EP2168409B1 - Dispositif de production d'un jet de plasma - Google Patents

Dispositif de production d'un jet de plasma Download PDF

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Publication number
EP2168409B1
EP2168409B1 EP08759132A EP08759132A EP2168409B1 EP 2168409 B1 EP2168409 B1 EP 2168409B1 EP 08759132 A EP08759132 A EP 08759132A EP 08759132 A EP08759132 A EP 08759132A EP 2168409 B1 EP2168409 B1 EP 2168409B1
Authority
EP
European Patent Office
Prior art keywords
counter electrode
discharge tube
fact
plasma
plasma jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP08759132A
Other languages
German (de)
English (en)
Other versions
EP2168409A1 (fr
Inventor
Eckart Theophile
Werner Krammel
Václav BADURA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maschinenfabrik Reinhausen GmbH
Scheubeck GmbH and Co
Original Assignee
Maschinenfabrik Reinhausen GmbH
Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maschinenfabrik Reinhausen GmbH, Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG filed Critical Maschinenfabrik Reinhausen GmbH
Publication of EP2168409A1 publication Critical patent/EP2168409A1/fr
Application granted granted Critical
Publication of EP2168409B1 publication Critical patent/EP2168409B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube

Definitions

  • the invention relates to a device for generating a plasma jet.
  • Such a device is from the not yet pre-published German priority application DE 10 2006 012 100.7-54 known. It has a discharge tube made of dielectric material, in the interior of which an inner, rod-shaped, solid electrode is arranged to extend in the longitudinal direction. A second electrode comprises the discharge tube. This can be done directly or at a radial distance. To generate the plasma jet, the inner rod-shaped electrode is set to high voltage while the outer electrode is grounded. Due to the conditions of the electric field, this leads to a dielectrically impeded discharge and preferably to an ignition of the plasma at the tip of the inner rod-shaped electrode.
  • a cap made of dielectric material is provided at the end of the discharge tube.
  • the plasma generated in this case is "cold plasma” under atmospheric pressure, which has a gennge gas temperature, up to a few hundred degrees Celsius.
  • a disadvantage of this known cooling system is the enormous structural complexity that must be operated in order to prevent a potential carryover between the different potentials of the tungsten electrode and the plasma nozzle of the plasma torch. Also, it is not desirable in the course of reliability, in an electrical system in which very high electrical currents and voltages occur to use an electrically conductive fluid, here water, as a coolant.
  • J. Toshifuji at al .; Surface End Coatings Technology 171 (2003) 302-306 discloses an apparatus for producing a plasma jet having a dielectric discharge tube, a center electrode and a second concentric counter electrode.
  • DE 2654485 discloses a cooling device in a plasma torch. The object of the invention is therefore to provide a device for generating a plasma jet of the type mentioned above with an additional cooling arrangement, in which there is no thermal overload despite high coupled power. Furthermore, it is an object of the invention to find a structurally simple and operationally safe solution for it.
  • the device according to the invention with a cooling arrangement has a counterelectrode which is designed such that it forms a surface segmentation or enlargement, for example in the ignition region of the plasma.
  • a heat sink is arranged on the counterelectrode.
  • an electrical temperature sensor is provided on the cooling arrangement, which is part of a control loop and ensures that the thermal load of the system does not exceed a previously defined limit temperature.
  • the heat sink is designed so that it both as a holder of the device in automated manufacturing equipment serves, as well as the inclusion of the temperature sensor allows.
  • FIG. 1 It shows a discharge tube 1 of dielectric material, inside which a central, rod-shaped center electrode 2 is arranged, which simultaneously embodies a vertical central axis.
  • a second electrode 3, which forms the counterelectrode to the central center electrode 2 is rotationally symmetrical, so that the dielectric discharge tube 1, the central center electrode 2 and the counterelectrode 3 form a coaxial structure with an open end face on which the plasma jet, ie the actual plasma beam is generated.
  • the central center electrode 2 is set to high voltage, while the outer counter electrode 3 is grounded.
  • the counterelectrode 3 On the side facing away from the central center electrode 2, the counterelectrode 3 has an encircling, radial segmentation 5 in the form of cooling fins in the region of the plasma coupling.
  • an electrical temperature sensor 9 is integrated, which is part of an electrical control circuit and ensures that the thermal load of the system does not exceed a previously defined limit temperature and if necessary, a forced shutdown of the system can be done as a safety measure.
  • a deflection unit 10 is arranged, which leads an incoming air volume flow 11 to the opening of the heat sink 6.
  • the air volume flow 11 is variably adjustable and freely definable for the respective cooling demand. For example, if a higher power coupled into the device to get a more intense plasma jet, this inevitably causes a higher thermal stress on the components, especially in the field of plasma coupling. To counteract this effect, the air volume flow 11 must be increased in order to ensure sufficient cooling of the components by means of the heat sink 6 according to the invention and the circumferential segmentation 5 of the counter electrode 3. Thus, it is possible to drive a temperature curve controlled and defined in cooperation with the temperature sensor 9 for the respective cooling requirement.
  • the heat sink 6 and the deflection unit 10 are designed such that they serve both as a machine holder of the device in automated manufacturing facilities, as well as allow the recording of the temperature sensor 9 at the same time.
  • a dielectric end cap 4 is attached to the discharge tube 1 at the open end side, which is fastened by screwing to the counter electrode 3.
  • the end cap 4 is z. Example of Teflon or other plastic with appropriate thermal and mechanical stability, but alternatively also of ceramic.
  • d. H. prevents a direct arc between the central center electrode 2 and the grounded counter electrode 3, since the distance between these two electrodes is now much larger electrically.
  • FIG. 2 shows a cooling arrangement according to the invention for a device for generating a plasma jet in a sectional view.
  • the center electrode 2 is visible, which is constructed concentrically with the discharge tube 1 and the counter electrode 3 and is operatively connected.
  • the air volume flow 11 flowing in via the air supply channel 12 and still bundled in this area is guided via the deflection unit 10 to the air inlet 7 of the heat sink 6 and split onto the existing segments of the cooling fins 5 of the counter electrode 3.
  • FIG. 2 exemplarily the course of the air convection 13 for a segment of the cooling fins 5 visible.
  • the incoming air at the air inlet 7 flows over the segment of the cooling fin 5 and the counter electrode 3, heats up by absorbing the thermal energy generated during the plasma coupling and then flows through a possible outlet of the openings of the air outlet 8.
  • the air outlet 8 exemplarily the course of the air flow possible.

Claims (5)

  1. Dispositif servant à générer un jet de plasma avec au moins un tube de décharge (1), la paroi du tube de décharge (1) étant constituée de matériau diélectrique, une première électrode (2) de construction pleine étant agencée au centre à l'intérieur du tube de décharge (1), s'étendant dans le sens longitudinal de celui-ci, une contre-électrode (3) enveloppant concentriquement la paroi du tube de décharge (1), de sorte que la première électrode (2), le tube de décharge (1) et la contre-électrode (3) forment une structure coaxiale et concentrique dans la section transversale avec une face avant ouverte, contre laquelle le jet de plasma peut être généré, caractérisé en ce que la contre-électrode (3) présente une segmentation radiale circulaire sur le côté opposé de la première électrode (2) et que sur la contre-électrode (3) est fixé sur le côté de la segmentation un corps réfrigérant (6) disposant d'au moins une entrée d'air (7) et d'au moins une sortie d'air (8) de façon à ce qu'il puisse être traversé par l'air.
  2. Dispositif selon la revendication 1,
    caractérisé en ce que,
    dans la zone de la segmentation (5) un capteur de température électrique (9) est installé, qui fait partie d'un circuit de réglage électrique.
  3. Dispositif selon la revendication 1 ou 2,
    caractérisé en ce que,
    la segmentation radiale circulaire de la contre-électrode (3) est prévue dans zone de transmission du plasma.
  4. Dispositif selon l'une des revendications 1 à 3,
    caractérisé en ce que,
    sur la face avant du dispositif sur laquelle peut être généré le jet de plasma, il est agencé un capuchon de recouvrement (4) diélectrique et concentrique qui enveloppe la contre-électrode (3) et sert d'accumulateur thermique.
  5. Dispositif selon l'une des revendications 1 à 4,
    caractérisé en ce que,
    le corps réfrigérant (6) en plus de présenter un support pour le dispositif accueille également un capteur de température.
EP08759132A 2007-07-12 2008-06-10 Dispositif de production d'un jet de plasma Not-in-force EP2168409B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007032496A DE102007032496B3 (de) 2007-07-12 2007-07-12 Vorrichtung zur Erzeugung eines Plasma-Jets
PCT/EP2008/004605 WO2009006972A1 (fr) 2007-07-12 2008-06-10 Dispositif de production d'un jet de plasma

Publications (2)

Publication Number Publication Date
EP2168409A1 EP2168409A1 (fr) 2010-03-31
EP2168409B1 true EP2168409B1 (fr) 2012-12-26

Family

ID=39739298

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08759132A Not-in-force EP2168409B1 (fr) 2007-07-12 2008-06-10 Dispositif de production d'un jet de plasma

Country Status (3)

Country Link
EP (1) EP2168409B1 (fr)
DE (1) DE102007032496B3 (fr)
WO (1) WO2009006972A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016146498A1 (fr) 2015-03-17 2016-09-22 Tesa Se Traitement au plasma basse température
DE102016203413A1 (de) 2016-03-02 2017-09-07 Tesa Se Erhöhung der Abzugskraft durch selektive Plasmavorbehandlung

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI432228B (zh) * 2010-09-07 2014-04-01 Univ Nat Cheng Kung 微電漿產生裝置及其滅菌系統
DE102013017109A1 (de) * 2013-10-15 2015-04-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur Herstellung von Partikeln in einem Atmosphärendruckplasma
DE102022124117A1 (de) 2022-09-20 2024-03-21 Caphenia Gmbh Plasma-Reaktor
CN117460142A (zh) * 2023-09-22 2024-01-26 北京核力同创科技有限公司 一种多峰场负氢离子源引出结构

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BE566144A (fr) * 1957-03-27
FR1322260A (fr) * 1962-02-14 1963-03-29 Saint Gobain Chalumeau à flamme de plasma
DE2651185A1 (de) * 1976-11-10 1978-05-11 Nuc Weld Gmbh Kuehleinrichtung bei einem plasmabrenner
US4659899A (en) * 1984-10-24 1987-04-21 The Perkin-Elmer Corporation Vacuum-compatible air-cooled plasma device
US4902871A (en) * 1987-01-30 1990-02-20 Hypertherm, Inc. Apparatus and process for cooling a plasma arc electrode
US4912361A (en) * 1988-07-18 1990-03-27 Electro-Plasma, Inc. Plasma gun having improved anode cooling system
US5008511C1 (en) * 1990-06-26 2001-03-20 Univ British Columbia Plasma torch with axial reactant feed
TW315340B (fr) * 1995-02-13 1997-09-11 Komatsu Mfg Co Ltd
DE19828633B4 (de) * 1998-06-26 2004-07-29 Wirth, Aloisia Lichtbogenschweiß- oder -schneidbrenner sowie Kühlsystem, Plasmadüsen bzw. WIG-Elektrodenspannzangen, Spannsystem für Plasmaelektrodennadeln u. verfahrensübergreifendes Konstruktionsprinzip hierfür
DE29919142U1 (de) * 1999-10-30 2001-03-08 Agrodyn Hochspannungstechnik G Plasmadüse
ATE434921T1 (de) * 2000-03-31 2009-07-15 Thermal Dynamics Corp Lichtbogen-plasmabrenner und verfahren zur erhöhung der lebensdauer der verschleissteile eines lichtbogen-plasmabrenners
DE102005042955A1 (de) * 2005-09-01 2007-03-15 Tbi Industries Gmbh Plasmaschweiß- und Schneidbrenner mit einem Kühlsystem
US7326377B2 (en) * 2005-11-30 2008-02-05 Honeywell International, Inc. Solid-free-form fabrication process and apparatus including in-process workpiece cooling

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016146498A1 (fr) 2015-03-17 2016-09-22 Tesa Se Traitement au plasma basse température
DE102015204753A1 (de) 2015-03-17 2016-10-20 Tesa Se Niedertemperatur-Plasma-Behandlung
DE102016203413A1 (de) 2016-03-02 2017-09-07 Tesa Se Erhöhung der Abzugskraft durch selektive Plasmavorbehandlung
WO2017148763A1 (fr) 2016-03-02 2017-09-08 Tesa Se Augmentation de la force d'arrachement par prétraitement sélectif au plasma

Also Published As

Publication number Publication date
WO2009006972A1 (fr) 2009-01-15
EP2168409A1 (fr) 2010-03-31
DE102007032496B3 (de) 2009-01-29

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