EP1096552A4 - Verfahren zur ionenimplantierung - Google Patents
Verfahren zur ionenimplantierungInfo
- Publication number
- EP1096552A4 EP1096552A4 EP99923945A EP99923945A EP1096552A4 EP 1096552 A4 EP1096552 A4 EP 1096552A4 EP 99923945 A EP99923945 A EP 99923945A EP 99923945 A EP99923945 A EP 99923945A EP 1096552 A4 EP1096552 A4 EP 1096552A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- ion implantation
- implantation
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15910998 | 1998-06-08 | ||
JP10159109A JP3054123B2 (ja) | 1998-06-08 | 1998-06-08 | イオン注入方法 |
PCT/JP1999/003040 WO1999065069A1 (fr) | 1998-06-08 | 1999-06-08 | Procede d'implantation d'ions |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1096552A1 EP1096552A1 (de) | 2001-05-02 |
EP1096552A4 true EP1096552A4 (de) | 2001-11-07 |
Family
ID=15686449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99923945A Withdrawn EP1096552A4 (de) | 1998-06-08 | 1999-06-08 | Verfahren zur ionenimplantierung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6583018B1 (de) |
EP (1) | EP1096552A4 (de) |
JP (1) | JP3054123B2 (de) |
KR (1) | KR20010043249A (de) |
WO (1) | WO1999065069A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7135423B2 (en) | 2002-05-09 | 2006-11-14 | Varian Semiconductor Equipment Associates, Inc | Methods for forming low resistivity, ultrashallow junctions with low damage |
AU2003228925A1 (en) * | 2002-05-10 | 2003-11-11 | Varian Semiconductor Equipment Associates, Inc. | Methods and systems for dopant profiling |
EP1596427A4 (de) | 2003-02-19 | 2009-06-10 | Panasonic Corp | Verfahren zum einführen von verunreinigungen |
JP2005026442A (ja) * | 2003-07-02 | 2005-01-27 | Renesas Technology Corp | 半導体装置の製造方法 |
US7566482B2 (en) | 2003-09-30 | 2009-07-28 | International Business Machines Corporation | SOI by oxidation of porous silicon |
CN101436534B (zh) | 2003-10-09 | 2012-02-08 | 松下电器产业株式会社 | 制作器件的方法以及采用该方法形成的已加工材料 |
JP2005223218A (ja) | 2004-02-06 | 2005-08-18 | Matsushita Electric Ind Co Ltd | 不純物導入方法 |
US20080194086A1 (en) * | 2004-06-04 | 2008-08-14 | Yuichiro Sasaki | Method of Introducing Impurity |
DE102005063462B4 (de) * | 2004-09-22 | 2017-10-12 | Infineon Technologies Ag | Verfahren zur Herstellung einer dotierten Zone in einem Halbleiterkörper |
US7993465B2 (en) * | 2006-09-07 | 2011-08-09 | Applied Materials, Inc. | Electrostatic chuck cleaning during semiconductor substrate processing |
US7642150B2 (en) * | 2006-11-08 | 2010-01-05 | Varian Semiconductor Equipment Associates, Inc. | Techniques for forming shallow junctions |
WO2009001592A1 (ja) | 2007-06-25 | 2008-12-31 | Ryobi Ltd. | 電動工具 |
CN102379005B (zh) | 2009-04-13 | 2016-08-24 | 应用材料公司 | 用离子和中性束注入改变膜的磁性 |
US10083854B2 (en) * | 2014-06-24 | 2018-09-25 | Ev Group E. Thallner Gmbh | Method and device for surface treatment of substrates |
JP2018022715A (ja) * | 2016-08-01 | 2018-02-08 | 株式会社Screenホールディングス | ドーパント導入方法 |
JP2019091923A (ja) * | 2019-02-07 | 2019-06-13 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | 基板を表面処理するための方法及び装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07263358A (ja) * | 1994-03-25 | 1995-10-13 | Ulvac Japan Ltd | ドープトアモルファスシリコン膜の形成方法およびその形成装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS632322A (ja) | 1986-06-23 | 1988-01-07 | Shindengen Electric Mfg Co Ltd | シリコン半導体における異方性エツチング面の突起物除去方法 |
JP2751181B2 (ja) | 1988-02-20 | 1998-05-18 | ソニー株式会社 | 半導体装置の製法 |
JPH02307277A (ja) | 1989-05-22 | 1990-12-20 | Matsushita Electron Corp | 不揮発性半導体装置の製造方法 |
JP2748326B2 (ja) | 1989-09-08 | 1998-05-06 | 富士通株式会社 | イオン注入方法 |
JPH03248419A (ja) | 1990-02-26 | 1991-11-06 | Mitsubishi Electric Corp | 半導体製造装置 |
US5266510A (en) * | 1990-08-09 | 1993-11-30 | Micron Technology, Inc. | High performance sub-micron p-channel transistor with germanium implant |
JPH0536618A (ja) | 1991-08-02 | 1993-02-12 | Mitsubishi Electric Corp | 半導体製造装置 |
JPH06232390A (ja) | 1993-01-29 | 1994-08-19 | Nippon Steel Corp | 半導体装置のポリサイド配線の製造方法 |
JP2705592B2 (ja) | 1994-10-14 | 1998-01-28 | 日本電気株式会社 | 半導体装置の製造方法 |
JP2699921B2 (ja) | 1995-04-21 | 1998-01-19 | 日本電気株式会社 | 半導体装置の製造方法 |
US6037640A (en) * | 1997-11-12 | 2000-03-14 | International Business Machines Corporation | Ultra-shallow semiconductor junction formation |
US6313505B2 (en) * | 1998-09-02 | 2001-11-06 | Advanced Micro Devices, Inc. | Method for forming shallow source/drain extension for MOS transistor |
-
1998
- 1998-06-08 JP JP10159109A patent/JP3054123B2/ja not_active Expired - Fee Related
-
1999
- 1999-06-08 EP EP99923945A patent/EP1096552A4/de not_active Withdrawn
- 1999-06-08 KR KR1020007012196A patent/KR20010043249A/ko not_active Application Discontinuation
- 1999-06-08 US US09/719,089 patent/US6583018B1/en not_active Expired - Fee Related
- 1999-06-08 WO PCT/JP1999/003040 patent/WO1999065069A1/ja not_active Application Discontinuation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07263358A (ja) * | 1994-03-25 | 1995-10-13 | Ulvac Japan Ltd | ドープトアモルファスシリコン膜の形成方法およびその形成装置 |
Non-Patent Citations (4)
Title |
---|
BOUSETTA A ET AL: "SI ULTRASHALLOW P+N JUNCTIONS USING LOW-ENERGY BORON IMPLANTATION", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 58, no. 15, 15 April 1991 (1991-04-15), pages 1626 - 1628, XP000208385, ISSN: 0003-6951 * |
DOWNEY D F ET AL: "Dose-rate effects on the formation of ultra-shallow junctions with low-energy Band BF2ion implants", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 308-309, no. 1-4, 31 October 1997 (1997-10-31), pages 562 - 569, XP004110336, ISSN: 0040-6090 * |
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 02 29 February 1996 (1996-02-29) * |
See also references of WO9965069A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP1096552A1 (de) | 2001-05-02 |
KR20010043249A (ko) | 2001-05-25 |
JP2000012481A (ja) | 2000-01-14 |
US6583018B1 (en) | 2003-06-24 |
WO1999065069A1 (fr) | 1999-12-16 |
JP3054123B2 (ja) | 2000-06-19 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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17P | Request for examination filed |
Effective date: 20001222 |
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AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
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A4 | Supplementary search report drawn up and despatched |
Effective date: 20010924 |
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Kind code of ref document: A4 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
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17Q | First examination report despatched |
Effective date: 20020404 |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20060103 |