EP1067829B1 - Buse à plasma - Google Patents

Buse à plasma Download PDF

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Publication number
EP1067829B1
EP1067829B1 EP00113748A EP00113748A EP1067829B1 EP 1067829 B1 EP1067829 B1 EP 1067829B1 EP 00113748 A EP00113748 A EP 00113748A EP 00113748 A EP00113748 A EP 00113748A EP 1067829 B1 EP1067829 B1 EP 1067829B1
Authority
EP
European Patent Office
Prior art keywords
casing
nozzle according
plasma nozzle
plasma
mouthpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00113748A
Other languages
German (de)
English (en)
Other versions
EP1067829A2 (fr
EP1067829A3 (fr
Inventor
Peter FÖRNSEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasma Treat GmbH
Original Assignee
Plasma Treat GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Treat GmbH filed Critical Plasma Treat GmbH
Publication of EP1067829A2 publication Critical patent/EP1067829A2/fr
Publication of EP1067829A3 publication Critical patent/EP1067829A3/fr
Application granted granted Critical
Publication of EP1067829B1 publication Critical patent/EP1067829B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3463—Oblique nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Definitions

  • the invention relates to a plasma nozzle for pretreating surfaces with a tubular housing having an axis, which forms a nozzle channel through which a working gas, with an electrode arranged coaxially to the axis in the nozzle channel and with a counter electrode surrounding the nozzle channel, wherein a high voltage generator for generating a high-frequency AC voltage between the electrode and the counter electrode is provided.
  • a plasma nozzle of this type is described in DE 195 32 412 A and serves, for example, to pretreat plastic surfaces in such a way that it is possible or easier to apply adhesives, printing inks and the like onto the plastic surface.
  • Such a pretreatment is required because plastic surfaces are not wettable with liquids in the normal state and therefore do not accept the printing ink or the adhesive.
  • the pre-treatment changes the surface structure of the plastic so that the surface becomes wettable for relatively high surface tension liquids.
  • the surface tension of the liquids with which the surface is just still wettable represents a measure of the quality of the pretreatment.
  • a relatively cool, but highly reactive plasma jet is achieved, which has approximately the shape and dimensions of a candle flame and thus also the pretreatment of profile parts relatively deep relief allowed. Due to the high reactivity of the plasma jet, a very short-term pretreatment is sufficient, so that the workpiece can be guided past the plasma jet at a correspondingly high speed. Due to the comparatively low temperature of the plasma jet, therefore, the pretreatment of heat-sensitive plastics is possible. Since no counter electrode on the back of the workpiece is required, the surfaces of any thick, block-like workpieces, hollow bodies and the like can be easily pretreated. For a uniform treatment of larger surfaces, a battery of several staggered plasma nozzles has been proposed in the cited publication. In this case, however, a relatively high expenditure on equipment is required.
  • DE 298 05 999 U discloses a device in which two plasma nozzles are arranged eccentrically and with parallel axes on a common rotary head, so that when the surface is swept over by the rotary head, a strip is pretreated whose width corresponds to the diameter of the rotary head.
  • this device is not suitable for treating curved surfaces whose radius of curvature is of the order of the diameter of the rotary head.
  • high inertial and gyroscopic forces occur when the rotary head is moved in several axes, for example by means of a robot arm.
  • the plasma is ejected in the axial direction of the nozzle channel in the known plasma nozzles.
  • This has the disadvantage in complicated-shaped workpieces that the points to be treated are often difficult to achieve, especially when the nozzle is guided along the workpiece by means of a robot.
  • the object of the invention is therefore to provide a plasma nozzle, with which the desired surface areas of the workpiece can be pretreated faster.
  • the housing or at least the part of the housing forming the nozzle channel or the mouthpiece is preferably rotatable relative to the housing about its axis. If the housing or the mouthpiece is set in rapid rotation and the plasma nozzle is guided along the workpiece, it is thus possible in one operation to treat a surface strip whose width is substantially greater than the diameter of the plasma jet. Since only a single nozzle is used, the expenditure on equipment is significantly lower than in the case of the rotary head described above. In addition, significantly smaller inertial forces arise because the housing rotates about its longitudinal axis. Thus, a plasma nozzle is provided which has a compact construction and nevertheless allows a rational plasma treatment of larger surfaces.
  • the housing or the mouthpiece is thus rotatable relative to the electrodes arranged in the nozzle channel and to the supply device for the working gas, so that this electrode and the gas supply device can be held rotationally fixed and only the surrounding housing or only the mouthpiece rotates.
  • the counter electrode can be formed directly by the rotating housing and is preferably grounded, so that no contact protection measures are required for the housing and the associated rotary drive.
  • the deflection angle of the plasma jet relative to the axis of rotation can be selected as needed and may for example be 90 °.
  • the plasma nozzle is particularly suitable for pretreating the inner surfaces of pipes or hoses. For example, it is possible to mount the plasma nozzle within the annular gap of an extrusion die, so that a freshly extruded pipe string can be pretreated immediately after it leaves the extruder.
  • the working gas is preferably twisted so that it flows vortex-shaped through the nozzle channel and therefore channels the arc formed between the electrode and the counter electrode into the mouth region of the nozzle channel in the vortex core.
  • the plasma jet is stabilized, and in the vortex core there is an intimate contact between the working gas and the arc, so that the reactivity of the plasma is increased.
  • the plasma nozzle shown in FIG. 1 has a tubular housing 10 which, in its upper area in the drawing, widens in diameter and is rotatably mounted on a fixed support tube 14 with the aid of a bearing 12. Inside the housing 10, a nozzle channel 16 is formed, which leads from the open end of the support tube 14 to an opening 18 in the drawing lower end of the housing.
  • an electrically insulating ceramic tube 20 is inserted in the support tube 14.
  • a working gas for example air
  • the working gas is supplied through the support tube 14 and the ceramic tube 20 into the nozzle channel 16.
  • the working gas is twisted so that it flows vortex-shaped through the nozzle channel 16 to the mouth 18, as symbolized in the drawing by a helical arrow.
  • the nozzle channel 16 thus creates a vortex core which extends along the axis A of the housing.
  • a pin-shaped electrode 24 is mounted, which protrudes coaxially into the nozzle channel 16 and to which by means of a high voltage generator 26, a high-frequency alternating voltage is applied.
  • the metal housing 10 is grounded through the bearing 12 and the support tube 14 and serves as a counter electrode, so that an electrical discharge between the electrode 24 and the housing 10 can be caused.
  • the high voltage generator 26 is switched on, due to the high frequency of the alternating voltage and due to the dielectricity of the ceramic tube 20, a corona discharge first occurs at the swirl device 22 and the electrode 24. This corona discharge ignites an arc discharge from the electrode 24 to the housing 10.
  • the arc of this discharge is entrained by the vortexed incoming working gas and channeled in the core of the vortex-shaped gas flow, so that the arc then extends almost straight from the top of the electrode 24 along the axis A and only in the area the mouth of the housing 10 branches radially onto the housing wall. In this way, a plasma jet 28 is generated, which exits through the mouth 18.
  • the mouth 18 of the nozzle channel is formed by a mouthpiece 30 made of metal, which is screwed into a threaded bore 32 of the housing 10 and in which a tapered to the mouth 18 and obliquely with respect to the axis A extending channel 34 is formed.
  • the plasma jet 28 emerging from the orifice 18 forms an angle with the axis A of the housing, which angle is approximately 45 ° in the example shown.
  • this angle can be varied as needed.
  • a gear 36 is arranged, which is in driving connection with a motor, not shown, for example via a toothed belt or a pinion.
  • the motor driven housing 10 is rotated at high speed about the axis A, so that the plasma jet 28 describes a conical surface that sweeps over the surface of a workpiece, not shown, to be machined.
  • the plasma nozzle is moved along the surface of the workpiece or vice versa, the workpiece is moved along the plasma nozzle, a relatively uniform pretreatment of the surface of the workpiece is achieved on a strip whose width to the diameter of the cone described by the plasma jet 28 on the Workpiece surface corresponds.
  • the width of the pretreated area can be influenced.
  • the plasma jet 28 impinging obliquely on the workpiece surface which in turn is twisted, intensive action of the plasma on the workpiece surface is achieved.
  • the twist direction of the plasma jet can be in the same direction or in opposite directions to the direction of rotation of the housing 10.
  • FIG. 2 shows an embodiment in which only the mouthpiece 30 is rotatable relative to the stationary housing 10.
  • the housing 10 is tapered conically at its outlet end and forms an axial / radial bearing for a flared upstream portion of the mouthpiece 30.
  • the bearing is formed in the example shown as a magnetic bearing 38.
  • the mouthpiece 30 is pressed by the dynamic pressure of the outflowing air against the conical bearing surface of the housing 10, but is held by the magnetic bearing 38 without contact in the housing, so that it is on its entire circumference forms a narrow gap with a width of only about 0.1 to 0.2 mm with the housing.
  • the grounding of the mouthpiece 30 is carried out by sparkover across this gap.
  • an aerodynamic drive is provided in the example shown, for example in the form of an air nozzle 40, are flowed through the arranged on the outer periphery of the mouthpiece blades 42 tangentially with air.
  • the aerodynamic drive can also be done by arranged inside the mouthpiece blades or ribs, which are acted upon by the air flowing in a spiral manner through the channel 34.
  • the rotational movement of the mouthpiece 30 can also be generated in that the mouth 18 is made somewhat in the circumferential direction, so that the mouthpiece is rotated by the recoil of the outflowing air in rotation.
  • This embodiment has the advantage that the rotary drive is structurally simplified and the moment of inertia of the rotating masses is limited to a minimum.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Geometry (AREA)
  • Plasma Technology (AREA)
  • Arc Welding In General (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Claims (20)

  1. Buse à plasma pour le prétraitement de surfaces avec un traitement au plasma, comprenant :
    - un boîtier tubulaire (10) présentant un axe (A), ledit boîtier formant un canal de buse (16) parcouru par un gaz de travail, et
    - une électrode (24) agencée coaxialement avec l'axe (A) dans le canal de buse (16) et une contre-électrode entourant le canal de buse (16),
    - un générateur de haute tension étant prévu pour générer une tension alternative haute fréquence entre l'électrode (24) et la contre-électrode, caractérisée en ce que
    - l'embouchure (18) du canal de buse (16) est déviée par rapport à l'axe (A) du boîtier (10).
  2. Buse à plasma selon la revendication 1, caractérisée en ce que
    l'embouchure (18) peut tourner par rapport à l'électrode fixe (24) autour de l'axe (A) du boîtier (10).
  3. Buse à plasma selon la revendication 1 ou 2, caractérisée en ce que
    - l'embouchure (18) du canal de buse (16) est formée par un embout (30) inséré dans le boîtier (10) et
    - un canal (34) s'étendant en oblique par rapport à l'axe (A) du boîtier (10) est formé dans l'embout (39).
  4. Buse à plasma selon la revendication 3, caractérisée en ce que
    le canal (34) formé dans l'embout (30) s'amincit vers l'extrémité libre.
  5. Buse à plasma selon l'une quelconque des revendications 1 à 4, caractérisée en ce que
    - le boîtier (10) est raccordé à l'embout (30) de manière solidaire en rotation et
    - le boîtier (10) peut tourner autour de l'axe (A) par rapport à l'électrode fixe aménagée dans le canal de buse (16).
  6. Buse à plasma selon la revendication 5, caractérisée en ce que le boîtier (10) est monté à rotation sur un tube support (14).
  7. Buse à plasma selon la revendication 6, caractérisée en ce que le tube support (14) sert à acheminer le gaz de travail.
  8. Buse à plasma selon l'une quelconque des revendications 5 à 7, caractérisée en ce que le boîtier (10) est raccordé au tube support (14) via un palier conducteur d'électricité (12) .
  9. Buse à plasma selon l'une quelconque des revendications 5 à 8, caractérisée en ce que le boîtier (10) porte, sur sa périphérie externe, une roue dentée (36) ou une poulie à courroie pour l'entraînement en rotation du boîtier.
  10. Buse à plasma selon l'une quelconque des revendications 1 à 4, caractérisée en ce que le boîtier (10) est aménagé de manière solidaire en rotation par rapport à l'électrode fixe (24) et en ce que l'embout (30) est monté mobile en rotation dans le boîtier (10).
  11. Buse à plasma selon la revendication 10, caractérisée en ce que l'embout (30) est, à l'aide d'un palier, par exemple d'un palier magnétique (38), monté sans contact dans le boîtier (10).
  12. Buse à plasma selon la revendication 11, caractérisée en ce que l'intervalle du palier entre le boîtier (10) et l'embout (30) est dimensionné de sorte que l'embout (30) soit mis à la terre en surmontant l'amorçage d'arc sur cet intervalle.
  13. Buse à plasma selon la revendication 11 ou 12, caractérisée en ce que le palier (38) entre le boîtier (10) et l'embout (32) est un palier axial/radial et en ce que l'embout (30) est dynamiquement précontraint contre le palier par le gaz de travail qui le traverse.
  14. Buse à plasma selon l'une quelconque des revendications 10 à 13, caractérisée en ce qu'il est prévu un entraînement rotatif aérodynamique pour l'embout (30).
  15. Buse à plasma selon la revendication 14, caractérisée en ce que l'entraînement rotatif aérodynamique se présente sous la forme d'un buse d'air (40) et en ce que des aubes (42) sont aménagées sur la périphérie extérieure de l'embout (30).
  16. Buse à plasma selon la revendication 14, caractérisée en ce que l'entraînement rotatif aérodynamique se présente sous la forme d'aubes ou de nervures aménagées à l'intérieur de l'embout (30).
  17. Buse à plasma selon la revendication 14, caractérisée en ce que l'entraînement rotatif aérodynamique se présente par la mise en place de l'embouchure (18) dans la direction périphérique.
  18. Buse à plasma selon l'une quelconque des revendications 1 à 17, caractérisée en ce que la contre-électrode est formée par le boîtier (10).
  19. Buse à plasma selon l'une quelconque des revendications 1 à 18, caractérisée en ce que la contre-électrode est mise à la terre.
  20. Buse à plasma selon l'une quelconque des revendications 1 à 19, caractérisée en ce qu'il est prévu un dispositif d'entraînement en rotation (22) qui génère un flux tourbillonnaire du gaz de travail dans le canal de buse (16).
EP00113748A 1999-07-09 2000-06-29 Buse à plasma Expired - Lifetime EP1067829B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29911974U DE29911974U1 (de) 1999-07-09 1999-07-09 Plasmadüse
DE29911974U 1999-07-09

Publications (3)

Publication Number Publication Date
EP1067829A2 EP1067829A2 (fr) 2001-01-10
EP1067829A3 EP1067829A3 (fr) 2003-06-25
EP1067829B1 true EP1067829B1 (fr) 2006-05-17

Family

ID=8075901

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00113748A Expired - Lifetime EP1067829B1 (fr) 1999-07-09 2000-06-29 Buse à plasma

Country Status (8)

Country Link
US (1) US6262386B1 (fr)
EP (1) EP1067829B1 (fr)
JP (1) JP4111659B2 (fr)
AT (1) ATE326827T1 (fr)
DE (2) DE29911974U1 (fr)
DK (1) DK1067829T3 (fr)
ES (1) ES2265312T3 (fr)
PT (1) PT1067829E (fr)

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DE102007024090A1 (de) 2007-05-22 2008-11-27 Diener, Christof, Dipl.-Ing. Plasmabehandlungsvorrichtung
DE202008013560U1 (de) 2008-10-15 2010-03-04 Raantec Verpachtungen Gmbh & Co. Kg Vorrichtung zur Erzeugung eines Plasmastrahls
DE102009008907A1 (de) 2009-02-13 2010-09-23 Airbus Operations Gmbh Verfahren zur Plasmabehandlung und Lackierung einer Fläche
DE102015121252A1 (de) 2015-12-07 2017-06-08 Plasmatreat Gmbh Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls und Verfahren zur Behandlung der Oberfläche eines Werkstücks
DE102015121253A1 (de) 2015-12-07 2017-06-08 Plasmatreat Gmbh Vorrichtung zum Erzeugen eines atmosphärischen Plasmastrahls zur Behandlung der Oberfläche eines Werkstücks
WO2022258654A1 (fr) 2021-06-10 2022-12-15 Plasmatreat Gmbh Dispositif de génération d'un jet de plasma atmosphérique pour le traitement d'une surface d'une pièce à usiner

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WO2018026026A1 (fr) * 2016-08-02 2018-02-08 주식회사 피글 Élément d'amélioration du plasma, dispositif d'alimentation en plasma et dispositif médical le comprenant
KR20180134182A (ko) * 2017-06-08 2018-12-18 삼성전자주식회사 플라즈마 처리 장치
TWI674041B (zh) * 2017-12-21 2019-10-01 雷立強光電科技股份有限公司 一種大氣電漿產生裝置
TWI691237B (zh) * 2018-02-13 2020-04-11 國立交通大學 常壓電漿束產生裝置
KR102032294B1 (ko) * 2018-04-13 2019-10-15 주식회사 에이피피 대기압 플라즈마 발생장치
DE102018132960A1 (de) 2018-12-19 2020-06-25 Plasmatreat Gmbh Vorrichtung und Verfahren zur Behandlung einer Werkstückoberfläche mit einem atmosphärischen Plasmastrahl
WO2021079420A1 (fr) 2019-10-22 2021-04-29 株式会社Ｆｕｊｉ Dispositif de génération de plasma et procédé de traitement par plasma
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JP7420003B2 (ja) * 2020-07-31 2024-01-23 株式会社デンソー プラズマ処理装置用のプラズマ放出ノズル及びプラズマ処理装置
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DE102007024090A1 (de) 2007-05-22 2008-11-27 Diener, Christof, Dipl.-Ing. Plasmabehandlungsvorrichtung
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DE102015121252A1 (de) 2015-12-07 2017-06-08 Plasmatreat Gmbh Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls und Verfahren zur Behandlung der Oberfläche eines Werkstücks
DE102015121253A1 (de) 2015-12-07 2017-06-08 Plasmatreat Gmbh Vorrichtung zum Erzeugen eines atmosphärischen Plasmastrahls zur Behandlung der Oberfläche eines Werkstücks
WO2017097694A1 (fr) 2015-12-07 2017-06-15 Plasmatreat Gmbh Dispositif de génération d'un jet de plasma atmosphérique et procédé de traitement de la surface d'une pièce
US10555411B2 (en) 2015-12-07 2020-02-04 Plasmatreat Gmbh Device for generating an atmospheric plasma beam, and method for treating the surface of a workpiece
WO2022258654A1 (fr) 2021-06-10 2022-12-15 Plasmatreat Gmbh Dispositif de génération d'un jet de plasma atmosphérique pour le traitement d'une surface d'une pièce à usiner
DE102021115020A1 (de) 2021-06-10 2022-12-15 Plasmatreat Gmbh Vorrichtung zum erzeugen eines atmosphärischen plasmastrahls zur behandlung einer oberfläche eines werkstücks

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PT1067829E (pt) 2006-10-31
EP1067829A2 (fr) 2001-01-10
EP1067829A3 (fr) 2003-06-25
ES2265312T3 (es) 2007-02-16
DE50012751D1 (de) 2006-06-22
JP4111659B2 (ja) 2008-07-02
JP2001068298A (ja) 2001-03-16
DE29911974U1 (de) 2000-11-23
US6262386B1 (en) 2001-07-17
ATE326827T1 (de) 2006-06-15

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