IL109238A - Method and apparatus for process control - Google Patents
Method and apparatus for process controlInfo
- Publication number
- IL109238A IL109238A IL109238A IL10923894A IL109238A IL 109238 A IL109238 A IL 109238A IL 109238 A IL109238 A IL 109238A IL 10923894 A IL10923894 A IL 10923894A IL 109238 A IL109238 A IL 109238A
- Authority
- IL
- Israel
- Prior art keywords
- master disk
- optical master
- layer
- region
- light beam
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
- G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Abstract
A method of investigating an optical master disk comprising: providing a layer (14) of developing fluid with a surface of said layer in contact with a surface of said optical master disk (3) to develop said surface, causing a light beam (6) to be incident on a region of said surface of said optical master disk, and investigating at least one diffracted light beam (10) generated from said light beam by diffraction at said region of said surface; characterized in that another surface of the layer of developing fluid is in contact with a rigid body (4) spaced from said optical master disk such that the thickness of said layer of developing fluid at at least said region of said surface of said optical master disk is determined by the spacing between said optical master disk and said rigid body.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB939307239A GB9307239D0 (en) | 1993-04-07 | 1993-04-07 | Method and apparatus for process control |
Publications (2)
Publication Number | Publication Date |
---|---|
IL109238A0 IL109238A0 (en) | 1994-07-31 |
IL109238A true IL109238A (en) | 1997-07-13 |
Family
ID=10733474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL109238A IL109238A (en) | 1993-04-07 | 1994-04-06 | Method and apparatus for process control |
Country Status (17)
Country | Link |
---|---|
EP (1) | EP0695438A1 (en) |
JP (1) | JPH08508602A (en) |
CN (1) | CN1120866A (en) |
AU (1) | AU675125B2 (en) |
BR (1) | BR9406451A (en) |
CA (1) | CA2159100A1 (en) |
CZ (1) | CZ283292B6 (en) |
FI (1) | FI954769A0 (en) |
GB (1) | GB9307239D0 (en) |
HU (1) | HUT73543A (en) |
IL (1) | IL109238A (en) |
NO (1) | NO953933D0 (en) |
NZ (1) | NZ263235A (en) |
RU (1) | RU2107893C1 (en) |
SG (1) | SG44328A1 (en) |
TW (1) | TW255966B (en) |
WO (1) | WO1994023343A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8576686B2 (en) | 2005-01-25 | 2013-11-05 | Cinram Group, Inc. | Apparatus for multilevel optical recording |
US8472020B2 (en) | 2005-02-15 | 2013-06-25 | Cinram Group, Inc. | Process for enhancing dye polymer recording yields by pre-scanning coated substrate for defects |
US7535806B2 (en) | 2005-07-07 | 2009-05-19 | Cinram International Inc. | Apparatus and method for detecting laser dropout |
EP1965383A1 (en) * | 2007-03-02 | 2008-09-03 | Singulus Mastering B.V. | Diffraction order measurement |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5857843U (en) * | 1981-10-16 | 1983-04-19 | パイオニア株式会社 | Photoresist wet development equipment |
JPS59121337A (en) * | 1982-12-24 | 1984-07-13 | Fujitsu Ltd | Resist developing device |
EP0379281A3 (en) * | 1989-01-19 | 1991-03-20 | Cosmopolitan Textile Company Limited | Web inspecting method and apparatus |
JP2861073B2 (en) * | 1989-07-05 | 1999-02-24 | ソニー株式会社 | Developing device |
US5124216A (en) * | 1990-07-31 | 1992-06-23 | At&T Bell Laboratories | Method for monitoring photoresist latent images |
JPH04141840A (en) * | 1990-10-01 | 1992-05-15 | Matsushita Electric Ind Co Ltd | Automatic developing device for photoresist |
JPH04311837A (en) * | 1991-04-10 | 1992-11-04 | Tdk Corp | Method for developing optical master disk |
US5357304A (en) * | 1992-03-25 | 1994-10-18 | Sony Corporation | Image development apparatus and method |
-
1993
- 1993-04-07 GB GB939307239A patent/GB9307239D0/en active Pending
-
1994
- 1994-04-05 HU HU9502729A patent/HUT73543A/en unknown
- 1994-04-05 CN CN94191725.8A patent/CN1120866A/en active Pending
- 1994-04-05 BR BR9406451A patent/BR9406451A/en not_active Application Discontinuation
- 1994-04-05 WO PCT/GB1994/000720 patent/WO1994023343A1/en active IP Right Grant
- 1994-04-05 EP EP94911284A patent/EP0695438A1/en not_active Withdrawn
- 1994-04-05 NZ NZ263235A patent/NZ263235A/en unknown
- 1994-04-05 SG SG1995001399A patent/SG44328A1/en unknown
- 1994-04-05 CA CA002159100A patent/CA2159100A1/en not_active Abandoned
- 1994-04-05 CZ CZ952571A patent/CZ283292B6/en unknown
- 1994-04-05 RU RU95121761A patent/RU2107893C1/en active
- 1994-04-05 JP JP6521868A patent/JPH08508602A/en active Pending
- 1994-04-05 AU AU63841/94A patent/AU675125B2/en not_active Ceased
- 1994-04-06 IL IL109238A patent/IL109238A/en not_active IP Right Cessation
- 1994-04-06 TW TW083102979A patent/TW255966B/zh active
-
1995
- 1995-10-03 NO NO953933A patent/NO953933D0/en unknown
- 1995-10-06 FI FI954769A patent/FI954769A0/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
NO953933L (en) | 1995-10-03 |
RU2107893C1 (en) | 1998-03-27 |
WO1994023343A1 (en) | 1994-10-13 |
EP0695438A1 (en) | 1996-02-07 |
HU9502729D0 (en) | 1995-11-28 |
IL109238A0 (en) | 1994-07-31 |
CZ283292B6 (en) | 1998-02-18 |
AU6384194A (en) | 1994-10-24 |
HUT73543A (en) | 1996-08-28 |
SG44328A1 (en) | 1997-12-19 |
FI954769A (en) | 1995-10-06 |
CZ257195A3 (en) | 1996-09-11 |
JPH08508602A (en) | 1996-09-10 |
TW255966B (en) | 1995-09-01 |
GB9307239D0 (en) | 1993-06-02 |
CN1120866A (en) | 1996-04-17 |
CA2159100A1 (en) | 1994-10-13 |
AU675125B2 (en) | 1997-01-23 |
FI954769A0 (en) | 1995-10-06 |
NO953933D0 (en) | 1995-10-03 |
BR9406451A (en) | 1996-01-02 |
NZ263235A (en) | 1996-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
RH | Patent void |