EP1314890A2 - Système de contrôle d'une pompe à vide - Google Patents

Système de contrôle d'une pompe à vide Download PDF

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Publication number
EP1314890A2
EP1314890A2 EP02025927A EP02025927A EP1314890A2 EP 1314890 A2 EP1314890 A2 EP 1314890A2 EP 02025927 A EP02025927 A EP 02025927A EP 02025927 A EP02025927 A EP 02025927A EP 1314890 A2 EP1314890 A2 EP 1314890A2
Authority
EP
European Patent Office
Prior art keywords
predetermined
alternating current
rotational speed
pressure
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02025927A
Other languages
German (de)
English (en)
Other versions
EP1314890A3 (fr
Inventor
Shinya Yamamoto
Masahiro Kawaguchi
Osamu Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Publication of EP1314890A2 publication Critical patent/EP1314890A2/fr
Publication of EP1314890A3 publication Critical patent/EP1314890A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated

Definitions

  • the present invention generally relates to an operation method of controlling a vacuum pump and a control system for controlling the vacuum pump whose rotary shaft is driven by an alternating current motor and whose gas transferring body is driven by the rotating movement of the rotary shaft to cause vacuum action in a vacuum area.
  • an actual intake pressure at an inlet is detected and is compared with a predetermined intake pressure.
  • the rotational speed of an electric motor is controlled based on the difference in the above pressure comparison.
  • the actual intake pressure is larger than the predetermined intake pressure, the rotational speed of the vacuum pump is increased.
  • the actual intake pressure is lower than the predetermined intake pressure, the rotational speed of the vacuum pump is decreased.
  • power loss is relatively reduced due to the above operation control.
  • the present invention addresses the above mentioned problem associated with the cost while the power loss is controlled in the vacuum pump.
  • a vacuum pump has an alternating current motor, a rotary shaft and a gas transferring body.
  • the alternating current motor runs at a certain speed based on frequency of alternating current.
  • the motor is sufficiently supplied with the current. Gas is transferred from a certain space by the gas transferring body that is driven by the motor through the rotary shaft.
  • a method for controlling the vacuum pump includes keeping a rotational speed of the motor at a first predetermined rotational speed, detecting a value of the current to the motor, keeping the rotational speed at a second predetermined rotational speed that is higher than the first predetermined rotational speed when the value of the current exceeds a first predetermined value, and keeping the rotational speed at the first predetermined rotational speed when the value of the current becomes lower than a second predetermined value.
  • the present invention also provides a method for controlling a vacuum pump.
  • the vacuum pump has an alternating current motor, a rotary shaft and a gas transferring body.
  • the alternating current motor runs at a certain speed based on frequency of alternating current.
  • the motor is sufficiently supplied with the current.
  • Gas is transferred from a certain space by the gas transferring body that is driven by the motor through the rotary shaft.
  • the method includes detecting a value of the current to the motor, and changing the rotational speed of the motor to cancel the variation of the current such that the detected value of the current becomes a predetermined value.
  • the present invention also provides a control system for controlling pump torque on a vacuum pump.
  • the vacuum pump has an alternating current motor, a rotary shaft and a gas transferring body.
  • the motor is actuated by an external power source.
  • the motor runs at a certain speed based on frequency of alternating current.
  • the motor is sufficiently supplied with the current.
  • Gas is transferred from a certain space by the gas transferring body that is driven by the motor through the rotary shaft, the control system including a rotational speed adjuster and a controller.
  • the rotational speed adjuster is electrically connected to the motor and the external power source.
  • the rotational speed adjuster changes the value of the current supplied to the motor in response to the pump torque in order to keep the rotational speed of the motor at a predetermined rotational speed.
  • the controller is electrically connected to the rotational speed adjuster.
  • the controller detects a value of the current to the motor from the rotational speed adjuster compares the detected value of the current with a predetermined value.
  • the controller changes the rotational speed of the motor in such a manner that the detected value approaches the predetermined value when the detected value is different from the predetermined value.
  • FIG. 1 A first preferred embodiment according to the present invention will now be described by referring to FIGs. 1 through 4.
  • a semi-conductor is produced in a vacuum chamber C1 of a first predetermined embodiment of the present invention.
  • Work piece (not shown) stands by at a load lock chamber C2 and is subsequently supplied to the vacuum chamber C1.
  • Completed work piece stands by at the load lock chamber C2 before it is taken out.
  • the pressure in the vacuum chamber C1 is reduced to a desired low pressure level by a first vacuum pump Po1.
  • a second vacuum pump Po2 is connected to the load lock chamber C2 via an electromagnetic valve 36 that is normally closed.
  • the pressure in the load lock chamber C2 is reduced to a desired low pressure by the second vacuum pump Po2.
  • the second vacuum pump Po2 vacuums the load lock chamber C2 or a vacuumed area.
  • the first and second vacuum pumps Po1 and Po2 are called roots pump, and FIGs. 2 through 3C illustrate the internal structures of the first and second vacuum pumps Po1 and Po2.
  • a front housing 13 and a rear housing 14 are fixedly connected to a rotor housing 12.
  • a pair of rotary shafts 15 and 16 is rotatably supported by the front housing 13 and the rear housing 14.
  • Rotors 17 through 21 are integrally formed with the rotary shaft 15 while rotors 22 through 26 are integrally formed with the rotary 16.
  • the rotors 17 through 21 respectively engage with the rotors 22 through 26 in respective pump chambers 27 through 31 in the rotor housing 12.
  • the rotors 17 through 26 are gas transferring bodies that transfer gas from the vacuumed area.
  • a gear housing 32 is fixedly connected to the rear housing 14.
  • the rotary shafts 15 and 16 protrude through the rear housing 14 into the gear housing 32.
  • Gears 33 and 34 are respectively secured at the rear ends of the rotary shafts 15 and 16.
  • the gear 33 engages with the gear 34.
  • An alternating current (AC) motor M1 or M2 is placed adjacent to the gear housing 32.
  • the motor M1 or M2 is actuated by an alternating current power source E as a power source.
  • the rotational speed of the motor M1 or M2 is determined by frequency of alternating current. Namely, the motor M1 or M2 runs at a certain speed in response to a certain frequency of the altemating current.
  • the rotational power of the motor M1 or M2 is transmitted to the rotary shaft 15, and the rotary shaft 15 is rotated in the direction of arrows R1 as shown in FIGs. 3A through 3C.
  • the rotation of the rotary shaft 15 is transmitted to the rotary shaft 16 via the gears 33 and 34.
  • the rotary shaft 16 is rotated in the direction opposite to the rotary shaft 15 as indicated by arrows R2 in FIGs. 3A through 3C.
  • an inlet 121 is formed in the rotor housing 12.
  • the gas is introduced from the inlet 121 into the first pump chamber 27.
  • the gas in the first pump chamber 27 is compressed by the rotation of the rotors 17 and 22, and is transferred to the second pump chamber 28 via a passage 351 in a partition wall 35 as shown in FIGs. 2 and 3B.
  • the volume of the gas is gradually reduced.
  • the gas in the pump chamber 31 is discharged from an outlet 122, which is formed in the rotor housing 12 as shown in FIG. 3C, due to the rotations of the rotors 21 and 26.
  • an inverter 10 as a rotational speed adjuster is electrically connected to the second motor M2 and an alternating-power source E.
  • a controller 11 is electrically connected to the inverter 10.
  • the inverter 10 controls the rotational speed of the second motor M2 according to the control command from the controller 11.
  • the inverter 10 changes the value of the alternating current in order to keep the rotational speed of the second motor M2 in response to pump torque from the second motor M2.
  • the second motor M2 needs relatively large value of the alternating current to keep its rotational speed so that the inverter 10 increases the value of the alternating current supplied to the second motor M2.
  • the second motor M2 needs relatively small value of the alternating current to keep its rotational speed so that the inverter 10 decreases the value of the alternating current supplied to the second motor M2.
  • the controller 11 changes the rotational speed of the second motor M2 by causing the inverter 10 to change frequency of the alternating current to the second motor M2.
  • the controller 11 detects a value of the alternating current from the inverter 10 to the second motor M2.
  • the alternating current value from the inverter 10 to the second motor M2 reflects pump torque that is essentially the load applied to the second motor M2. Namely, the controller 11 detects the value of the alternating current to indirectly detect the pump torque or the load applied to the second motor M2.
  • FIG. 4 shows relationships among the rotational speed of the second motor M2, the pressure in the load lock chamber C2, the pressure in a passage between an electromagnetic valve 36 and the second vacuum pump Po2, and the value of the alternating current with respect to time.
  • a graph H shows the change in the rotational speed of the second motor M2 as a function of time.
  • a graph J shows the pressure change in the passage between an electromagnetic valve 36 and the second vacuum pump Po2 as a function of time.
  • the pressure in the passage varies based on the rotational speed control by the controller 11.
  • a graph F shows the pressure change in the load lock chamber C2 as a function of time.
  • the pressure in the load lock chamber C2 varies based on the opening and closing position of a first electric gate 37 and the rotational speed control by the controller 11.
  • a graph G shows the change in the alternating current value to the second motor M2 of the second vacuum pump Po2 as a function of time.
  • a first predetermined pressure P1 as shown in FIG. 4 is a desired pressure level in the load lock chamber C2, and a second predetermined pressure P2 is a transient target pressure in the passage between the electromagnetic valve 36 and the second vacuum pump Po2.
  • the second predetermined pressure P2 is lower than the first predetermined pressure P1.
  • a first predetermined alternating current value W1 as shown in FIG. 4 is an expected alternating current value supplied from the inverter 10 to the second motor M2 when the pressure in the load lock chamber C2 is at the first predetermined pressure P1 and the electromagnetic valve 36 is open.
  • a second predetermined alternating current value W2 is an expected alternating current value supplied from the inverter 10 to the second motor M2 when the pressure in the above passage is at the transient target pressure P2, the electromagnetic valve 36 is closed and the rotational speed of the second motor M2 is at a first predetermined rotational speed N1 that is a maximum speed of the second motor M2.
  • the second predetermined alternating current value W2 is lower than the first predetermined alternating current value W1.
  • the load lock chamber C2 is opened to the atmosphere by opening the first electric gate 37.
  • a second electric gate 38 is opened, the work piece in the load lock chamber C2 is moved to the vacuum chamber C1.
  • a switch control device 39 which is different from the controller 11, controls the opening and closing of the electromagnetic valve 36 and the first and second electric gates 37 and 38.
  • the electromagnetic valve 36, and the first and second electric gates 37 and 38 function as an electric opening and closing means.
  • the pressure in the load lock chamber C2 is detected by a pressure detector 40.
  • the opening and closing of the electromagnetic valve 36 is controlled based on the detected pressure by the pressure detector 40.
  • the rotational speed of the second motor M2 is kept at a second predetermined rotational speed N2, and the pressure in the load lock chamber C2 is at the first predetermined pressure P1.
  • the electromagnetic valve 36 is closed and the load lock chamber C2 and the second vacuum pump Po2 are not connected.
  • the second vacuum pump Po2 is driven at the second predetermined rotational speed N2.
  • the second predetermined rotational speed N2 is an expected rotational speed that causes the pressure in the load lock chamber C2 to be kept at the first predetermined pressure P1 when the electromagnetic valve 36 is open.
  • the second predetermined rotational speed N2 is set in such a manner that the pressure in the load lock chamber C2 is at the first predetermined pressure P1 when the value of the alternating current is at the second predetermined alternating current value W2.
  • the switch control device 39 commands that the first electric gate 37 should be closed and the electromagnetic valve 36 should be open when time is at t2 in FIG. 4.
  • the first electric gate 37 is closed, and the load lock chamber C2 is closed from the atmosphere.
  • the second vacuum pump Po2 communicates with the load lock chamber C2, which becomes under the atmospheric pressure.
  • the pressure in the passage between the electromagnetic valve 36 and the second vacuum pump Po2 increases and the pump torque from the second vacuum pump Po2 also increases.
  • the inverter 10 increases the value of the alternating current to the second motor M2 of the second vacuum pump Po2 in response to the pump torque of the second vacuum pump Po2 in order to keep the rotational speed of the second motor M2 at the second predetermined rotational speed N2.
  • the controller 11 changes the rotational speed of the second motor M2 from the second predetermined rotational speed N2 to the first predetermined rotational speed N1. Therefore, the pressure in the load lock chamber C2 and the passage between the electromagnetic valve 36 and the second vacuum pump Po2 decreases.
  • the controller 11 After the rotational speed of the second motor M2 is changed from the second predetermined rotational speed N2 to the first predetermined rotational speed N1, the controller 11, which detects the value of the alternating current from the inverter 10 to the second motor M2, compares the detected alternating current value with the second predetermined alternating current value W2.
  • the inverter 10 keeps the rotational speed at the first predetermined rotational speed N1. If the pressure in the load lock chamber C2 is relatively high or if the amount of exhaust gas that is transferred by the second vacuum pump Po2 is relatively large, the pump torque or the load applied to the second motor M2 becomes relatively large, and the alternating current value to the second motor M2 also becomes relatively large. As the pressure in the load lock chamber C2 is decreased, the alternating current value decreases.
  • the switch control device 39 causes the electromagnetic valve 36 to close. Therefore, the communication between the load lock chamber C2 and the second vacuum pump Po2 is also closed. At this time, the pressure in the load lock chamber C2 and in the passage between the electromagnetic valve 36 and the second vacuum pump Po2 is at the first predetermined pressure P1, and the detected alternating current value is at the first predetermined alternating current value W1.
  • the pressure in the passage between the electromagnetic valve 36 and the second vacuum pump Po2 is further decreased by the suction of the second vacuum pump Po2 whose second motor M2 runs at the first predetermined rotational speed N1. Namely, the alternating current to the second vacuum pump Po2 is reduced.
  • the controller 11 changes the rotational speed of the second motor M2 from the first predetermined rotational speed N1 to the second predetermined rotational speed N2.
  • the passage pressure between the electromagnetic valve 36 and the second vacuum pump Po2 is at a second predetermined pressure P2 that is lower than the first predetermined pressure P1.
  • the controller 11 compares the detected alternating current value corresponding to the detected pump torque with a predetermined alternating current value corresponding to a predetermined pump torque value.
  • the inverter 10 and the controller 11 constitute a rotation control means that controls the rotational speed of the second motor M2 in such a manner that the detected alternating current value approaches the predetermined pump torque value.
  • the electromagnetic valve 36 When the electromagnetic valve 36 is open and the gas flows in the passage between the load lock chamber C2 and the second vacuum pump Po2, the accuracy of the pressure estimated by detecting the alternating current value falls slightly compared to the situation where the gas does not flow in the passage between the load lock chamber C2 and the second vacuum pump Po2. Therefore, if a switch from the opening of the electromagnetic valve 36 to the closing of it is decided by detecting the first predetermined pressure P1 that is estimated based on the alternating current, the switch may lead an erroneous detection.
  • the transient target pressure P2 is estimated by detecting the alternating current value when the gas does not flow in the passage between the load lock chamber C2 and the second vacuum pump Po2. Therefore, when the electromagnetic valve 36 is closed upon detecting the second predetermined pressure P2 that is estimated based on the detected alternating current value, the above error is avoided. Namely, when the electromagnetic valve 36 is closed, it is confirmed by detecting the transient target pressure P2, which is lower than the first predetermined pressure P1. The above control is effective for accurately operating the control of the devices belonging to the second vacuum pump Po2 after the electromagnetic valve 36 becomes closed.
  • the first vacuum pump Po1 vacuums the vacuum chamber C1 or the vacuumed area, and it is controlled by rotational control means that is constituted of an inverter 10A as a speed rotational adjuster and a controller 11 A.
  • a desired pressure in the vacuum chamber C1 is set at a third predetermined pressure P3 that is lower than the first predetermined pressure P1 in the load lock chamber C2.
  • the first predetermined rotational speed N1 of the first motor M1 is fast enough to cause the pressure in the vacuum chamber C1 to be the third predetermined pressure P3.
  • a third predetermined value W3 of the aftemating current is a predetermined alternating current value that is expected to be supplied to the first vacuum pump Po1 when the pressure in the vacuum chamber C1 is at the third predetermined pressure P3.
  • the rotational speed of the first motor M1 is kept at a third predetermined rotational speed N3, and it is expected that the pressure in the vacuum chamber C1 is at the third predetermined pressure P3.
  • the second electric gate 38 is open, the pressure in the vacuum chamber C1 is increased and the pump torque of the first vacuum pump Po1 increases.
  • the inverter 10A increases the value of the alternating current to the first motor M1 of the first vacuum pump Po1 in response to the pump torque of the first vacuum pump Po1.
  • the controller 11A detects an increase in the alternating current of the first motor M1.
  • the controller 11 A controls the rotational speed of the first motor M1 to the first predetermined rotational speed N1 by a feedback control based on the detected alternating current value. Namely, the controller 11A continuously increases the rotational speed of the first motor M1, when the value of the alternating current is larger than the third predetermined alternating current value W3.
  • the segment H11 in the graph H1 in FIG. 6 indicates the change of the rotational speed of the first motor M1 by the feedback control after the second electric gate 38 has been opened. When the second electric gate 38 is opened, the pressure in the vacuum chamber C1 is increased from the third predetermined pressure P3 since the pressure in the load lock chamber C2 is higher than that in the vacuum chamber C1.
  • the value of the alternating current to the first motor M1 is increased in accordance with the increase of the pressure in the vacuum chamber C1.
  • the rotational speed of the first motor M1 is increased from the third predetermined rotational speed N3.
  • the controller 11A stops the feedback control and controls the rotational speed of the first motor M1 at the first predetermined rotational speed N1 during the period that corresponds to the segment H12 in the graph H1 in FIG. 6.
  • the pressure in the vacuum chamber C1 is decreased in accordance with the increasing rotational speed of the first motor M1. As the pressure in the vacuum chamber C1 is decreased, the alternating current value to the first motor M1 decreases.
  • the controller 11A starts the feedback control based on the detected alternating current value in such a manner that the detected altemating current value approaches the third predetermined alternating current value W3 again.
  • the feedback control is operated during the time that corresponds to the segment H13 in the graph H1 in FIG. 6.
  • the controller 11A stops the feedback control.
  • the controller 11A controls the rotational speed of the first motor M1 at the first predetermined rotational speed N1 during the period that corresponds to the segment H14 in the graph H1 in FIG. 6.
  • Strain of the rotary shaft 15 or 16, which reflects the pump torque may be detected by a strain gauge.
  • the detected strain is compared with a predetermined strain, and the rotational speed of the motor M1 or M2 is controlled in such a manner that the detected strain converges into the predetermined strain.
  • a strain detecting element of the strain gauge is attached on the circumferential surface of the rotary shaft 15 or 16, and the strain of the circumferential surface of the rotary shaft 15 or 16 is detected.
  • the rotational speed of the first motor M1 is controlled in such a manner that the pressure in the load lock chamber C2 becomes the first predetermined pressure P1 from the beginning.
  • the second predetermined alternating current value W2 is equal to the first predetermined alternating current value W1.
  • the rotational speed of the second motor M2 is changed from the first predetermined rotational speed N1 to the second predetermined rotational speed N2 when the detected alternating current value becomes lower than the first predetermined alternating current value W1.
  • the electromagnetic valve 36 is removed.
  • the feedback control is performed to cause the detected alternating current value to converge into the second predetermined altemating current value W2.
  • the feedback control is performed to cause the detected alternating current value to converge into the first predetermined alternating current value W1.
  • the third predetermined rotational speed N3 does not need to be set.
  • the feedback control is performed all throughout the operation based on the detected altemating current value in such a manner that the detected alternating current value approaches the third predetermined alternating current value W3. Namely, when the detected alternating current value is larger than the third predetermined altemating current value W3, the rotational speed of the first motor M1 is continuously increased until the detected alternating current value becomes equal to the third predetermined alternating current value W3.
  • the rotational speed of the first motor M1 is continuously decreased until the detected alternating current value becomes equal to the third predetermined alternating current value W3.
  • a vacuum pump has an alternating current motor, a rotary shaft and a gas transferring body.
  • the alternating current motor runs at a certain speed based on frequency of alternating current and is sufficiently supplied with the alternating current. Gas is transferred from a certain space by the gas transferring body driven by the alternating current motor through the rotary shaft.
  • a method for controlling a vacuum pump includes keeping a rotational speed of the alternating current motor at a second predetermined rotational speed, detecting a value of the alternating current to the alternating current motor, keeping the rotational speed at a first predetermined rotational speed that is higher than the second predetermined rotational speed when the detected alternating current value exceeds a first predetermined value, and keeping the rotational speed at the second predetermined rotational speed when the detected alternating current value becomes equal to a second predetermined value.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP02025927A 2001-11-21 2002-11-20 Système de contrôle d'une pompe à vide Withdrawn EP1314890A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001356469 2001-11-21
JP2001356469A JP2003155981A (ja) 2001-11-21 2001-11-21 真空ポンプにおける運転制御方法及び運転制御装置

Publications (2)

Publication Number Publication Date
EP1314890A2 true EP1314890A2 (fr) 2003-05-28
EP1314890A3 EP1314890A3 (fr) 2003-08-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP02025927A Withdrawn EP1314890A3 (fr) 2001-11-21 2002-11-20 Système de contrôle d'une pompe à vide

Country Status (3)

Country Link
US (1) US20030123990A1 (fr)
EP (1) EP1314890A3 (fr)
JP (1) JP2003155981A (fr)

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FR2883934A1 (fr) * 2005-04-05 2006-10-06 Alcatel Sa Pompage rapide d'enceinte avec limitation d'energie
EP1906024A2 (fr) * 2006-09-12 2008-04-02 Anest Iwata Corporation Dispositif de commande de fonctionnement et procédé de pompes à vide
DE102008062054B4 (de) 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
WO2021259466A1 (fr) * 2020-06-24 2021-12-30 Pierburg Pump Technology Gmbh Pompe à vide de véhicule automobile
WO2021259461A1 (fr) * 2020-06-24 2021-12-30 Pierburg Pump Technology Gmbh Pompe à vide de véhicule automobile

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EP2644247B1 (fr) * 2004-03-24 2018-07-11 Donaldson Company, Inc. Cartouche de filtration
AU2005262974B2 (en) * 2004-07-13 2011-02-17 Delaval Holding Ab Controllable vacuum source
US8261564B2 (en) * 2007-05-10 2012-09-11 Spx Corporation Refrigerant recovery apparatus with variable vacuum time and method
KR100775772B1 (ko) 2007-05-23 2007-11-12 주식회사 부강스틸 회전속도제어수단이 겸비된 회전식 강선인발장치
GB0809976D0 (en) * 2008-06-02 2008-07-09 Edwards Ltd Vacuum pumping systems
WO2011052675A1 (fr) * 2009-10-29 2011-05-05 株式会社アルバック Unité de pompe, dispositif d'aspiration et dispositif d'évacuation pour un sas de chargement
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US20030123990A1 (en) 2003-07-03
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