EP2209354B1 - Générateur destiné à produire un jet de plasma collimé - Google Patents

Générateur destiné à produire un jet de plasma collimé Download PDF

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Publication number
EP2209354B1
EP2209354B1 EP10150084.1A EP10150084A EP2209354B1 EP 2209354 B1 EP2209354 B1 EP 2209354B1 EP 10150084 A EP10150084 A EP 10150084A EP 2209354 B1 EP2209354 B1 EP 2209354B1
Authority
EP
European Patent Office
Prior art keywords
hollow cylindrical
electrode
working gas
pin electrode
cylindrical sheath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP10150084.1A
Other languages
German (de)
English (en)
Other versions
EP2209354A2 (fr
EP2209354A3 (fr
Inventor
Michael Bisges
Uwe Hartmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Relyon Plasma GmbH
Original Assignee
Reinhausen Plasma GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102009004968A external-priority patent/DE102009004968B4/de
Priority claimed from DE202009000537U external-priority patent/DE202009000537U1/de
Application filed by Reinhausen Plasma GmbH filed Critical Reinhausen Plasma GmbH
Publication of EP2209354A2 publication Critical patent/EP2209354A2/fr
Publication of EP2209354A3 publication Critical patent/EP2209354A3/fr
Application granted granted Critical
Publication of EP2209354B1 publication Critical patent/EP2209354B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3468—Vortex generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Definitions

  • the invention relates to a jet generator for generating a collimated plasma beam by arc discharge with supply of a working gas
  • a jet generator for generating a collimated plasma beam by arc discharge with supply of a working gas
  • a working gas comprising a pin electrode, a concentrically arranged to the pin electrode hollow cylindrical, insulated from the pin electrode sheath of electrically conductive material, on whose one end face an annular electrode is arranged, the one Limited nozzle opening whose diameter is smaller than the diameter of the hollow cylindrical shell having a supply for the working gas at the opposite end face and a voltage source for applying a voltage between the pin and ring electrode, wherein the sheath and / or the ring electrode are grounded.
  • a collimated plasma jet used in which a plasma jet is generated by applying a high-frequency alternating voltage in a nozzle tube between two electrodes by means of a non-thermal discharge from a working gas.
  • the working gas is preferably under atmospheric pressure. It is also called an atmospheric plasma.
  • air is used as the working gas.
  • the pre-treatment and cleaning by means of plasma has numerous advantages, of which in particular the high degree of degreasing, the environmental friendliness, the suitability for almost all Materials that stand out for their low operating costs and excellent integration into the various production processes.
  • a generic beam generator for generating a collimated plasma jet which has a cup-shaped housing made of plastic with a lateral supply for the working gas.
  • a nozzle tube made of ceramic is held in the opening of the pot-shaped housing.
  • a pin electrode made of copper is centrally arranged, which protrudes into the nozzle tube made of ceramic.
  • the outer periphery of the nozzle tube is surrounded outside the cup-shaped housing by a jacket of electrically conductive material, which forms a ring electrode at the free end of the nozzle tube.
  • the annular electrode defines a nozzle opening whose diameter is smaller than the inner diameter of the nozzle tube made of ceramic, so that a certain constriction is achieved at the outlet of the nozzle tube.
  • the connection for the working gas is arranged eccentrically with respect to the pot-shaped housing of the jet generator, so that the supplied working gas flows in a spiral shape through the ceramic nozzle tube. This forms a gas vortex whose vortex core extends along the axis of the nozzle tube.
  • the electrically conductive jacket extends approximately to the level of the tip of the pin electrode. When the voltage is raised, a corona discharge occurs at the tip of the pin electrode.
  • the discharge tufts extend radially onto the wall of the nozzle tube and the transport of the charge carriers to the electrically conductive jacket takes place through the ceramic material of the nozzle tube.
  • an extremely high ignition voltage in the order of 10 to 30 kV is required.
  • This corona discharge provides the necessary ions, by which an arc discharge from the pin electrode to the end-side ring electrode is ignited with increasing voltage.
  • Due to the swirling flow of the working gas the arc between the pin electrode and the nozzle tube is channeled in the vortex core along the axis of the nozzle tube, so that it branches only in the region of the nozzle opening into several sub-branches.
  • the working gas which rotates in the area of the vortex core and thus in the immediate vicinity of the arc at high flow velocity, comes into intimate contact with the arc and is thereby partly transferred to the plasma state.
  • a disadvantage of the known jet generator is the high thermal load of the surfaces to be treated.
  • the voltage source requires a very high ignition voltage in the order of 10 to 30 kV. Further losses occur due to the high resistance between the pin electrode and the annular electrode at the nozzle opening.
  • the extremely strong heating of the pin electrode causes molten and dissolved from the surface particles are blown with the plasma jet to the surface. To counteract this destruction of the pin electrode and contamination of the surfaces with detached particles, a large amount of working gas must be passed through the jet generator for cooling purposes.
  • a strong heating of the pin electrode during operation of the beam generator can not be avoided and a concomitant change in the power output of the beam generator can not be prevented.
  • the German Utility Model DE 20 2007 018 327 U1 describes a device in which a plasma is generated by a discharge from a working gas.
  • the working gas is imparted a turbulent flow, in which the working gas is passed in the device through an intermediate wall into a nozzle tube which has a ring of obliquely employed in the circumferential direction of the nozzle tube bores.
  • the invention is therefore the object of the invention to provide a jet generator of the type mentioned, which operates with a low ignition and operating voltage, which generates less heat loss and thus the treated surfaces less thermally loaded and its power output during operation is practically constant.
  • the handling of the jet generator should be improved in order to be able to process particularly complicated surface structures better.
  • the solution is based inter alia on the idea of generating an asymmetric heat profile in the jet generator, according to which the majority of the heat loss is released only at the nozzle opening, while the pin electrode is thermally loaded only extremely low. At the same time the resistance between the pin and ring electrode is reduced.
  • the object is achieved in a jet generator of the type mentioned in that the hollow cylindrical shell has an end face conically tapering in the direction of the annular electrode portion, the pin electrode projects into the hollow cylindrical shell, but ends in particular at a small distance in front of the conical section in that the hollow cylindrical jacket directly surrounds the pin electrode, the supply for the working gas has means for generating a turbulent flow of the working gas and the voltage source is a pulsed DC voltage source.
  • the flow conditions in the region of the nozzle opening are of particular importance.
  • separation edges or vortex entrainment must be avoided, since otherwise uncontrolled discharges in the region of the nozzle opening will impair the energy input into the working gas.
  • the conically tapering in the direction of the annular electrode portion carries in conjunction with the Before this section ending pin electrode instrumental in avoiding unintentional discharges and at the same time the flow conditions are improved in the region of the nozzle opening.
  • the means for generating the turbulent flow provide for the formation of a controlled turbulent flow, in the core of which the arc discharge is optimally channeled.
  • the preferably wide, in particular over at least 75% of the length of the hollow cylindrical shell extending pin electrode causes a lower operating voltage sets during operation, which is between 500 volts and a maximum of 7,000 volts.
  • the lower burning or operating voltage causes less heat loss.
  • electrically conductive jacket immediately surrounding the pin electrode, i. without the interposition of a dielectric, and the pin electrode protrudes into the hollow cylindrical shell can reduce the height of the ignition voltage, which was required in the prior art to overcome the ceramic existing dielectric.
  • the pulsed DC voltage source whose ground potential is connected to the sheath and / or the ring electrode of the beam generator, thermally loads the pin electrode only about 10% of the resulting heat loss, while in the jet generator according to the prior art, about half of the heat loss occurs at the pin electrode.
  • the low thermal load of the pin electrode equalizes the power output of the beam generator.
  • the conically tapered portion in which the turbulence contracts in the direction of the nozzle opening, a maximum of 20% of the length of the hollow cylindrical shell. This results in optimal flow conditions with reduced resistance between the electrodes.
  • Another measure for reducing the ignition voltage is that the radial distance between the pin electrode and the hollow cylindrical jacket is less than five times the diameter of the pin electrode.
  • a wandering of the arc projection and thus a scaling of the pin electrode are prevented if the end tapered pin electrode has a pointing in the direction of the nozzle opening rounded tip.
  • the jet generator according to the invention has as a means for generating a turbulent flow of the working gas a sleeve inserted from the front side into the hollow cylindrical shell surrounding the pin electrode of electrically insulating material, on the surface of which at least one arranged as a helix web is arranged, which is between the inner wall of hollow cylindrical shell and the surface of the sleeve forms a channel for the working gas.
  • the pitch of the helical land can effectively influence the temperature of the plasma jet. A larger slope cools the plasma jet stronger, while a smaller slope leads to a warmer plasma jet.
  • the residence time of the working gas at the same flow rate due to the shorter flow path through the jet generator is shorter, whereby the cooling effect of the working gas is amplified.
  • the residence time of the working gas at the same flow rate due to the longer flow path through the jet generator is reduced.
  • the sleeve forming the duct for the working gas fixes the pole electrode in the electrically conductive jacket and ensures the required electrical separation between the pole electrode and the jacket.
  • the sleeve is not only easy to install, but also leads to compact dimensions of the pin-shaped jet generator.
  • the dimensions of the jet generator in the circumferential direction can be further reduced in that the feed for the working gas has a flush with the hollow cylindrical wall wall having at least one extending in the axial direction of the shell passage which communicates with the supply for the working gas.
  • the axial working gas supply allows the execution of the jet generator as a pin-like tool, at the nozzle opening opposite the end face of the working gas is supplied via a connected to the electrically conductive jacket tube.
  • a simple pulsed DC voltage source generates, for example, rectangular signals. These can be superimposed by additional pulses.
  • the annular electrode may be formed integrally with the conical portion of the hollow cylindrical shell.
  • the electrode and the cladding are preferably made of the same electrically conductive material.
  • the ring electrode is formed by the area surrounding the nozzle opening of the jacket of electrically conductive material.
  • FIG. 1 shows a beam generator according to the invention (1) for generating a bundled, bolt-shaped plasma jet (2), which is formed by arc discharge (3) while supplying a working gas (4).
  • the jet generator (1) consists essentially of a pin electrode (5) which concentrically surrounds a hollow cylindrical, with respect to the pin electrode (5) insulated, tubular jacket (6) made of electrically conductive material. Suitable materials are metals, in particular copper or stainless steel.
  • the hollow cylindrical jacket (6) has at one end face a section (8) which tapers conically at least in the interior of the jacket in the direction of an annular electrode.
  • the portion of the jacket may e.g. have a different shape for ergonomic reasons. It is crucial for the function that the section inside the shell is conical. In the illustrated embodiment, however, the portion is also conically formed on the outside.
  • the annular electrode (7) defines a nozzle opening (9) on the nozzle tip formed by the conical section. The diameter of the nozzle opening (9) is smaller than the inner diameter of the hollow cylindrical shell (6).
  • the hollow cylindrical jacket (6) has a supply for the working gas on, a hose connected to a gas supply, not shown, in particular a compressed air supply (10), in the hollow cylindrical jacket (6) flush wall (11) with two in the axial direction of the jacket (6) extending passages (12) for the working gas and means (13) for generating a turbulent flow of the working gas (4).
  • the means (13) for generating a vortex flow is a sleeve (14) of electrically insulating material which is inserted into the shell (6) at the same time surrounding and supporting the pin electrode (5), on the surface of which a helically extending web (FIG.
  • the passages (12) in the disk-shaped wall (11) communicate with the helical passage (18) for the working gas.
  • the sleeve (14) surrounds the pin electrode (5), which via a further in the axis of the jacket (6) extending passage (19) in the wall (11) with the supply line (20) to a in FIG. 2 shown pulsed DC voltage source (21) is connected.
  • the annular electrode (7) pressed into the section (8) tapering at least in the interior of the jet generator (1), for example made of Kanthal or titanium, is as shown FIG. 2 recognizable, via a further supply line (22) connected to the pulsed DC voltage source (21), wherein the annular electrode (7) is connected to a ground (23).
  • FIG. 3 It can be seen how by means of an adapter (24) to a cable (26) interconnected leads (20, 22) to the pin electrode (5) and the annular electrode (7) via a radial passage (25) from the hose ( 10) are coupled for the working gas.
  • the sleeve-shaped adapter (24) surrounds the hose (10) in the region of Outcoupling of the cable (26).
  • the cable (26) is passed through a seal (27), for example in the form of a permanently elastic sealant.
  • the adapter (24) is coupled directly to the end face of the electrically conductive jacket (6) of the jet generator (1) opposite the annular electrode (7).
  • On the free side of the adapter (24) of the hose (10) for the working gas (4) is glued with its front edge in the diameter corresponding through hole of the adapter (24).
  • FIG. 5 illustrates the connection of the supply lines (20/21) comprising cable (26) with the pin electrode (5) and the annular electrode (7).
  • the supply line (22) via the short piece of wire (34) with the electrically conductive jacket (6) and thus the annular electrode (7) is brought into connection.
  • the short piece of wire (34) for example, between the wall (11) and the inner wall (16) of the electrically conductive jacket (6) is clamped.
  • the connection to the annular electrode (7) is produced.
  • the beam generator works as follows:
  • FIG. 1 the flow of the working gas (4) through the jet generator (1) according to the invention is represented by arrows.
  • the working gas (4) through the hose (10) from the compressed air source, not shown, to the passages (12) in the end face of the beam generator (1) bounding wall (11).
  • the working gas (4) enters through the passages (12) in the helically extending channel (18), the gas flow in the illustrated embodiment imparting a spin in the clockwise direction about the longitudinal axis of the jet generator (1) around.
  • the working gas (4) leaves the sleeve (14) as a vortex flow whose vortex core extends along the longitudinal axis of the jacket (6) of the jet generator (1).
  • FIG. 1 shows the beam generator after ignition with already formed, bolt-shaped plasma jet (2).
  • the plasma jet (2) is formed in that the rotating working gas (4) in the region of the vortex core and thus in the immediate vicinity of the arc between the tip of the pin electrode (5) and the annular electrode (7) comes into intimate contact and thereby partially in the plasma state is transferred.
  • the gas is hardly heated along the pin electrode, so that a cool, atmospheric plasma at the nozzle opening (9) of the jet generator (1) emerges.
  • FIG. 2 illustrates the arc discharge between the tip of the pin electrode (5) and the annular electrode (7) after ignition.
  • the applied, pulsed DC voltage generates a radial arc discharge between the tip of the pin electrode (5) and the inner wall of the shell (6). Due to the turbulence (35) of the working gas (4) of this arc (37) is increasingly channeled in the vortex core on the axis of the shell (6) and expelled in the direction of the nozzle opening (9) until the branching arc (38) from the outside the annular electrode (7) touches down.
  • a white-blue glowing arc (39), extending from the tip of the pin electrode (5) after ignition in a sharply defined thin channel along the axis of the shell (6) to close to the nozzle opening (9) extends.
  • the arc (38) divides into a plurality of sub-branches (40), which seat radially from the outside on the annular electrode (7).
  • FIG. 6 illustrates the asymmetric heat distribution along the jet generator according to the invention (1) from the inlet of the working gas (4) to the nozzle opening (9).
  • the temperature in the jet generator (1) rises only in the region of the nozzle opening (9), while it remains virtually constant at a low level along the pin electrode (5) and thus along the vortex flow (35).
  • a very homogeneous vortex flow (35) which is not influenced by temperature changes, forms, the vortex core of which optimally channels the bolt-shaped plasma jet (2) and expels it in the axial direction of the jacket (6).
  • FIGS. 7 a) - d) show finally different forms of the end-side portion of a pin electrode (5) for a beam generator according to the invention (1).
  • tapered end pin electrode (5) has a rounded tip (41), as shown in the FIGS. 5 b) and c) is shown.
  • pin electrode (5) with a groove (45), whereby a lumpless arc is formed, which leads to a much lower wear of the pin electrode (5).

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Geometry (AREA)
  • Plasma Technology (AREA)

Claims (9)

  1. Générateur destiné à produit un jet de plasma collimé par la décharge d'arc électrique sous apport d'un gaz de travail comprenant
    - une électrode à pointe,
    - un manteau cylindrique creux placé de manière concentrique par rapport à l'électrode à pointe et isolé par rapport à l'électrode à pointe dans un matériau conducteur d'électricité,
    - sur lequel, sur une partie frontale, une électrode en forme de bague est située qui limite une ouverture de buse dont le diamètre est inférieur au diamètre du manteau cylindrique creux,
    - qui présente sur la partie frontale opposée une alimentation pour le gaz de travail
    - également une source de tension pour exercer une tension entre l'électrode à pointe et l'électrode en forme de bague, le manteau et/ou l'électrode en forme de bague étant mis à la terre et
    - le manteau cylindrique creux (6) présentant sur sa partie frontale une découpe (8) rétrécissant de manière conique en direction de l'électrode en forme de bague (7),
    - l'électrode à pointe (5) s'enclenchant dans le manteau cylindrique creux (6), se terminant cependant avant la découpe conique (8),
    - le manteau cylindrique creux (6) entourant directement l'électrode à pointe (5),
    caractérisé par
    - sur la partie frontale, sur laquelle se trouve l'alimentation de gaz de travail (4), une cosse (14) entourant l'électrode à pointe (5) et dans un matériau à isolation électrique étant utilisée dans le manteau cylindrique creux (6), sur la surface de celle-ci se trouvant au moins une traverse (15) en forme d'hélice qui forme entre la paroi intérieure (16) du manteau cylindrique creux (6) et de la surface (17) de la cosse (14) un canal (18) pour le gaz de travail et
    - la source de tension étant une source de tension continue pulsée (21).
  2. Générateur selon la revendication 1, l'électrode à pointe (5) s'étendant sur au moins 75 % de la longueur du manteau cylindrique creux (6).
  3. Générateur selon la revendication 1 ou 2, la découpe (8) à rétrécissement conique correspondant au maximum à 20 % de la longueur du manteau cylindrique creux (6).
  4. Générateur selon l'une des revendications 1 à 3, la distance radiale entre l'électrode à pointe (5) et le manteau cylindrique creux (6) étant inférieure au quintuple du diamètre de l'électrode à pointe (5).
  5. Générateur selon l'une des revendications 1 à 4, l'électrode à pointe (5) qui se termine en forme de cône à son extrémité présentant une pointe (41) arrondie tournée en direction de l'ouverture de la buse (9).
  6. Générateur selon l'une des revendications 1 à 5, l'alimentation pour le gaz de travail présentant une paroi (11) pouvant être installé de manière affleurante dans le manteau cylindrique creux (6) avec au moins un passage (12) passant dans le sens de l'axe du manteau qui communique avec le canal (18) pour le gaz de travail.
  7. Générateur selon l'une des revendications 1 à 6, la source de tension continue (21 ) mettant à disposition une tension maximale située entre 500 et 7000 volt.
  8. Générateur selon l'une des revendications 1 à 7, l'électrode en forme de bague (7) étant fabriquée dans un matériau avec une couche d'oxyde adhérente.
  9. Générateur selon l'une des revendications 1 à 8, l'électrode en forme de bague (7) étant formée d'une seule pièce avec la découpe conique (8) du manteau cylindrique creux (6).
EP10150084.1A 2009-01-14 2010-01-05 Générateur destiné à produire un jet de plasma collimé Not-in-force EP2209354B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009004968A DE102009004968B4 (de) 2009-01-14 2009-01-14 Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls
DE202009000537U DE202009000537U1 (de) 2009-01-14 2009-01-14 Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls

Publications (3)

Publication Number Publication Date
EP2209354A2 EP2209354A2 (fr) 2010-07-21
EP2209354A3 EP2209354A3 (fr) 2012-01-11
EP2209354B1 true EP2209354B1 (fr) 2014-04-09

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Application Number Title Priority Date Filing Date
EP10150084.1A Not-in-force EP2209354B1 (fr) 2009-01-14 2010-01-05 Générateur destiné à produire un jet de plasma collimé

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DK (1) DK2209354T3 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011076806A1 (de) 2011-05-31 2012-12-06 Leibniz-Institut für Plasmaforschung und Technologie e.V. Vorrichtung und Verfahren zur Erzeugung eines kalten, homogenen Plasmas unter Atmosphärendruckbedingungen
CN109504970B (zh) * 2018-12-14 2024-01-09 四川大学 一种种植体活化亲水装置
US11533802B1 (en) * 2022-04-23 2022-12-20 Janak H. Handa Direct-current plasma torch apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2951143A (en) * 1958-09-25 1960-08-30 Union Carbide Corp Arc torch
US3007072A (en) * 1959-01-29 1961-10-31 Gen Electric Radial type arc plasma generator
US3740522A (en) * 1971-04-12 1973-06-19 Geotel Inc Plasma torch, and electrode means therefor
DE19532412C2 (de) 1995-09-01 1999-09-30 Agrodyn Hochspannungstechnik G Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken
DE19847774C2 (de) * 1998-10-16 2002-10-17 Peter Foernsel Vorrichtung zur Plasmabehandlung von stab- oder fadenförmigem Material
JP2006114450A (ja) * 2004-10-18 2006-04-27 Yutaka Electronics Industry Co Ltd プラズマ生成装置
US7342197B2 (en) * 2005-09-30 2008-03-11 Phoenix Solutions Co. Plasma torch with corrosive protected collimator

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Publication number Publication date
EP2209354A2 (fr) 2010-07-21
DK2209354T3 (da) 2014-07-14
EP2209354A3 (fr) 2012-01-11

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