EP0713773A2 - Générateur de micro-gouttelettes en particulier pour imprimante à jet d'encre - Google Patents

Générateur de micro-gouttelettes en particulier pour imprimante à jet d'encre Download PDF

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Publication number
EP0713773A2
EP0713773A2 EP95810667A EP95810667A EP0713773A2 EP 0713773 A2 EP0713773 A2 EP 0713773A2 EP 95810667 A EP95810667 A EP 95810667A EP 95810667 A EP95810667 A EP 95810667A EP 0713773 A2 EP0713773 A2 EP 0713773A2
Authority
EP
European Patent Office
Prior art keywords
transducers
generator according
drop generator
transducer
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95810667A
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German (de)
English (en)
Other versions
EP0713773A3 (fr
EP0713773B1 (fr
Inventor
Joachim Heinzl
Wolfgang Schullerus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pelikan Produktions AG
Original Assignee
Pelikan Produktions AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pelikan Produktions AG filed Critical Pelikan Produktions AG
Publication of EP0713773A2 publication Critical patent/EP0713773A2/fr
Publication of EP0713773A3 publication Critical patent/EP0713773A3/fr
Application granted granted Critical
Publication of EP0713773B1 publication Critical patent/EP0713773B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14282Structure of print heads with piezoelectric elements of cantilever type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/03Specific materials used
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/11Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Definitions

  • a drop generator for microdrops is known.
  • a multiplicity of piezoelectric bending transducers are arranged in an ink-filled chamber of a housing, each of which is assigned to a nozzle leading through a housing wall.
  • an ink droplet is ejected from the nozzle in question.
  • This drop generator is simply constructed. However, the printed image is unsatisfactory, sometimes uneven and washed out. Similar drop generators are described in DE-OS 31 14 224 and DE-OS 31 14 259.
  • the present invention has for its object to eliminate the above disadvantage. This object is achieved by the combination of features of the claims.
  • the partition walls reliably prevent ink from escaping from an adjacent nozzle when one transducer is actuated, because the pressure waves can no longer spread to the adjacent nozzle. In addition, the viscous coupling between adjacent transducers is completely avoided.
  • the partitions also bring a significant increase in efficiency. Because the ink can no longer move sideways under the activated bending transducer, a considerably higher pressure is generated at the nozzle with the same deflection. Therefore, on the one hand, a significantly higher and more constant drop flight speed and, on the other hand, a lower power requirement can be achieved.
  • a piezoelectric transducer unit 12 is fastened on a base 9 attached to or molded onto the nozzle plate 2 and arranged opposite the wall 6 and is positioned by means of interacting positioning means, for example by pins 10, which are inserted into bores in the base 9 and engage in bores in the unit 12 .
  • the unit 12 consists of a piezoceramic plate 13 which is laminated at the top with a thin metal foil 14 and at the bottom with a thicker metal foil 15. From the free end 16 through the nozzles 7 to the base 9, slots 17 are cut into this composite plate at regular intervals, e.g. ground with a diamond disc, so that the element 12 has a comb-like structure with a connecting web 18 over the base 9 and tines 19.
  • the film 14 is interrupted on the web 18 in the extension of the slots 17, so that a film strip is formed for each tine 19.
  • the film 15, on the other hand, is continuous on the web 18 and projects over the plate 13 on the end face. It is connected to a connecting line 20 for the return conductor.
  • Each strip of film 14 is connected to a connecting line 21 for the outgoing conductor.
  • partitions 26 connected on the end face of the nozzle plate 2 to a chamber wall 6, 25 are fastened, each separating two prongs 19 and being narrower than the slots 17.
  • FIG. 2a shows a prong 19 in the rest position.
  • a negative pressure prevails in the liquid chamber 5, so that a concave meniscus 28 is formed in the nozzle 7, the capillary pressure of which is in equilibrium with the negative pressure.
  • the piezoceramic layer 13 of the prong 19 tries to shorten under the influence of the electric field (cross-effect). This shortening is opposed by the thicker metal foil 15 with a greater resistance than the thinner metal foil 14, so that the tine 19 bends away from the nozzle plate 2 (FIG. 2b).
  • the rate of deformation is selected by a suitable choice of the pulse shape at the connection 21 such that the liquid meniscus 28 in the nozzle 7 retracts only very little.
  • the pulse at connection 21 drops and the previously introduced electrical charge flows away, the tine 19 snaps back into the basic position (FIG. 2 c) and a drop 29 is ejected from the nozzle 7.
  • Figure 3d shows the state shortly after the droplet ejection.
  • the liquid meniscus 28 has withdrawn deeper into the nozzle 7. Liquid flows through the inlet opening 8 until the meniscus 28 has reached its equilibrium position again.
  • coating materials e.g. ORMOCERe (organically modified ceramics), epoxies, acrylates, polyurethanes and thermoplastic polymers are used.
  • the selection depends on the working fluid used, since resistance of the coating to the fluid is required. However, the liquid must also wet the coated surfaces well, so that the chamber 5 of the drop generator can be vented properly.
  • the non-conductive coating means that even electrically conductive inks, e.g. Water-based inks, which are desirable in many cases in printing applications, can be used.
  • electrically conductive inks e.g. Water-based inks
  • only electrically non-conductive inks could be used. This restricted the area of application of these devices considerably. In addition, this property can make the ink considerably more expensive.
  • a bimorph bending transducer element 12 is shown in FIG. It consists of the piezoceramic layer 13, the relatively thick, thus bonded metal foil 15, which at the same time forms the electrode for the return conductor, and the electrode 34, which replaces the thinner metal foil 14 according to FIGS. 1-5.
  • the electrode 34 which replaces the thinner metal foil 14 according to FIGS. 1-5.
  • FIG. 7 shows a so-called SS-CMB (single sided ceramic multilayer bender). These transducers are described in "Actuator 94 Conference Proceedings", Bremen 1994 by J. Verkerk et al. described in more detail to which reference is made.
  • the element 12 here consists of an active piezoceramic layer 35, a passive piezoceramic layer 36 and a plurality of electrode layers 37 which divide the layer 35 into several layers and are alternately connected to end metallizations 38, 39 and thus to the connecting lines 20, 21.
  • the layers 40 of the layer 35 are alternately polarized in opposite directions.
  • the layer 35 as a whole becomes shorter or longer compared to the passive layer 36, depending on the polarity of the voltage applied. Due to the parallel connection of many thin piezoceramic layers (20-100 ⁇ m per layer) in the SS-CMB, relatively low voltages are sufficient to achieve high field strengths. As a result, the required pulse voltage for droplet ejection - depending on the thickness and number of layers - drops to around 20-40 V. Another advantage is that temperature fluctuations only cause negligible deflection of the tines, since apart from the very thin electrode layers (1 -2 ⁇ m per layer) only one material is used.
  • a symmetrical multi-layer bending transducer element 12 is shown in FIG. It is created by laminating two layers 45, 46 piezoactive materials with the same polarity direction.
  • the outer electrodes 47 which are connected to one another by the end metallization 38 are connected to the return conductor 20 for all tines.
  • the center electrode 48 is severed before the lamination of the second piezoactive layer 45 in the extension of the slots 17.
  • the nozzles 7 and thus also the tines 19 must be arranged very closely. If the minimum size of the transducers allows, a one to two row arrangement should be aimed for. In the case of a two-row structure (FIGS. 4 and 5) for 300 dpi, the pitch of the tines 19 of a row is 1/150 ′′ or approximately 170 ⁇ m. A 100 ⁇ m wide tine with a surrounding gap of 20 ⁇ m in width therefore requires the structuring of 30 ⁇ m thick partitions. In order for the individual tines to be able to transfer enough kinetic energy into the ink, they must be a multiple of this width high, e.g.
  • the partition walls 26 have to be designed with much larger aspect ratios. Suitable techniques are available today, such as the LIGA process or anisotropic etching of silicon single crystals. These methods are described in W. Menz, P. Bley; Microsystem technology for engineers, Weinheim 1993 described. Other suitable processes for the production of the partition walls are, for example, the electrodeposition of metals onto the nozzle plate 2, the stamping or injection molding, in which case the molds can be produced using the LIGA process. In particular in the case of production by injection molding, the partition walls 26 can be formed in one piece with the nozzle plate 2, the frame 3, the base 9 and, if appropriate, the intermediate wall 25 (FIG. 4). Other suitable methods for producing the partition walls 26 are the photolithographic structuring of photoresist lacquers or foils.
  • FIGS. 9-11 show variants in which the housing 1 contains a plurality of staggered chambers 5, each with a converter element 12 according to FIGS. 1-3 or according to one of FIGS. 6-8.
  • the axes of the nozzles 7 are inclined at least at the outlet end or at right angles to the direction of movement of the tine ends 16.
  • the nozzles 7 are narrowed towards the outlet cross section.
  • the nozzles 7 of the different rows are slightly offset from one another in the longitudinal direction of the rows.
  • FIG. 9 In the embodiment according to FIG. 9, three identical housing elements 55 corresponding to FIG. 1 but with thicker nozzle plate 56 and an additional nozzle plate 56 are stacked on top of one another.
  • the nozzle channel 57 is bent at a right angle.
  • An additional channel 58 connects the inlet opening 8 to a distribution channel 59 in a cover plate 60.
  • the axes of the nozzles 7 run at 45 ° to the direction of movement of the tine ends 16.
  • the tine ends 16 are ground off at 45 °, so that their end faces 66 run parallel to the plate 65.
  • the ends 66 therefore have a movement component perpendicular to the plate 65.
  • the chambers 5 here have lateral connections which can be connected to the storage container via a distributor line. However, the connections can also be connected to a separate container, wherein the containers can contain inks of different colors, so that the drop generator is also suitable for multi-color printing.
  • the distributor plate 60 is omitted and the channels 58 are connected to separate containers.
EP95810667A 1994-11-24 1995-10-27 Générateur de micro-gouttelettes en particulier pour imprimante à jet d'encre Expired - Lifetime EP0713773B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH354594 1994-11-24
CH3545/94 1994-11-24
CH03545/94A CH688960A5 (de) 1994-11-24 1994-11-24 Tropfenerzeuger fuer Mikrotropfen, insbesondere fuer einen Ink-Jet-Printer.

Publications (3)

Publication Number Publication Date
EP0713773A2 true EP0713773A2 (fr) 1996-05-29
EP0713773A3 EP0713773A3 (fr) 1997-04-16
EP0713773B1 EP0713773B1 (fr) 1999-12-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP95810667A Expired - Lifetime EP0713773B1 (fr) 1994-11-24 1995-10-27 Générateur de micro-gouttelettes en particulier pour imprimante à jet d'encre

Country Status (4)

Country Link
US (1) US5739832A (fr)
EP (1) EP0713773B1 (fr)
CH (1) CH688960A5 (fr)
DE (1) DE59507429D1 (fr)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19626428A1 (de) * 1996-07-01 1998-01-15 Heinzl Joachim Tröpfchenwolkenerzeuger
DE19831335A1 (de) * 1998-07-13 2000-02-10 Michael Angermann Tröpfchenerzeuger für leitfähige Flüssigkeiten
EP1036660A1 (fr) 1999-03-15 2000-09-20 Tally GmbH Tête d'impression à éjection de goutte à la demande utilisant des transducteurs piézo déformable en flexion, et sa méthode de commande
DE10007053A1 (de) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Verfahren zum Herstellen von Komponenten eines Tropfenerzeugers für Mikrotropfen, insbesondere eines Düsenkopfes für Tintendrucker, und Tropfenerzeuger selbst
DE10007055A1 (de) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere Düsenkopf für Tintendrucker
DE10007052A1 (de) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Verfahren zum Herstellen von Komponenten eines Tropfenerzeugers für Mikrotropfen und Tropfenerzeuger selbst
US6286925B1 (en) 1996-10-08 2001-09-11 Pelikan Produktions Ag Method of controlling piezo elements in a printhead of a droplet generator
DE10039255A1 (de) * 2000-08-11 2002-02-21 Tally Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere für den Düsenkopf eines Tintendruckers
EP1285762A2 (fr) 2001-08-10 2003-02-26 Tally Computerdrucker GmbH Générateur de micro-gouttelettes en particulier pour imprimante à jet d'encre
DE102004040700B4 (de) * 2004-08-23 2007-04-26 Tallygenicom Computerdrucker Gmbh Verfahren und Regelschaltung zum selektiven Ansteuern ausgewählter piezoelektrischer Aktoren aus einer Vielzahl von Düsen eines Düsenkopfes in Matrixdruckern
US7416282B2 (en) * 1997-07-15 2008-08-26 Silverbrook Research Pty Ltd Printhead having common actuator for inkjet nozzles
IT201800003552A1 (it) * 2018-03-14 2019-09-14 St Microelectronics Srl Modulo valvola piezoelettrico, metodo di fabbricazione del modulo valvola, metodo di funzionamento del modulo valvola e dispositivo di ausilio alla respirazione includente uno o piu' moduli valvola

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JPH10202874A (ja) * 1997-01-24 1998-08-04 Seiko Epson Corp インクジェットプリンタヘッド及びその製造方法
US7661793B2 (en) * 1997-07-15 2010-02-16 Silverbrook Research Pty Ltd Inkjet nozzle with individual ink feed channels etched from both sides of wafer
US7527357B2 (en) 1997-07-15 2009-05-05 Silverbrook Research Pty Ltd Inkjet nozzle array with individual feed channel for each nozzle
US6557977B1 (en) * 1997-07-15 2003-05-06 Silverbrook Research Pty Ltd Shape memory alloy ink jet printing mechanism
AUPQ130999A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V11)
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US6439693B1 (en) * 2000-05-04 2002-08-27 Silverbrook Research Pty Ltd. Thermal bend actuator
US6477029B1 (en) 2000-09-27 2002-11-05 Eastman Kodak Company Deformable micro-actuator
US6498711B1 (en) 2000-11-08 2002-12-24 Eastman Kodak Company Deformable micro-actuator with grid electrode
US6352337B1 (en) 2000-11-08 2002-03-05 Eastman Kodak Company Assisted drop-on-demand inkjet printer using deformable micro-acuator
US6428146B1 (en) 2000-11-08 2002-08-06 Eastman Kodak Company Fluid pump, ink jet print head utilizing the same, and method of pumping fluid
US6394585B1 (en) 2000-12-15 2002-05-28 Eastman Kodak Company Ink jet printing using drop-on-demand techniques for continuous tone printing
US7464547B2 (en) 2001-05-02 2008-12-16 Silverbrook Research Pty Ltd Thermal actuators
US6655777B2 (en) * 2001-07-18 2003-12-02 Lexmark International, Inc. Automatic horizontal and vertical head-to-head alignment method and sensor for an ink jet printer
US6616261B2 (en) 2001-07-18 2003-09-09 Lexmark International, Inc. Automatic bi-directional alignment method and sensor for an ink jet printer
US6843547B2 (en) 2001-07-18 2005-01-18 Lexmark International, Inc. Missing nozzle detection method and sensor for an ink jet printer
US6631971B2 (en) 2001-07-18 2003-10-14 Lexmark International, Inc. Inkjet printer and method for use thereof
US6626513B2 (en) 2001-07-18 2003-09-30 Lexmark International, Inc. Ink detection circuit and sensor for an ink jet printer
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US6572220B1 (en) 2002-05-21 2003-06-03 Eastman Kodak Company Beam micro-actuator with a tunable or stable amplitude particularly suited for ink jet printing
US7051654B2 (en) * 2003-05-30 2006-05-30 Clemson University Ink-jet printing of viable cells
KR20060039111A (ko) * 2004-11-02 2006-05-08 삼성전자주식회사 캔틸레버 액츄에이터를 구비한 잉크젯 프린트헤드
KR100624443B1 (ko) * 2004-11-04 2006-09-15 삼성전자주식회사 일방향 셔터를 구비한 압전 방식의 잉크젯 프린트헤드
US7785496B1 (en) 2007-01-26 2010-08-31 Clemson University Research Foundation Electrochromic inks including conducting polymer colloidal nanocomposites, devices including the electrochromic inks and methods of forming same
US8703216B2 (en) 2011-07-26 2014-04-22 The Curators Of The University Of Missouri Engineered comestible meat
WO2015038988A1 (fr) 2013-09-13 2015-03-19 Modern Meadow, Inc. Microsupports comestibles et exempts de produits d'origine animale pour viande transformée
CA2938156C (fr) 2014-02-05 2022-05-10 Modern Meadow, Inc. Produits alimentaires seches fabriques a partir de cellules musculaires cultivees
ES2842501T5 (es) 2015-09-21 2023-04-13 Modern Meadow Inc Materiales compuestos de tejido reforzados con fibras
CN111303641A (zh) 2016-02-15 2020-06-19 现代牧场股份有限公司 含有胶原原纤维的生物制造材料
AU2018253595A1 (en) 2017-11-13 2019-05-30 Modern Meadow, Inc. Biofabricated leather articles having zonal properties
CN109216537B (zh) * 2018-09-03 2022-05-10 西安增材制造国家研究院有限公司 一种面向微型器件应用的体材压电陶瓷图形化加工方法
WO2020150443A1 (fr) 2019-01-17 2020-07-23 Modern Meadow, Inc. Matériaux de collagène en couches et leurs procédés de fabrication
WO2020240776A1 (fr) * 2019-05-30 2020-12-03 コニカミノルタ株式会社 Tête d'encrage, procédé de fabrication de celle-ci, et procédé de formation d'image

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Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6116517A (en) * 1996-07-01 2000-09-12 Joachim Heinzl Droplet mist generator
DE19626428A1 (de) * 1996-07-01 1998-01-15 Heinzl Joachim Tröpfchenwolkenerzeuger
US6286925B1 (en) 1996-10-08 2001-09-11 Pelikan Produktions Ag Method of controlling piezo elements in a printhead of a droplet generator
US7845764B2 (en) 1997-07-15 2010-12-07 Silverbrook Research Pty Ltd Inkjet printhead having nozzle arrangements with actuator pivot anchors
US7980670B2 (en) 1997-07-15 2011-07-19 Silverbrook Research Pty Ltd Inkjet printhead having selectively actuable nozzles arranged in nozzle pairs
US7416282B2 (en) * 1997-07-15 2008-08-26 Silverbrook Research Pty Ltd Printhead having common actuator for inkjet nozzles
DE19831335A1 (de) * 1998-07-13 2000-02-10 Michael Angermann Tröpfchenerzeuger für leitfähige Flüssigkeiten
US6460979B1 (en) 1999-03-15 2002-10-08 Tally Computerdrucker Gmbh Piezo bending transducer drop-on demand print head and method of actuating it
DE19911399C2 (de) * 1999-03-15 2001-03-01 Joachim Heinzl Verfahren zum Ansteuern eines Piezo-Druckkopfes und nach diesem Verfahren angesteuerter Piezo-Druckkopf
EP1036660A1 (fr) 1999-03-15 2000-09-20 Tally GmbH Tête d'impression à éjection de goutte à la demande utilisant des transducteurs piézo déformable en flexion, et sa méthode de commande
DE10007055A1 (de) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere Düsenkopf für Tintendrucker
DE10007053C2 (de) * 2000-02-17 2001-12-20 Tally Computerdrucker Gmbh Verfahren zum Herstellen von Komponenten eines Tropfenerzeugers für Mikrotropfen, insbesondere eines Düsenkopfes für Tintendrucker, und Tropfenerzeuger selbst
DE10007052A1 (de) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Verfahren zum Herstellen von Komponenten eines Tropfenerzeugers für Mikrotropfen und Tropfenerzeuger selbst
DE10007053A1 (de) * 2000-02-17 2001-09-06 Tally Computerdrucker Gmbh Verfahren zum Herstellen von Komponenten eines Tropfenerzeugers für Mikrotropfen, insbesondere eines Düsenkopfes für Tintendrucker, und Tropfenerzeuger selbst
DE10039255A1 (de) * 2000-08-11 2002-02-21 Tally Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere für den Düsenkopf eines Tintendruckers
DE10039255B4 (de) * 2000-08-11 2004-02-12 Tally Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere für den Düsenkopf eines Tintendruckers
EP1285762A2 (fr) 2001-08-10 2003-02-26 Tally Computerdrucker GmbH Générateur de micro-gouttelettes en particulier pour imprimante à jet d'encre
DE10139397B4 (de) * 2001-08-10 2005-12-22 Tallygenicom Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere Düsenkopf für Tintendrucker
US6969156B2 (en) 2001-08-10 2005-11-29 Tally Computer Drucker Gmbh Droplet generator for microdroplets, in particular nozzle head for inkjet printer
EP1285762A3 (fr) * 2001-08-10 2003-04-02 Tally Computerdrucker GmbH Générateur de micro-gouttelettes en particulier pour imprimante à jet d'encre
DE10139397A1 (de) * 2001-08-10 2003-02-27 Tally Computerdrucker Gmbh Tropfenerzeuger für Mikrotropfen, insbesondere Düsenkopf für Tintendrucker
DE102004040700B4 (de) * 2004-08-23 2007-04-26 Tallygenicom Computerdrucker Gmbh Verfahren und Regelschaltung zum selektiven Ansteuern ausgewählter piezoelektrischer Aktoren aus einer Vielzahl von Düsen eines Düsenkopfes in Matrixdruckern
IT201800003552A1 (it) * 2018-03-14 2019-09-14 St Microelectronics Srl Modulo valvola piezoelettrico, metodo di fabbricazione del modulo valvola, metodo di funzionamento del modulo valvola e dispositivo di ausilio alla respirazione includente uno o piu' moduli valvola
EP3540281A1 (fr) 2018-03-14 2019-09-18 STMicroelectronics S.r.l. Module de soupape piézoélectrique, procédé de fabrication du module de soupape, procédé de fonctionnement du module de soupape et dispositif d'assistance respiratoire comprenant un ou plusieurs modules de soupape
US10941880B2 (en) 2018-03-14 2021-03-09 Stmicroelectronics S.R.L. Piezoelectric valve module, method for manufacturing the valve module, method for operating the valve module, and respiratory aid device including one or more of the valve modules

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US5739832A (en) 1998-04-14
CH688960A5 (de) 1998-06-30
DE59507429D1 (de) 2000-01-20
EP0713773A3 (fr) 1997-04-16
EP0713773B1 (fr) 1999-12-15

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