EP1335641B1 - Plasma nozzle - Google Patents

Plasma nozzle Download PDF

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Publication number
EP1335641B1
EP1335641B1 EP02002927A EP02002927A EP1335641B1 EP 1335641 B1 EP1335641 B1 EP 1335641B1 EP 02002927 A EP02002927 A EP 02002927A EP 02002927 A EP02002927 A EP 02002927A EP 1335641 B1 EP1335641 B1 EP 1335641B1
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EP
European Patent Office
Prior art keywords
nozzle tube
nozzle
electrode
plasma
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP02002927A
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German (de)
French (fr)
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EP1335641A1 (en
Inventor
Peter FÖRNSEL
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Plasma Treat GmbH
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Plasma Treat GmbH
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Priority to DE50200894T priority Critical patent/DE50200894D1/en
Priority to EP02002927A priority patent/EP1335641B1/en
Priority to AT02002927T priority patent/ATE274787T1/en
Publication of EP1335641A1 publication Critical patent/EP1335641A1/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3468—Vortex generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Definitions

  • the invention relates to a plasma nozzle for generating a jet of an atmospheric Plasma. with a nozzle pipe through which a working gas flows. an electrode arranged coaxially in the nozzle tube, a high-frequency generator for applying a voltage between the electrode and the Nozzle tube and a swirl device for the swirled introduction of the working gas in an annular space between the electrode and the nozzle tube.
  • a plasma nozzle of this type is known from US-A-5 837 958 and from WO 01 43512 A. known and is used in particular for surface pretreatment, for example for hydrophilizing workpieces, but can also be used for other purposes are used, for example for plasma polymerization or plasma coating.
  • the high frequency generator generates a voltage of, for example 500 kV or more with a frequency of 1kHz or more between the Electrode and the nozzle tube. This leads to an arc discharge, their discharge arc, however, due to the swirled flow of the working gas gets carried away. The working gas forms a vortex that is around the axis of the nozzle tube rotates.
  • the arc in the vortex core is on the axis of the nozzle tube so that it is only at the mouth of the nozzle tube branches and overturns on the nozzle tube. Because of the rapid rotation of the working gas in the vortex core occurs along the entire length of the arc for intimate contact of the working gas with the arc. Thereby a relatively cool, but highly reactive secondary plasma is generated. which then emerges as a jet from the mouth of the nozzle tube.
  • the inside of the nozzle tube is lined with a ceramic tube, which is a dielectric forms and has the purpose of igniting and forming the arc to control. Specifically, there is one when the voltage is switched on Corona discharge in the annular space between the electrode and the dielectric, and only through this corona discharge is the actual arc discharge ignited so that the arc forms in the desired manner.
  • the plasma nozzle does not function impaired but on the contrary is improved if you look at the No dielectric at all.
  • the ignition then occurs suddenly by skipping of the arc between the electrode and the wall of the nozzle tube.
  • the swirled flow of the working gas is sufficient, the arc to blow out of the annulus so that it is like the conventional nozzle is channeled in the vortex core.
  • the structure of the plasma nozzle is simplified and the manufacturing costs are reduced.
  • the diameter and the axial length of the Reduce the plasma nozzle without negatively affecting the geometry of the plasma jet.
  • the nozzle tube tapers conically towards the mouth.
  • a ceramic tube with such a rejuvenation it is difficult to manufacture a transition point between the ceramic tube in the conventional plasma nozzle and give the conductive surface of the nozzle tube. Through this transition point the flow of the working gas in the nozzle pipe was disturbed.
  • these problems are avoided, and the inner surface of the nozzle tube can be designed with a high degree of design freedom depending on the application Design so that the plasma jet has the desired shape and length receives.
  • the swirl device is preferably formed by a wall made of metal with a spiral shape arranged holes formed electrically opposite the electrode is insulated and is at the potential as the nozzle tube. Due to the Flow and pressure conditions in the annulus will cause the arc to die Flow of the working gas is sucked in and carried away, so that it is reliable too a shift of the base point of the arc to the tip of the electrode comes.
  • the plasma nozzle 10 shown in FIG. 1 has a nozzle tube 12 made of metal, which tapers conically to an outlet opening 14. At the outlet opening 14 opposite end, the nozzle tube 12 has an inlet 16 for a working gas on, for example for compressed air.
  • An intermediate wall 18 of the nozzle tube 12 has a ring of bores 20 made obliquely in the circumferential direction and thus forms a swirl device for the working gas.
  • the downstream one Conical tapered part of the nozzle tube is therefore from the working gas in the Form flows through a vortex 22, the core of which on the longitudinal axis of the nozzle tube runs.
  • An electrode 24 is arranged centrally on the underside of the intermediate wall 18, which projects coaxially into the tapered section of the nozzle tube.
  • the electrode 24 is rounded off by a rotationally symmetrical one Pin formed, for example of copper, which is electrically isolated by an insulator 26 insulated from the intermediate wall 18 and the other parts of the nozzle tube is.
  • a high frequency is applied to the electrode 24 via an insulated shaft 28 AC voltage applied by a high frequency transformer 30 is generated.
  • the voltage can be regulated variably and is, for example 500 V or more, preferably 2 - 5 kV.
  • the frequency is, for example, in the Order of magnitude from 1 to 20 kHz and is preferably also adjustable.
  • the Shaft 28 is connected to the high-frequency transformer 30 via a flexible high-voltage cable 32 connected.
  • the inlet 16 is via a not shown Hose connected to a variable flow compressed air source, preferably combined with the high-frequency generator 30 to form a supply unit is.
  • the plasma nozzle 10 can be effortlessly by hand or with the help of a robot arm.
  • the nozzle tube 12 and the intermediate wall 18 are grounded.
  • FIG. 2 shows a plasma nozzle 10 'according to a modified embodiment.
  • the electrode 24 is separated from the intermediate wall 18 designed and suspended on thin, radial webs 38, the wall of the nozzle tube 12 on electrically insulating bushings Enforce 40.
  • the voltage supply to the electrode 24 takes place via the webs 38.
  • This embodiment has the advantage of greater freedom in terms of the design of the electrode 24.
  • this electrode have a streamlined shape so that the swirling flow of the working gas is further optimized in the nozzle tube. Since also the partition 18 here does not act as a heat sink for the electrode, the electrode 24 can be on a higher temperature, so that the work function for the electrons is smaller.

Abstract

The plasma nozzle has a nozzle tube (12) carrying a flow of a working gas, a coaxial electrode (24) in the tube, a high frequency generator (30) and a spin device (18) for introducing the gas into an annular chamber between the electrode and tube with spin. The annular chamber is limited to the outward length of the electrode by the conducting surface of the nozzle tube.

Description

Die Erfindung betrifft eine Plasmadüse zur Erzeugung eines Strahls eines atmosphärischen Plasmas. mit einem von einem Arbeitsgas durchströmten Düsenrohr. einer koaxial in dem Düsenrohr angeordneten Elektrode, einem Hochfrequenzgenerator zum Anlegen einer Spannung zwischen der Elektrode und dem Düsenrohr und einer Dralleinrichtung zur verdrallten Einleitung des Abeitsgases in einen Ringraum zwischen der Elektrode und dem Düsenrohr.The invention relates to a plasma nozzle for generating a jet of an atmospheric Plasma. with a nozzle pipe through which a working gas flows. an electrode arranged coaxially in the nozzle tube, a high-frequency generator for applying a voltage between the electrode and the Nozzle tube and a swirl device for the swirled introduction of the working gas in an annular space between the electrode and the nozzle tube.

Eine Plasmadüse dieser Art ist aus US-A-5 837 958 sowie aus WO 01 43512 A bekannt und dient insbesondere zur Oberflächenvorbehandlung, beispielsweise zum Hydrophilisieren von Werkstücken, kann jedoch auch für andere Zwecke eingesetzt werden, beispielsweise zur Plasmapolymerisation oder Plasmabeschichtung. Der Hochfrequenzgenerator erzeugt eine Spannung von beispielsweise 500 kV oder mehr mit einer Frequenz von 1kHz oder mehr zwischen der Elektrode und dem Düsenrohr. Hierdurch kommt es zu einer Bogenentladung, deren Entladungsbogen jedoch durch die verdrallte Strömung des Arbeitsgases mitgerissen wird. Das Arbeitsgas bildet einen Wirbel, der um die Achse des Düsenrohres rotiert. Letztlich wird so der Lichtbogen im Wirbelkern auf der Achse des Düsenrohres kanalisiert, so daß er sich erst an der Mündung des Düsenrohres verzweigt und auf das Düsenrohr überschlägt. Aufgrund der raschen Rotation des Arbeitsgases im Wirbelkern kommt es auf der gesamten Länge des Lichtbogens zu einer innigen Berührung des Arbeitsgases mit dem Lichtbogen. Dadurch wird ein verhältnismäßig kühles, aber hoch reaktives Sekundärplasma erzeugt. das dann als Strahl aus der Mündung des Düsenrohres austritt.A plasma nozzle of this type is known from US-A-5 837 958 and from WO 01 43512 A. known and is used in particular for surface pretreatment, for example for hydrophilizing workpieces, but can also be used for other purposes are used, for example for plasma polymerization or plasma coating. The high frequency generator generates a voltage of, for example 500 kV or more with a frequency of 1kHz or more between the Electrode and the nozzle tube. This leads to an arc discharge, their discharge arc, however, due to the swirled flow of the working gas gets carried away. The working gas forms a vortex that is around the axis of the nozzle tube rotates. Ultimately, the arc in the vortex core is on the axis of the nozzle tube so that it is only at the mouth of the nozzle tube branches and overturns on the nozzle tube. Because of the rapid rotation of the working gas in the vortex core occurs along the entire length of the arc for intimate contact of the working gas with the arc. Thereby a relatively cool, but highly reactive secondary plasma is generated. which then emerges as a jet from the mouth of the nozzle tube.

Das Düsenrohr ist innen mit einem Keramikrohr ausgekleidet, das ein Dielektrikum bildet und den Zweck hat, die Zündung und Ausbildung des Lichtbogens zu steuern. Speziell kommt es beim Einschalten der Spannung zunächst zu einer Koronaentladung in dem Ringraum zwischen der Elektrode und dem Dielektrikurn, und erst durch diese Koronaentladung wird die eigentliche Bogenentladung so gezündet, daß sich der Lichtbogen in der gewünschten Weise ausbildet.The inside of the nozzle tube is lined with a ceramic tube, which is a dielectric forms and has the purpose of igniting and forming the arc to control. Specifically, there is one when the voltage is switched on Corona discharge in the annular space between the electrode and the dielectric, and only through this corona discharge is the actual arc discharge ignited so that the arc forms in the desired manner.

Aus EP-A-0 639 041 ist eine ähnlich aufgebaute Plasmadüse bekannt, die zum Plasmaspritzen, d. h. zur Pulverbeschichtung dient. Diese Düse wird jedoch mit Gleichstrom betrieben und weist deshalb kein Dielektrikum im Düsenrohr auf. Aufgabe der Erfindung ist es, eine einfacher und kompakter aufgebaute Plasmadüse zu schaffen, bei der sich die Geometrie des Plasmastrahls besser steuern läßt. From EP-A-0 639 041 a similarly constructed plasma nozzle is known, which for Plasma spraying, d. H. is used for powder coating. However, this nozzle comes with Operated in direct current and therefore has no dielectric in the nozzle tube. The object of the invention is a simple and compact plasma nozzle to create, in which the geometry of the plasma beam control better leaves.

Diese Aufgabe wird dadurch gelöst, daß der Ringraum auf der Länge der Elektrode nach außen nur durch die leitende Oberfläche des Düsenrohres begrenzt wird.This object is achieved in that the annular space along the length of the electrode is limited to the outside only by the conductive surface of the nozzle tube.

Überraschend hat sich gezeigt, daß die Funktionsweise der Plasmadüse nicht beeinträchtigt sondern im Gegenteil noch verbessert wird, wenn man auf das Dielektrikum ganz verzichtet. Die Zündung erfolgt dann schlagartig durch Überspringen des Lichtbogens zwischen der Elektrode und der Wand des Düsenrohres. Allein die verdrallte Strömung des Arbeitsgases reicht aus, den Lichtbogen so aus dem Ringraum herauszublasen, daß er wie bei der herkömmlichen Düse im Wirbelkern kanalisiert wird. Durch den Verzicht auf das Keramikrohr wird der Aufbau der Plasmadüse vereinfacht, und die Herstellungskosten werden gesenkt. Insbesondere läßt sich der Durchmesser und auch die axiale Länge der Plasmadüse reduzieren, ohne daß dies einen negativen Einfluß auf die Geometrie des Plasmastrahls hat.Surprisingly, it has been shown that the plasma nozzle does not function impaired but on the contrary is improved if you look at the No dielectric at all. The ignition then occurs suddenly by skipping of the arc between the electrode and the wall of the nozzle tube. The swirled flow of the working gas is sufficient, the arc to blow out of the annulus so that it is like the conventional nozzle is channeled in the vortex core. By not using the ceramic tube the structure of the plasma nozzle is simplified and the manufacturing costs are reduced. In particular, the diameter and the axial length of the Reduce the plasma nozzle without negatively affecting the geometry of the plasma jet.

Um die Form und Länge des Plasmastrahls zu steuern, ist es erwünscht, daß sich das Düsenrohr zur Mündung hin konisch verjüngt. Da jedoch ein Keramikrohr mit einer solchen Verjüngung nur schwer herzustellen ist, mußte es dann bei der herkömmlichen Plasmadüse eine Übergangsstelle zwischen dem Keramikrohr und der leitenden Oberfläche des Düsenrohres geben. Durch diese Übergangsstelle wurde die Strömung des Arbeitsgases im Düsenrohr gestört. Bei der erfindungsgemäßen Lösung werden diese Probleme vermieden, und die Innenfläche des Düsenrohres läßt sich mit hoher konstruktiver Freiheit je nach Anwendungsfall so gestalten, daß der Plasmastrahl die gewünschte Form und Länge erhält.In order to control the shape and length of the plasma jet, it is desirable that the nozzle tube tapers conically towards the mouth. However, since a ceramic tube with such a rejuvenation it is difficult to manufacture a transition point between the ceramic tube in the conventional plasma nozzle and give the conductive surface of the nozzle tube. Through this transition point the flow of the working gas in the nozzle pipe was disturbed. In the solution according to the invention, these problems are avoided, and the inner surface of the nozzle tube can be designed with a high degree of design freedom depending on the application Design so that the plasma jet has the desired shape and length receives.

Weitere vorteilhafte Ausgestaltungen der Erfindung ergeben sich aus den Unteransprüchen.Further advantageous embodiments of the invention result from the subclaims.

Bevorzugt wird die Dralleinrichtung durch eine Wand aus Metall mit spriralförmig angeordneten Bohrungen gebildet, die gegenüber der Elektrode elektrisch isoliert ist und sich auf dem Potential wie das Düsenrohr befindet. Aufgrund der Strömungs- und Druckverhältnisse in dem Ringraum wird der Lichtbogen in die Strömung des Arbeitsgases eingesaugt und mitgerissen, so daß es zuverlässig zu einer Verlagerung des Fußpunktes des Lichtbogens zur Spitze der Elektrode kommt. The swirl device is preferably formed by a wall made of metal with a spiral shape arranged holes formed electrically opposite the electrode is insulated and is at the potential as the nozzle tube. Due to the Flow and pressure conditions in the annulus will cause the arc to die Flow of the working gas is sucked in and carried away, so that it is reliable too a shift of the base point of the arc to the tip of the electrode comes.

Im folgenden wird ein Ausführungsbeispiel der Erfindung anhand der Zeichnung näher erläutert.The following is an embodiment of the invention with reference to the drawing explained in more detail.

Es zeigen:

Fig. 1
einen schematischen Schnitt durch die Plasmadüse der Erfindung; und
Fig.2
einen Schnitt durch eine Plasmadüse gemäß einer abgewandelten Ausführungsform.
Show it:
Fig. 1
a schematic section through the plasma nozzle of the invention; and
Fig.2
a section through a plasma nozzle according to a modified embodiment.

Die in Figur 1 gezeigte Plasmadüse 10 weist ein Düsenrohr 12 aus Metall auf, das sich konisch zu einer Auslaßöffnung 14 verjüngt. Am der Auslaßöffnung 14 entgegengesetzten Ende weist das Düsenrohr 12 einen Einlaß 16 für ein Arbeitsgas auf, beispielsweise für Druckluft. Eine Zwischenwand 18 des Düsenrohres 12 weist einen Kranz von schräg in Umfangsrichtung angestellten Bohrungen 20 auf und bildet so eine Dralleinrichtung für das Arbeitsgas. Der stromabwärtige, konisch verjüngte Teil des Düsenrohres wird deshalb von dem Arbeitsgas in der Form eines Wirbels 22 durchströmt, dessen Kern auf der Längsachse des Düsenrohres verläuft.The plasma nozzle 10 shown in FIG. 1 has a nozzle tube 12 made of metal, which tapers conically to an outlet opening 14. At the outlet opening 14 opposite end, the nozzle tube 12 has an inlet 16 for a working gas on, for example for compressed air. An intermediate wall 18 of the nozzle tube 12 has a ring of bores 20 made obliquely in the circumferential direction and thus forms a swirl device for the working gas. The downstream one Conical tapered part of the nozzle tube is therefore from the working gas in the Form flows through a vortex 22, the core of which on the longitudinal axis of the nozzle tube runs.

An der Unterseite der Zwischenwand 18 ist mittig eine Elektrode 24 angeordnet, die koaxial in den verjüngten Abschnitt des Düsenrohres hineinragt. Die Elektrode 24 wird durch einen rotationssymmetrischen, an der Spitze abgerundeten Stift gebildet, beispielsweise aus Kupfer, der durch einen Isolator 26 elektrisch gegenüber der Zwischenwand 18 und den übrigen Teilen des Düsenrohres isoliert ist. Über einen isolierten Schaft 28 wird an die Elektrode 24 eine hochfrequente Wechselspannung angelegt, die von einem Hochfrequenztransformator 30 erzeugt wird. Die Spannung ist variabel regelbar und beträgt beispielsweise 500 V oder mehr, vorzugweise 2 - 5 kV. Die Frequenz liegt beispielsweise in der Größenordnung von 1 bis 20 kHz und ist vorzugsweise ebenfalls regelbar. Der Schaft 28 ist mit dem Hochfrequenztransformator 30 über ein flexibles Hochspannungskabel 32 verbunden. Der Einlaß 16 ist über einen nicht gezeigten Schlauch mit einer Druckluftquelle mit variablem Durchsatz verbunden, die vorzugsweise mit dem Hochfrequenzgenerator 30 zu einer Versorgungseinheit kombiniert ist. Die Plasmadüse 10 läßt sich so mühelos mit der Hand oder mit Hilfe eines Roboterarms bewegen. Das Düsenrohr 12 und die Zwischenwand 18 sind geerdet.An electrode 24 is arranged centrally on the underside of the intermediate wall 18, which projects coaxially into the tapered section of the nozzle tube. The electrode 24 is rounded off by a rotationally symmetrical one Pin formed, for example of copper, which is electrically isolated by an insulator 26 insulated from the intermediate wall 18 and the other parts of the nozzle tube is. A high frequency is applied to the electrode 24 via an insulated shaft 28 AC voltage applied by a high frequency transformer 30 is generated. The voltage can be regulated variably and is, for example 500 V or more, preferably 2 - 5 kV. The frequency is, for example, in the Order of magnitude from 1 to 20 kHz and is preferably also adjustable. The Shaft 28 is connected to the high-frequency transformer 30 via a flexible high-voltage cable 32 connected. The inlet 16 is via a not shown Hose connected to a variable flow compressed air source, preferably combined with the high-frequency generator 30 to form a supply unit is. The plasma nozzle 10 can be effortlessly by hand or with the help of a robot arm. The nozzle tube 12 and the intermediate wall 18 are grounded.

Durch die angelegte Spannung wird eine Hochfrequenzentladung in der Form eines Lichtbogens 34 zwischen der Elektrode 24 und dem Düsenrohr 12 erzeugt. Aufgrund der drallförmigen Strömung des Arbeitsgases wird dieser Lichtbogen jedoch im Wirbelkern auf der Achse des Düsenrohres 12 kanalisiert, so daß er sich erst im Bereich der Auslaßöffnung 14 zur Wand des Düsenrohres 12 verzweigt. Das Arbeitsgas, das im Bereich des Wirbelkerns und damit in unmittelbarer Nähe des Lichtbogens 34 mit hoher Strömungsgeschwindigkeit rotiert, kommt mit dem Lichtbogen in innige Berührung und wird dadurch zum Teil in den Plasmazustand überführt, so daß ein Strahl 36 eines verhältnismäßig kühlen atmosphärischen Plasmas, etwa in der Gestalt einer Kerzenflamme, aus der Auslaßöffnung 14 der Plasmadüse 10 austritt.A high-frequency discharge in the form of a Arc 34 generated between the electrode 24 and the nozzle tube 12. Due to the swirling flow of the working gas, this arc will however channeled in the vortex core on the axis of the nozzle tube 12 so that it only branches to the wall of the nozzle tube 12 in the area of the outlet opening 14. The working gas that is in the area of the vortex core and thus in the immediate Near the arc 34 rotates at high flow speed, comes into intimate contact with the arc and thereby becomes partly in transferred the plasma state so that a beam 36 of a relatively cool one atmospheric plasma, approximately in the shape of a candle flame, from the Outlet opening 14 of the plasma nozzle 10 exits.

Figur 2 zeigt eine Plasmadüse 10' gemäß einem abgewandelten Ausführungsbeispiel. Im Unterschied zu Figur 1 ist hier die Elektrode 24 getrennt von der Zwischenwand 18 ausgebildet und schwebend an dünnen, radialen Stegen 38 gehalten, die die Wand des Düsenrohres 12 an elektrisch isolierenden Durchführungen 40 durchsetzen. Die Spannungszufuhr zu der Elektrode 24 erfolgt über die Stege 38.Figure 2 shows a plasma nozzle 10 'according to a modified embodiment. In contrast to FIG. 1, the electrode 24 is separated from the intermediate wall 18 designed and suspended on thin, radial webs 38, the wall of the nozzle tube 12 on electrically insulating bushings Enforce 40. The voltage supply to the electrode 24 takes place via the webs 38.

Diese Ausführungsform hat den Vorteil, daß eine größere Freiheit hinsichtlich der Gestaltung der Elektrode 24 besteht. Insbesondere kann diese Elektrode eine Stromlinienform haben, so daß die drallförmige Strömung des Arbeitsgases im Düsenrohr weiter optimiert wird. Da außerdem die Zwischenwand 18 hier nicht als Wärmesenke für die Elektrode wirkt, kann die Elektrode 24 auf einer höheren Temperatur gehalten werden, so daß die Austrittsarbeit für die Elektronen kleiner ist.This embodiment has the advantage of greater freedom in terms of the design of the electrode 24. In particular, this electrode have a streamlined shape so that the swirling flow of the working gas is further optimized in the nozzle tube. Since also the partition 18 here does not act as a heat sink for the electrode, the electrode 24 can be on a higher temperature, so that the work function for the electrons is smaller.

Claims (5)

  1. A plasma nozzle for generating a jet (36) of an atmospheric plasma, having a nozzle tube (12) which a work gas flows through, an electrode (24) positioned coaxially in the nozzle tube, a high-frequency generator (30) for applying a voltage between the electrode (24) and the nozzle tube (12), and a twist device (18) for twisted introduction of the work gas into an annular space between the electrode (24) and the nozzle tube (12) in such a way that the electric arc is channeled in the vortex core along the axis of the nozzle tube and only branches at the mouth of the nozzle tube and arcs over onto the nozzle tube,
    characterized in that the annular space along the length of the electrode (24) is delimited to the outside only by the conductive surface of the nozzle tube (12).
  2. The plasma nozzle according to Claim 1,
    characterized in that the twist device (18) is electrically connected to the nozzle tube (12) and is insulated from the electrode (24).
  3. The plasma nozzle according to Claim 1 or 2,
    characterized in that the nozzle tube (12) tapers toward its outlet opening (14).
  4. The plasma nozzle according to one of the preceding claims,
    characterized in that the electrode (24) is implemented spatially separate from the twist device (18) and is held suspended in the nozzle tube (12) using radial webs (38).
  5. The plasma nozzle according to Claim 4,
    characterized in that the electrode (24) is a streamlined body.
EP02002927A 2002-02-09 2002-02-09 Plasma nozzle Expired - Lifetime EP1335641B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE50200894T DE50200894D1 (en) 2002-02-09 2002-02-09 plasma nozzle
EP02002927A EP1335641B1 (en) 2002-02-09 2002-02-09 Plasma nozzle
AT02002927T ATE274787T1 (en) 2002-02-09 2002-02-09 PLASMA NOZZLE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02002927A EP1335641B1 (en) 2002-02-09 2002-02-09 Plasma nozzle

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EP1335641A1 EP1335641A1 (en) 2003-08-13
EP1335641B1 true EP1335641B1 (en) 2004-08-25

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DE102007010996A1 (en) 2007-03-05 2008-09-11 Arcoron Gmbh plasma nozzle
DE202008017836U1 (en) 2008-03-05 2010-08-12 Arcoron Gmbh plasma nozzle

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JP5047811B2 (en) 2005-02-11 2012-10-10 シーカ・テクノロジー・アーゲー Adhesion of air plasma treated thermoplastics
DE102005018926B4 (en) 2005-04-22 2007-08-16 Plasma Treat Gmbh Method and plasma nozzle for generating an atmospheric plasma jet generated by means of high-frequency high voltage comprising a device in each case for characterizing a surface of a workpiece
DE102005020510A1 (en) 2005-04-29 2006-11-09 Basf Ag Composite element, in particular window pane
DE102005020511A1 (en) * 2005-04-29 2006-11-09 Basf Ag Composite element, in particular window pane
WO2008061602A1 (en) 2006-11-23 2008-05-29 Plasmatreat Gmbh Method and device for producing a plasma, and applications of the plasma
DE102007011235A1 (en) 2007-03-06 2008-09-11 Plasma Treat Gmbh Method and device for treating a surface of a workpiece
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