EP1335641B1 - Buse à plasma - Google Patents

Buse à plasma Download PDF

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Publication number
EP1335641B1
EP1335641B1 EP02002927A EP02002927A EP1335641B1 EP 1335641 B1 EP1335641 B1 EP 1335641B1 EP 02002927 A EP02002927 A EP 02002927A EP 02002927 A EP02002927 A EP 02002927A EP 1335641 B1 EP1335641 B1 EP 1335641B1
Authority
EP
European Patent Office
Prior art keywords
nozzle tube
nozzle
electrode
plasma
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02002927A
Other languages
German (de)
English (en)
Other versions
EP1335641A1 (fr
Inventor
Peter FÖRNSEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasma Treat GmbH
Original Assignee
Plasma Treat GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Treat GmbH filed Critical Plasma Treat GmbH
Priority to DE50200894T priority Critical patent/DE50200894D1/de
Priority to EP02002927A priority patent/EP1335641B1/fr
Priority to AT02002927T priority patent/ATE274787T1/de
Publication of EP1335641A1 publication Critical patent/EP1335641A1/fr
Application granted granted Critical
Publication of EP1335641B1 publication Critical patent/EP1335641B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3468—Vortex generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Definitions

  • the invention relates to a plasma nozzle for generating a jet of an atmospheric Plasma. with a nozzle pipe through which a working gas flows. an electrode arranged coaxially in the nozzle tube, a high-frequency generator for applying a voltage between the electrode and the Nozzle tube and a swirl device for the swirled introduction of the working gas in an annular space between the electrode and the nozzle tube.
  • a plasma nozzle of this type is known from US-A-5 837 958 and from WO 01 43512 A. known and is used in particular for surface pretreatment, for example for hydrophilizing workpieces, but can also be used for other purposes are used, for example for plasma polymerization or plasma coating.
  • the high frequency generator generates a voltage of, for example 500 kV or more with a frequency of 1kHz or more between the Electrode and the nozzle tube. This leads to an arc discharge, their discharge arc, however, due to the swirled flow of the working gas gets carried away. The working gas forms a vortex that is around the axis of the nozzle tube rotates.
  • the arc in the vortex core is on the axis of the nozzle tube so that it is only at the mouth of the nozzle tube branches and overturns on the nozzle tube. Because of the rapid rotation of the working gas in the vortex core occurs along the entire length of the arc for intimate contact of the working gas with the arc. Thereby a relatively cool, but highly reactive secondary plasma is generated. which then emerges as a jet from the mouth of the nozzle tube.
  • the inside of the nozzle tube is lined with a ceramic tube, which is a dielectric forms and has the purpose of igniting and forming the arc to control. Specifically, there is one when the voltage is switched on Corona discharge in the annular space between the electrode and the dielectric, and only through this corona discharge is the actual arc discharge ignited so that the arc forms in the desired manner.
  • the plasma nozzle does not function impaired but on the contrary is improved if you look at the No dielectric at all.
  • the ignition then occurs suddenly by skipping of the arc between the electrode and the wall of the nozzle tube.
  • the swirled flow of the working gas is sufficient, the arc to blow out of the annulus so that it is like the conventional nozzle is channeled in the vortex core.
  • the structure of the plasma nozzle is simplified and the manufacturing costs are reduced.
  • the diameter and the axial length of the Reduce the plasma nozzle without negatively affecting the geometry of the plasma jet.
  • the nozzle tube tapers conically towards the mouth.
  • a ceramic tube with such a rejuvenation it is difficult to manufacture a transition point between the ceramic tube in the conventional plasma nozzle and give the conductive surface of the nozzle tube. Through this transition point the flow of the working gas in the nozzle pipe was disturbed.
  • these problems are avoided, and the inner surface of the nozzle tube can be designed with a high degree of design freedom depending on the application Design so that the plasma jet has the desired shape and length receives.
  • the swirl device is preferably formed by a wall made of metal with a spiral shape arranged holes formed electrically opposite the electrode is insulated and is at the potential as the nozzle tube. Due to the Flow and pressure conditions in the annulus will cause the arc to die Flow of the working gas is sucked in and carried away, so that it is reliable too a shift of the base point of the arc to the tip of the electrode comes.
  • the plasma nozzle 10 shown in FIG. 1 has a nozzle tube 12 made of metal, which tapers conically to an outlet opening 14. At the outlet opening 14 opposite end, the nozzle tube 12 has an inlet 16 for a working gas on, for example for compressed air.
  • An intermediate wall 18 of the nozzle tube 12 has a ring of bores 20 made obliquely in the circumferential direction and thus forms a swirl device for the working gas.
  • the downstream one Conical tapered part of the nozzle tube is therefore from the working gas in the Form flows through a vortex 22, the core of which on the longitudinal axis of the nozzle tube runs.
  • An electrode 24 is arranged centrally on the underside of the intermediate wall 18, which projects coaxially into the tapered section of the nozzle tube.
  • the electrode 24 is rounded off by a rotationally symmetrical one Pin formed, for example of copper, which is electrically isolated by an insulator 26 insulated from the intermediate wall 18 and the other parts of the nozzle tube is.
  • a high frequency is applied to the electrode 24 via an insulated shaft 28 AC voltage applied by a high frequency transformer 30 is generated.
  • the voltage can be regulated variably and is, for example 500 V or more, preferably 2 - 5 kV.
  • the frequency is, for example, in the Order of magnitude from 1 to 20 kHz and is preferably also adjustable.
  • the Shaft 28 is connected to the high-frequency transformer 30 via a flexible high-voltage cable 32 connected.
  • the inlet 16 is via a not shown Hose connected to a variable flow compressed air source, preferably combined with the high-frequency generator 30 to form a supply unit is.
  • the plasma nozzle 10 can be effortlessly by hand or with the help of a robot arm.
  • the nozzle tube 12 and the intermediate wall 18 are grounded.
  • FIG. 2 shows a plasma nozzle 10 'according to a modified embodiment.
  • the electrode 24 is separated from the intermediate wall 18 designed and suspended on thin, radial webs 38, the wall of the nozzle tube 12 on electrically insulating bushings Enforce 40.
  • the voltage supply to the electrode 24 takes place via the webs 38.
  • This embodiment has the advantage of greater freedom in terms of the design of the electrode 24.
  • this electrode have a streamlined shape so that the swirling flow of the working gas is further optimized in the nozzle tube. Since also the partition 18 here does not act as a heat sink for the electrode, the electrode 24 can be on a higher temperature, so that the work function for the electrons is smaller.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Geometry (AREA)
  • Plasma Technology (AREA)
  • Arc Welding In General (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Claims (5)

  1. Buse à plasma pour la production d'un jet (36) d'un plasma atmosphérique, comportant un tube de buse (12) traversé par un gaz de travail, une électrode (24) disposée coaxialement dans le tube de buse, un générateur à haute fréquence (30) pour l'application d'une tension entre l'électrode (24) et le tube de buse (12) et un dispositif de tourbillonnement (18) pour introduire, en le faisant tourbillonner, le gaz de travail dans un espace annulaire entre l'électrode (24) et le tube de buse (12), de telle sorte que l'arc électrique est canalisé dans le noyau du tourbillon sur l'axe du tube de buse et se ramifie uniquement au niveau de l'embouchure du tube de buse et produit une décharge disruptive sur le tube de buse,
    caractérisée en ce que l'espace annulaire est limité sur la longueur de l'électrode (24) vers l'extérieur, uniquement par la surface conductrice du tube de buse (12).
  2. Buse à plasma selon la revendication 1,
    caractérisée en ce que le dispositif de tourbillonnement (18) est relié électriquement au tube de buse (12) et isolé vis-à-vis de l'électrode (24).
  3. Buse à plasma selon la revendication 1 ou 2,
    caractérisée en ce que le tube de buse (12) se rétrécit en direction de son ouverture de sortie (14).
  4. Buse à plasma selon l'une des revendications précédentes,
    caractérisée en ce que l'électrode (24) est agencée en étant séparée spatialement du dispositif de tourbillonnement (18) et est retenu à l'état flottant dans le tube de buse (12) par des barrettes radiales.
  5. Buse à plasma selon la revendication 4,
    caractérisée en ce que l'électrode (24) est un corps d'une forme correspondant à des lignes d'écoulement.
EP02002927A 2002-02-09 2002-02-09 Buse à plasma Expired - Lifetime EP1335641B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE50200894T DE50200894D1 (de) 2002-02-09 2002-02-09 Plasmadüse
EP02002927A EP1335641B1 (fr) 2002-02-09 2002-02-09 Buse à plasma
AT02002927T ATE274787T1 (de) 2002-02-09 2002-02-09 Plasmadüse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02002927A EP1335641B1 (fr) 2002-02-09 2002-02-09 Buse à plasma

Publications (2)

Publication Number Publication Date
EP1335641A1 EP1335641A1 (fr) 2003-08-13
EP1335641B1 true EP1335641B1 (fr) 2004-08-25

Family

ID=27589098

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02002927A Expired - Lifetime EP1335641B1 (fr) 2002-02-09 2002-02-09 Buse à plasma

Country Status (3)

Country Link
EP (1) EP1335641B1 (fr)
AT (1) ATE274787T1 (fr)
DE (1) DE50200894D1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010996A1 (de) 2007-03-05 2008-09-11 Arcoron Gmbh Plasmadüse
DE202008017836U1 (de) 2008-03-05 2010-08-12 Arcoron Gmbh Plasmadüse

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101151340A (zh) 2005-02-11 2008-03-26 Sika技术股份公司 空气-等离子体处理过的热塑性塑料的粘合
DE102005018926B4 (de) 2005-04-22 2007-08-16 Plasma Treat Gmbh Verfahren und Plasmadüse zum Erzeugen eines mittels hochfrequenter Hochspannung erzeugten atmosphärischen Plasmastrahls umfassend eine Vorrichtung jeweils zur Charakterisierung einer Oberfläche eines Werkstückes
DE102005020511A1 (de) * 2005-04-29 2006-11-09 Basf Ag Verbundelement, insbeondere Fensterscheibe
DE102005020510A1 (de) 2005-04-29 2006-11-09 Basf Ag Verbundelement, insbesondere Fensterscheibe
DE202007018327U1 (de) 2006-11-23 2008-08-07 Plasmatreat Gmbh Vorrichtung zum Erzeugen eines Plasmas
DE102007011235A1 (de) 2007-03-06 2008-09-11 Plasma Treat Gmbh Verfahren und Vorrichtung zur Behandlung einer Oberfläche eines Werkstückes
ATE474895T1 (de) 2007-05-11 2010-08-15 Sika Technology Ag Über polyurethan-heissschmelzklebstoff verbundene schichtbundkörper sowie verfahren zum verkleben von weichmacher enthaltenden kunststoffen
DE102008029681A1 (de) 2008-06-23 2009-12-24 Plasma Treat Gmbh Verfahren und Vorrichtung zum Aufbringen einer Schicht, insbesondere einer selbstreinigend und/oder antimikrobiell wirkenden photokatalytischen Schicht, auf eine Oberfläche
DE102008058783A1 (de) 2008-11-24 2010-05-27 Plasmatreat Gmbh Verfahren zur atmosphärischen Beschichtung von Nanooberflächen
DE102010055532A1 (de) 2010-03-02 2011-12-15 Plasma Treat Gmbh Verfahren zur Herstellung eines mehrschichtigen Verpackungsmaterials und Verfahren zum Auftragen eines Klebers sowie Vorrichtung dazu
DE102010011643B4 (de) 2010-03-16 2024-05-29 Christian Buske Vorrichtung und Verfahren zur Plasmabehandlung von lebendem Gewebe
DE102010062386B4 (de) * 2010-12-03 2014-10-09 Evonik Degussa Gmbh Verfahren zum Konvertieren von Halbleiterschichten, derartig hergestellte Halbleiterschichten sowie derartige Halbleiterschichten umfassende elektronische und optoelektronische Erzeugnisse
JP6210974B2 (ja) 2011-05-06 2017-10-11 テーザ・ソシエタス・ヨーロピア 第１の外側の感圧接着性の面および第２の外側の熱活性化性の面を備えた両面接着テープ
DE102012102721B4 (de) 2012-03-29 2013-12-05 BSH Bosch und Siemens Hausgeräte GmbH Verfahren zum Passivieren einer Metalloberfläche
EP2644739B1 (fr) 2012-03-29 2019-03-06 BSH Hausgeräte GmbH Procédé de passivation d'une surface métallique et appareil ménager, notamment lave-vaisselle ménager, doté d'une partie de paroi
DE102012206081A1 (de) 2012-04-13 2013-10-17 Krones Ag Beschichtung von Behältern mit Plasmadüsen
DE102012220286A1 (de) 2012-11-07 2014-05-08 Tesa Se Verfahren zur Erhöhung der adhäsiven Eigenschaften von Haftklebemassen auf Untergründen mittels Plasmabehandlung
DE102015009764A1 (de) 2015-07-31 2017-02-02 Tesa Se Reaktives Klebstofffilm-System zur Verklebung unpolarer Oberflächen
CN106753000A (zh) 2015-11-25 2017-05-31 德莎欧洲公司 具有改善的耐湿热性的粘合

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1350055A (fr) * 1962-12-11 1964-01-24 Centre Nat Rech Scient Perfectionnements à l'injection des gaz dans les chalumeaux à plasma
US5444209A (en) * 1993-08-11 1995-08-22 Miller Thermal, Inc. Dimensionally stable subsonic plasma arc spray gun with long wearing electrodes
JPH07192892A (ja) * 1993-12-24 1995-07-28 Komatsu Ltd プラズマトーチ
DE29921694U1 (de) * 1999-12-09 2001-04-19 Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen Plasmadüse

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010996A1 (de) 2007-03-05 2008-09-11 Arcoron Gmbh Plasmadüse
DE202008017836U1 (de) 2008-03-05 2010-08-12 Arcoron Gmbh Plasmadüse

Also Published As

Publication number Publication date
DE50200894D1 (de) 2004-09-30
ATE274787T1 (de) 2004-09-15
EP1335641A1 (fr) 2003-08-13

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