EP3387886B1 - Dispositif de génération d'un jet de plasma atmosphérique et procédé de traitement de la surface d'une pièce - Google Patents

Dispositif de génération d'un jet de plasma atmosphérique et procédé de traitement de la surface d'une pièce Download PDF

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Publication number
EP3387886B1
EP3387886B1 EP16805832.9A EP16805832A EP3387886B1 EP 3387886 B1 EP3387886 B1 EP 3387886B1 EP 16805832 A EP16805832 A EP 16805832A EP 3387886 B1 EP3387886 B1 EP 3387886B1
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EP
European Patent Office
Prior art keywords
shield
axis
plasma jet
workpiece
nozzle
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EP16805832.9A
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German (de)
English (en)
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EP3387886A1 (fr
Inventor
Christian Buske
Stefan Knipper
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Plasmatreat GmbH
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Plasmatreat GmbH
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3463—Oblique nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3457—Nozzle protection devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Definitions

  • the invention relates to an apparatus for generating an atmospheric plasma jet for treating the surface of a workpiece with a plasma jet rotating about an axis, which generates a wide treatment track when moving over the surface.
  • the invention further relates to a system having at least one plasma apparatus, which rotates about an axis and thereby generates at least one plasma jet to each other in a circular motion over the surface. A movement of the at least one plasma jet over the surface also leads to a broad treatment track.
  • the invention also relates to a method for treating the surface of a workpiece using such a device or such an arrangement.
  • a treatment of a surface with a plasma jet is understood in particular to mean a surface pretreatment by which the surface tension is changed and a better wettability of the surface with fluids is achieved.
  • a surface treatment can also be understood as a surface coating in that a surface coating is achieved by addition of at least one precursor into the plasma jet by a chemical reaction taking place in the plasma jet and / or on the surface of the workpiece, wherein at least part of the chemical products are deposited become.
  • surface treatment may also mean cleaning, disinfecting or sterilizing the surface.
  • a device for producing an atmospheric plasma jet for treating the surface of a workpiece with a plasma jet rotating about an axis is known from US Pat EP 1 067 829 B1 known.
  • This device has a tubular housing having an axis A, one within the housing arranged inner electrode, which preferably runs parallel to the axis A or which is arranged in particular in the axis A.
  • an electrical voltage is applied to the inner electrode, through which an electrical discharge is produced, which generates a plasma by interacting with the working gas flowing inside the housing. together with the working gas, the plasma is transported on.
  • the device has a nozzle arrangement having a nozzle arrangement for discharging a plasma jet to be generated in the housing, wherein the nozzle arrangement is preferably arranged at the end of the discharge path, is grounded and channels the outflowing gas and plasma jet.
  • the direction of the nozzle opening extends at an angle to the axis A, wherein the direction of the nozzle opening can be assumed parallel to the mean direction of the exiting plasma jet and, for example, can be defined parallel to the normal of the opening.
  • a channel extends arcuately within the nozzle assembly to deflect starting from the interior of the housing, the gas and plasma jet.
  • the nozzle assembly is rotatable relative to the axis A, wherein the nozzle assembly is either rotatable relative to the housing and the inner electrode or rotatably connected to housing, while the housing rotates relative to the inner electrode.
  • the nozzle arrangement or the nozzle arrangement and the housing are driven by a motor.
  • US2015 / 0303034 A1 discloses a device according to the preamble of claim 1.
  • US Pat EP 0 986 939 B1 Another system for treating an atmospheric plasma surface is known from US Pat EP 0 986 939 B1 known and comprises two devices for generating an atmospheric plasma jet, wherein each of the two devices comprises a tubular housing having an axis A and A ', an inner electrode disposed within the housing and a nozzle arrangement having a nozzle opening for discharging a in the housing generating plasma jet, wherein the two devices about a common axis B rotatable with each other and wherein a drive for generating a rotational movement of the devices about the axis (B) is provided.
  • Fig. 1a the treatment trace of a plasma jet of a device described above is shown, wherein the trajectory (line) represents the point of impact of the maximum plasma intensity.
  • the device is in y-direction, ie in Fig. 1 moved upward to continuously apply the rotating plasma jet over a strip having an approximate width dx and to treat the surface with plasma.
  • the direction of movement (y) has the effect that the outer regions of the treatment track (dx) in the area of the dashed lines are treated more intensively with the plasma than is the case for the middle regions of the treatment track.
  • Fig. 1b represented intensity distribution having two maxima, which occur in the outer regions of the treatment track, indicated by the dashed lines. In between, there is only a noticeably lower intensity of the plasma treatment, so that an intensity minimum occurs in the middle of the treatment track.
  • the surface is insufficient and also not sufficiently plasma-treated in regular stripes.
  • the speed of movement of the device relative to the surface must regularly be slowed down in order to achieve saturation of the plasma treatment even in the central regions of the treatment track. The application of the device is thus limited.
  • the present invention is therefore based on the technical problem of developing the device and system mentioned above and the method for treating the surface of a workpiece such that the disadvantages mentioned are at least partially resolved and that a more uniform treatment of the surface is achieved.
  • a device for producing an atmospheric plasma jet for treating the surface of a workpiece of the type mentioned above in that a shield surrounds the nozzle arrangement and in that the shielding for changing the intensity of the interaction of the plasma jet to be generated is provided with the surface of the workpiece as a function of the angle of rotation of the nozzle relative to the axis A.
  • the described shield has the function of influencing the rotating plasma jet as a function of the angular position in such a way that the intensity of the plasma jet has an azimuthally varying distribution on the surface of the workpiece.
  • the intensity of the plasma treatment generally depends on the duration of the application, the distance of the surface from the nozzle opening and / or the angle of incidence of the plasma jet on the surface under otherwise constant conditions. If the shield now influences one or more of these parameters in an azimuthally varying manner, the intensity of the plasma treatment of the surface may have an azimuthal distribution.
  • the device is characterized in that the shield is formed in the azimuthal direction only over a partial section. Due to the fact that the shielding is only partially present, the plasma jet is shielded only over a part of a rotation, thus influenced, and has little or no influence over a further part of the rotation. Thus, an azimuthal intensity distribution can be adjusted by the configuration of the shield itself.
  • the above-explained shield is formed in the azimuthal direction symmetrical to the axis A via two sections.
  • a symmetrical intensity distribution of a plasma treatment is achieved, which can be advantageously used in particular when moving the device relative to the surface.
  • the axial length of the shield varies in the azimuthal direction.
  • the shield projects differently in the axial direction and influences the plasma jet differently depending on the length.
  • the obliquely incident plasma jet is at least partially reflected by the inside of the shield and thus deflected inwards. There, therefore, the intensity of the plasma treatment is changed by the deflection of the plasma jet and the plasma treatment is intensified in the interior of the shield or in the interior of the area enclosed by the rotating plasma jet space.
  • the length of the shield may vary in steps.
  • the shield acts on the incident plasma jet over a first portion with the full length and not or only slightly over a second portion, because in the second portion of the shield is made shorter.
  • two equally long first sections and two equally short second sections of the shield are provided.
  • An embodiment in stages leads to an abrupt change of the plasma intensity in the azimuthal direction, which is suitable in particular for static applications to produce a specific pattern on the surface.
  • the length of the shield can vary continuously, in particular in the form of a sinusoidal function.
  • This embodiment has the advantage that the shielding and thus the change in the intensity of the plasma treatment in the azimuthal direction can not be varied abruptly in stages but in the form of a constantly changing function. The resulting distribution of plasma intensity then results in a more uniform treatment of the surface of the workpiece during movement of the device relative to a surface.
  • a further embodiment of the device according to the invention is that the inner surface of the shield occupies azimuthally varying angles to the axis A.
  • the degree of deflection of the plasma jet is azimuthally changed by the shield.
  • the inner surface of the shield for example, at one point occupy an angle of 90 ° to the surface to be treated, while at another point, possibly offset by a rotation of 90 ° thereto, the inner surface inclined at an angle of 70 ° outwards is.
  • the change in the angle of the inner surface can be changed in steps or continuously.
  • the inner surface of the shield has an angle of 90 °, while at 90 ° and 270 ° an angle of the inner surface of 70 ° is present.
  • the angle of the inner surface can be directed both inwards and outwards. Depending on the application, therefore, a more or less strong deflection of the plasma jet can be selected.
  • the azimuthal change of the angle of the inner surface of the shield can also be combined with an azimuthal variation of the length of the shield in the axial direction described above.
  • a further preferred embodiment of the described apparatus for producing an atmospheric plasma jet for the treatment of the surface of a workpiece has a shield which is adjustable in its position relative to the nozzle arrangement, in particular in the direction of the axis A and / or in the radial direction.
  • the entire shield can be designed to be displaceable in the axial direction.
  • the strength and also the azimuthal effective range of the shield can be adjusted in this way.
  • the portion of the shield that influences the plasma jet acts over a larger azimuthal range. If, on the other hand, the lower edge of the shield is arranged less far away from the nozzle arrangement, then the strength of the interaction and possibly the azimuthal effective range of the shield is lower.
  • the shield may have at least two, preferably a plurality of shielding elements, which are designed to be adjustable independently of one another.
  • the shielding elements can be adjustable in the radial direction and / or in the axial direction. This embodiment makes possible a greater variability of the setting of the azimuthal intensity distribution of the plasma jet. If each shield element is individually adjustable in position, then the azimuthal distribution can be adjusted individually. In particular, in special applications, the device can thus be used variable.
  • a heating device for heating the shielding may be provided.
  • This heating has the advantage that the plasma jet impinging on the shield transmits heat energy to the shield to a lesser extent and thus works lossless.
  • the shield may be heated to a temperature higher than the temperature of the plasma jet so that the plasma jet may be further supplied with thermal energy by the shield.
  • a heating device can be designed as a thermal radiator in the form of an outer heating jacket or by an electric heater integrated in the shield.
  • the heater can also be used in rotationally symmetrical shields.
  • a method of treating the surface of a workpiece wherein a plasma jet rotating about the axis A is produced by means of an apparatus producing an atmospheric plasma jet having an axis A and a nozzle arrangement rotating relatively about the axis A. in which the device is moved with the rotating plasma jet along the surface to be treated and in which the intensity of the interaction of the plasma jet with the surface of the workpiece is changed by means of a shielding in dependence on the rotation angle of the nozzle relative to the axis A.
  • the uniformity of the action of the plasma jet relative to the direction of movement across the surface can be improved when the device produces a treatment track.
  • a more uniform plasma treatment along the treatment track is achieved.
  • Fig. 1c represented by the intensity profile that unlike Fig. 1b a flat, or only slightly wavy form of a plateau occupies. If adjacent treatment traces are then brought onto the surface in such overlapping manner that the intensity of the plateau is summed up in the overlap areas, then the surface is more uniformly treated by the plasma jet than has hitherto been possible in the prior art.
  • the design of the shield may be formed in carrying out the method in the various embodiments described above for the device, without these being explained again here. This results in the same advantages described.
  • a system for treating an atmospheric plasma surface with at least one device for producing an atmospheric plasma jet wherein the at least one device comprises a tubular housing having an axis A or A ', one within the internal electrode arranged in the housing and a nozzle arrangement having a nozzle opening for discharging a plasma jet to be generated in the housing, the at least one device being rotatable about an optionally common axis B and a drive for generating a rotational movement of the at least one device about the axis B is provided.
  • the system is characterized in that the direction of the nozzle opening of the at least one device extends at an angle to the axis A or A ', that the nozzle arrangement of the at least one device is rotatable relative to the axis A or A', that in each case a drive for generating a rotational movement of the nozzle arrangement of the at least one device about the respective axis A or A 'is provided, that the at least one device at an angle to the axis B is aligned and that the drive for generating a rotational movement of the at least one device and the drive for generating a rotational movement of the nozzle assembly of the at least one device are synchronized with each other such that during a rotation of the at least one device about the common axis B, the nozzle assembly of the at least one Device performs two revolutions around the respective axis A and A '.
  • the system has been generally described with at least one device. Preference is given to a system with two devices, whereby systems with three or more devices are possible. In the following, the invention will be described primarily with reference to an installation with two devices, but this is not intended to limit the invention to two devices.
  • the plasma jet angle is between the two extreme values.
  • the intensity of the plasma treatment of the surface is varied in the azimuthal direction due to the different plasma jet angle and additionally by the associated greater distance of the nozzle assemblies to the surface of the workpiece.
  • the angle of the nozzle openings to the respective axis A or A ' is substantially coincident with the angle of the devices to the axis B.
  • a vertical alignment of the respective plasma jet is achieved.
  • the rotational movement of the nozzle assemblies is transmitted via a planetary gear by the rotational movement of the devices about the axis B.
  • a synchronous movement is achieved purely mechanically.
  • a synchronous electronic control of individual motors is possible without a planetary gear is then necessary.
  • a method for treating the surface of a workpiece wherein at least one rotating plasma jet is generated by means of a previously described system in which the system is moved with the at least one rotating plasma jet along the surface to be treated and in which the at least one plasma jet is directed in two first angular positions of 0 ° or 180 ° of the rotational movement about the axis B at a steep, preferably perpendicular angle to the surface of the workpiece and wherein the at least one plasma jet in two second angular positions of 90 ° or 270 ° of the rotational movement about the axis B in a flat, preferably at an angle of twice the angle of the nozzle openings relative to the axes A and A ', is directed to the surface of the workpiece.
  • the system is moved substantially in the direction of one of the two first angular positions 0 ° or 180 ° of the rotational movement about the axis B along the surface.
  • the process is carried out with a system with two devices.
  • Known device 2 for generating a plasma jet has a tubular housing 10, which is enlarged in diameter in its upper part in the drawing and mounted rotatably on a fixed support tube 14 by means of a bearing 12. Inside the housing 10, a nozzle channel 16 is formed, which leads from the open end of the support tube 14 to a nozzle opening 18.
  • an electrically insulating ceramic tube 20 is inserted in the support tube 14.
  • a working gas for example air
  • the working gas is supplied through the support tube 14 and the ceramic tube 20 into the nozzle channel 16.
  • the working gas is twisted so that it flows in a vortex-like manner through the nozzle channel 16 to the nozzle opening 18, as in the drawing by a helical arrow is symbolized.
  • the nozzle channel 16 thus creates a vortex core which extends along the axis A of the housing 10.
  • a pin-shaped inner electrode 24 is mounted, which protrudes coaxially into the nozzle channel 16 and to which by means of a high voltage generator 26, a high-frequency high voltage is applied.
  • a high-frequency high voltage is typically understood to mean a voltage of 1 to 100 kV, in particular 1 to 50 kV, preferably 5 to 50 kV, at a frequency of 1 to 100 kHz, in particular 10 to 100 kHz, preferably 10 to 50 kHz.
  • the high-frequency high voltage can be a high-frequency AC voltage, but also a pulsed DC voltage or an overlay of both voltage forms.
  • the metal housing 10 is grounded through the bearing 12 and the support tube 14 and serves as a counter electrode, so that an electric discharge between the inner electrode 24 and the housing 10 can be generated.
  • the inner electrode 24 arranged within the housing 10 is preferably aligned parallel to axis A, in particular the inner electrode 24 is arranged in the axis A.
  • the nozzle opening 18 of the nozzle channel is formed by a nozzle assembly 30 made of metal, which is screwed into a threaded bore 32 of the housing 10 and in which a tapered to the nozzle opening 18 and arcuate and obliquely with respect to the axis A extending channel 34 is formed.
  • the plasma jet 28 emerging from the nozzle opening 18 forms an angle with the axis A of the housing, which angle is approximately 45 ° in the example shown.
  • this angle can be varied as needed.
  • the nozzle arrangement 30 is thus arranged at the end of the discharge path of the high-frequency arc discharge and via the metallic contact with the housing 10 grounded.
  • the nozzle arrangement 30 thus channels the outflowing gas and plasma jet, wherein the direction of the nozzle opening 18 extends at a predetermined angle to the axis A. In this case, one can define the direction of the nozzle opening 18 parallel to the normal of the nozzle opening 18.
  • a gear 36 is arranged, which is in driving connection with a motor, not shown, for example via a toothed belt or a pinion.
  • an arc discharge between the inner electrode 24 and the housing 10 is generated due to the high frequency of the voltage.
  • the arc of this high-frequency arc discharge is entrained by the vortexed working gas and channeled in the core of the vortex-shaped gas flow, so that the arc then almost straight from the tip of the inner electrode 24 along the axis A and extends only in the region of the lower end of the housing 10 or in the region of the channel 34 branches radially on the housing wall or on the wall of the nozzle assembly 30. In this way, a plasma jet 28 is generated, which exits through the nozzle opening 18.
  • arc and "arc discharge” are used herein as a phenomenological description of the discharge, since the discharge occurs in the form of an arc.
  • arc is otherwise used as a discharge form in DC discharges with substantially constant voltage values. In the present case, however, it is a high-frequency discharge in the form of an arc, ie a high-frequency arc discharge.
  • the housing 10 rotates at high speed about the axis A, so that the plasma jet 28 describes a conical surface, which sweeps over the surface to be machined of a workpiece, not shown. Then, as the device 2 is moved along the surface of the workpiece, or vice versa, the workpiece is moved along the device 2, a relatively uniform treatment of the surface of the workpiece on a strip is achieved, the width of which is equal to the diameter of the cone described by the plasma jet 28 on the workpiece surface corresponds. By varying the distance between the mouthpiece 30 and the workpiece, the width of the pretreated area can be influenced.
  • the beam 28, which in turn is twisted has an intensive effect of the plasma on the workpiece surface.
  • the twist direction of the plasma jet can be in the same direction or in opposite directions to the direction of rotation of the housing 10.
  • the intensity of the plasma treatment by the rotating plasma jet 28 depends on the one hand on the distance of the nozzle opening 18 to the surface and on the other hand on the angle of incidence of the plasma jet 28 on the surface to be treated.
  • Fig. 3a to 3c show a first embodiment of a device 4 according to the invention with a device 2 having a same structure, as previously with reference to Fig. 1 has been described.
  • a shield 40 is provided which surrounds the nozzle arrangement 30.
  • the shape of the shield 40 has in the lower edge of the nozzle assembly 30 downwardly projecting portion on a cylindrical inner surface 42 which has sections 44 stages.
  • the shield 40 forms in the azimuthal direction portions 46 with a greater axial length and portions 48 with a smaller axial length.
  • the shield 40 varies the intensity of the interaction of the plasma jet 28 with the surface of the workpiece as a function of the angle of rotation of the nozzle assembly 30 relative to the axis A.
  • Fig. 3a shows the plasma jet 28 hits one of the longer portions 46 of the shield 40, so that the plasma jet 28 is deflected or reflected inwards.
  • Fig. 3b shows the lower portion of the device 4 according to the invention in a 90 ° relative to in Fig. 3a position shown.
  • the plasma jet 28 is directed to one of the shortened portions 48 and can emerge from the nozzle assembly 30 with almost no interaction with the shield.
  • the shield 40 and the arrangement of the sections 46 and 48 are formed in the azimuthal direction symmetrical to the axis A.
  • the structure of the shield is also in Fig. 3c to recognize in a view of the device 2 from below.
  • the plasma jet 28 is influenced to a greater extent in dependence on the angle of the inner surface 42 in the region of the longer section 46 than in the region of the shorter section 48. This results in a varying intensity in the azimuthal direction of the interaction of the plasma jet 28 with the surface of the workpiece.
  • the shield 40 is formed so that it surrounds the nozzle assembly 30 over the entire circumference, in each case two shorter portions 46 and two longer portions 48 are provided.
  • the shield is formed in the azimuthal direction only over a partial section or two partial sections.
  • Fig. 4a to 4c show a further embodiment of a device 6 according to the invention with a device 2.
  • the nozzle assembly 30 is rotatable relative to a stationary housing 10.
  • the housing 10 is tapered conically at its outlet end and forms an axial / radial bearing for a flared upstream part of the nozzle assembly 30.
  • the bearing is formed in the example shown as a magnetic bearing 38.
  • the nozzle assembly 30 is characterized by the dynamic pressure of the outflowing air against the conical Bearing surface of the housing 10 is pressed, but is held by the magnetic bearing 38 without contact in the housing so that it forms a narrow gap with a width of only about 0.1 to 0.2 mm with the housing over its entire circumference.
  • the grounding of the mouthpiece 30 is carried out by sparkover across this gap.
  • the nozzle opening 18 As a rotary drive for the nozzle assembly 30, the nozzle opening 18, which is not aligned in the exact radial direction, but has a tangential component, so that an aerodynamic drive through the partially tangentially emerging air together with the plasma jet 28 is formed.
  • the aerodynamic drive may also be effected by blades or ribs (not shown) arranged in the interior of the nozzle arrangement 30, which are acted upon by the air flowing in a spiral manner through the channel 34.
  • This embodiment of the bearing and the drive has the advantage that the rotary drive is structurally simplified and the moment of inertia of the rotating masses is limited to a minimum.
  • Fig. 4 In contrast to Fig. 3 is the embodiment according to Fig. 4 formed such that the variation of the length of the shield 40 is not in stages, but steadily at least partially in a curved shape, in particular in the form of a sinusoidal function. This results in continuous and thus smoother transitions between the longer sections 46 and the shorter sections 48 and thus a more uniform variation of the intensity of the plasma jet 28 on the surface to be treated.
  • the device is shown with a rotation angle of the nozzle assembly 30, wherein the plasma jet 28 impinges on one of the longer portions 46 and thus is reflected and deflected.
  • the intensity of the plasma jet 28 is distributed more strongly to the inner space surrounded by the shield 40.
  • Fig. 4b shows the device with a 90 ° to the in Fig. 4a In this position, the plasma jet 28 is directed in the direction of one of the shorter sections 48 and is therefore not or only insignificantly influenced by the shield 40.
  • Fig. 4c shows the device 2 in a view from below, resulting in the symmetrical structure of the shield.
  • the plasma jet 28 is influenced to a greater extent in dependence on the angle of the inner surface 42 in the region of the longer section 46 than in the region of the shorter section 48.
  • an azimuthally varying intensity of the interaction of the plasma jet 28 with the surface of the workpiece results.
  • Fig. 5a to c show a further preferred embodiment of an inventive device 8 for generating an atmospheric plasma jet for the treatment of the surface of a workpiece, which also has a device 2 and a shield 40.
  • the inner surface 42 of the shield 40 in the region of the distal edge 52 an azimuthally varying angle to the axis A, wherein the exiting plasma jet 28 impinges on the portion 52 which has an inner surface 42 extending parallel to the axis A substantially.
  • the plasma jet as previously described for the other embodiments, reflected and deflected so that the intensity of the plasma jet 28 is more directed to the interior of the shield 40.
  • Fig. 5b shows the device 8 in an angular position of the nozzle assembly 30, which is 90 ° relative to the in Fig. 5a shown, so that the inner surface 42 is directed in the region 52 to the outside.
  • the shield 40 thus expands the interior of the shield 40 in this angular position.
  • the plasma jet 28 emerging from the nozzle arrangement 30 strikes the area 52 of the shielding 40 only to a slight extent and therefore remains virtually uninfluenced.
  • Fig. 5c shows the device 8 described above in a view from below, in which the two different angular positions of Fig. 5a and 5b be illustrated. It should be clarified by the different forms of the plasma jet 28 that are shown that the plasma jet 28 is influenced differently in dependence on the angle of the inner surface 42 in the region of the lower region 52. This results in a varying intensity in the azimuthal direction of the interaction of the plasma jet 28 with the surface of the workpiece.
  • shields 40 in which either different lengths sections 46 and 48 or portions of the inner surface 42 are formed at different angles to the axis A.
  • embodiments are also possible within the scope of the invention in which sections of different length are combined with inner surfaces having different angles to the axis A.
  • the previously explained embodiments of the devices 4, 6 and 8 according to the invention produce a change in the azimuthal direction or variable intensity profile of the plasma treatment of a surface.
  • This intensity profile can, in the stationary state, that is, when the device 4, 6 or 8 is not moved relative to the surface to be treated, depending on the application certain positions of the surface are used.
  • a limited, for example, cross-shaped surface portion of the surface to be treated with plasma it is possible in the invention to form the shield 40 in the manner previously described so that below the shield 40, a corresponding pattern of the plasma treatment results, if the nozzle assembly 30 rotates about the axis 40.
  • a method according to the invention for treating the surface of a workpiece can also be carried out as follows.
  • a device 4, 6 or 8 producing an atmospheric plasma jet with an axis A and with a nozzle arrangement 30 rotating relative to the axis A, a plasma jet 28 rotating about the axis A is generated.
  • the device 4, 6 or 8 with the rotating plasma jet 28 is moved along the surface to be treated and by means of a shield 40 with sections 46 and 48 or 50 or 52, the intensity of the interaction of the plasma jet 28 with the surface of the workpiece in dependence Angle of rotation of the nozzle assembly 30 relative to the axis A changed.
  • a certain intensity profile in the plasma treatment of the surface can be adjusted, so that, for example, either a homogeneous as possible intensity profile is achieved or a known in the art profile, in particular strip profile in the intensity of the plasma treatment is enhanced.
  • the method described above is performed so that the rotating plasma jet 28 is shielded by the shield 40 along the direction of movement more than transversely to the direction of movement, in particular reflected or deflected inwards.
  • the plasma jet 28 is reflected by the shield 40 and deflected and thereby distributed within the volume surrounded by the shield 40, whereby the intensity of the plasma jet 28 per unit area is reduced overall.
  • the plasma jet 28 in the direction of movement in each case almost unhindered on the surface and can reach a higher intensity of the pretreatment per unit area. In this way, an intensity distribution according to Fig. 1c be achieved.
  • a heating device 60 is provided for heating the shield 40.
  • the heating device 60 is designed as an electrically heated cylinder, which heats the shield by means of its own temperature and heat radiation.
  • the heating element can also be used independently of an azimuthally varying shield for rotationally symmetrical shields.
  • the Fig. 6 shows an embodiment of an inventive apparatus 2 for generating an atmospheric plasma jet for the treatment of the surface of a workpiece, as for example in connection with Fig. 3 has been described.
  • the illustrated shield 40 therefore has an azimuthal configuration which allows varying the intensity of the interaction of the plasma jet 28 with the surface of the workpiece as a function of the angle of rotation of the nozzle assembly 30 relative to the axis A by a varying length.
  • the shield 40 is formed in position relative to the nozzle assembly 30 in the direction of the axis A adjustable.
  • Fig. 6a shows an arrangement of the shield 40 with axially advanced position, ie with a greater distance of the lower edge of the shield 40 to the nozzle assembly 30, as it is in Fig. 6b is shown.
  • the shield in Fig. 6b is retracted relative to the lower edge of the nozzle assembly 30 and therefore affects the emerging plasma jet 28 to a lesser extent than in position Fig. 6a ,
  • Fig. 7a and 7b show a further embodiment of an inventive device 2 for generating an atmospheric plasma jet for the treatment of the surface of a workpiece, as for example in connection with Fig. 3 has been described.
  • the illustrated shield 40 has at the lower end a plurality, but at least two shielding elements 40a and 40b, which are designed to be independently adjustable.
  • the shielding elements 40a and 40b can be adjusted both axially and radially along a direction running at an angle to the axis A direction.
  • the shielding elements 40a and 40b are arranged in guides (not shown) and can be fixed in one of several positions.
  • a specific azimuthal distribution of the influence of the plasma jet 28 can be set by the plurality of peripheral shielding elements 40a, 40b.
  • Fig. 8a shows a shield 40 of a further embodiment of an inventive apparatus 2 for generating an atmospheric plasma jet for the treatment of the surface of a workpiece, as basically in connection with Fig. 5 has been described.
  • the lower edge of the shield 40 is provided with a plurality of individual recesses 52 a of the distal edge 52.
  • Fig. 8b shows a partial cross section of the device 2, wherein the lower edge 52 with the recesses 52a form an azimuthally circulating pattern of sections with stronger and weaker influence of the plasma jet 28.
  • a plant 100 according to the invention for the treatment of a surface is shown with atmospheric plasma.
  • the plant 100 has two schematically illustrated devices 2 and 2 'for generating an atmospheric plasma jet 28 and 28', as they are known for example from the prior art and above with reference to Fig. 2 have been explained.
  • Each of the two devices 2, 2 ' has a tubular housing 10, 10' with an axis A or A ', an inner electrode (not shown) arranged inside the housing 10, 10' and a nozzle arrangement 30 having a nozzle opening 18, 18 ' , 30 'for discharging a plasma jet 28, 28' to be generated in the housing 10, 10 '.
  • Both devices 2, 2 ' are rotatably connected to each other about a common axis B via a frame 102, wherein in the frame a drive (not shown) for generating a rotational movement of the devices 2, 2' about the axis B is provided.
  • the compressed air connections and voltage connections are arranged in the frame 102 and not shown in detail.
  • the direction of the nozzle openings 18, 18 'in each case extends at an angle ⁇ , ⁇ ' to the axis A, A ', wherein the nozzle arrangement 30, 30' are rotatable relative to the axis A, A '.
  • a drive (not shown), as shown by the Fig. 2 has been explained, is provided for generating a rotational movement of the nozzle assemblies 30, 30 'about the respective axis A, A'.
  • the two devices 2, 2 'at an angle ⁇ , ⁇ ' aligned to the axis B such as Fig. 9a and 9b demonstrate.
  • the drive for generating a rotational movement of the devices 2, 2 'and the drives for generating a rotational movement of the nozzle assemblies 30, 30' are synchronized with each other such that during one revolution of the devices 2, 2 'about the common axis B of each of the nozzle assemblies 30th , 30 'performs two revolutions about the respective axis A, A'.
  • Fig. 9a and 9b illustrated that the angle ⁇ , ⁇ 'of the nozzle openings to the respective axis A and A' substantially coincides with the angle ⁇ , ⁇ 'of the devices 2, 2' to the axis B.
  • an angular arrangement is achieved in which in two azimuthally opposite angular positions of the devices 2, 2 ', the plasma jets 28, 28' are aligned substantially perpendicular to the surface (see Fig. 9a ), while in two angular positions rotated respectively by 90 ° and 270 ° thereto, the plasma jets 28, 28 'are oriented essentially flat at an angle of 2 * ⁇ , 2 * ⁇ ' to the surface (see FIG Fig. 9b ).
  • the intensity of the plasma treatment of the surface thus varies twofold between a maximum and a minimum intensity during a rotation of the devices 2, 2 'about the common axis B.
  • Another method for treating the surface of a workpiece can be carried out in a previously described system in which two rotating plasma jets are generated in which the system is moved with the rotating plasma jets along the surface to be treated and in which the plasma jets in two first angular positions °, 180 ° of the rotational movement about the axis B are directed at a steep, preferably perpendicular, angle to the surface of the workpiece (see Fig. 9a ) and in which the plasma jets are directed in two second angular positions 90 °, 270 ° of rotational movement about the axis B in a flat, preferably at an angle of twice the angle of the nozzle openings relative to the axes A, A ', on the surface of the workpiece be (see Fig. 9b ).
  • the method explained above can be carried out statically by treating only a partial area of the surface with the plasma jets 28, 28 '.
  • the system is moved substantially in the direction of one of the two first angular positions 0 °, 180 ° of the rotational movement about the axis B along the surface.
  • the system is moved substantially in the direction of one of the two first angular positions 0 °, 180 ° of the rotational movement about the axis B along the surface.
  • Fig. 10 Now shows an embodiment with only one device 2, in which the axis B extends substantially in the vicinity of the center of gravity of the device 2.
  • the device 2 performs a wobbling motion, which is generated by a drive, not shown.
  • the alignment of the single plasma jet 28 then performs an equal azimuthal directional distribution, as previously with reference to Fig. 6a and 6b has been explained for the devices 2 and 2 '.
  • the diameter of the area treated by the system with plasma is smaller.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)

Claims (11)

  1. Dispositif pour générer un jet de plasma atmosphérique destiné à traiter la surface d'une pièce,
    - avec un boîtier (10) de forme tubulaire qui possède un axe (A),
    - avec une électrode interne (24) disposée à l'intérieur du boîtier (10),
    - avec un arrangement de buse (30) possédant une ouverture de buse (18) et destiné à décharger un jet de plasma à générer dans le boîtier (10),
    - la direction de l'ouverture de buse (18) ayant un angle par rapport à l'axe (A) et
    - l'arrangement de buse (30) étant rotative par rapport à l'axe (A),
    caractérisé en ce
    - qu'un écran (40) entoure l'arrangement de buse (30) et
    - que l'écran (40) est conçu pour une modification de l'intensité de l'interaction du jet de plasma à générer avec la surface de la pièce en fonction de l'angle de rotation de l'arrangement de buse (30) par rapport à l'axe (A).
  2. Dispositif selon la revendication 1, caractérisé en ce que l'écran (40), dans la direction azimutale, est formé seulement sur une portion partielle.
  3. Dispositif selon la revendication 1 ou 2, caractérisé en ce que l'écran (40), dans la direction azimutale, est formé sur deux portions partielles de manière symétrique par rapport à l'axe (A).
  4. Dispositif selon l'une des revendications 1 à 3, caractérisé en ce que la longueur axiale de l'écran (40 ; 46, 48) varie dans la direction azimutale.
  5. Dispositif selon la revendication 4, caractérisé en ce que la variation de la longueur de l'écran (40 ; 46, 48) s'effectue par paliers ou en continu, notamment sous la forme d'une fonction sinusoïdale.
  6. Dispositif selon l'une des revendications 1 à 5, caractérisé en ce que la surface intérieure (42) de l'écran (40) possède, au moins dans la zone du bord distal (52), un angle qui varie dans la direction azimutale par rapport à l'axe (A).
  7. Dispositif selon l'une des revendications 1 à 6, caractérisé en ce que l'écran (40) est configuré réglable dans sa position par rapport à l'arrangement de buse (30), notamment dans la direction de l'axe (A) et/ou dans la direction radiale.
  8. Dispositif selon la revendication 7, caractérisé en ce que le écran (40) possède au moins deux éléments faisant écran (40a, 40b) qui sont réalisés réglables indépendamment l'un de l'autre.
  9. Dispositif selon l'une des revendications 1 à 8, caractérisé en ce qu'un dispositif de chauffage (60) destiné à chauffer l'écran (40) est prévu.
  10. Procédé de traitement de la surface d'une pièce
    - dans lequel est généré, au moyen d'un dispositif pour générer un jet de plasma atmosphérique, le dispositif ayant un axe (A) et un arrangement de buse en rotation relative autour de l'axe (A), un jet de plasma en rotation autour de l'axe (A),
    - dans lequel le dispositif est déplacé avec le jet de plasma en rotation le long de la surface à traiter et
    - dans lequel l'intensité de l'interaction du jet de plasma avec la surface de la pièce est modifiée au moyen d'un écran en fonction de l'angle de rotation de la buse par rapport à l'axe (A).
  11. Procédé selon la revendication 10, dans lequel le jet de plasma en rotation est protégé par l'écran plus fortement le long de la direction de déplacement que transversalement à la direction de déplacement.
EP16805832.9A 2015-12-07 2016-12-05 Dispositif de génération d'un jet de plasma atmosphérique et procédé de traitement de la surface d'une pièce Active EP3387886B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015121252.8A DE102015121252A1 (de) 2015-12-07 2015-12-07 Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls und Verfahren zur Behandlung der Oberfläche eines Werkstücks
PCT/EP2016/079719 WO2017097694A1 (fr) 2015-12-07 2016-12-05 Dispositif de génération d'un jet de plasma atmosphérique et procédé de traitement de la surface d'une pièce

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EP3387886A1 EP3387886A1 (fr) 2018-10-17
EP3387886B1 true EP3387886B1 (fr) 2019-09-25

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US (1) US10555411B2 (fr)
EP (1) EP3387886B1 (fr)
JP (1) JP6543424B2 (fr)
CN (1) CN108370639B (fr)
CA (1) CA3007719A1 (fr)
DE (1) DE102015121252A1 (fr)
ES (1) ES2750775T3 (fr)
WO (1) WO2017097694A1 (fr)

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WO2021235912A1 (fr) * 2020-05-22 2021-11-25 이창훈 Système et procédé de traitement de surface pour des objets cylindriques et annulaires destinés à être traités à l'aide d'un dispositif de génération de plasma atmosphérique
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Publication number Publication date
JP2019501505A (ja) 2019-01-17
CN108370639A (zh) 2018-08-03
CN108370639B (zh) 2020-05-19
US10555411B2 (en) 2020-02-04
US20180359842A1 (en) 2018-12-13
JP6543424B2 (ja) 2019-07-10
ES2750775T3 (es) 2020-03-27
CA3007719A1 (fr) 2017-06-15
EP3387886A1 (fr) 2018-10-17
DE102015121252A1 (de) 2017-06-08
WO2017097694A1 (fr) 2017-06-15

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