WO2014114288A1 - Bloc optique à compensation thermique comportant un élément optique maintenu par complémentarité de formes - Google Patents

Bloc optique à compensation thermique comportant un élément optique maintenu par complémentarité de formes Download PDF

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Publication number
WO2014114288A1
WO2014114288A1 PCT/DE2014/100013 DE2014100013W WO2014114288A1 WO 2014114288 A1 WO2014114288 A1 WO 2014114288A1 DE 2014100013 W DE2014100013 W DE 2014100013W WO 2014114288 A1 WO2014114288 A1 WO 2014114288A1
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WO
WIPO (PCT)
Prior art keywords
ring
annular cutting
socket
optical component
optical
Prior art date
Application number
PCT/DE2014/100013
Other languages
German (de)
English (en)
Inventor
Lutz Reichmann
Birgit Massino
Original Assignee
Jenoptik Optical Systems Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Optical Systems Gmbh filed Critical Jenoptik Optical Systems Gmbh
Publication of WO2014114288A1 publication Critical patent/WO2014114288A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Definitions

  • the invention relates to a thermally compensated optical assembly having a socket and a form-fitting held in this version optical component, in particular a lens, as is known generically from the patent US 4,850,674 A.
  • sockets for optical components depending on the demands on the quality and the given conditions of transport, storage and use of the optical system in which the optical component forms part, constructed.
  • expected shock loads, possible temperature fluctuations during transport, storage and use as well as the energetic and spectral radiation influence during use play a role.
  • An adjustable socket should be found, suitable for an operating temperature range of +/- 5 ° C and an extended temperature range during storage and transport of +/- 40 ° C, specifically z. From -20 ° C to + 60 ° C.
  • the housing of the lens should be made of aluminum. With an expansion coefficient of 0.5 * 10 -6 / K of the glass of the lens and a free aperture of 120 mm diameter, the operating temperature range between the lens and the housing is already made of aluminum, which has a coefficient of expansion of 23 * 10 -6 /. K has elongation differences of +/- 14 ⁇ across the diameter.
  • the lens While arising Stretching differences during transport and storage may not lead to irreversible misalignment or damage to the lens, the lens must be kept free of tension in its centered position during use despite elongation differences within a predetermined tolerance range.
  • the centering of the optical device in the operating temperature range should be kept accurate to better than 1 ⁇ and after reaching any temperature within the extended temperature range, the original position should again be taken to better than 1 ⁇ exactly after the assembly has again assumed a temperature in the operating temperature range ,
  • the module should survive a shock load of at least 20 g, without a permanent displacement of the optical component of greater than 1 ⁇ arises.
  • the natural frequency of the module should be greater than 450 Hz.
  • the optical element in the socket is not adjustable, in particular, a lateral adjustment is not possible.
  • this version is not suitable because the lens is held positively and run the effective directions of attacking holding forces through the optically active areas as tensile or compressive force , They thus cause, for. B. with temperature change, alternating voltages in the optically effective range of the optical element.
  • the tangential holding elements engage a socket, the holding forces are transmitted through the socket added.
  • the aforementioned patent DE 10 2006 060 088 A1 gives no indication of how the optical element is held in the version stress-free or low-voltage. In particular, it is not apparent how different strains of the optical element and the socket are compensated for changes in temperature.
  • the patent application DE 10 2006 038 634 A1 relates to a socket of an optical element, which is characterized in that it distributes the holding forces, which are required for holding the optical element, on at least four circumferentially mounted radially engaging holding elements. In this case, it is ensured by a connection of the adjacent holding elements that the holding force is distributed as evenly as possible on the holding elements. In particular, this should compensate for manufacturing tolerances in the statically overdetermined system. Such a holder is also suitable to compensate for differences in expansion between the optical element and the socket by deforming the holding elements.
  • a lens frame which also has at least four circumferentially arranged holding elements.
  • the holding elements are designed as leaf springs, which are biased radially resiliently. Axial they have a much higher rigidity.
  • the optical element is thus held axially in position while being laterally offset by the balance of the radial Restoring forces of the holding elements is kept centered. Expansion differences are compensated by the radial compliance of the holding elements.
  • the adjustability is achieved by radial attacking adjustment.
  • the adjusting means must be biased by the holding elements. Elongation differences externally ßern in variable, guided by the optically effective volume forces. Basically, a minimum amount of radial holding force is required, which is also passed through the optically effective volume. This creates stress birefringence.
  • the variable in the adjustment radial holding forces of the holding elements lead to varying voltages in the optically effective volume.
  • the patent application US 2006/0066963 A1 relates to a low-tension, kinematically self-centering support of an optical element, wherein the compensation of differences in strain is held by a kinematically simple certain storage of the optical element in mainly V-shaped grooves on the optical element and on the socket.
  • the design is suitable to compensate for temperature differences, but it is also not adjustable.
  • the space requirement is considerable and the contour machining of the optical element is complicated and expensive.
  • the very small contact surfaces on the holding elements lead locally to high surface pressure in the optical material, which in particular in crystalline material, eg. B. CaF2, is unfavorable or only low holding forces.
  • the publication closest to the invention was found to be US Pat. No. 4,850,674.
  • a radial compensation of differences in expansion between an optical lens and a socket by a targeted selection of the thermal expansion coefficient of the lens and the frame forming components and the dimensioning of the radially juxtaposed, to be considered for the thermal expansion lengths is achieved so that the expansion difference radially is compensated for zero.
  • the lens is thus not held in a force-locking manner, but in a form-fitting manner, which also causes no voltage changes within the optical element as a result of temperature changes.
  • the frame-forming components is a mounting ring, at one end of an inwardly directed collar is formed on which rests one of the optically active surfaces of the lens.
  • the optical axis of the lens which must be here equal to the axis of symmetry of the lens, held in relation to the supports in their center position.
  • This design principle does not allow centering an axis other than the symmetry axis of the lens.
  • the optical element is not adjustable.
  • the present invention has for its object to provide a different solution for a thermally compensated optical assembly with a form-fitting held optical component, which has a greater design scope.
  • the optical component should be laterally adjustable in a plane perpendicular to the optical axis.
  • This object is form-fitting for a thermally compensated optical assembly having a socket within an operating temperature range held, having a first expansion coefficient having dissolved optical component.
  • the socket comprises a socket ring, having an axis of symmetry, with a first annular cutting edge and at least three annular cutting segments fixedly connected thereto, which together form a second annular cutting edge.
  • the first annular cutting edge and the annular cutting segments, which together form the second annular cutting edge, rest on opposing optically active surfaces of the optical component, forming contact paths.
  • the socket ring has a second expansion coefficient and the ring cutting segments a third coefficient of expansion, wherein the first coefficient of expansion is smaller than the second coefficient of expansion and this smaller than the third coefficient of expansion.
  • the mounting ring and the ring cutting segments have radial length dimensions with respect to the axis of symmetry, which are dimensioned depending on the dimensions of the optical component and the expansion coefficient so that cancel the differences in elongation of the optical component and the socket along the contact tracks.
  • the optical assembly also has a housing part and three holding elements connecting the housing part to the socket.
  • phases are formed in an area of the installation of the first annular cutting edge and the annular cutting segments on the optical component.
  • the first annular cutting edge in the form of ring cutting segments is executed. They can be advantageously formed on the mounting ring, with which they have the second coefficient of expansion.
  • the holding elements are arranged tangentially to the socket.
  • the holding elements are advantageously each centrally via a socket-side connection point with the socket and at two ends in each case via a housing-side connection point, which are each secured to a housing part by means of an adjustment radially movable adjusting unit, indirectly connected.
  • optical component made of quartz glass
  • frame ring made of Invar
  • ring cutting segments made of aluminum.
  • the holding elements, the actuators and the housing part are monolithic, wherein the attachment points represent solid joints.
  • FIG. 1 is a sectional view through a side view of a socket with lens according to a first embodiment
  • FIG. 2 is a sectional view through the side view of a socket with lens according to a third embodiment
  • Fig. 3b shows an assembly with a second embodiment of the holding elements
  • Fig. 4 is a plan view of an assembly.
  • a thermally compensated optical subassembly according to the invention basically consists of a socket 4, in which an optical component 1, having an optical axis, is held positively free of play over at least one operating temperature range, a housing part 5 and at least three retaining elements 6.1 connecting the socket 4 to the housing part 5 - 6.3, over which a difference in expansion between the frame 4 and the housing part 5 is compensated.
  • any components can be understood here which can be integrated in the optical assembly into a beam path of an optical arrangement and which influence the beam guidance or beam shaping. Based on the respective optical arrangement, they have two optically active surfaces, a beam entry surface and a beam exit surface. Within these optically effective surfaces, there is in each case a free area, which in the case of an optical lens is referred to as a free diameter. Taking thermal compensation for an optical component 1 means that the optical component 1 is held in its position within a temperature range. Since the optical component 1 is also subject to an expansion, in each case only one selected point can be held in its position relative to the optically effective surfaces. For a lens, these selected points are the vertices through which the optical axis of the lens passes. Not always and in all optical components 1, the geometric centers of the optically active surfaces are to be held in position, but other selected points, the connecting line is then understood as an optical axis.
  • an optical axis extending through off-center lying on the optically active surfaces selected points, are held in position.
  • the socket 4 basically consists of a first annular cutting edge 2.1 and a second annular cutting edge, which has a mounting ring 2, which has an axis of symmetry 0, are interconnected, wherein the second annular cutting edge is formed by at least three annular cutting segments 3.1 - 3.3.
  • a first embodiment of the socket 4 is shown.
  • an optical lens has been designed so that its optical axis, which is held in position, coincides with the axis of symmetry 0.
  • the unit formed by the socket 4 and the lens is thermally compensated, so that the lens over an operating temperature range of z. B. 10 ° C is held positively and stress-free.
  • the lens rests on one of its two optically active surfaces in an area outside the free diameter at the first annular cutting edge 2.1, whereby it is kept centered to the first annular cutting edge 2.1.
  • the second annular blade abuts on the opposite optically effective surface of the lens outside the free diameter.
  • the first annular cutting edge 2.1 is formed on a closed ring 2.2, together representing the mounting ring 2 with an L-shaped cross section, wherein at the free end of the short leg of the L-shape, an edge of the first annular cutting edge 2.1 in the direction of the symmetry axis 0 of the mounting ring. 2 has.
  • the edge of the first annular cutting edge 2.1 lies on a circular line with a radius which represents a fourth radial length dimension l 4 , about the symmetry axis 0 of the mounting ring 2.
  • the second annular cutting edge is formed by three annular cutting segments 3.1 - 3.3.
  • the ring cutting segments 3.1 - 3.3 have a RingCloudsegmentdicke representing a third radialCnallow l 3 , on.
  • each case over their outer peripheral surfaces are the ring cutting segments 3.1 - 3.3, with at least approximately equal angular distances from each other, over the inner peripheral surface of the ring 2.2 firmly connected to this.
  • the inner circumferential surface has an inner radius which represents a second radial length dimension l 2 .
  • the compounds may, for. B. be screwed.
  • the edges of the ring cutting segments 3.1 - 3.3 lie on a circular line with a radius which represents a first radial length dimension about the symmetry axis 0.
  • the first annular cutting edge 2.1 is the same as the second annular cutting edge in the form of annular cutting segments 3.1 - 3.3.
  • the annular cutting segments forming the first annular cutting edge 2.1 are formed on the closed ring 2.2, so that they are made of the same material as the closed ring 2.2.
  • the ring cutting segments forming a first annular cutting edge 2.1 are the same as the annular cutting segments 3.1 - 3.3 of the second annular cutting edge and arranged exactly opposite them.
  • the edge or the edges of the first annular cutting edge 2.1 and the edges of the second annular cutting ring forming segments 3.1 - 3.3 lie on the lens along formed contact tracks without play and without significant holding force.
  • the position of the first ring cutting 2.1 and the second ring cutting, formed by the three ring cutting segments 3.1 - 3.3, to each other in a suitable manner must be changed, so that the edges the lens along the contact tracks remain free-play fitting. That is, the diameter on which the edges each lie, and their distance from each other must be dependent on the elongation of the lens, determined by their expansion coefficient CM and their radius r, as a radial length measure change.
  • the mounting ring 2 with the first annular cutting edge 2.1 and the three ring cutting segments 3.1 - 3.3 made of materials with different thermal expansion coefficients ⁇ 2 , a 3 and the mounting ring 2 and the ring cutting segments 3.1 - 3.3 are in their radial length dimensions , over which the radial expansion affects, dimensioned accordingly.
  • the lens has a first expansion coefficient oci, the mounting ring 2 a second expansion coefficient a 2 and the ring cutting segments 3.1 - 3.3 a third expansion coefficient oc 3rd By ⁇ - ⁇ ⁇ 2 ⁇ 3 is selected, as z.
  • the position of the contact track between the edges of the ring cutting segments 3.1 - 3.3 and the lens on the choice of the expansion coefficient of the mounting ring 2 and the ring cutting segments 3.1 - 3.3 and the dimensioning of their radial length dimensions h - l 4 are affected.
  • the position of the contact track between the edge of the first annular cutting edge 2.1 and the lens can be influenced accordingly only via the choice of the coefficient of expansion of the mounting ring 2 and its radial length dimensions.
  • first annular cutting edge 2.1 is also executed segmented, the possibilities of influencing increase and they increase further if the then segmented first annular cutting edge 2.1 is not formed on the mounting ring 2, but in the form of individual parts, made of a different material, is connected to this.
  • the orbits can be placed around a circle center point, which does not coincide with the geometric center of the lens over a different choice of radial length dimensions of the ring cutting segments.
  • the position of the lens with respect to another, extending through this center of the circle axis can be maintained.
  • an optical device 1 z. B. be kept a round plan optics.
  • a phase is mandatory to achieve a positive connection in the radial direction.
  • the optical component 1 can also be a quadrangular or polygonal optical component.
  • the number of ring cutting segments can then be cheaper four or more. Otherwise, statements on the illustrated embodiments for a module with lens make analogous to here, the radial length dimensions of the annular there are then of course distances of the axis of symmetry 0 to the edges of the ring cutting, whose arrangement are adapted to the peripheral shape of the optical component 1.
  • the version 4 is connected to the housing part 5 by three circumferentially uniformly distributed elastic holding elements 6.1 - 6.3 and is held by these holding elements 6.1 - 6.3, self-centering.
  • the holding elements 6.1 - 6.3 are connected via the connection-side connection points 8.1 - 8.3 with the socket 4 and housing-side connection points 7.1 - 7.3 with the housing part 5.
  • the holding elements 6.1 - 6.3 are designed so that they are comparatively radially slightly stiff, but axially and tangentially very stiff, so that a kinematic uniquely determined centered position of the socket 4 is specified within the housing part 5.
  • the holding elements 6.1 - 6.3 can, as shown in Fig. 3a, tangentially on one side of the socket 4 fittingly connected to this, which would have a slight rotation of the socket 4 relative to the housing part 5 result in a compensating movement. However, they can also, as shown in Fig.
  • the housing-side connection points 7.1 - 7.3 of the holding elements 6.1 - 6.3 are each provided on an adjusting unit 9.1 - 9.3, which can be displaced radially via an adjusting element 10.1 - 10.3.
  • Fig. 4 shows an embodiment of an assembly is shown, with holding elements 6.1 - 6.3 of FIG. 3b in conjunction with the actuators 9.1 -9.3 and the adjusting elements 10.1 - 10.3, which are designed here as screws.
  • the version 4 is adjusted laterally. That is, if one of the housing-side connection points 7.1 - 7.3 moved radially, the position of the lens changes laterally to the optical axis, wherein the displacement also by the deformation of the holding elements 6.1 - 6.3 is compensated. Restoring forces are absorbed by the version 4. This keeps the lens de-energized.
  • An equivalent effect is achieved even with a tangentially displaceable mounting of the housing-side connection points 7.1 - 7.3, when the arrangement is selected with one-sided support elements 6.1 - 6.3.
  • the holding elements 6.1 - 6.3 and the actuators 9.1 - 9.3 designed as solid joints, whereby the control and compensatory movements are free of friction.
  • the exemplary embodiment described fulfills the task set out in the introduction to the description of which the invention is based.
  • Adjustment element oci first expansion coefficient coefficient of expansion of the lens 2
  • second expansion coefficient expansion coefficient of

Abstract

L'invention concerne un bloc optique à compensation thermique. Ledit bloc optique comporte un élément optique (1) maintenu par complémentarité de formes dans une monture (4) dans une gamme de température de fonctionnement. La monture (4) comporte un anneau de monture (2) sur lequel est formée ou fixée une première arête annulaire (2.1) et auquel sont reliés de façon fixe au moins trois segments d'arête annulaire (3.1 à 3.3) qui forment conjointement une seconde arête annulaire. La première arête annulaire (2.1) et les segments d'arête annulaire (3.1 à 3.3) reposent sur des surfaces opposées, optiquement actives, de l'élément optique (1) en formant des pistes de contact. En choisissant de façon appropriée la matière de l'anneau de monture (2), de la première arête annulaire (2.1), des segments d'arête annulaire (3.1 à 3.3) et de l'élément optique (1), et en choisissant de façon coordonnée la longueur radiale (l1 - l4) par rapport à l'axe de symétrie (0) de l'anneau de monture (2), il est possible de compenser les différences de dilatation entre l'élément optique (1) et la monture (4) le long des pistes de contact dans une gamme de température prédéfinie.
PCT/DE2014/100013 2013-01-23 2014-01-20 Bloc optique à compensation thermique comportant un élément optique maintenu par complémentarité de formes WO2014114288A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102013001460.3 2013-01-23
DE102013001460 2013-01-23
DE102013104159.0 2013-04-24
DE201310104159 DE102013104159A1 (de) 2013-01-23 2013-04-24 Thermisch kompensierte optische Baugruppe mit einem formschlüssig gehaltenen optischen Bauelement

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WO2014114288A1 true WO2014114288A1 (fr) 2014-07-31

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PCT/DE2014/100013 WO2014114288A1 (fr) 2013-01-23 2014-01-20 Bloc optique à compensation thermique comportant un élément optique maintenu par complémentarité de formes

Country Status (3)

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DE (2) DE202013011933U1 (fr)
TW (1) TW201435422A (fr)
WO (1) WO2014114288A1 (fr)

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DE102017205043A1 (de) * 2017-03-24 2018-04-12 Carl Zeiss Smt Gmbh Optisches system sowie lithographieanlage
CN107907963B (zh) * 2017-11-07 2023-12-01 丹阳丹耀光学股份有限公司 镜头专用调心机构及使用该机构的同心度调节装置
WO2019166879A1 (fr) * 2018-03-02 2019-09-06 Gooch & Housego Plc Bague de montage pour maintenir l'alignement de dispositifs optiques
WO2020003189A1 (fr) * 2018-06-29 2020-01-02 3M Innovative Properties Company Appareil et procédé pour maintenir l'alignement d'une ferrule optique lors d'une dilatation ou d'une contraction thermique
DE102022201007A1 (de) 2022-01-31 2022-11-17 Carl Zeiss Smt Gmbh Vorrichtung zur Verbindung wenigstens einer ersten und einer zweiten Modulkomponente, Modul eines Lithografiesystems, optisches Element und Lithografiesystem

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JP2005215503A (ja) * 2004-01-30 2005-08-11 Olympus Corp レンズ保持機構並びにレンズユニット
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TW201435422A (zh) 2014-09-16
DE102013104159A1 (de) 2014-07-24
DE202013011933U1 (de) 2014-10-28

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