EP0654145A1 - Capteur de champs magnetiques constitue d'un conducteur d'inversion magnetique et d'une ou plusieurs resistances magnetoresistives - Google Patents

Capteur de champs magnetiques constitue d'un conducteur d'inversion magnetique et d'une ou plusieurs resistances magnetoresistives

Info

Publication number
EP0654145A1
EP0654145A1 EP94920425A EP94920425A EP0654145A1 EP 0654145 A1 EP0654145 A1 EP 0654145A1 EP 94920425 A EP94920425 A EP 94920425A EP 94920425 A EP94920425 A EP 94920425A EP 0654145 A1 EP0654145 A1 EP 0654145A1
Authority
EP
European Patent Office
Prior art keywords
magnetic field
magnetoresistive
layer strips
field sensor
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP94920425A
Other languages
German (de)
English (en)
Inventor
Fritz Dettmann
Uwe Loreit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IMO Institut fur Mikrostrukturtechnologie und Optoelektronik eV
Original Assignee
IMO Institut fur Mikrostrukturtechnologie und Optoelektronik eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IMO Institut fur Mikrostrukturtechnologie und Optoelektronik eV filed Critical IMO Institut fur Mikrostrukturtechnologie und Optoelektronik eV
Publication of EP0654145A1 publication Critical patent/EP0654145A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices

Definitions

  • Magnetic field sensor made up of a magnetic reversal line and one or more magnetoresistive resistors
  • a method for eliminating zero drift in magnetoresistive sensor bridges is described in Technical Information 901 228 from Philips Components.
  • the magnetoresistive sensor bridge is placed in a wound coil.
  • Short current pulses in alternating directions through the spu generate enough magnetic field to set the self-magnetization of the magnetoresistive layer strips in the corresponding direction. Since the sensor sign changes its polarity when the direction of magnetization is reversed, the separation of the alternating component proportional to the magnetic field from the direct component means that the zero voltage of the sensor bridge also contains its drift.
  • the manufacture of such coils is expensive. Their inductance limits the measuring frequency.
  • the adjustment of the sensor elements in the coil is a complex operation, especially if all three magnetic field components are to be measured in a rough arrangement.
  • the object of the invention is to provide a magnetic field sensor with a minimal zero point drift, d can be produced inexpensively entirely in thin-film technology and in which restrictions i of the measurement frequency are not caused by the sensor element.
  • the object is achieved by the thin-film arrangements described in the claims.
  • a single magnetic field-dependent resistor which consists of one or more magnetoresistive layer strips, on a highly conductive thin-layer conductor strip perpendicular to its longitudinal direction.
  • the highly conductive thin-film conductor strip i, however, has a meandering structure. So that despite the alternating magnetic field direction alternating across the meandering stripes, a current arises which flows in the same direction in all sub-areas under the influence of a field to be measured.
  • meandering the hodüeitßhige Thin-layer conductor strip advantageously results in that only a small current is required for reversing the direction of magnetization.
  • the magnetic stray field outside the sensor chip is very small, since the magnetic fields of the meandering strips lying next to one another largely remain due to their opposite direction.
  • the magnetic field sensors can thus be operated in close proximity to one another.
  • the magnetic reversal conductor also has a very low inductance, so that the measuring frequency is no longer limited by it.
  • the magnetic field sensor When the magnetic field sensor is operated with a magnetoresistive resistor, a constant current is fed into this. The voltage at the magnetoresistive resistor is measured as the output signal. After a current pulse in a specific direction through the highly conductive thin-film conductor strip, the self-magnetization in the areas of the magnetoresistive resistance is defined in a certain way. In this state, the magnetic field to be measured causes an increase in the resistance value of the magnetoresistive resistor. The output voltage is therefore greater than i case free of magnetic fields. If a current pulse m in the opposite direction to the previous one is now fed into the highly conductive thin-film conductor strips, the directions d self-magnetizations are reversed.
  • the field to be measured thus reduces the resistance and the output voltage is smaller than in the case without a magnetic field.
  • an AC voltage is present at the output, the amplitude of which is proportional to the magnetic field to be measured. Any influences, such as the temperature, which lead to a slow dri of the resistance value of the magnetoresistive layer strip, have no influence on the AC output voltage. However, the decrease in the magnetoressitive effect with increasing temperature is noticeable in the output AC voltage ampute.
  • a further highly conductive layer strip is present under each magnetoresistive layer strip isolated in the same direction.
  • the current through this highly conductive layer strip is controlled by the sensor output voltage so that the applied z measuring magnetic field is just canceled by it.
  • the magnetoresistive magnetic field sensor acts as a zero detector.
  • the output variable of the arrangement is the size of the compensation current, which does not depend on the temperature of the arrangement. Likewise, non-linearities in the sensor characteristic no longer play a role, since the sensor is not controlled.
  • a single magnetoresistive resistor not only a single magnetoresistive resistor is used, but there are four parallel magnetoresistive resistors consisting of several areas above the thin-layer magnetizing conductor and the highly conductive compensation conductor, the areas of which alternate with Barber pole structures with alternating positive and negative angles
  • the longitudinal direction of the magnetoresistive layer strips are provided in such a way that they alternately begin with areas of positive and negative Barberpolst ⁇ ikturwinkel.
  • the vi resistors are connected to a Wheatstone bridge. If the magnetic reversal conductor is again operated in alternating pulses in the opposite direction, an AC voltage signal appears at the bridge output. Only a DC voltage signal is now superimposed on this, which results from d possibly unequal four resistance values of the bridge. However, this DC voltage component i is significantly lower than that when using a single resistor, which enables simple evaluation. Of course, the compensation of the magnetic field to be measured can also be used hi.
  • the bridge arrangement can consist of four resistors, all of which are formed from an even number of regions. Only the order of the angle of the barber pole structure changes from one resistance to another.
  • the magnetization direction is set in the areas by a first strong current pulse through the ummagnetization conductor.
  • the sensor bridge is thus sensitive to magnetic fields and can be used in the usual way without further magnetic reversal. Since all four resistors of the bridge consist of the same areas, the same changes can be expected in all resistors when the temperature of the sensor arrangement changes. This also applies to the proportion of change that arises from the variable layer tensions and, as a result, from magnetostriction.
  • the sensor bridge therefore has a reduced zero point drift compared to known sensor bridge arrangements and is therefore also suitable for measuring smaller fields in normal operation.
  • FIG. 1 shows a magnetoresistive resistor over a flat magnetic reversal conductor.
  • FIG. 2 shows how a flat compensation conductor is additionally arranged.
  • Figure 3 contains a complex arrangement with sensor bridge, magnetic reversal conductor and compensation conductor.
  • FIG. 1 shows a meandered, highly conductive, flat thin-film conductor 6, which is located on a layer support, into which a current IM can be fed when connected at both ends.
  • Areas 1 of magnetoresistive layer strips with their longitudinal direction perpendicular to the meander strips of the thin layer conductor 6 are insulated above this thin layer conductor 6.
  • Barber pole structures are located on the areas 1 of the magnetoresistive layer strips, which alternately form a negative angle 3 and a positive angle 4 with the longitudinal direction of the areas 1.
  • the areas 1 are all electrically connected in series by means of highly conductive, non-magnetic connections 2, so that a single resistor is present.
  • the series connection is electrical at the contact surfaces 5 connectable.
  • a constant current is fed in during operation of the magnetic field sensor.
  • the magnetization directions in the areas 1 are set as indicated by the corresponding arrows.
  • An external magnetic field H g to be measured causes an increase in the resistance value in all areas 1 compared to the field-free state in the magnetization directions shown.
  • a current pulse in the opposite direction through the magnetic reversal conductor 6 rotates the magnetizations of all areas 1 in the opposite direction.
  • the external magnetic field H g thus causes a decrease in resistance.
  • an alternating voltage can be tapped off the magnetoresistive resistor, the amplitude of which is proportional to the magnetic field strength of H. A certain minimum field strength is required to remagnetize the magnetoresistive areas.
  • the field strength that is generated by the re-magnetization current is inversely proportional to the width of the thin-film conductor.
  • the meandering significantly reduces the width and thus drastically reduces the current value required for magnetic reversal.
  • a high resistance value can easily be achieved. Since the change in resistance is proportional to the resistance value and this in turn is included as a proportionality factor in the AC output voltage, a high output voltage amplitude is also ensured.
  • the fact that the magnetoresistive resistance through the connections is also in the form of a meander has the advantage that the sensor element can be accommodated on a chip surface of small dimensions.
  • the arrangement shown in FIG. 2 differs from that in FIG. 1 only by an additional, highly conductive layer meander 7, which is arranged under the magnetoresistive regions 1.
  • the magnetic field of the current 1 ⁇ through this meander 7 is directed against the external magnetic field H g at the location of the areas 1.
  • a signal can be derived from the AC output voltage of the magnetoresistive resistor, which ensures that the current 1 ⁇ is set precisely to such a value that the external magnetic field at the location of the regions 1 is eliminated.
  • the compensation current Ij ⁇ set in this way now represents the sensor output signal.
  • the magnetoresistive resistor now only acts as a zero detector. Temperature dependencies and non-linearities in its characteristic are thus eliminated.
  • regions 1 of the magnetoresistive resistors are connected to one another by connecting lines 2 and 10 in such a way that a bridge is created.
  • the contact surfaces 8 are provided for the bridge operating voltage, the contact surfaces 9 for the bridge output voltage.
  • a magnetic reversal conductor 6 and a compensation line 7 are also present here, as in FIG. 2. Compensation of the external magnetic field to be measured is of course also possible here if the alternating voltage signal of the bridge output is used to regulate the current 1 ⁇ .
  • each bridge resistor consists of an even number of regions 1. The only difference is the angle of the barber pole structures of the regions 1 located next to one another. Bridge resistors are therefore composed of completely identical components. Temperature changes, the resistances will also change by the same values.

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)

Abstract

Un capteur qui fonctionne sur la base de l'effet de magnétorésistance contient un conducteur sinueux d'inversion magnétique (6) intégré dans le dispositif à couche mince. Les bandes qui forment la couche magnétorésistive sont pourvues de zones (1) ayant une structure à zébrures (3) inclinées alternativement positives et négatives, adaptées à la structure sinueuse du conducteur. Le courant requis pour inverser l'aimantation des zones (1) est particulièrement faible. Par inversion magnétique périodique des zones (1), on obtient comme signal de sortie du capteur une tension alternative exempte de dérive. Cette absence de dérive constitue une condition préalable d'utilisation du capteur de champs magnétiques pour mesurer avec précision de faibles champs magnétiques.
EP94920425A 1993-06-09 1994-05-31 Capteur de champs magnetiques constitue d'un conducteur d'inversion magnetique et d'une ou plusieurs resistances magnetoresistives Withdrawn EP0654145A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4319146 1993-06-09
DE4319146A DE4319146C2 (de) 1993-06-09 1993-06-09 Magnetfeldsensor, aufgebaut aus einer Ummagnetisierungsleitung und einem oder mehreren magnetoresistiven Widerständen
PCT/EP1994/001789 WO1994029740A1 (fr) 1993-06-09 1994-05-31 Capteur de champs magnetiques constitue d'un conducteur d'inversion magnetique et d'une ou plusieurs resistances magnetoresistives

Publications (1)

Publication Number Publication Date
EP0654145A1 true EP0654145A1 (fr) 1995-05-24

Family

ID=6489983

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94920425A Withdrawn EP0654145A1 (fr) 1993-06-09 1994-05-31 Capteur de champs magnetiques constitue d'un conducteur d'inversion magnetique et d'une ou plusieurs resistances magnetoresistives

Country Status (5)

Country Link
US (1) US5521501A (fr)
EP (1) EP0654145A1 (fr)
JP (1) JP3465059B2 (fr)
DE (1) DE4319146C2 (fr)
WO (1) WO1994029740A1 (fr)

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JPH08503778A (ja) 1996-04-23
DE4319146A1 (de) 1994-12-15
JP3465059B2 (ja) 2003-11-10
US5521501A (en) 1996-05-28
DE4319146C2 (de) 1999-02-04
WO1994029740A1 (fr) 1994-12-22

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