GB9307239D0 - Method and apparatus for process control - Google Patents

Method and apparatus for process control

Info

Publication number
GB9307239D0
GB9307239D0 GB939307239A GB9307239A GB9307239D0 GB 9307239 D0 GB9307239 D0 GB 9307239D0 GB 939307239 A GB939307239 A GB 939307239A GB 9307239 A GB9307239 A GB 9307239A GB 9307239 D0 GB9307239 D0 GB 9307239D0
Authority
GB
United Kingdom
Prior art keywords
process control
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB939307239A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nimbus Communications International Ltd
Nimbus Technology and Engineering Ltd
Original Assignee
Nimbus Communications International Ltd
Nimbus Technology and Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nimbus Communications International Ltd, Nimbus Technology and Engineering Ltd filed Critical Nimbus Communications International Ltd
Priority to GB939307239A priority Critical patent/GB9307239D0/en
Publication of GB9307239D0 publication Critical patent/GB9307239D0/en
Priority to CA002159100A priority patent/CA2159100A1/en
Priority to AU63841/94A priority patent/AU675125B2/en
Priority to EP94911284A priority patent/EP0695438A1/en
Priority to BR9406451A priority patent/BR9406451A/pt
Priority to JP6521868A priority patent/JPH08508602A/ja
Priority to NZ263235A priority patent/NZ263235A/en
Priority to RU95121761A priority patent/RU2107893C1/ru
Priority to PCT/GB1994/000720 priority patent/WO1994023343A1/en
Priority to HU9502729A priority patent/HUT73543A/hu
Priority to CZ952571A priority patent/CZ283292B6/cs
Priority to CN94191725.8A priority patent/CN1120866A/zh
Priority to SG1995001399A priority patent/SG44328A1/en
Priority to IL109238A priority patent/IL109238A/xx
Priority to TW083102979A priority patent/TW255966B/zh
Priority to NO953933A priority patent/NO953933L/no
Priority to FI954769A priority patent/FI954769A0/fi
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB939307239A 1993-04-07 1993-04-07 Method and apparatus for process control Pending GB9307239D0 (en)

Priority Applications (17)

Application Number Priority Date Filing Date Title
GB939307239A GB9307239D0 (en) 1993-04-07 1993-04-07 Method and apparatus for process control
SG1995001399A SG44328A1 (en) 1993-04-07 1994-04-05 Method and apparatus for process control
PCT/GB1994/000720 WO1994023343A1 (en) 1993-04-07 1994-04-05 Method and apparatus for process control
CZ952571A CZ283292B6 (cs) 1993-04-07 1994-04-05 Způsob prohlížení optického matricového disku a zařízení k provádění tohoto způsobu
EP94911284A EP0695438A1 (en) 1993-04-07 1994-04-05 Method and apparatus for process control
BR9406451A BR9406451A (pt) 1993-04-07 1994-04-05 Método e aparelho para controle de processo
JP6521868A JPH08508602A (ja) 1993-04-07 1994-04-05 プロセス制御のための方法および装置
NZ263235A NZ263235A (en) 1993-04-07 1994-04-05 Optical investigation of photoresist development on optical recording master disk
RU95121761A RU2107893C1 (ru) 1993-04-07 1994-04-05 Способ исследования оптического диска оригинала и устройство для его осуществления
CA002159100A CA2159100A1 (en) 1993-04-07 1994-04-05 Method and apparatus for process control
HU9502729A HUT73543A (en) 1993-04-07 1994-04-05 Method and apparatus for process control
AU63841/94A AU675125B2 (en) 1993-04-07 1994-04-05 Method and apparatus for process control
CN94191725.8A CN1120866A (zh) 1993-04-07 1994-04-05 过程控制的方法和设备
TW083102979A TW255966B (fi) 1993-04-07 1994-04-06
IL109238A IL109238A (en) 1993-04-07 1994-04-06 Method and apparatus for process control
NO953933A NO953933L (no) 1993-04-07 1995-10-03 Fremgangsmåte og apparat for prosesstyring
FI954769A FI954769A0 (fi) 1993-04-07 1995-10-06 Menetelmä ja laite prosessivalvontaa varten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939307239A GB9307239D0 (en) 1993-04-07 1993-04-07 Method and apparatus for process control

Publications (1)

Publication Number Publication Date
GB9307239D0 true GB9307239D0 (en) 1993-06-02

Family

ID=10733474

Family Applications (1)

Application Number Title Priority Date Filing Date
GB939307239A Pending GB9307239D0 (en) 1993-04-07 1993-04-07 Method and apparatus for process control

Country Status (17)

Country Link
EP (1) EP0695438A1 (fi)
JP (1) JPH08508602A (fi)
CN (1) CN1120866A (fi)
AU (1) AU675125B2 (fi)
BR (1) BR9406451A (fi)
CA (1) CA2159100A1 (fi)
CZ (1) CZ283292B6 (fi)
FI (1) FI954769A0 (fi)
GB (1) GB9307239D0 (fi)
HU (1) HUT73543A (fi)
IL (1) IL109238A (fi)
NO (1) NO953933L (fi)
NZ (1) NZ263235A (fi)
RU (1) RU2107893C1 (fi)
SG (1) SG44328A1 (fi)
TW (1) TW255966B (fi)
WO (1) WO1994023343A1 (fi)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8576686B2 (en) 2005-01-25 2013-11-05 Cinram Group, Inc. Apparatus for multilevel optical recording
US8472020B2 (en) 2005-02-15 2013-06-25 Cinram Group, Inc. Process for enhancing dye polymer recording yields by pre-scanning coated substrate for defects
US7535806B2 (en) 2005-07-07 2009-05-19 Cinram International Inc. Apparatus and method for detecting laser dropout
EP1965383A1 (en) * 2007-03-02 2008-09-03 Singulus Mastering B.V. Diffraction order measurement

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857843U (ja) * 1981-10-16 1983-04-19 パイオニア株式会社 フオトレジスト湿式現像装置
JPS59121337A (ja) * 1982-12-24 1984-07-13 Fujitsu Ltd レジスト現像装置
EP0379281A3 (en) * 1989-01-19 1991-03-20 Cosmopolitan Textile Company Limited Web inspecting method and apparatus
JP2861073B2 (ja) * 1989-07-05 1999-02-24 ソニー株式会社 現像装置
US5124216A (en) * 1990-07-31 1992-06-23 At&T Bell Laboratories Method for monitoring photoresist latent images
JPH04141840A (ja) * 1990-10-01 1992-05-15 Matsushita Electric Ind Co Ltd フォトレジスト自動現像装置
JPH04311837A (ja) * 1991-04-10 1992-11-04 Tdk Corp 光ディスク原盤の現像方法
US5357304A (en) * 1992-03-25 1994-10-18 Sony Corporation Image development apparatus and method

Also Published As

Publication number Publication date
AU6384194A (en) 1994-10-24
HUT73543A (en) 1996-08-28
SG44328A1 (en) 1997-12-19
BR9406451A (pt) 1996-01-02
NO953933D0 (no) 1995-10-03
TW255966B (fi) 1995-09-01
CZ283292B6 (cs) 1998-02-18
FI954769A (fi) 1995-10-06
NO953933L (no) 1995-10-03
IL109238A (en) 1997-07-13
CN1120866A (zh) 1996-04-17
HU9502729D0 (en) 1995-11-28
IL109238A0 (en) 1994-07-31
FI954769A0 (fi) 1995-10-06
WO1994023343A1 (en) 1994-10-13
CZ257195A3 (en) 1996-09-11
RU2107893C1 (ru) 1998-03-27
NZ263235A (en) 1996-07-26
AU675125B2 (en) 1997-01-23
EP0695438A1 (en) 1996-02-07
JPH08508602A (ja) 1996-09-10
CA2159100A1 (en) 1994-10-13

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