GB2349977B - Ion generation and irradiation method - Google Patents

Ion generation and irradiation method

Info

Publication number
GB2349977B
GB2349977B GB0010455A GB0010455A GB2349977B GB 2349977 B GB2349977 B GB 2349977B GB 0010455 A GB0010455 A GB 0010455A GB 0010455 A GB0010455 A GB 0010455A GB 2349977 B GB2349977 B GB 2349977B
Authority
GB
United Kingdom
Prior art keywords
ion generation
irradiation method
irradiation
ion
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0010455A
Other versions
GB0010455D0 (en
GB2349977A (en
Inventor
Kyoichi Suguro
Katsuya Okumura
Atsushi Murakoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP12169299A external-priority patent/JP3655491B2/en
Priority claimed from JP26985499A external-priority patent/JP3615096B2/en
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to GB0109679A priority Critical patent/GB2359414B/en
Publication of GB0010455D0 publication Critical patent/GB0010455D0/en
Publication of GB2349977A publication Critical patent/GB2349977A/en
Application granted granted Critical
Publication of GB2349977B publication Critical patent/GB2349977B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation
GB0010455A 1999-04-28 2000-04-28 Ion generation and irradiation method Expired - Fee Related GB2349977B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0109679A GB2359414B (en) 1999-04-28 2000-04-28 Ion implantation method and ion generation apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12169299A JP3655491B2 (en) 1999-04-28 1999-04-28 Ion generation method and ion irradiation method
JP26985499A JP3615096B2 (en) 1999-09-24 1999-09-24 Ion generator, ion irradiation device and filament

Publications (3)

Publication Number Publication Date
GB0010455D0 GB0010455D0 (en) 2000-06-14
GB2349977A GB2349977A (en) 2000-11-15
GB2349977B true GB2349977B (en) 2001-10-24

Family

ID=26458986

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0010455A Expired - Fee Related GB2349977B (en) 1999-04-28 2000-04-28 Ion generation and irradiation method

Country Status (2)

Country Link
US (2) US6875986B1 (en)
GB (1) GB2349977B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6661014B2 (en) * 2001-03-13 2003-12-09 Varian Semiconductor Equipment Associates, Inc. Methods and apparatus for oxygen implantation
US6894296B2 (en) * 2002-07-30 2005-05-17 Taiwan Semiconductor Manufacturing Co., Ltd Multi-inlet PFS arc chamber for hi-current implanter
JP3640947B2 (en) 2002-10-07 2005-04-20 株式会社東芝 Ion source, ion implantation apparatus, and method for manufacturing semiconductor device
JP2004165034A (en) * 2002-11-14 2004-06-10 Nissin Electric Co Ltd Ion source filament life prediction method, and ion source device
US6995079B2 (en) * 2003-08-29 2006-02-07 Semiconductor Energy Laboratory Co., Ltd. Ion implantation method and method for manufacturing semiconductor device
KR101166236B1 (en) * 2004-04-21 2012-07-17 코닌클리즈케 필립스 일렉트로닉스 엔.브이. Method for the thermal treatment of tungsten electrodes free from thorium oxide for high-pressure discharge lamps
US7446326B2 (en) * 2005-08-31 2008-11-04 Varian Semiconductor Equipment Associates, Inc. Technique for improving ion implanter productivity
US20070126007A1 (en) * 2005-12-07 2007-06-07 Matocha Kevin S SiC semiconductor device and method of fabricating same
US8072149B2 (en) * 2008-03-31 2011-12-06 Varian Semiconductor Equipment Associates, Inc. Unbalanced ion source
US8809800B2 (en) * 2008-08-04 2014-08-19 Varian Semicoductor Equipment Associates, Inc. Ion source and a method for in-situ cleaning thereof
US7965026B2 (en) * 2009-06-25 2011-06-21 General Electric Company Lamp with IR suppressing composite
US8883620B1 (en) * 2013-04-24 2014-11-11 Praxair Technology, Inc. Methods for using isotopically enriched levels of dopant gas compositions in an ion implantation process
US20170330725A1 (en) * 2016-05-13 2017-11-16 Axcelis Technologies, Inc. Lanthanated tungsten ion source and beamline components
UA113607C2 (en) * 2016-10-31 2017-02-10 ELECTRONIC BEAM LAMP WITH LINEAR THERMOCATODE
WO2018116219A1 (en) 2016-12-20 2018-06-28 Sabic Global Technologies B.V. Method for manufacturing of bisphenol a
US10319557B2 (en) * 2017-08-31 2019-06-11 Taiwan Semiconductor Manufacturing Co., Ltd. Ion generator and method for using the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0313576A (en) * 1989-06-12 1991-01-22 Fujitsu Ltd Method for ion irradiation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3770954A (en) * 1971-12-29 1973-11-06 Gen Electric Method and apparatus for analysis of impurities in air and other gases
US3835327A (en) * 1972-05-08 1974-09-10 United Aircraft Corp Triode electron gun for electron beam machines
US4649059A (en) * 1985-05-29 1987-03-10 The United States Of America As Represented By The Secretary Of The Air Force Photoionization technique for growth of metallic films
US4886971A (en) * 1987-03-13 1989-12-12 Mitsubishi Denki Kabushiki Kaisha Ion beam irradiating apparatus including ion neutralizer
JP3598602B2 (en) * 1995-08-07 2004-12-08 セイコーエプソン株式会社 Plasma etching method, liquid crystal display panel manufacturing method, and plasma etching apparatus
JP3660457B2 (en) 1996-12-26 2005-06-15 株式会社東芝 Ion generator and ion irradiation device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0313576A (en) * 1989-06-12 1991-01-22 Fujitsu Ltd Method for ion irradiation

Also Published As

Publication number Publication date
US20020100876A1 (en) 2002-08-01
US6646268B2 (en) 2003-11-11
US6875986B1 (en) 2005-04-05
GB0010455D0 (en) 2000-06-14
GB2349977A (en) 2000-11-15

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20110428