EP0695438A1 - Method and apparatus for process control - Google Patents
Method and apparatus for process controlInfo
- Publication number
- EP0695438A1 EP0695438A1 EP94911284A EP94911284A EP0695438A1 EP 0695438 A1 EP0695438 A1 EP 0695438A1 EP 94911284 A EP94911284 A EP 94911284A EP 94911284 A EP94911284 A EP 94911284A EP 0695438 A1 EP0695438 A1 EP 0695438A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- master disk
- light beam
- optical master
- optical
- developing fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
- G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
Definitions
- a reflected rather than a transmitted beam bring certain practical advantages. All optical parts can be located above the disk, the measurement can be made insensitive to the condition of, for example, the under surface of the glass, and the disk master can be mounted on an opaque turntable or spider structure without interfering with the optical measurement. There is also a more fundamental advantage. It is found that the strength of, for example, the first- order diffracted beam is not greatly different whether it is measured in transmission through the pitted master surface on in reflection from it. The zero- order or direct beam, however, is greatly attenuated in reflection compared with transmission. This means that the strength of the first-order beam, measured as a fraction of the zero-order beam, is greater in reflection than it is in transmission. Therefore, the consequences of stray light from the zero-order beam entering the first-order beam detector are less serious if the reflected beam is used.
- FIG. 3 shows an optical sensing arrangement in accordance with an embodiment of the present invention
- Fig. 4 shows a general view of a developing arrangement incorporating the optical sensor of Fig. 3;
- the first-order diffracted beam 8 lies within the plane of the drawing and reaches the photodiode sensor 9.
- the sensor 9 is large enough to intercept the beam 8 for any allowable value of the track pitch recorded on the disk 3. (A track pitch range of 1.5 -
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB939307239A GB9307239D0 (en) | 1993-04-07 | 1993-04-07 | Method and apparatus for process control |
GB9307239 | 1993-04-07 | ||
PCT/GB1994/000720 WO1994023343A1 (en) | 1993-04-07 | 1994-04-05 | Method and apparatus for process control |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0695438A1 true EP0695438A1 (en) | 1996-02-07 |
Family
ID=10733474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94911284A Withdrawn EP0695438A1 (en) | 1993-04-07 | 1994-04-05 | Method and apparatus for process control |
Country Status (17)
Country | Link |
---|---|
EP (1) | EP0695438A1 (fi) |
JP (1) | JPH08508602A (fi) |
CN (1) | CN1120866A (fi) |
AU (1) | AU675125B2 (fi) |
BR (1) | BR9406451A (fi) |
CA (1) | CA2159100A1 (fi) |
CZ (1) | CZ283292B6 (fi) |
FI (1) | FI954769A (fi) |
GB (1) | GB9307239D0 (fi) |
HU (1) | HUT73543A (fi) |
IL (1) | IL109238A (fi) |
NO (1) | NO953933L (fi) |
NZ (1) | NZ263235A (fi) |
RU (1) | RU2107893C1 (fi) |
SG (1) | SG44328A1 (fi) |
TW (1) | TW255966B (fi) |
WO (1) | WO1994023343A1 (fi) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8576686B2 (en) | 2005-01-25 | 2013-11-05 | Cinram Group, Inc. | Apparatus for multilevel optical recording |
US8472020B2 (en) | 2005-02-15 | 2013-06-25 | Cinram Group, Inc. | Process for enhancing dye polymer recording yields by pre-scanning coated substrate for defects |
US7535806B2 (en) | 2005-07-07 | 2009-05-19 | Cinram International Inc. | Apparatus and method for detecting laser dropout |
EP1965383A1 (en) * | 2007-03-02 | 2008-09-03 | Singulus Mastering B.V. | Diffraction order measurement |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5857843U (ja) * | 1981-10-16 | 1983-04-19 | パイオニア株式会社 | フオトレジスト湿式現像装置 |
JPS59121337A (ja) * | 1982-12-24 | 1984-07-13 | Fujitsu Ltd | レジスト現像装置 |
EP0379281A3 (en) * | 1989-01-19 | 1991-03-20 | Cosmopolitan Textile Company Limited | Web inspecting method and apparatus |
JP2861073B2 (ja) * | 1989-07-05 | 1999-02-24 | ソニー株式会社 | 現像装置 |
US5124216A (en) * | 1990-07-31 | 1992-06-23 | At&T Bell Laboratories | Method for monitoring photoresist latent images |
JPH04141840A (ja) * | 1990-10-01 | 1992-05-15 | Matsushita Electric Ind Co Ltd | フォトレジスト自動現像装置 |
JPH04311837A (ja) * | 1991-04-10 | 1992-11-04 | Tdk Corp | 光ディスク原盤の現像方法 |
US5357304A (en) * | 1992-03-25 | 1994-10-18 | Sony Corporation | Image development apparatus and method |
-
1993
- 1993-04-07 GB GB939307239A patent/GB9307239D0/en active Pending
-
1994
- 1994-04-05 WO PCT/GB1994/000720 patent/WO1994023343A1/en active IP Right Grant
- 1994-04-05 NZ NZ263235A patent/NZ263235A/en unknown
- 1994-04-05 HU HU9502729A patent/HUT73543A/hu unknown
- 1994-04-05 CZ CZ952571A patent/CZ283292B6/cs unknown
- 1994-04-05 BR BR9406451A patent/BR9406451A/pt not_active Application Discontinuation
- 1994-04-05 AU AU63841/94A patent/AU675125B2/en not_active Ceased
- 1994-04-05 CA CA002159100A patent/CA2159100A1/en not_active Abandoned
- 1994-04-05 RU RU95121761A patent/RU2107893C1/ru active
- 1994-04-05 CN CN94191725.8A patent/CN1120866A/zh active Pending
- 1994-04-05 JP JP6521868A patent/JPH08508602A/ja active Pending
- 1994-04-05 SG SG1995001399A patent/SG44328A1/en unknown
- 1994-04-05 EP EP94911284A patent/EP0695438A1/en not_active Withdrawn
- 1994-04-06 IL IL109238A patent/IL109238A/xx not_active IP Right Cessation
- 1994-04-06 TW TW083102979A patent/TW255966B/zh active
-
1995
- 1995-10-03 NO NO953933A patent/NO953933L/no unknown
- 1995-10-06 FI FI954769A patent/FI954769A/fi not_active Application Discontinuation
Non-Patent Citations (1)
Title |
---|
See references of WO9423343A1 * |
Also Published As
Publication number | Publication date |
---|---|
NO953933D0 (no) | 1995-10-03 |
BR9406451A (pt) | 1996-01-02 |
AU6384194A (en) | 1994-10-24 |
GB9307239D0 (en) | 1993-06-02 |
CA2159100A1 (en) | 1994-10-13 |
SG44328A1 (en) | 1997-12-19 |
WO1994023343A1 (en) | 1994-10-13 |
CN1120866A (zh) | 1996-04-17 |
FI954769A0 (fi) | 1995-10-06 |
RU2107893C1 (ru) | 1998-03-27 |
NO953933L (no) | 1995-10-03 |
CZ257195A3 (en) | 1996-09-11 |
IL109238A0 (en) | 1994-07-31 |
IL109238A (en) | 1997-07-13 |
HU9502729D0 (en) | 1995-11-28 |
JPH08508602A (ja) | 1996-09-10 |
FI954769A (fi) | 1995-10-06 |
NZ263235A (en) | 1996-07-26 |
TW255966B (fi) | 1995-09-01 |
AU675125B2 (en) | 1997-01-23 |
CZ283292B6 (cs) | 1998-02-18 |
HUT73543A (en) | 1996-08-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19951027 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE |
|
17Q | First examination report despatched |
Effective date: 19970915 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19980127 |