GB9818330D0 - Ion implantation dosimetry method and apparatus - Google Patents

Ion implantation dosimetry method and apparatus

Info

Publication number
GB9818330D0
GB9818330D0 GBGB9818330.4A GB9818330A GB9818330D0 GB 9818330 D0 GB9818330 D0 GB 9818330D0 GB 9818330 A GB9818330 A GB 9818330A GB 9818330 D0 GB9818330 D0 GB 9818330D0
Authority
GB
United Kingdom
Prior art keywords
ion implantation
dosimetry method
dosimetry
implantation
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9818330.4A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Surrey
Original Assignee
University of Surrey
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Surrey filed Critical University of Surrey
Priority to GBGB9818330.4A priority Critical patent/GB9818330D0/en
Publication of GB9818330D0 publication Critical patent/GB9818330D0/en
Priority to PCT/GB1999/002561 priority patent/WO2000011457A1/en
Priority to AU51846/99A priority patent/AU5184699A/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
GBGB9818330.4A 1998-08-21 1998-08-21 Ion implantation dosimetry method and apparatus Ceased GB9818330D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB9818330.4A GB9818330D0 (en) 1998-08-21 1998-08-21 Ion implantation dosimetry method and apparatus
PCT/GB1999/002561 WO2000011457A1 (en) 1998-08-21 1999-08-04 Ion implantation dosimetry method and apparatus
AU51846/99A AU5184699A (en) 1998-08-21 1999-08-04 Ion implantation dosimetry method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9818330.4A GB9818330D0 (en) 1998-08-21 1998-08-21 Ion implantation dosimetry method and apparatus

Publications (1)

Publication Number Publication Date
GB9818330D0 true GB9818330D0 (en) 1998-10-14

Family

ID=10837672

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9818330.4A Ceased GB9818330D0 (en) 1998-08-21 1998-08-21 Ion implantation dosimetry method and apparatus

Country Status (3)

Country Link
AU (1) AU5184699A (en)
GB (1) GB9818330D0 (en)
WO (1) WO2000011457A1 (en)

Also Published As

Publication number Publication date
AU5184699A (en) 2000-03-14
WO2000011457A1 (en) 2000-03-02

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)