EP0975875B1 - Systeme de pompe a vide avec pompe a anneau liquide - Google Patents

Systeme de pompe a vide avec pompe a anneau liquide Download PDF

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Publication number
EP0975875B1
EP0975875B1 EP98922706A EP98922706A EP0975875B1 EP 0975875 B1 EP0975875 B1 EP 0975875B1 EP 98922706 A EP98922706 A EP 98922706A EP 98922706 A EP98922706 A EP 98922706A EP 0975875 B1 EP0975875 B1 EP 0975875B1
Authority
EP
European Patent Office
Prior art keywords
pump
liquid ring
liquid
pumping system
vacuum pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98922706A
Other languages
German (de)
English (en)
Other versions
EP0975875A1 (fr
Inventor
Heinz-Dieter Bürger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Buerger Heinz-Dieter Vakuum- und Verfahrenstechni
Original Assignee
Buerger Heinz-Dieter Vakuum- und Verfahrenstechnik
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Filing date
Publication date
Application filed by Buerger Heinz-Dieter Vakuum- und Verfahrenstechnik filed Critical Buerger Heinz-Dieter Vakuum- und Verfahrenstechnik
Publication of EP0975875A1 publication Critical patent/EP0975875A1/fr
Application granted granted Critical
Publication of EP0975875B1 publication Critical patent/EP0975875B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
    • F04C19/004—Details concerning the operating liquid, e.g. nature, separation, cooling, cleaning, control of the supply
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Definitions

  • the invention relates to a vacuum pump system with a liquid ring pump for pumping gases, e.g. against Atmospheric pressure.
  • Liquid ring pumps have been used for many years. They contain one in a cylindrical housing eccentrically housed rotor, the blades of which are one Liquid along the cylindrical wall of the housing Relocate and due to the eccentric rotor position Dip more or less deeply into this liquid ring. This results within the liquid ring between the blades spaces of variable volume, so that a Gas sucked into one of these rooms in the course the rotation of the rotor is compressed and finally ejected becomes.
  • the object of the invention is to provide a suction system to specify a liquid ring pump in which contamination the working fluid of the pump is avoided even then if the gases to be conveyed contain substances at atmospheric pressure and the temperature of the liquid ring condense would.
  • this object is achieved by that the liquid of the liquid ring pump from an inert Fluid is formed and that the liquid ring pump with a Diaphragm-type backing pump interacts and on the inlet side a suction valve that is controlled so that it can only be opened when the temperature of the liquid ring in the pump exceeded a lower limit Has.
  • the liquid ring pump operated higher temperature, so that already due to the higher Temperature the risk of condensation from the liquid contaminating substances at the outlet of the liquid ring pump is reduced.
  • the liquid ring pump long maintenance-free operation guaranteed.
  • the inlet 1 is via a suction valve 3 and possibly a Cold trap 4 with the suction connection 5 of a liquid ring pump 6 connected.
  • the liquid ring preferably consists of perfluorinated polyether.
  • the pressure connection 7 of the pump leads to a via a temperature-controlled separator 8 Diaphragm pump 9, which acts as a backing pump in the system and is connected on the outlet side to outlet 2 to the atmosphere. If necessary, the diaphragm pump on the inlet and / or On the outlet side, a cold trap 10 or 11 have to remove foreign matter before releasing it into the atmosphere withhold.
  • the valve 3 is controlled by a processor 12, the temperature measurement signals from a thermocouple 16 in the liquid ring the pump 6 and possibly a thermocouple 17 recycled in the separator 8.
  • the processor opens 12 the valve 3 only when the liquid ring Minimum operating temperature above room temperature from e.g. Has reached 45 ° C.
  • the temperature measurement in the Separator 8 can serve to prevent overheating and close valve 3 (and turn off the pumping system), when the gases entering the separator 8 an upper limit temperature of e.g. Exceed 90 ° C.
  • valve 3 starts Liquid ring pump 6 to work, which quickly increases the temperature of the liquid ring rises. Is the temperature of e.g. Reached 45 ° C, then the processor 12 opens the valve 3, see above that the pumping process begins. The extracted gases are via the diaphragm pump 9 to the atmosphere-side outlet 2 promoted.
  • the pressure relief valve 13 remains blocked until until the diaphragm pump is no longer able to increase the throughput to process the liquid ring pump, so that on Inlet of the diaphragm pump builds up a pressure that exceeds the limit pressure of the pressure relief valve 13 exceeds. Then briefly this valve is opened and the pressure in question is released.
  • the diaphragm pump normally holds the pressure connection 7 of the liquid ring pump 6 to a negative pressure of approximately 100 mbar absolutely, so vapors that are in the pumped gas can be and at atmospheric pressure and ambient temperature would condense, remain in vapor form and into the Diaphragm pump are discharged. This also collects no toxic or aggressive substances in the liquid ring, so the lifespan and maintenance periods of the pumping system compared to known water ring pumps be extended.
  • the invention is not in detail on all features of the illustrated embodiment limited. So can, for example, instead of a perfluorinated polyether other possibly even inorganic fluid can be used regarding the pumped gases and vapors in question is inert (such as long-chain silanes). You can also individual or all of the cold traps shown saved if the gases to be pumped are not foreign components contain that must be prevented by cold traps, to get into the atmosphere.
  • inert such as long-chain silanes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Reciprocating Pumps (AREA)

Claims (7)

  1. Système de pompage à vide comprenant une pompe à anneau liquide pour évacuer des gaz, par exemple vers l'atmosphère, le liquide de la pompe à anneau liquide étant constitué par un fluide inerte, caractérisé en ce que la pompe à anneau liquide (6) coopère avec une pompe primaire (9) du type à diaphragme et présente à l'entrée une vanne d'entrée (3) dont l'ouverture est commandée seulement lorsque la température de l'anneau liquide de la pompe (6) a dépassé un seuil inférieur.
  2. Système de pompage à vide selon la revendication 1, caractérisé en ce que la vanne d'entrée (3) est commandée en outre par un thermocouple (17) qui mesure la température du gaz à la sortie de la pompe à anneau liquide (6) et ferme la vanne lorsque la température dépasse un seuil supérieur.
  3. Système de pompage à vide selon l'une des revendications 1 et 2, caractérisé en ce qu'un séparateur (8) commandé en température est inséré entre la sortie (7) de la pompe à anneau liquide (6) et l'entrée de la pompe à diaphragme (9).
  4. Système de pompage à vide selon l'une des revendications 2 à 3, caractérisé en ce qu'une vanne de sécurité (13) est disposée en parallèle à la pompe à diaphragme.
  5. Système de pompage à vide selon l'une des revendications 3 et 4, caractérisé en ce qu'un conduit comportant une soupape d'étranglement (14) relie la sortie de la pompe à diaphragme et l'entrée (5) de la pompe à anneau liquide (6).
  6. Système de pompage à vide selon la revendication 5, caractérisé en ce qu'une sonde acoustique de cavitation est associée à la pompe à anneau liquide (6) et agit sur la soupape d'étranglement (14).
  7. Système de pompage à vide selon l'une des revendications 1 à 6, caractérisé en ce que le liquide de la pompe à anneau liquide (6) est constitué par du perfluoropolyéther.
EP98922706A 1997-04-14 1998-04-14 Systeme de pompe a vide avec pompe a anneau liquide Expired - Lifetime EP0975875B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19715480A DE19715480C2 (de) 1997-04-14 1997-04-14 Vakuumpumpsystem mit einer Flüssigringpumpe
DE19715480 1997-04-14
PCT/EP1998/002174 WO1998046885A1 (fr) 1997-04-14 1998-04-14 Systeme de pompe a vide avec pompe a anneau liquide

Publications (2)

Publication Number Publication Date
EP0975875A1 EP0975875A1 (fr) 2000-02-02
EP0975875B1 true EP0975875B1 (fr) 2003-02-26

Family

ID=7826432

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98922706A Expired - Lifetime EP0975875B1 (fr) 1997-04-14 1998-04-14 Systeme de pompe a vide avec pompe a anneau liquide

Country Status (3)

Country Link
EP (1) EP0975875B1 (fr)
DE (2) DE19715480C2 (fr)
WO (1) WO1998046885A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020078471A1 (fr) * 2018-10-18 2020-04-23 Changxin Memory Technologies, Inc. Système de dégazage, tour de dégazage et système d'eau le comportant

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19959068A1 (de) * 1999-12-08 2001-06-21 Siemens Ag Vorrichtung und Verfahren zur (vibro-)akustischen Überwachung eines verfahrens- und/oder fertigungstechnischen Prozesses mit einem Klopfsensor
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
DE102009058838A1 (de) 2009-12-18 2011-06-22 BARTEC BENKE GmbH, 21465 Messanordnung für eine Flüssigkeit, insbesondere zur Verwendung in einer Milchannahmeanordnung, und Verfahren zum Betrieb einer Milchannahmeanordnung
GB2571969B (en) * 2018-03-14 2020-10-07 Edwards Tech Vacuum Engineering Qingdao Co Ltd A liquid ring pump manifold with an integrated spray nozzle

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2971691A (en) * 1955-08-16 1961-02-14 Heraeus Gmbh W C Pumping system
DE1103514B (de) * 1958-12-24 1961-03-30 Klein Schanzlin & Becker Ag Rotationskompressor mit Fluessigkeitsring zum Verdichten von Gasen, vorzugsweise von aggressiven Medien
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
US4050851A (en) * 1975-11-10 1977-09-27 The Nash Engineering Company Liquid ring pumps and compressors using a ferrofluidic ring liquid
DE2927797A1 (de) * 1979-07-10 1981-02-05 Leybold Heraeus Gmbh & Co Kg Verdraenger-vakuumpumpe mit saugstutzenventil
US4315717A (en) * 1979-11-19 1982-02-16 The Nash Engineering Company Evacuation system with precondenser
DE3204784A1 (de) * 1982-02-11 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Fluessigkeitsringvakuumpumpe mit vorgeschaltetem vorverdichter
DE3420144A1 (de) * 1984-05-30 1985-12-05 Loewe Pumpenfabrik GmbH, 2120 Lüneburg Regelungs- und steuerungssystem, insbes. fuer wassering-vakuumpumpen
DE3425616A1 (de) * 1984-07-12 1986-01-23 Loewe Pumpenfabrik GmbH, 2120 Lüneburg Anordnung zur minimierung des kuehlfluessigkeitsverbrauches insbes. bei fluessigkeitsring-vakuumpumpen o.dgl.
DE3710782A1 (de) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020078471A1 (fr) * 2018-10-18 2020-04-23 Changxin Memory Technologies, Inc. Système de dégazage, tour de dégazage et système d'eau le comportant

Also Published As

Publication number Publication date
DE59807317D1 (de) 2003-04-03
EP0975875A1 (fr) 2000-02-02
DE19715480C2 (de) 1999-01-14
WO1998046885A1 (fr) 1998-10-22
DE19715480A1 (de) 1998-10-15

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