JPH10232363A - Optical scanning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanning device having a low parts count, a stable beam form, and a large deflection angle obtainable, and permitting to reduce a physical size and weight. SOLUTION: A refracting interface 6b is a hemispheric surface, and forms a rotation symmetry about two rotation axes A1 and A2 as symmetrical axes. Even if reflected light Lo is directed in any direction by rotating a lens member 6, laser light Li is made incident on the lens member 6 always in a fixed state. Further, since an angle of refracting interface 6b to the reflected light Lo is also constant, the laser light exits from the lens member 6 to outside always in a fixed state. Therefore, a shape of the laser light becomes stable even if it is scanned in any direction, and detection accuracy is stabilized and high precision can be maintained. Further, since incident and exit directions of the laser light allow this device to disregard location of other optical, elements, a large deflection angle is obtained, and a low parts count is required for this device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanning device used for a laser radar, a bar code reader, a laser copying machine, a laser printer and the like.

[0002]

2. Description of the Related Art Laser radars, for example, laser radars mounted on automobiles, are used for detecting the distance between a host vehicle and a preceding vehicle or obstacle. A conventional laser radar has, for example, a configuration as shown in FIG. Here, the laser light emitted from the laser diode 202 is
After passing through the cylindrical lens 206 and the like, an appropriate light beam 208 having an elliptical shape or the like is formed.
Is deflected by the output reflecting mirror 210a and is output to an object 212 such as a vehicle ahead. Further, the reflected light 214 reflected from the object 212 is detected by the light receiving unit 220 via the light receiving reflector 216, the condenser lens 218, and the like.

The distance to the object 212 can be detected from the time from the emission of the laser beam to the reception of the laser beam, and the direction of the object 212 can be detected from the rotational position of the optical scanning device 210. As the optical scanning device 210, a configuration in which a mirror surface such as a rotary polygon mirror, a pyramidal mirror, or a galvano mirror is rotated by a motor or the like is known.

Further, as described in JP-A-7-128602 and JP-A-7-92409, a mirror is supported by an elastic member, and the elastic member is bent or twisted to generate a mirror. An optical scanning device that vibrates the light has also been proposed.

[0005]

However, in many cases, these optical scanning devices have only a deflection function by the turning operation of a plane mirror, so that a small and lightweight laser diode is used as a light source of a laser radar. Requires an optical element such as a collimator lens for condensing the spread of emitted light due to diffraction and a cylindrical lens for correcting an elliptical beam shape. Conventionally, these lenses are individually arranged between a laser diode and an optical scanning device, and after condensing and correcting laser light, deflection is performed by the optical scanning device. There are problems that it is difficult to make space, and that it is necessary to align the optical axis of each component.

On the other hand, with respect to these problems, a technique has been proposed in which an optical scanning device has a function of condensing and correcting a laser beam. For example, as described in JP-A-5-11203, an optical scanning device having a reflecting surface having a curved surface shape and having a correction function,
As described in Japanese Patent Publication No. 2 (1994), by moving an optical scanning lens and passing laser light off the axis of the lens,
There are those that collect and deflect light.

However, when a curved mirror is turned and deflected, if the deflection angle is to be increased, the off-axis of the reflecting surface is used, so that a large amount of aberration is generated and the focused beam is generated. Is not constant with respect to the deflection angle. This also applies to an optical scanning device that moves a light scanning lens and passes laser light off the axis of the lens.

The present invention has been made in view of the above circumstances, and has a small number of parts, a stable beam shape, a large deflection angle, and a small size and light weight including a deflection direction detection mechanism. It is an object of the present invention to provide an optical scanning device capable of achieving the following.

[0009]

According to the optical scanning device of the present invention, the lens member itself includes a refracting surface for condensing the irradiation light and a flat reflecting surface for reflecting the irradiation light. Have. The refracting surface is rotationally symmetric with respect to one or two symmetry axes, and the entire lens member is rotatably supported by the support means about the symmetry axis included in the reflection surface. ing.

Therefore, when the lens member is rotated, the refracting surface and the reflecting surface rotate integrally. Since this rotation is a rotation about an axis of symmetry in which the refraction surface has a rotationally symmetric relationship, the refraction surface is always constant in its position and angle with respect to incident irradiation light at any rotational position. . Further, since the axis of symmetry exists in the reflecting surface, the position is always constant with respect to the incident irradiation light only at a different rotation angle at any rotating position of the reflecting surface. Also, the irradiation light reflected by the reflecting surface is
Again, although transmitted through the refraction surface, since the axis of symmetry is present in the reflection surface, even if the irradiation light is reflected at any angle, the position and angle of the refraction surface are always constant with respect to the irradiation light. is there.

Therefore, the irradiation light can be emitted and scanned in an arbitrary direction by the rotation of the lens member, and the beam shape is stable. Further, in the rotation of the lens member, a large deflection angle can be obtained because the lens member itself can collect and reflect light and scan by rotation without considering the arrangement of other optical elements. As a result, miniaturization and weight reduction are realized.

Incidentally, the refracting surface may be composed of a part or all of a spherical surface. In this case, the reflection surface is arranged at a position including the spherical center point of the refraction surface. Then, the entire lens member is rotatably supported by the support means around the spherical center point. Therefore, when the lens member is rotated, the refraction surface and the reflection surface rotate integrally. This rotation is
Since the rotation is at the center point of the refraction surface that is a part or all of the spherical surface, the refraction surface is always constant in its position and angle with respect to the incident irradiation light at any rotational position. Therefore, as in the previous case,
The irradiation light can be emitted and scanned in an arbitrary direction by rotating the lens member, and the beam shape is stable. Further, in the rotation of the lens member, a large deflection angle can be obtained because the lens member itself can collect and reflect light and scan by rotation without considering the arrangement of other optical elements. As a result, miniaturization and weight reduction are realized.

The supporting means may be constructed so as to be capable of rotatably supporting the lens member depending on the relationship between the shaft and the bearing. May be rotatably supported. In other words, the supporting means may be configured integrally as a whole, and may support the lens member rotatably around the axis of symmetry or the center point included in the reflecting surface by its own elastic deformation. By doing so, the number of parts can be further reduced, and the manufacturing cost can be reduced. In this case, the lens member (or a part thereof) and the supporting means may be integrally formed of an optical material.

The reflecting surface of the lens member may be formed by depositing a metal material or a dielectric on a flat portion of the lens member. Further, a reflecting surface may be formed by a plane reflecting mirror which is joined to a part of the lens member while satisfying optical matching. In this case, the plane reflecting mirror can be formed integrally with the supporting means in advance, and if the plane reflecting mirror and the supporting means are formed integrally as described above, the number of parts can be reduced.

In addition to the above-described configuration, an irradiation light transmitting portion provided on a part of the reflection surface is further provided, and the irradiation direction of the irradiation light transmitted through the irradiation light transmitting portion is detected by the irradiation direction detecting means. May be configured. Alternatively, in addition to the above-described configuration, all or a part of the reflection surface may be a half mirror, and the irradiation direction of the irradiation light transmitted through the half mirror may be detected by the irradiation direction detection unit.

As described above, since the irradiation direction of the irradiation light transmitted through the irradiation light transmitting portion and the half mirror corresponds to the rotational position of the lens member, the irradiation direction is determined based on the irradiation direction detected by the irradiation direction detecting means. Thus, the rotational position of the lens member can be detected. Further, since the rotational position of the lens member also corresponds to the emission direction of the irradiation light by the reflection surface, the scanning direction by the irradiation light can be detected based on the detected irradiation direction. In addition, since the direction of the illuminating light is detected at the point after passing through the reflecting surface and exiting behind the lens member, the configuration is simple and compact, and the irradiating direction detecting means is provided in the space behind the lens member. However, the optical scanning device hardly increases in size and contributes to the reduction in size and weight of the device.

An auxiliary refracting means such as a prism is provided in the irradiation light transmitting section to adjust the direction of the irradiation light transmitted through the reflecting surface, and to guide the irradiation light to a position where the irradiation direction detecting means can be easily arranged. Is also good. By doing so, the degree of freedom in space adjustment is increased, which contributes to a reduction in the size and weight of the device.

The reflecting surface is not formed by providing a special reflecting film or joining a plane reflecting mirror, but is caused by a difference in the refractive index between the inside and the outside of the lens member in the plane portion of the lens member. Light reflection may be used. In this case, there is no need to provide a reflecting film or join a plane reflecting mirror, and the manufacturing cost is reduced.

Further, the irradiation direction of a part of the irradiation light transmitted through the reflecting surface may be detected by the irradiation direction detecting means. Also in this configuration, as described above, the optical scanning device hardly increases in size and contributes to the reduction in size and weight of the device. In order to control the scanning trajectory of the irradiation light, a driving unit and a driving control unit are further provided.
In the driving means, the lens member is rotated around the axis of symmetry or the center point included in the reflection surface, and in the driving control means,
Based on the irradiation direction of the irradiation light detected by the irradiation direction detection means, adjust the rotation of the lens member by the driving means,
The scanning locus of the irradiation light is controlled.

The function of realizing such drive control means of the optical scanning device in a computer system is provided as, for example, a program activated on the computer system side. In the case of such a program, for example,
Floppy disk, magneto-optical disk, CD-ROM,
It can be used by storing it in a machine-readable storage medium such as a hard disk, loading it into a computer system as needed, and starting it. In addition, ROM
Alternatively, the program may be stored as a machine readable storage medium such as a ROM or a backup RAM, and the ROM or the backup RAM may be incorporated in a computer system and used.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION

[First Embodiment] FIG. 1 is a perspective view showing a configuration of an optical scanning device 2 as a first embodiment to which the above-described invention is applied.

The optical scanning device 2 comprises a support member 4 as a support means and a lens member 6. The support member 4 includes a disk-shaped lens support 8, a rectangular support frame 10,
The support shaft 1 for supporting the lens support 8 rotatably about the rotation axis A1 with the opposed side members 4a and 4b of the support frame 10.
2, a rotation actuator 16 such as a motor that is attached to the support frame 10 and drives the lens support 8 to rotate about the rotation axis A1 via the support shaft 14, and the support frame 10 is orthogonal to the support shafts 12, 14. And a rotary actuator 20 such as a motor for driving the support member 4 to rotate about the rotation axis A2 via the support shaft 18. The rotation actuator 20 is fixed to a fixed base (not shown),
The support shaft 19 is mounted on the same fixed base.

The lens member 6 has a hemispherical shape and is made of glass,
It is formed of an optical material, such as a transparent resin or a silicon crystal, that refracts laser light output from the laser diode 26 from the infrared to the visible region. On the circular bottom surface 6a of the lens member 6, a material 22 such as a metal material or a dielectric material for forming the reflection surface 24 is deposited as shown in FIG. 2A, and as shown in FIG. The reflection layer 6c is formed. The surface of the reflection layer 6c on the lens member 6 side is
The reflection surface 24 is formed.

The two rotation axes A1 and A2 are present in the reflection surface 24, and are orthogonal to each other at the center of the reflection surface 24. Therefore, by adjusting the rotation position by the rotation actuators 16 and 20, the reflection surface 24 can be directed in any direction. However, the light is emitted from the laser diode 26 fixed outside the optical scanning device 2 toward the center of the reflection surface 24 (the intersection of the rotation axes A1 and A2 and the center of the hemispherical refraction surface 6b). Since the laser light has to be emitted by transmitting through the lens member 6, the direction in which the reflecting surface 24 is directed is also maximized so that the rotation actuator 16, The rotation range of 20 is limited.

The refracting surface 6b, which is the surface of the lens member 6, is a hemispherical surface, and is rotationally symmetric with respect to the two rotation axes A1 and A2, respectively. Therefore, even if the laser diode 26 is rotated to any position where the laser light is received by the refraction surface 6b, the positional relationship between the laser diode 26 and the refraction surface 6b is always the same, and the refraction surface 6b with respect to the incident light Li. Is the same.

Therefore, in order to change the scanning direction of the laser beam emitted from the optical scanning device 2, the laser beam is always constant regardless of the direction in which the lens member 6 is rotated to direct the reflected light Lo in any direction. The light enters the lens member 6 in this state. Also, the reflected light Lo of the laser light reflected on the reflection surface 24 is reflected at the center of the reflection surface 24 and passes through the refraction surface 6b from inside the lens member 6, so that the lens member 6 is rotated. Regardless of the direction in which the reflected light Lo is directed, the positional relationship between the center of the reflection surface 24 and the refraction surface 6b is the same, and the angle of the refraction surface 6b with respect to the reflection light Lo is the same. Light is emitted from the lens member 6 to the outside in a constantly constant state. Here, the converging and collimating are always performed in a constant state by the lens member 6, and parallel light beams are emitted from the lens member 6 to the outside. In FIG. 3, the laser diode 26 is disposed at the focal point of the lens member 6. However, by disposing the laser diode 26 between the focal point and the lens member 6, diffused laser light is emitted from the lens member 6. The laser beam may be emitted from the lens member 6 by concentrating the laser diode 26 from the lens member 6 rather than the focal point.

FIGS. 3 (a) and 3 (b) show the relationship between the incident light Li and the reflected light Lo with respect to the refraction surface 6b at each of the two angles rotated about the rotation axis A1. Indicates no change. This is the same for the rotation axis A2, and also when the two rotation axes A1 and A2 are simultaneously rotated.

Therefore, the laser beam can be emitted and scanned in an arbitrary direction by the rotation of the lens member 6, and the shape of the laser beam becomes stable even when scanned at any angle, and the detection accuracy is stable. High accuracy can be maintained. The stability of the shape of the laser beam means that the spatial resolution can always be kept constant when used in a laser radar or the like, and has the effect that stable and precise detection becomes possible.

Further, the optical processing is only refraction and reflection at the lens member 6, and the number of parts of the optical scanning device 2 can be reduced. Since the arrangement of the optical elements does not need to be considered, the scanning range is not limited much by the rotation of the lens member 6, so that a large deflection angle can be obtained.

The rotary actuators 16 and 20 correspond to driving means. [Embodiment 2] FIG. 4 is a perspective view showing a configuration of an optical scanning device 32 as Embodiment 2 to which the above-described invention is applied.

The optical scanning device 32 includes a support member 34 as support means and a lens member 36. As shown in FIG. 5, the support member 34 is configured to rotate the lens support 38 by the rotation axis B using a disc-shaped lens support 38, a rectangular support frame 40, and opposed side members 40 a and 40 b of the support frame 40.
1, support shafts 42 and 44 rotatably supported, and support frame 4
0, the rotation actuators 46a, 46b, 46c, 46d of the support shafts 42, 44, the rectangular fixed frame 47 disposed concentrically outside the support frame 40, and the side members of the fixed frame 47. The supporting frame 40 is rotated by the side members 47a and 47b opposed to each other in a direction orthogonal to the rotation axis B1.
2, supporting shafts 48 and 49 rotatably supported by 2, and actuators 50 a, 50 b, 50 c and 50 d for rotating the supporting shafts 48 and 49 provided on the fixed frame 47.

The support member 34 includes actuators 46a to 46a.
Parts other than 46d and 50a to 50d are integrally formed of an elastic material such as metal, glass, or silicon crystal. A reflecting surface 38a is formed on the upper surface of the integrally formed lens support base 38 in the same manner as in the first embodiment, and the circular bottom surface 36a of the hemispherical lens member 36 is formed on the reflecting surface 38a by an ultraviolet curable resin or the like. Bonding in an optical matching state with an adhesive.

Further, with respect to the side members 40a, 40b of the support frame 40 on which the support shafts 42, 44 are provided, a thin piezoelectric element is adhered to one surface side of the side members 40a, 40b with the support shafts 42, 44 therebetween. Actuators 46a to 46d. Similarly, with respect to the side members 47a and 47b of the fixed frame 47 provided with the support shafts 48 and 49, a thin piezoelectric element is adhered to one surface side of the side members 47a and 47b with the support shafts 48 and 49 therebetween. 50a to 50d.

The optical scanning device 32 thus formed is
As shown in FIG. 4, the laser diode 56 is arranged toward the center of the reflecting surface 38a, and the actuators 46a to 46a are arranged.
When a driving voltage is applied to 46d and 50a to 50d, the lens member 36 can be rotated within a predetermined range around the two rotation axes B1 and B2.

Therefore, similarly to the first embodiment, the laser beam from the laser diode 56 can be scanned two-dimensionally. Here, the actuators 46a-4
In FIG. 6D, the piezoelectric elements of one of the actuators 46a and 46b are contracted by applying a driving voltage, and the piezoelectric elements of the other actuators 46c and 46d are expanded by applying a driving voltage, with the support shafts 42 and 44 interposed therebetween. like,
The support shafts 42 and 44 can be rotated around the rotation axis B1. In addition, by extending the piezoelectric elements of one of the actuators 46a and 46b by applying a drive voltage and contracting the piezoelectric elements of the other actuators 46c and 46d by applying a drive voltage, the support shafts 42 and 44 can be rotated in opposite directions. .

As a result, the lens support base 38 supported by the support shafts 42 and 44 rotates, and the lens member 36 can be rotated around the rotation axis B1. Similarly to the case of the support frame 40, also in the fixed frame 47, the support shafts 48 and 49 can be rotated by driving the actuators 50a to 50d, and the support frame 40 can be rotated around the rotation axis B2. For this reason, the actuators 46a to 46
d, the lens member 36 is driven by the driving of 50a to 50d.
It is possible to rotate around two rotation axes B1 and B2. Here, the rotation axes B1 and B2 are within the reflection surface 38a.

Therefore, the optical scanning device 3 of the present embodiment
In the second embodiment, the same effects as those of the first embodiment are obtained, and since the support member 34 has a simple structure and is integrally formed, the number of parts is further reduced, and the manufacturing cost can be reduced. Note that the actuators 46a to 46
d, 50a to 50d correspond to the driving means.

[Embodiment 3] As Embodiment 3, as shown in FIG. 7, a configuration for detecting the irradiation direction (scanning direction) by the lens member 66 will be described. Other configurations are the same as those of the first or second embodiment.

Here, unlike the first and second embodiments, the lens member 66 is, as shown in FIG. 8, centered on the intersection of the reflection layer 66c provided on the bottom surface thereof with the rotation axes C1 and C2. The reflection layer is not formed in the region indicated by, and a circular irradiation light transmitting portion 66d is formed. As a method for forming the irradiation light transmitting portion 66d, the reflection layer 66c formed on the bottom surface of the lens member 66 may be removed by etching, and a flat mirror 150 shown in FIG.
May be formed in advance in the center of the lens member to form a hole, and may be joined to the bottom surface of the lens member 66.

Therefore, when this is incorporated in an optical scanning device, as shown in FIGS. 7A and 7B, the central portion of the light beam of the laser beam from the laser diode 86 is not reflected by the reflecting surface 84, It penetrates behind the member 66.
Behind the lens member 66, the photodiodes 88a and 88b arranged in the vertical and horizontal directions (only the vertical direction in the figure, but are also actually arranged in the horizontal direction perpendicular to the figure). ).

When the laser beam passes through the lens member 66 from the irradiation light transmitting portion 66d to the rear, the laser beam is refracted by the difference in the refractive index between the lens member 66 and the atmosphere to change the traveling direction. As shown in FIGS. 7A and 7B, the traveling direction is determined by the angle between the irradiation light transmitting portion 66d and the laser light, that is, the angle between the reflection surface 84 and the laser light. , Ie, the angle of the lens member 66, can be detected by the angle of the laser beam transmitted behind the lens member 66.

The angle of the laser beam behind the lens member 66 can be determined by the ratio of the laser beams irradiated to the photodiodes 88a and 88b. Therefore, the output ratio of the photodiodes 88a and 88b is
By detecting by 0 and outputting the light intensity ratio,
Alternatively, the scanning direction of the lens member 66 can be detected by calculating and outputting the angle from the light intensity ratio. The same applies to the horizontal direction.

Then, by receiving the output of the light intensity detection circuit 90, the drive control circuit 92 checks the scanning direction of the laser beam from the laser diode 86, and the drive control circuit 92 controls the actuator 94 (rotary actuators 16, 20 or actuators 46a to 46d, 46a to 46d, By adjusting the driving amount of 50a to 50d) by feedback control or the like, laser light can be accurately scanned in an arbitrary range.

As described above, the optical scanning device of the present embodiment produces the same effects as those of the first and second embodiments, and
Since the rotational position of the lens member 66 is detected in the direction of the laser light transmitted through the irradiation light transmitting portion 66d at the position of the reflection surface 84, the configuration is simple and compact, and the space behind the lens member 66 is reduced. Since the photodiodes 88a and 88b and the luminous intensity detection circuit 90 are provided, the optical scanning device is hardly increased in size, and contributes to the reduction in size and weight of the device.

The photodiodes 88a and 88b and the luminous intensity detecting circuit 90 correspond to the irradiation direction detecting means, the actuator 94 corresponds to the driving means, and the driving control circuit 9
2 corresponds to the drive control means. [Fourth Embodiment] As a fourth embodiment, an optical element such as a prism may be further provided on the configuration of the third embodiment so as to overlap the irradiation light transmitting portion 66d. For example, by arranging the prism 96 as shown in FIG.
As shown in (a) and (b), the optical path of the laser light emerging from the irradiation light transmitting portion 66d to the back of the lens member 66 is
It can be reduced as compared with the third embodiment.

As described above, the optical scanning device according to the fourth embodiment has the effect of the third embodiment, as well as the irradiation detected for detecting the rotational position of the lens member 66 by the shape of the prism 96 and other optical elements. Since the laser light can be guided to an arbitrary position by changing the optical path of the light, the degree of freedom in the arrangement of the photodiodes 88a and 88b and the luminous intensity detecting circuit 90 is increased, and it is possible to further compact the device. Contributes to the reduction in size and weight of the equipment.

Fifth Embodiment The fifth embodiment differs from the first to fourth embodiments in that, as shown in FIG. 11, the bottom surface 106a of the lens member 106 has a reflecting surface made of a metal material, a dielectric material, or the like. Is not used. Instead, the minimum incident angle θ of the laser beam from the laser diode 116 is always substantially equal to or larger than the critical angle, so that the bottom surface 1
Almost totally reflected at 06a.

Therefore, in addition to the effects of the first and second embodiments, since the reflective layer need not be particularly formed, the manufacturing cost is reduced. In such a configuration, FIG.
As shown in the figure, by realizing an angle slightly smaller than the critical angle as the minimum incident angle θ, it is detected that the lens member 106 is at the reference rotation position, and the rotation position of the lens member 106 is estimated from the detection cycle. It can also be used for control.

That is, as shown in FIG. 12A, in the total reflection state, no laser light is transmitted from the bottom surface 106a to the back side of the lens member 106, so that no laser light is detected by the photodiode 108. FIG.
As shown in (b), when the minimum incident angle θ of the laser beam irradiated on the bottom surface 106a by the rotation of the lens member 106 becomes smaller than the critical angle, the laser beam transmitted through the bottom surface 106a and refracted irradiates the photodiode 108. Is done. As a result, the light intensity detection circuit 110 outputs an output corresponding to the output from the photodiode 108 to a drive control circuit (not shown).

If the rotation of the lens member 106 is controlled by setting the reference rotation position at which the laser beam is detected by the photodiode 108 as one of the two rotation limit positions, the rotation angle of the lens member 106, that is, The scanning direction can be estimated from the elapsed time from the time when the laser light is detected, based on the detection cycle of the laser light.

The photodiode 108 and the luminous intensity detecting circuit 110 correspond to the irradiation direction detecting means. [Others] In the first embodiment, the hemispherical lens member 6 is used. However, as shown in FIG.
4 may be used as the spherical lens member 126. Of the rotation axes D1 and D2 existing in the reflection surface 124, the rotation about the rotation axis D1 by the rotation actuator 128 does not need to be reciprocated, and only the rotation in one direction is sufficient, so that high-speed rotation is possible. In addition, since the main scanning can be performed twice in one rotation, the scanning can be quickly performed in a short time.

When scanning is performed in one dimension instead of a hemispherical or spherical lens member having a rotationally symmetric refracting surface (surface) on two rotation axes, as shown in FIG. A semi-cylindrical lens member 136 having a refracting surface 136b rotationally symmetric with respect to F and a reflecting surface 134 including the rotation axis F thereof may be used. In this case, the circular or elliptical laser light from the laser diode is
The refraction surface 136b and the reflection surface 134 of the thirty-six form a linear laser beam to be emitted from the lens member 136.
Note that the laser light from the laser diode is directed to the rotation axis F so that both the light entering and exiting the lens member 136 pass through the refracting surface 136b. Further, since the rotation is performed only on one rotation axis, the rotation actuator 13
8 is one.

As in the case shown in FIG.
The fourth lens member 136 may be a cylindrical lens member having a back-to-back configuration, which enables high-speed rotation and quick scanning in a short time. Also, in the case of rotational symmetry about one rotation axis G, it is not necessary to have a semi-cylindrical shape or a cylindrical shape, and like the lens member 146 shown in FIG.
A curved surface for correcting the shape of the laser beam may be formed along the rotation axis G. That is, in the example of FIG.
A curved surface having a radius R2 is formed in a direction perpendicular to the curved surface having a radius R1 of the refraction surface 146b around the rotation axis G. Here, R1 ≠ R2, and R1> R2 in FIG. 15, but R1 <R2 may also be satisfied.

In this way, when the laser light from the laser diode is elliptical, the laser light is corrected to a circular shape or a different elliptical shape when emitted from the lens member 146. It is possible to correct the shape. Also in this case, the laser light from the laser diode is directed to the rotation axis F,
6 is made to pass through the refracting surface 146b. Further, since there is only rotation on one rotation axis, there is one rotation actuator 148.

Except for the second and fifth embodiments, as a hemispherical lens member disposed on the lens support 8, as shown in FIG. The lens member 156 may be formed by using the agent 152 and joining in an optical matching state. The rotation axis is arranged on the lens support 8 so as to be included in the reflection surface 150a of the plane mirror 150.

When the direction of the laser beam is detected by the photodiode, by providing a half mirror on the bottom surface of the lens member, the half mirror can perform both reflection and transmission functions. good. Such a half mirror can be easily formed by reducing the film thickness to be deposited, and it is not necessary to provide a hole in the reflective layer.
In particular, there is an effect that a fine drilling operation becomes unnecessary when the size is reduced.

In the lens members 6, 36, 66, 106, 126, and 156 in which some or all of the spherical surface is used as a refracting surface in the above-described examples or embodiments, the two rotation axes are included in the reflecting surface. But at least part 2
It suffices that the center of the spherical surface of the refraction surface, which is the intersection of the two rotation axes, is included in the reflection surface. That is, it is not necessary that the two rotation axes are included in the reflection surface, and only one rotation axis may be included, or the rotation axis may not be included at all, and the above-described effect is produced. Can be.

[Brief description of the drawings]

FIG. 1 is a perspective view of an optical scanning device according to a first embodiment.

FIG. 2 is an explanatory diagram of a configuration of a lens member according to the first embodiment.

FIG. 3 is an explanatory diagram of functions of the optical scanning device according to the first embodiment;

FIG. 4 is a perspective view of an optical scanning device according to a second embodiment.

FIG. 5 is an explanatory view for assembling the optical scanning device according to the second embodiment;

FIG. 6 is an operation explanatory diagram of the optical scanning device according to the second embodiment.

FIG. 7 is a diagram illustrating the configuration and functions of an optical scanning device according to a third embodiment;

FIG. 8 is an explanatory diagram of a configuration of a lens member according to a third embodiment.

FIG. 9 is a configuration explanatory view of a lens member according to a fourth embodiment.

FIG. 10 is a diagram illustrating the configuration and functions of an optical scanning device according to a fourth embodiment.

FIG. 11 is a diagram illustrating the configuration and functions of a lens member according to a fifth embodiment.

FIG. 12 is a diagram illustrating the configuration and functions of an optical scanning device according to a fifth embodiment.

FIG. 13 is an explanatory diagram of a configuration of a lens member according to another embodiment.

FIG. 14 is an explanatory diagram of a configuration of a lens member as another embodiment.

FIG. 15 is a configuration explanatory view of a lens member as another embodiment.

FIG. 16 is an explanatory diagram of a configuration of a lens member as another embodiment.

FIG. 17 is an explanatory diagram of a configuration of a conventional laser radar.

[Explanation of symbols]

A1, A2: rotating shaft B1, B2: rotating shaft C
1, C2: rotating shaft D1, D2: rotating shaft F: rotating shaft G: rotating shaft 2: optical scanning device 4: support member 6: lens member 6a: bottom surface 6b: refraction surface 6c: reflection layer 8: lens support base 10 ... Support frames 12, 14 ... Support shafts 16, 20 ... Rotary actuators 18, 19 ... Support shaft 24 ... Reflective surface 26 ... Laser diode 32 ... Optical scanning device 34 ... Support member 36 ... Lens member 36a ... Bottom surface 38 ... Lens support 38a: Reflecting surface 40: Support frame 42, 44 ... Support shaft 46a, 46b, 46c, 46d: Rotating actuator 47: Fixed frame 48, 49 ... Support shaft 50a, 50b, 50c, 50d: Rotating actuator 56: Laser diode 66 ... Lens member 6
6c: reflection layer 66d: irradiation light transmitting portion 84: reflection surface 86: laser diode 88a, 88b: photodiode 90: light intensity detection circuit 92: drive control circuit 94: actuator 96
... Prism 106 ... Lens member 106a ... Bottom surface 108 ... Photodiode 110 ... Light intensity detection circuit 116 ... Laser diode
124 reflective surface 126 lens member 128 rotary actuator 1
34 ... Reflection surface 136 ... Lens member 136b ... Refraction surface 138 ... Rotation actuator 146 ... Lens member 146b ... Refraction surface 150 ... Plane mirror 150a ... Reflection surface 152 ... Adhesive 156 ... Lens member

Claims (12)

[Claims] 1. An optical scanning device for scanning irradiation light from a light emitting means in a predetermined direction, comprising: a refracting surface rotationally symmetric with respect to one or two symmetry axes; and at least one symmetry axis. A lens member having a planar reflection surface that is disposed at a position including the irradiation light incident through the refraction surface and reflects again from the refraction surface; and the reflection surface includes the lens member. An optical scanning device, comprising: a supporting unit that rotatably supports around the axis of symmetry. 2. An optical scanning device for scanning irradiation light from a light emitting means in a predetermined direction, wherein the optical scanning device is disposed at a position including a refracting surface composed of a part or all of a spherical surface and a spherical center point of the refracting surface. A lens member having a planar reflecting surface that reflects the irradiation light incident through the refracting surface and exits from the refracting surface again; and the lens member includes the spherical center point included in the reflecting surface. An optical scanning device, comprising: support means for rotatably supporting around. 3. The support means is integrally formed and supports the lens member by its own elastic deformation so as to be rotatable around the symmetry axis or the spherical center point included in the reflection surface. The optical scanning device according to claim 1, wherein: 4. The lens member according to claim 1, wherein the reflecting surface of the lens member is formed by depositing a metal material or a dielectric on a plane portion of the lens member.
4. The optical scanning device according to any one of 3. 5. A lens according to claim 1, wherein said reflecting surface of said lens member is formed by a plane reflecting mirror joined to a part of said lens member so as to satisfy optical matching. The optical scanning device according to any one of the above. 6. The optical scanning device according to claim 5, wherein said plane reflecting mirror is formed integrally with said support means. 7. An irradiation light transmitting portion provided on a part of the reflection surface, and irradiation direction detecting means for detecting an irradiation direction of irradiation light transmitted through the irradiation light transmitting portion. The optical scanning device according to claim 1, wherein: 8. An irradiation direction detecting means for detecting an irradiation direction of irradiation light transmitted through the half mirror, wherein all or a part of the reflection surface forms a half mirror. The optical scanning device according to claim 1. 9. An optical scanning device according to claim 7, wherein an auxiliary refraction means is provided in said irradiation light transmitting portion. 10. The lens member according to claim 1, wherein the reflection surface of the lens member is a plane portion of the lens member that reflects light generated from a difference in refractive index between the inside and the outside of the lens member. The optical scanning device according to any one of the above. 11. An optical scanning device according to claim 10, further comprising an irradiation direction detecting means for detecting an irradiation direction of the irradiation light transmitted through said reflection surface. 12. A driving unit for rotating the lens member around the axis of symmetry or the center point of the spherical surface included in the reflection surface, and irradiation of irradiation light detected by the irradiation direction detection unit. 12. A drive control means for adjusting a rotation of the lens member by the drive means based on a direction to control a scanning trajectory of irradiation light.
The optical scanning device according to any one of the above.