EP1466665A1 - Element avec fonction photocatalytique et procede de fabrication de celui-ci - Google Patents

Element avec fonction photocatalytique et procede de fabrication de celui-ci Download PDF

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Publication number
EP1466665A1
EP1466665A1 EP02790849A EP02790849A EP1466665A1 EP 1466665 A1 EP1466665 A1 EP 1466665A1 EP 02790849 A EP02790849 A EP 02790849A EP 02790849 A EP02790849 A EP 02790849A EP 1466665 A1 EP1466665 A1 EP 1466665A1
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European Patent Office
Prior art keywords
layer
function according
photocatalytic function
photocatalyst
oxide
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EP02790849A
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German (de)
English (en)
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EP1466665B1 (fr
EP1466665A4 (fr
Inventor
Toshiaki NIPPON SHEET GLASS CO.LTD. ANZAKI
Yoshifumi NIPPON SHEET GLASS CO.LTD. KIJIMA
Kenji NIPPON SHEET GLASS CO.LTD. MORI
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Nippon Sheet Glass Co Ltd
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Nippon Sheet Glass Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01N—PRESERVATION OF BODIES OF HUMANS OR ANIMALS OR PLANTS OR PARTS THEREOF; BIOCIDES, e.g. AS DISINFECTANTS, AS PESTICIDES OR AS HERBICIDES; PEST REPELLANTS OR ATTRACTANTS; PLANT GROWTH REGULATORS
    • A01N59/00—Biocides, pest repellants or attractants, or plant growth regulators containing elements or inorganic compounds
    • A01N59/16—Heavy metals; Compounds thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/16—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/24—Chromium, molybdenum or tungsten
    • B01J23/28—Molybdenum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74—Iron group metals
    • B01J23/745—Iron
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00—Catalysts, in general, characterised by their form or physical properties
    • B01J35/39—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B01J37/024—Multiple impregnation or coating
    • B01J37/0244—Coatings comprising several layers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/71—Photocatalytic coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/36—Underside coating of a glass sheet

Definitions

  • the present invention relates to a member with a photocatalyst layer formed on the surface thereof.
  • Photocatalysts such as anatase type titanium oxide are known to exert antifouling effect to decompose organic materials under ultraviolet light irradiation, antibacterial activity and hydrophilicity. Additionally, nowadays, photocatalysts exerting a catalytic function under visible light irradiation are attracting attention.
  • Formation of the above-described photocatalyst layer on the surface of a member such as glass is frequently carried out by means of vacuum film formation methods including sputtering and vapor deposition, or reduced-pressure film-formation methods.
  • Japanese Patent Application Publication No. 9-227167 discloses that a barrier layer is provided between a glass substrate and a photocatalytic composition (medium) which is formed on the surface of the substrate for the purpose of preventing function deterioration of the medium caused by alkali eluted from the glass, and proposes use of zirconium oxide, in particular, amorphous zirconium oxide as the barrier layer.
  • Japanese Patent Application Publication No. 10-66878 discloses that a photocatalyst film is formed on a substrate in a state where an undercoat film is interposed therebetween, and in particular, zirconium oxide is used as the undercoat film and titanium oxide is used as the photocatalyst film.
  • Japanese Patent Application Publication No. 2000-312830 discloses that a layer of a metal oxide such as zirconium oxide is interposed between a substrate (aluminum) and a photocatalyst layer so as to control oxygen diffusion from the photocatalyst layer to the substrate with the aid of the metal oxide layer.
  • a metal oxide such as zirconium oxide
  • Japanese Patent Application Publication No. 2001-205094 discloses zirconium oxide as a photocatalytic material and discloses that a titanium oxide layer is formed on the exterior of the zirconium oxide.
  • PCT International Publication discloses that a high temperature stable type cubic or orthorhombic zirconium oxide layer is formed between a substrate and a titanium oxide layer.
  • a photocatalyst layer in which a columnar particulate structure of polycrystal or single crystal is formed clearly and continuously from the interface of the substrate to the surface of the photocatalyst layer exerts a remarkable photocatalytic effect; however, a photocatalyst layer (TiO 2 ), in which no columnar particulate structure is found in the neighborhood of the interface of the substrate and an amorphous layer (hereinafter referred to as a dead layer) is found instead does not exert any sufficient photocatalytic effect. Accordingly, the present inventors investigated measures for substantially preventing the above-described dead layer from being formed, and discovered that provision of an undercoat layer for promoting crystal growth in the photocatalyst layer can effectively control formation of the dead layer.
  • the present inventors have achieved the present invention on the basis of the following knowledge: When a photocatalyst layer is formed through the intermediary of an undercoat layer which promotes the crystal growth of the photocatalyst, the generation of the above-described dead layer can be controlled, and when a peel preventing layer is provided between the undercoat layer and the glass substrate, peeling of the film from the glass substrate and the generation of defects can be controlled. In addition, an excellent photocatalytic function can be achieved even if the film formation is conducted at low temperature.
  • a member having a photocatalytic function in which a photocatalyst layer is formed on the surface of a substrate through the intermediary of a crystalline undercoat layer, and no dead layer is substantially present in the neighborhood of the interface between the photocatalyst layer and the undercoat layer.
  • a member having a photocatalytic function in which a peel preventing layer whose main component is an oxide, and oxynitride and a nitride containing at least one of silicon and tin is provided on the surface of a substrate, a photocatalyst layer is formed on the surface of the peel preventing layer through the intermediary of a crystalline undercoat layer, and no dead layer is substantially present between the undercoat layer and the photocatalyst layer.
  • the thickness of the peel preventing layer is 2 nm to 200 nm, preferably 5 nm to 50 nm. When the thickness of the peel preventing layer is less than 2 nm, the effect of controlling the generation of peeling and defects becomes insufficient.
  • the upper limit of the thickness of the peel preventing layer is preferably 200 nm from the viewpoint of economy.
  • the thickness of the peel preventing layer is greater than 5 nm, the water blocking effect more preferably is enhanced.
  • the thickness exceeds 50 nm the stress of the amorphous film becomes greater and peeling easily occurs. Therefore, the more preferable upper limit of the thickness of the peel preventing layer is 50 nm.
  • An embodiment of the member having a photocatalytic function according to the present invention has a configuration in which a photocatalyst layer is formed on the surface of a substrate through the intermediary of a crystalline undercoat layer, the substrate is a glass substrate manufactured by a float glass method, the undercoat layer is positioned on the tin-containing surface (namely, the tin modification layer or the amorphous tin oxide layer) of the glass substrate, and no dead layer is substantially present between the undercoat layer and the photocatalyst layer.
  • Provision of the crystalline undercoat layer can improve the crystallinity of the photocatalyst layer, and the surface of the photocatalyst layer can be rapidly made superhydrophilic. Also, provision of the peel preventing layer between the substrate and the crystalline undercoat layer can control peeling of the undercoat layer from the substrate, or defects.
  • the peel preventing layer whose main component is an oxide, an oxynitride and a nitride containing at least one of silicon and tin has a capability of blocking a variety of ions and molecules such as a chlorine ion and water which penetrate from the outside.
  • a glass plate manufactured by a float process for example, a method for manufacturing a glass plate by floating molten glass on molten tin
  • a tin oxide containing layer is located on the bottom face (which refers to the face in contact with tin; the top face refers to the face not in contact with tin), and this layer functions as the peel preventing layer.
  • the peel preventing layer blocks chlorine ions and water which penetrate from the surface, prevents these ions and molecules from reaching the glass substrate, and thereby, it is possible to control peeling of the undercoat layer from the substrate. It is also possible to control discoloration or defects caused by reaction of carbonic acid gas and water from the atmosphere with alkali components in the glass.
  • the dead layer is a layer in which amorphous (noncrystalline) characteristics are predominant, and the electron diffraction image is observed as a halo pattern as shown in Figure 1(a).
  • amorphous (noncrystalline) characteristics are predominant
  • the electron diffraction image is observed as a halo pattern as shown in Figure 1(a).
  • Figure 1(b) diffraction spots are observed as shown in Figure 1(b).
  • no dead layer is substantially present refers to a case where the thickness of the dead layer is 20 nm or less, or more preferably 10 nm or less, as well as a case where no dead layer is present.
  • the dead layer having such a thickness does not cause so much deterioration of the photocatalytic activity which is caused by deterioration of the crystallinity of the photocatalyst layer.
  • the thickness of the photocatalyst layer is preferably 1 nm to 1,000 nm.
  • the thickness is less than 1 nm, the continuity of the film becomes poor and photocatalytic activity becomes insufficient.
  • the thickness is greater than 1,000 nm, since exciting light (ultraviolet light) does not reach the deep interior of the photocatalyst layer, such an increase of the film thickness does not lead to any further improvement of the photocatalytic activity.
  • the effect of the undercoat layer is found to be remarkable in a case where the thickness is in the range from 1 nm to 500 nm.
  • a comparison made with respect to the same thickness showed that the case where the undercoat layer is provided presents a larger photocatalytic activity than the case where no undercoat layer is provided. Therefore, it can be said that the thickness range of from 1 nm to 500 nm is more preferable.
  • the thickness of the photocatalyst layer is made as thin as 1 nm to 100 nm, if the particulates constituting the photocatalyst layer are formed continuously from the interface of the undercoat layer to the surface of the photocatalyst layer, crystal growth is developed, and thereby the photocatalytic activity can be exerted sufficiently.
  • the width of the particulates constituting the photocatalyst layer along the direction parallel to the substrate is preferably 5 nm or more. This is because if particulate width is less than 5 nm, the crystallinity is low and the photocatalytic activity becomes insufficient.
  • the undercoat layer and the photocatalyst layer are made of a crystalline metal oxide or a crystalline metal oxynitride, and at least one of the distances between oxygen atoms in the crystals which constitute the undercoat layer is approximate to one of the distances between oxygen atoms in the crystals which constitute the photocatalyst layer.
  • the photocatalyst layer is formed on the undercoat layer, a combination of the undercoat layer and the photocatalyst layer which satisfies the above-described condition allows the photocatalyst layer to grow easily and quickly as a crystalline one with the aid of the oxygen atoms as the common portions.
  • Figure 2(a) shows the atomic arrangement in the (111) orientation plane in the monoclinic zirconium oxide
  • Figure 2(b) shows the atomic arrangement in the (101) orientation plane in the tetragonal (anatase type) titanium oxide.
  • the monoclinic zirconium oxide and the tetragonal (anatase type) titanium oxide are similar to each other (in the range of from 90 to 110%). Accordingly, if the monoclinic crystalline zirconium compound is used as the undercoat layer, the crystalline film of the tetragonal titanium oxide can be formed on the undercoat layer easily.
  • zirconium oxide to which a small amount of nitrogen is added zirconium oxynitride, and zirconium oxide to which niobium (Nb) of 0.1 to 10 atomic % is added are preferably used as well as the above-described monoclinic zirconium oxide.
  • niobium Nb
  • the above-described tetragonal titanium oxide is preferably used.
  • anatase type titanium oxide is preferably used because the photocatalytic activity thereof is high.
  • rutile type titanium oxide, a composite oxide of titanium and tin, a mixed oxide of titanium and tin, titanium oxide to which a small amount of nitrogen is added, and titanium oxynitride are preferably used.
  • the thickness of the undercoat layer is preferably 1 nm or more and 500 nm or less.
  • the thickness of less than 1 nm is not preferable because the undercoat layer of such a thickness is not continuous and island-like, and thereby the durability is decreased.
  • the thickness is greater than 500 nm, the effect of the thickness on the photocatalyst layer becomes substantially the same, and increasing the thickness is economically useless.
  • the more preferable thickness of the undercoat layer is 2 to 50 nm. When the thickness is less than 2 nm, the crystallinity of the undercoat layer becomes low, and hence the effect of promoting the crystal growth of the photocatalyst layer becomes small.
  • the thickness is greater than 50 nm, the variation of the optical properties (color tone, reflectance) due to the thickness variation becomes large.
  • the electron diffraction image obtained by perpendicularly irradiating the cross section of the layer of the monoclinic zirconium oxide includes the electron diffraction image from the (111) plane or the (-111) plane, and the interplanar spacing with respect to the (111) orientation plane measured by the above-described electron diffraction image or by a bright-field image of a transmission electron microscope (TEM) is 2.6 to 3.0 ⁇ , and the interplanar spacing with respect to the (-111) orientation plane measured by the same method is 3.0 to 3.5 ⁇ .
  • TEM transmission electron microscope
  • the zirconium oxide suffers from deformation in the crystals. Consequently, the film stress becomes great, and peeling easily occurs. Also, since the oxygen positions in the crystal planes are displaced due to the deformation, the consistency of the oxide such as titanium oxide or the like constituting the photocatalyst layer with the oxygen positions becomes low, and thereby no desirable crystal growth of the photocatalyst layer is observed.
  • the electron diffraction image obtained by perpendicularly irradiating the cross section of the layer of the anatase type titanium oxide includes the electron diffraction pattern from the (101) plane, and the interplanar spacing with respect to the (101) orientation plane measured by the above-described electron diffraction image or by a bright-field image of a transmission electron microscope (TEM) is 3.3 to 3.7 ⁇ .
  • TEM transmission electron microscope
  • the interplanar spacing of titanium oxide is not in the above-described spacing range, the titanium oxide suffers from deformation in the crystals. Consequently, the film stress becomes great, and peeling easily occurs. Also, since the oxygen positions in the crystal planes are displaced due to the deformation, the consistency of the oxide such as zirconium oxide or the like constituting the undercoat layer with the oxygen positions becomes low, and thereby no desirable crystal growth of the titanium oxide is observed.
  • the methods for forming the undercoat layer and the photocatalyst layer may be any of a liquid phase method (a sol-gel method, a liquid phase precipitation method, a spray method and a pyrosol method), a vapor phase method (a sputtering method, a vacuum deposition method and a CVD method) and the like, and these methods have the effect of improving the crystallinity of the photocatalyst layer with the aid of the undercoat layer.
  • a vapor phase method such as a sputtering method, a deposition method and the like is more suitable because it is serves to grow crystals, and thereby it shows particularly significant effect in the present invention.
  • doping of metals in the photocatalyst layer can promote carrier generation and accordingly enhance the photocatalytic effect.
  • the doped metals include Sn, Zn, Mo and Fe, which are suitably high in the effect of improving the photocatalytic activity.
  • Sn, Zn and Mo the addition amount is preferably 0.1 mass % or more and 1 mass % or less, more preferably 0.2 mass % or more and 0.5 mass % or less.
  • Fe the content thereof in the photocatalyst layer is made to be 0.001 mass % to 1.0 mass %.
  • Titanium tin composite oxide or titanium tin mixed oxide is used for the photocatalyst layer.
  • titanium oxide containing tin it is possible to improve the maintenance of the hydrophilicity without deteriorating the photocatalytic activity of titanium oxide (TiO 2 ).
  • TiO 2 titanium oxide
  • the effect of tin contained in the target improves the film formation rate.
  • the content of tin in the photocatalyst layer is 3 atomic % or more and 50 atomic % or less based on the ratio of the number of tin atoms with respect to the total number of titanium atoms and tin atoms.
  • the content of tin is less than 3 atomic %, the effect of the addition of tin is unpreferably small.
  • the content of tin is greater than 50 atomic %, the photocatalytic activity is unpreferably deteriorated.
  • the hydrophilic thin film is preferably made of at lease one oxide selected from the group consisting of silicon oxide, zirconium oxide, germanium oxide and aluminum oxide. Among these oxides, silicon oxide is preferable from the viewpoint of the hydrophilicity improvement effect and durability. It is preferable that the hydrophilic thin film is porous. When the hydrophilic thin film is porous, it is possible to enhance the water holding effect and the maintenance performance of the hydrophilicity. Also, the active species such as active oxygen generated in the surface of the photocatalyst layer by irradiation of ultraviolet light can reach the surface of an article, so that the photocatalytic activity of the photocatalyst layer is not so significantly damaged.
  • a liquid phase method a sol-gel method, a liquid phase precipitation method, and a spray method
  • a vapor phase method a sputtering method, a vacuum deposition method and a CVD method
  • the vapor phase method such as a sputtering method
  • the film formation conditions so as to increase the dangling bonds in the oxide, for example, by increasing the gas pressure and reducing the oxygen amount in the gas at the time of sputtering, it becomes possible to manufacture a porous thin film.
  • the thickness of the hydrophilic thin film is preferably 1 nm or more and 30 nm or less. If the thickness is smaller than 1 nm, the hydrophilicity is insufficient, while if the thickness is greater than 30 nm, the photocatalytic activity of the photocatalyst layer is damaged.
  • the more preferable range of the thickness is 1 nm or more and 20 nm or less. In this range, the maintenance performance of the hydrophilicity is high when it is not irradiated with light.
  • the method of manufacturing the photocatalytic member according to the present invention comprises the steps of forming a peel preventing layer whose main component is an oxide, an oxynitride and a nitride containing at least one of silicon and tin on the surface of a substrate, forming a monoclinic zirconium oxide layer at low temperature on the peel preventing layer, and forming a photocatalyst layer constituted of a crystalline phase on the monoclinic zirconium oxide layer.
  • a photocatalytic member is obtained in which a dead layer observed as a halo pattern in an electron diffraction image is not substantially present between the monoclinic zirconium oxide layer and the photocatalyst layer.
  • a vapor phase method in particular, a sputtering method is preferable.
  • a photocatalyst layer having high photocatalytic activity can be formed, without heating or at temperature of 150°C or below, on a substrate or a thin film having low heat resistance, and thereby it becomes possible to combine a photocatalyst layer with a component having low heat resistance.
  • the present invention can be applied to film formation on a large size substrate such as glass in which uniform heating and control of cracks which may occur at the time of heating and cooling are difficult.
  • the above-described substrate having low heat resistance include a resin substrate or a film made of acrylic resin, polyethylene terephthalate resin, polyurethane resin, polyimide resin and the like.
  • Figure 1(a) is a transmission electron microscope (TEM) observation picture showing the electron diffraction pattern in a case where a dead layer is present; and Figure 1(b) is a TEM picture showing the electron diffraction pattern in a case where no dead layer is present.
  • Figure 2(a) is a diagram illustrating the atomic arrangement in the (111) plane of monoclinic zirconium oxide, and Figure 2(b) is a diagram illustrating the atomic arrangement in the (101) plane of anatase type titanium oxide.
  • Figure 3 is a schematic cross-sectional view illustrating a member having a photocatalytic function according to the present invention.
  • Figures 4(a) to (d) are scanning electron microscope (SEM) observation pictures for Examples 1 and 2 and Comparative Examples 1 and 2, respectively.
  • Figure 5 is a graph showing the results of X-ray diffraction measurements in Example 1 and Comparative Examples 1 and 2 which shows the relationship between the undercoat layer and the crystallinity of TiO 2 in the photocatalyst layer.
  • Figure 6 is a schematic cross-sectional view illustrating another embodiment of a member having a photocatalytic function according to the present invention.
  • Figure 7 shows optical microscope pictures of the surfaces of Example 18 and Comparative Example 16 after a salt spray test which show the effect of the peel preventing layer.
  • Figure 8 is a high resolution TEM picture which shows the cross section of the ZrO 2 layer and the TiO 2 layer in Example 18.
  • Figure 9 is a high resolution TEM picture which shows the cross section of the ZrO 2 layer and the TiO 2 layer in Example 17.
  • Figure 10 is an X-ray diffraction profile of the sample in Example 17.
  • Figure 3 is a schematic cross-sectional view illustrating a member having a photocatalytic function according to the present invention.
  • a layer of crystalline ZrO 2 is formed as an undercoat layer in a thickness of 56 nm on the surface of a glass plate as a substrate
  • a layer of crystalline TiO 2 in which metal is doped is formed as a photocatalyst layer in a thickness of 140 nm on the ZrO 2 layer
  • a porous SiO 2 layer is formed in a thickness of 5 nm on the TiO 2 layer so as to enhance the hydrophilicity.
  • the above-described ZrO 2 layer, TiO 2 layer and SiO 2 layer are formed by a sputtering method.
  • Metal such as tin (Sn), zinc (Zn), molybdenum (Mo) or iron (Fe) is doped at the time of forming the TiO 2 layer.
  • Table 1 shows the film configuration, the methods for forming the peel preventing layer, the undercoat layer, the photocatalyst layer and the hydrophilic thin layer, the presence of a dead layer, and the evaluation of the contact angle in Examples 1 to 9.
  • Table 2 shows the film configuration, the methods for forming the peel preventing layer, the undercoat layer, the photocatalyst layer and the hydrophilic thin layer, the presence of a dead layer, and the evaluation of the contact angle in Comparative Examples 1 to 11.
  • Table 3 shows the film formation conditions for each film in Table 1 and Table 2 (i.e., the peel preventing layer, the undercoat layer, the photocatalyst layer and the hydrophilic film).
  • the number of the film formation pass was appropriately adjusted so as to achieve a predetermined thickness.
  • UV- ⁇ 1 method and UV- ⁇ 3 method were adopted in a case where a hydrophilic thin film was not coated, and while UV- ⁇ 2 method was adopted in a case where a hydrophilic thin film was coated.
  • UV- ⁇ 1 method is a method in which irradiation with ultraviolet black light having an intensity of 1 mW/cm 2 is conducted for 15 minutes, and the contact angle with respect to pure water is measured immediately after completion of the irradiation.
  • UV- ⁇ 3 method is a method in which the period of time for the ultraviolet light irradiation in UV- ⁇ 1 method is changed to 60 minutes.
  • UV- ⁇ 2 method was basically applied to a case where a hydrophilic thin film was coated onto the surface of a photocatalyst layer.
  • a hydrophilic thin film is coated, the initial contact angle is small, and thereby a comparison of the contact angles before ultraviolet light irradiation and after ultraviolet light irradiation is difficult. Therefore, liquid of 5 ml which constituted of hexane, 2-propanol and propionic acid at a ratio of 6:1:3 was applied onto the surface, and the contact angle change caused by ultraviolet light irradiation (1 mW/cm 2 , 15 minutes) was measured.
  • the contact angle immediately after completion of the ultraviolet light irradiation can be considered an index of the photocatalytic activity and the antifouling property. Also, the contact angle was measured after storage in the dark for 2 weeks subsequent to completion of the ultraviolet light irradiation, and the results ware used as an index of the maintenance performance of the hydrophilicity based on the following reference.
  • UV- ⁇ 2 Performance evaluation Contact angle ⁇ ' after storing in dark Excellent (E) ⁇ ' ⁇ 15° Good (G) 15° ⁇ ⁇ ' ⁇ 25° Mean (M) 25° ⁇ ⁇ ' ⁇ 30° Bad (B) 30° ⁇ ⁇ '
  • Figures 4(a) to (d) are scanning electron microscope (SEM) observation pictures for Examples 1 and 2 and Comparative Examples 1 and 2, respectively. As shown in Figures 4(a) and (b), a columnar particulate photocatalyst layer (TiO 2 ) is formed on the undercoat layer (crystalline ZrO 2 ) in Examples 1 and 2.
  • SEM scanning electron microscope
  • Comparative Example 1 although a columnar particulate photocatalyst layer (TiO 2 ) is formed, the thickness thereof is small, and a dead layer is formed around the interface between the amorphous undercoat layer (Si 3 N 4 ) and the photocatalyst layer (TiO 2 ).
  • titanium oxide (TiO 2 ) in the photocatalyst layer does not grow into large particles, which suggests that the crystallinity is low.
  • Figure 5 is a graph showing the results of thin film X-ray diffraction measurements for Example 1 and Comparative Examples 1 and 2. From the results, it was confirmed that TiO 2 of Example 1 where the undercoat layer was constituted of crystalline ZrO 2 showed a diffraction peak which was ascribable to anatase (101), and the crystallinity of the TiO 2 was high.
  • TiO 2 of Comparative Example 1 where the undercoat layer was constituted of amorphous Si 3 N 4 showed a crystal peak of rutile (110) to some extent, but did not show a crystal peak of anatase (101), and in Comparative Example 2 where no undercoat layer was provided, neither a crystal peak of anatase (101) nor a crystal peak of rutile (110) was observed. With this, it was confirmed that the crystallinity of the TiO 2 in Comparative Examples was low.
  • the TiO 2 of Comparative Examples had low crystallinity or no crystallinity by the X-ray analysis, but it was confirmed that microcrystals of anatase or rutile were present on a dead layer which was observed as a halo pattern according to an electron diffraction. Such TiO 2 will be hereinafter referred to as low crystalline TiO 2 .
  • the presence of the dead layer prevents the particulate crystal structure of the photocatalyst layer from growing, which causes low photocatalytic activity. Specifically, it can be seen that the absence of the dead layer verifies the growth of the particulate crystal structure of the photocatalyst layer (TiO 2 ) which is necessary for exerting high photocatalytic activity.
  • TiO 2 the particulate crystal structure of the photocatalyst layer
  • a TiO 2 layer was formed on an amorphous ZrO 2 undercoat layer.
  • the amorphous ZrO 2 layer was obtained by conducting film formation by transition mode sputtering.
  • the amorphous ZrO 2 layer was obtained by employing an ion assisted deposition method so as to eject oxygen ions into a film and thereby disorder the structure of the film.
  • the TiO 2 layer formed on such an amorphous ZrO 2 undercoat layer has low crystallinity, and a thick dead layer was formed in this instance, which is different from Examples where the TiO 2 layer was formed on the monoclinic ZrO 2 undercoat layer. Consequently, it is not the material of the undercoat layer but the crystallinity of the undercoat layer that affects the crystallinity of the TiO 2 layer.
  • transition mode sputtering method which was employed for film formation of the zirconium oxide film in Comparative Example 3 and Comparative Example 13.
  • the film formation rate comes to be lowered. Accordingly, by sensing the oxidation state of the target through monitoring the emission state of oxygen with a plasma emission monitor, and by performing feedback of the obtained information to the gas flow rate control system, it becomes possible to form an oxide film at a higher film formation rate. This method is referred to as a transition mode sputtering method.
  • Table 4 shows the film configuration, the methods of forming the peel preventing layer, the undercoat layer, the photocatalyst layer and the hydrophilic thin layer; the presence of a dead layer, the results of contact angle evaluation, and the results of a salt spray test in Examples 10 to 17 and Comparative Examples 12 and 13.
  • Table 5 shows the film formation conditions for the peel preventing layer, and the film formation conditions for the other films (the undercoat layer and the photocatalyst layer).
  • the salt spray test was conducted as follows: Sodium chloride (extra pure reagent) was dissolved into ion-exchange water to prepare about 5% saline water. A test sample of 100 ⁇ 100 mm was fixed in an apparatus (CASSER-ISO-3, manufactured by Suga Test Instruments Co., Ltd.) so as to incline by 20 ⁇ 5 degrees from the vertical line, and the saline water was sprayed onto the test sample at a rate of 1 to 2 ml/hr. After the continuous spraying for 120 hours, the test sample was taken out and film peeling was observed.
  • CASSER-ISO-3 manufactured by Suga Test Instruments Co., Ltd.
  • a peel preventing layer SiO 2 , SixNy, SnO 2 , and SiOxNy
  • Example 16 where the undercoat layer and the photocatalyst layer were formed directly on the bottom face of a glass substrate manufactured by a float process, since the tin modification layer present on the bottom face blocks various kinds of ions and molecules to some extent, no film peeling was observed by a visual inspection and with an optical microscope, and defects were only partly observed with an optical microscope.
  • Comparative Examples 12 and 13 where no peel preventing layer was provided film peeling was observed.
  • Figure 6 is another cross-sectional view of a member having a photocatalytic function according to present invention, which shows a schematic diagram illustrating the relationship between the columnar particulate structure of the film and the crystallites.
  • a peel preventing layer is formed on the surface of a glass plate as a substrate, a monoclinic ZrO 2 layer is formed as an undercoat layer, and a crystalline TiO 2 layer is formed as a photocatalyst layer on the monoclinic ZrO 2 layer.
  • Table 6 shows Examples 18 to 26 and Comparative Examples 14 to 16 with respect to the relatively thin peel preventing layer, the monoclinic ZrO 2 undercoat layer and the photocatalyst layer.
  • Table 7 shows the film formation conditions for each film (the peel preventing layer, the undercoat layer, and the photocatalyst layer) of Examples 18 to 26 shown in Table 6.
  • Figure 7 also shows the optical microscope pictures of Example 18 (having a peel preventing layer) and Comparative Example 16 (having no peel preventing layer) after a salt spray test. No film peeling was observed in Example 18 having a peel preventing layer, while spot-like film peeling was observed in Comparative Example 16 having no peel preventing layer, which verifies the effect of the peel preventing layer.
  • the peel preventing layer, the undercoat layer and the photocatalyst layer are excellent in the contact angle evaluation results, the salt spray test results and the mechanical durability even if the peel preventing layer, the undercoat layer and the photocatalyst layer has a small thickness of around 5 to 10 nm.
  • a photocatalytic member in which the reflectance is low, the reflection color tone is neutral and the color tone unevenness is absent can be obtained, and such a member can be suitably applied particularly to glass for use in construction.
  • Table 8 shows a comparison of the hydrophilization properties and the film formation rate of the titanium tin oxide layer on the monoclinic ZrO 2 undercoat layer in Examples 18 and 27 to 29.
  • Table 9 shows the film formation conditions for the photocatalyst layer of Examples in Table 8, wherein the film formation conditions for the other layers, i.e., the peel preventing layer and the undercoat layer are the same as those shown in Table 7. It can be seen that the use of titanium oxide to which tin is added improves the hydrophilicity maintenance property in the dark. Also, it can be confirmed that the addition of tin improves the film formation rate in a sputtering method.
  • Table 10 shows the X-ray diffraction results and the TEM observation results with respect to the sample of Examples 18 and 17. It is apparent from Table 10 that the ZrO 2 undercoat layer is monoclinic, and the crystal structure of the photocatalyst layer TiO 2 is an anatase structure.
  • Figure 8 shows a structure in which the (-111) plane of ZrO 2 (monoclinic) is continuous with the (101) plane of TiO 2 (anatase) with an inclination is observed in the TiO 2 film which is grown on the ZrO 2 film.
  • FIG. 9 A high resolution TEM picture of the cross section of the ZrO 2 film and the TiO 2 film in Example 17 is shown in Figure 9.
  • the ZrO 2 film and the TiO 2 film in Example 17 has a thickness of 10 times or more compared to each film in Example 18.
  • a lattice pattern is found on the interface with respect to each thin film, and this figure shows that a structure in which the monoclinic ZrO 2 (-111) plane is continuous with the anatase type TiO 2 (101) plane is observed.
  • This figure also shows that the monoclinic ZrO 2 (110) plane is continuous with the anatase type TiO 2 (101) plane in some portions.
  • Figure 10 shows an X-ray diffraction profile of Example 17, in which peaks of the anatase type TiO 2 and the monoclinic ZrO 2 were observed.
  • the peel preventing layer whose main component is an oxide, an oxynitride and a nitride containing at least one of silicon and tin on the surface of the substrate, forming the monoclinic zirconium oxide layer, for example, at low temperature of 150°C or below, and thereafter forming the photocatalyst layer comprising a crystalline phase, it becomes possible to combine with a material having low heat resistance.
  • the present invention can be applied to film formation on a large size plate glass easily.
EP02790849A 2001-12-21 2002-12-24 Element avec fonction photocatalytique et procede de fabrication de celui-ci Expired - Lifetime EP1466665B1 (fr)

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WO2010044922A1 (fr) * 2008-06-12 2010-04-22 Anguel Nikolov Film fin et filtre d’interférence optique comprenant du dioxyde de titane d’indice élevé et procédé de préparation
US10604442B2 (en) 2016-11-17 2020-03-31 Cardinal Cg Company Static-dissipative coating technology
US11325859B2 (en) 2016-11-17 2022-05-10 Cardinal Cg Company Static-dissipative coating technology

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US20050233899A1 (en) 2005-10-20
KR100956214B1 (ko) 2010-05-04
CN1620336A (zh) 2005-05-25
WO2003053577A1 (fr) 2003-07-03
EP1466665B1 (fr) 2012-10-10
KR20040066181A (ko) 2004-07-23
JPWO2003053577A1 (ja) 2005-04-28
JP4295624B2 (ja) 2009-07-15
EP1466665A4 (fr) 2007-12-12
US7612015B2 (en) 2009-11-03
AU2002366770A1 (en) 2003-07-09

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