EP1710440A2 - Vakuumpump mit einer Energiebeschränkung - Google Patents

Vakuumpump mit einer Energiebeschränkung Download PDF

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Publication number
EP1710440A2
EP1710440A2 EP06300288A EP06300288A EP1710440A2 EP 1710440 A2 EP1710440 A2 EP 1710440A2 EP 06300288 A EP06300288 A EP 06300288A EP 06300288 A EP06300288 A EP 06300288A EP 1710440 A2 EP1710440 A2 EP 1710440A2
Authority
EP
European Patent Office
Prior art keywords
stages
configuration
parallel
series
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06300288A
Other languages
English (en)
French (fr)
Other versions
EP1710440A3 (de
Inventor
Jean-Luc Rival
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA, Alcatel Lucent SAS filed Critical Alcatel CIT SA
Publication of EP1710440A2 publication Critical patent/EP1710440A2/de
Publication of EP1710440A3 publication Critical patent/EP1710440A3/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/10—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by changing the positions of the inlet or outlet openings with respect to the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/05—Speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/58—Valve parameters

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
EP06300288A 2005-04-05 2006-03-27 Vakuumpump mit einer Energiebeschränkung Withdrawn EP1710440A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0503352A FR2883934B1 (fr) 2005-04-05 2005-04-05 Pompage rapide d'enceinte avec limitation d'energie

Publications (2)

Publication Number Publication Date
EP1710440A2 true EP1710440A2 (de) 2006-10-11
EP1710440A3 EP1710440A3 (de) 2008-02-06

Family

ID=35427303

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06300288A Withdrawn EP1710440A3 (de) 2005-04-05 2006-03-27 Vakuumpump mit einer Energiebeschränkung

Country Status (5)

Country Link
US (1) US20060222506A1 (de)
EP (1) EP1710440A3 (de)
JP (1) JP2006291952A (de)
CN (1) CN100559028C (de)
FR (1) FR2883934B1 (de)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013087822A1 (fr) * 2011-12-15 2013-06-20 Adixen Vacuum Products Dispositif de pompe a vide multi-etage
WO2014072276A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems
WO2015074865A1 (de) * 2013-11-19 2015-05-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-system sowie verfahren zum betreiben eines vakuumpumpen-systems
FR3017425A1 (fr) * 2014-02-12 2015-08-14 Adixen Vacuum Products Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement
WO2018184853A1 (fr) * 2017-04-07 2018-10-11 Pfeiffer Vacuum Groupe de pompage et utilisation
WO2019202297A1 (en) * 2018-04-16 2019-10-24 Edwards Limited A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
WO2020201218A1 (fr) * 2019-04-05 2020-10-08 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
FR3128747A1 (fr) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Pompe à vide multi-étagée

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
JP4820304B2 (ja) * 2007-01-18 2011-11-24 株式会社荏原製作所 真空ポンプユニット
US8864476B2 (en) * 2011-08-31 2014-10-21 Flow Control Llc. Portable battery operated bilge pump
CA2795964C (en) * 2011-11-18 2017-04-11 Flow Control Llc. Rechargeable battery powered utility pump with series centrifugal pump configuration
JP5099573B1 (ja) * 2012-01-23 2012-12-19 有限会社スコットプランニング 複数の真空装置の省エネルギ−化を図る真空ポンプシステム
WO2015109048A1 (en) * 2014-01-15 2015-07-23 Eaton Corporation Method of optimizing supercharger performance
DE202015004596U1 (de) * 2015-06-26 2015-09-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem
WO2017031807A1 (zh) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 一种多驱动腔非共轴真空泵
DE202016001950U1 (de) * 2016-03-30 2017-07-03 Leybold Gmbh Vakuumpumpe
GB2558626A (en) * 2017-01-11 2018-07-18 Edwards Ltd A multiple stage vacuum pump and pump configuring method
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
EP3489516B1 (de) * 2017-11-24 2021-09-01 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN108194353B (zh) * 2018-02-02 2019-12-13 中山市天元真空设备技术有限公司 一种成对转子转轴独立的直排大气的多级罗茨干式真空泵
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
CN110500275B (zh) 2019-09-23 2021-03-16 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的泵壳体结构
CN210629269U (zh) 2019-09-23 2020-05-26 兑通真空技术(上海)有限公司 一种罗茨泵的电机连接传动结构
CN110594156B (zh) 2019-09-23 2021-05-25 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的驱动结构
CN110685912A (zh) 2019-10-10 2020-01-14 兑通真空技术(上海)有限公司 一种多轴多级罗茨泵转子连接的结构
CN112594544B (zh) * 2020-12-11 2022-07-19 宜春市富锐气体有限责任公司 一种氩气生产的充灌排抽真空设备

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB738377A (en) * 1951-03-22 1955-10-12 Syntron Co Improvements in or relating to coating apparatus
US5039280A (en) * 1988-12-16 1991-08-13 Alcatel Cit Pump assembly for obtaining a high vacuum
EP0730093A1 (de) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Kontrollsystem für zweistufige Vakuumpumpe
US6196810B1 (en) * 1997-09-22 2001-03-06 Aisin Seiki Kabushiki Kaisha Multistage vacuum pump assembly
EP1314890A2 (de) * 2001-11-21 2003-05-28 Kabushiki Kaisha Toyota Jidoshokki Kontrollsystem für Vakuumpumpe
US20040028532A1 (en) * 2000-04-18 2004-02-12 Christian Beyer Oscillation piston pump
JP2004150329A (ja) * 2002-10-30 2004-05-27 Erc:Kk 真空装置
US20040136835A1 (en) * 2002-10-22 2004-07-15 Eckhard Bez Multi-stage reciprocating vacuum pump and method of operating the same
DE10308420A1 (de) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät

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ITTO20030392A1 (it) * 2003-05-28 2004-11-29 Varian Spa Sistema di pompaggio per vuoto.

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB738377A (en) * 1951-03-22 1955-10-12 Syntron Co Improvements in or relating to coating apparatus
US5039280A (en) * 1988-12-16 1991-08-13 Alcatel Cit Pump assembly for obtaining a high vacuum
EP0730093A1 (de) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Kontrollsystem für zweistufige Vakuumpumpe
US6196810B1 (en) * 1997-09-22 2001-03-06 Aisin Seiki Kabushiki Kaisha Multistage vacuum pump assembly
US20040028532A1 (en) * 2000-04-18 2004-02-12 Christian Beyer Oscillation piston pump
EP1314890A2 (de) * 2001-11-21 2003-05-28 Kabushiki Kaisha Toyota Jidoshokki Kontrollsystem für Vakuumpumpe
US20040136835A1 (en) * 2002-10-22 2004-07-15 Eckhard Bez Multi-stage reciprocating vacuum pump and method of operating the same
JP2004150329A (ja) * 2002-10-30 2004-05-27 Erc:Kk 真空装置
DE10308420A1 (de) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät

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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013087822A1 (fr) * 2011-12-15 2013-06-20 Adixen Vacuum Products Dispositif de pompe a vide multi-etage
FR2984423A1 (fr) * 2011-12-15 2013-06-21 Adixen Vacuum Products Dispositif de pompage et equipement de fabrication d'ecrans plats correspondant
WO2014072276A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems
WO2015074865A1 (de) * 2013-11-19 2015-05-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-system sowie verfahren zum betreiben eines vakuumpumpen-systems
FR3017425A1 (fr) * 2014-02-12 2015-08-14 Adixen Vacuum Products Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement
WO2015121222A1 (fr) * 2014-02-12 2015-08-20 Adixen Vacuum Products Système de pompage et procédé de descente en pression dans un sas de chargement et de déchargement
TWI735764B (zh) * 2017-04-07 2021-08-11 法商普發真空公司 泵抽單元及其用途
FR3065040A1 (fr) * 2017-04-07 2018-10-12 Pfeiffer Vacuum Groupe de pompage et utilisation
US11078910B2 (en) 2017-04-07 2021-08-03 Pfeiffer Vacuum Pumping unit and use
WO2018184853A1 (fr) * 2017-04-07 2018-10-11 Pfeiffer Vacuum Groupe de pompage et utilisation
WO2019202297A1 (en) * 2018-04-16 2019-10-24 Edwards Limited A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
US11326604B2 (en) 2018-04-16 2022-05-10 Edwards Limited Multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
WO2020201218A1 (fr) * 2019-04-05 2020-10-08 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
FR3094762A1 (fr) * 2019-04-05 2020-10-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
FR3128747A1 (fr) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Pompe à vide multi-étagée
WO2023078598A1 (en) * 2021-11-03 2023-05-11 Pfeiffer Vacuum Multistage vacuum pump

Also Published As

Publication number Publication date
FR2883934B1 (fr) 2010-08-20
US20060222506A1 (en) 2006-10-05
FR2883934A1 (fr) 2006-10-06
JP2006291952A (ja) 2006-10-26
CN100559028C (zh) 2009-11-11
EP1710440A3 (de) 2008-02-06
CN1847660A (zh) 2006-10-18

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