AU2001277758A1 - Optical element holding device - Google Patents

Optical element holding device

Info

Publication number
AU2001277758A1
AU2001277758A1 AU2001277758A AU7775801A AU2001277758A1 AU 2001277758 A1 AU2001277758 A1 AU 2001277758A1 AU 2001277758 A AU2001277758 A AU 2001277758A AU 7775801 A AU7775801 A AU 7775801A AU 2001277758 A1 AU2001277758 A1 AU 2001277758A1
Authority
AU
Australia
Prior art keywords
optical element
holding device
element holding
held
coordinate axes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001277758A
Inventor
Yuichi Shibazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2001277758A1 publication Critical patent/AU2001277758A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
    • G02B13/143—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lens Barrels (AREA)
  • Gyroscopes (AREA)
  • Optical Integrated Circuits (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

A holding apparatus characterized by: a holding portion (42) for holding a member to be held (38), wherein the holding portion includes a drive mechanism (85a, 85b, 108, 143) for providing the member to be held with three movements along three coordinate axes (R, ¸, Z) with an origin being substantially the center of the member to be held and two rotations about at least two coordinate axes of the three coordinate axes.
AU2001277758A 2000-08-18 2001-08-10 Optical element holding device Abandoned AU2001277758A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000-248429 2000-08-18
JP2000248429 2000-08-18
JP2000-248430 2000-08-18
JP2000248430 2000-08-18
PCT/JP2001/006917 WO2002016993A1 (en) 2000-08-18 2001-08-10 Optical element holding device

Publications (1)

Publication Number Publication Date
AU2001277758A1 true AU2001277758A1 (en) 2002-03-04

Family

ID=26598082

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001277758A Abandoned AU2001277758A1 (en) 2000-08-18 2001-08-10 Optical element holding device

Country Status (8)

Country Link
US (2) US7154684B2 (en)
EP (2) EP1312965B1 (en)
KR (1) KR100775796B1 (en)
AT (1) ATE352052T1 (en)
AU (1) AU2001277758A1 (en)
DE (1) DE60126103T2 (en)
TW (1) TW521317B (en)
WO (1) WO2002016993A1 (en)

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KR100775796B1 (en) 2007-11-12
US7420752B2 (en) 2008-09-02
US20070121224A1 (en) 2007-05-31
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EP1312965B1 (en) 2007-01-17
EP1312965A1 (en) 2003-05-21
KR20020041822A (en) 2002-06-03
TW521317B (en) 2003-02-21
US7154684B2 (en) 2006-12-26
DE60126103D1 (en) 2007-03-08
DE60126103T2 (en) 2007-11-15
ATE352052T1 (en) 2007-02-15
EP1312965A4 (en) 2003-08-13
US20020163741A1 (en) 2002-11-07
WO2002016993A1 (en) 2002-02-28

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