correspond to the axis of symmetry of the optical element, which is perpendicular to the plane in which the optical element mainly extends.
  • the contact surface pairing from FIG. 21 is similar to the contact surface pairing that can be used with the lens 22 from FIG. 6.
  • FIGS. 16 and 19 show special cases of contact surface pairing, each with a single contact point.
  • an essentially linear contact point can also be provided instead of an essentially point-shaped contact point.
  • a flat contact point can be provided from the outset.
  • the contact points of different types can also be combined with one another as desired within a contact surface pairing.
  • FIGS. 22 to 25 show different variants of holding devices 103, 113, 123 and 24 as they can be used, for example, to hold the lens 32 from FIG. 7.
  • FIG. 22 is a schematic partial section through the first holding device 103, in which the first holding element 103.1 is resiliently arranged on the first holding body 103.6 in the direction 103.7 by means of a cantilever beam 103.8 clamped on one side.
  • FIG. 23 is a schematic partial section through the first holding device 113, in which the first holding element 113.1 is resiliently arranged on the two-part first holding body 113.6 in the direction 113.7 by means of two bending beams 113.8 and 113.10 clamped on both sides.
  • the bending beams 113.8 and 113.10 form a parallelogram of the holding element 113.1.
  • FIG. 24 is a schematic perspective illustration of the first holding device 123, in which two first holding elements 123.1 are each connected by means of two parallel bending beams 113.8 and 113.10, which are connected at both ends, to a bending beam connected on one side to the first holding body 123.6.
  • This will next to the resilient bearing in the direction of 123.7 also achieved a distribution of the contact loads over several contact points.
  • This design is particularly suitable for holding optical elements in which the first holding area extends over a corresponding length in the circumferential direction.
  • the first holding device 123 consists of a material which has the same coefficient of thermal expansion as the optical element. This has the advantage that there is no relative movement between the optical element and the holding device in the event of temperature differences. This means that there are no friction effects associated with stick-slip effects and hysteresis effects at the contact points.
  • This solution is therefore ideally suited for systems in which particularly high demands are placed on the positional stability of the optical element.
  • FIG. 25 is a schematic perspective illustration of the second holding device 24, in which the second holding element 24.1 is rigidly arranged on the second holding body 24.2.
  • This second holding device 24 is suitable for holding the lens 32 from FIG. 7 with only one resilient first holding device, as was basically described in connection with FIG. 10.
  • FIG. 26 Arrangement 1 '.
  • the structure and function of the optical arrangement 1 ′ ′′ is basically the same as that of the arrangement 1 from FIG. 1, so that the differences are mainly dealt with here.
  • the lens 142 has an element body in the form of a lens body 142.1.
  • the lens body 142.1 comprises an optically effective first area with an optical axis 142.3.
  • This optically active region 142.2 which is rotationally symmetrical with respect to the optical axis 142.3, is defined on both sides of the lens 142 by a corresponding optically active surface of the lens body 142.1.
  • the lens 142 has a peripheral area which adjoins the optically active first area and extends in the circumferential direction of the lens 142.
  • the circumferential direction of the lens 142 lies in a plane oriented perpendicular to the optical axis 142.3.
  • three identical first holding areas 142.7 are arranged distributed uniformly on the circumference of the lens body 142.1.
  • Each holding area 142.7 has a first contact area 142.8, which cooperates with the associated first holding device 133 in order to hold the lens 142.
  • the respective first contact area 142.8 is formed on a first projection 142.9 which extends radially away from the optical axis 142.3.
  • This first projection 142.9 which could also be called a retaining lug, extends in the circumferential direction of the lens 142 over a limited first circumferential region.
  • This first circumferential region extends over an angular region of approximately 15 °. The first circumferential region therefore only extends over approximately 4.2% of the circumference of the lens body 142.1.
  • the first contact region 142.8 has a first contact surface 142.10 and a second contact surface 142.11 on the first projection 142.9.
  • the first contact surface 142.10 and the second contact surface 142.11 are each jacket surfaces of a cylinder jacket segment, ie in each case simply curved.
  • the surface axis runs perpendicular to the plane of the drawing, which in turn is parallel to the optical axis 142.3.
  • the first contact surface 142.10 and the second contact surface 142.11 face away from each other.
  • the first holding device 133 has a first holding element 133.1.
  • the first holding element 133.1 has a second contact area 133.2, which cooperates with the first contact area 142.8 on the first projection 142.9 of the lens 142.
  • the second contact area 133.2 is designed as a symmetrical V-shaped groove running essentially in the radial direction with a flat third contact surface 133.3, a flat fourth contact surface 133.4 and a rounded groove base.
  • the third contact area 133.3 and the fourth contact area 133.4 face each other. It goes without saying that the groove in other variants of the invention cannot be formed symmetrically due to the consideration of the gravitational force
  • the first holding element 133.1 is resiliently arranged on a first holding body 133.6. It can spring in a direction 133.7 that extends at least approximately in the circumferential direction of the lens 142. In the direction of the optical axis 142.3, the first holding element 133.1 is arranged essentially rigidly on the first holding body 133.6. This is achieved by the above-described central arrangement of the first holding element 133.1 on a bilaterally clamped bending beam. This bending beam is again through an elongated slot 133.9 formed in the first holding body 133.6 in the direction of the optical axis 142.3.
  • the first holding device 133 also has a second holding element 133.12, which lies opposite the first holding element 133.1 in the circumferential direction of the lens 142 with respect to the first projection 142.9.
  • the second holding element 133.12 is constructed symmetrically to the first holding element 133.1 with respect to the first projection 142.9. It interacts with contact surfaces on the projection 142.9, which are configured symmetrically with respect to the first projection 142.9 to the first contact surface 142.10 or the second contact surface 142.11.
  • the second holding element 133.12 is rigidly arranged on a second holding body 133.13.
  • the respective first holding element 133.1 bears against the associated first contact area 142.8 of the lens 142 with a defined bias in the circumferential direction of the lens 142.
  • the preload accordingly also acts between the second holding element 133.12 and the projection 142.9. In other words, the lens 142 is clamped in the circumferential direction.
  • the contact surfaces between the first holding device 133 and the first projection 142.9 are designed such that there are four essentially point-shaped contact points. However, it goes without saying that they can also be designed in such a way that four essentially linear contact points result.
  • This contact surface pairing with two essentially point-shaped contact points per holding device results in a self-adjusting clamping pairing.
  • This z. B. Differences in level between the first holding devices 133 are already compensated for in the contact zone between the first holding device 133 and the lens 142 without any substantial introduction of tension into the lens 142. This eliminates the need for expensive mounting of the first holding devices 133.
  • the holding devices 133 hold the lens 142 both positively and non-positively in the direction of its optical axis 142.3 and in the circumferential direction as well as frictionally in the radial direction of the lens 142.
  • the described design of the contact surfaces and the resilient mounting of the holding elements 133.1 result in a resulting holding force, which is predominantly directed in the circumferential direction of the lens 142 and is introduced into the lens 142.
  • the deformations of the lens are essentially limited to the respective projection 142.9 and therefore do not significantly influence the optically effective area.
  • the holding bodies 133.6 and 133.13 are each supported on a circumferential ring flange 4.1 '"of the holder 4'" by means of support elements 5 '".
  • the relative position of the holding bodies 133.6 and 133.13 with respect to the flange 4'" in the direction of the optical can be determined by means of these support elements 5 '"
  • Axis 142.3 can be changed in this way, on the one hand, the lens 142 can be displaced in the direction of the optical axis 142.3, but the optical axis 142.3 can also be tilted with respect to the plane of the ring flange 4.1 '".
  • the socket 4 '" is made of a material that has at least approximately the same coefficient of thermal expansion as the optical element.
  • the quartz-Invar pairing would be ideal. This does not result in any thermally dependent differences
  • the tangential spring action of the holding devices then only serves to compensate for the manufacturing tolerances, so that the force level required to achieve the force fit within the mount can be reduced, which has a positive effect on the deformations of the optical element.
  • the optical element is then in all Spatial directions kept largely form-fitting.
  • the respective support element 5 '" comprises one or more interchangeable spacer elements, so-called spacers, the thickness of which is selected depending on the desired positioning of the lens 142.
  • the respective support element 5'" can be any passive and / or active actuating device include.
  • the passive actuating devices can be differential screws, etc., for example.
  • the active actuating devices can be, for example, piezo actuators, etc.
  • connection between the holding body 133.6 and the support element 5 '" can be made in any known manner, for example by means of a screw connection, an adhesive connection, a soldered connection, a welded connection etc.
  • the holding body 133.6 and the support element 5'" can be monolithic be trained.
  • the Ver- The actuating device can then be integrated in a manner known per se into such a monolithic structure with corresponding solid-state joints.
  • the first holding devices 133 are monolithic.
  • the material of the respective component can be selected to be function-oriented.
  • the holding element can be made of a material with a high surface hardness in order to ensure permanent absorption of the high contact pressure.
  • the bending beam which ensures the springing of the holding element can then consist of a material with a correspondingly high elasticity, while the material of the holding body is designed for easy coupling to the flange or the supporting element.
  • the individual components can be connected to one another in a manner known per se, for example by means of a screw connection, an adhesive connection, a soldered connection, a welded connection, etc.
  • any other contact geometries can also be selected.
  • all of the contact geometries disclosed in the above exemplary embodiments, for example the contact geometries from FIGS. 14 to 21, can also be used here.

Abstract

L'invention concerne un élément optique, notamment une lentille, qui comprend un corps formant l'élément (2.1), pourvu d'une première zone optiquement active (2.2) présentant un axe optique (2.3), et une zone de bordure (2.6) entourant le corps formant l'élément (2.1) dans une direction périphérique de ce dernier, une première zone de retenue (2.7) étant placée dans la zone de bordure. La première zone de retenue (2.7) présente au moins une première zone de contact (2.8) conçue pour coopérer avec un premier dispositif de retenue (3) servant à retenir le corps formant l'élément (2.1). La zone de bordure (2.6) délimite la première zone de contact (2.8) dans le sens périphérique du corps formant l'élément (2.1) uniquement dans une première région périphérique délimitée dans le sens périphérique, et/ou la zone de bordure (22.6) délimite la première zone de contact (22.8) en direction de l'axe optique (22.3) uniquement au niveau de deux surfaces de contact (22.10, 22.11) du corps formant l'élément (22.1) qui sont espacées dans le sens de l'axe optique (22.3) et qui s'étendent respectivement dans la région de l'arête extérieure périphérique (42.16, 42.17) du corps formant l'élément (22.1), au moins une desdites surfaces de contact s'étendant partiellement en direction de l'axe optique (22.3).
EP05733315A 2004-04-13 2005-04-13 Element optique Withdrawn EP1735651A2 (fr)

Applications Claiming Priority (2)

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DE102004018656A DE102004018656A1 (de) 2004-04-13 2004-04-13 Optisches Element
PCT/EP2005/003900 WO2005101082A2 (fr) 2004-04-13 2005-04-13 Element optique

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JP (1) JP4653160B2 (fr)
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WO (1) WO2005101082A2 (fr)

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US20070201151A1 (en) 2007-08-30
WO2005101082A3 (fr) 2006-01-26
JP4653160B2 (ja) 2011-03-16
DE102004018656A1 (de) 2005-11-03
WO2005101082A2 (fr) 2005-10-27
JP2007532961A (ja) 2007-11-15
US7529046B2 (en) 2009-05-05

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