GB2359414B - Ion implantation method and ion generation apparatus - Google Patents

Ion implantation method and ion generation apparatus

Info

Publication number
GB2359414B
GB2359414B GB0109679A GB0109679A GB2359414B GB 2359414 B GB2359414 B GB 2359414B GB 0109679 A GB0109679 A GB 0109679A GB 0109679 A GB0109679 A GB 0109679A GB 2359414 B GB2359414 B GB 2359414B
Authority
GB
United Kingdom
Prior art keywords
ion
generation apparatus
implantation method
ion implantation
ion generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0109679A
Other versions
GB2359414A (en
GB0109679D0 (en
Inventor
Atsushi Murakoshi
Kyoichi Suguro
Katsuya Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP12168299A external-priority patent/JP2000312297A/en
Priority claimed from JP26985499A external-priority patent/JP3615096B2/en
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority claimed from GB0010455A external-priority patent/GB2349977B/en
Publication of GB0109679D0 publication Critical patent/GB0109679D0/en
Publication of GB2359414A publication Critical patent/GB2359414A/en
Application granted granted Critical
Publication of GB2359414B publication Critical patent/GB2359414B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
GB0109679A 1999-04-28 2000-04-28 Ion implantation method and ion generation apparatus Expired - Fee Related GB2359414B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP12168299A JP2000312297A (en) 1999-04-28 1999-04-28 Image processor and communication equipment provided with the image processor
JP26985499A JP3615096B2 (en) 1999-09-24 1999-09-24 Ion generator, ion irradiation device and filament
GB0010455A GB2349977B (en) 1999-04-28 2000-04-28 Ion generation and irradiation method

Publications (3)

Publication Number Publication Date
GB0109679D0 GB0109679D0 (en) 2001-06-13
GB2359414A GB2359414A (en) 2001-08-22
GB2359414B true GB2359414B (en) 2002-05-29

Family

ID=27255693

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0109679A Expired - Fee Related GB2359414B (en) 1999-04-28 2000-04-28 Ion implantation method and ion generation apparatus

Country Status (1)

Country Link
GB (1) GB2359414B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0303486A2 (en) * 1987-08-12 1989-02-15 Oki Electric Industry Company, Limited Method of ion implantation
US5506185A (en) * 1994-06-24 1996-04-09 Lockheed Idaho Technologies Company Ceramic oxyanion emitter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0303486A2 (en) * 1987-08-12 1989-02-15 Oki Electric Industry Company, Limited Method of ion implantation
US5506185A (en) * 1994-06-24 1996-04-09 Lockheed Idaho Technologies Company Ceramic oxyanion emitter

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Int. J. Mass. Spectrom. & Ion Phys., vol 11, no 1, pp 72-74 *
J. Nucl. Sci. & Tech., vol 23, no 3, pp 191-196 *
Meas. Sci. & Tech., vol 8, no 2, pp 184-188 *

Also Published As

Publication number Publication date
GB2359414A (en) 2001-08-22
GB0109679D0 (en) 2001-06-13

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20110428