EP0550810A2 - Doppelmembranpumpe - Google Patents
Doppelmembranpumpe Download PDFInfo
- Publication number
- EP0550810A2 EP0550810A2 EP92118863A EP92118863A EP0550810A2 EP 0550810 A2 EP0550810 A2 EP 0550810A2 EP 92118863 A EP92118863 A EP 92118863A EP 92118863 A EP92118863 A EP 92118863A EP 0550810 A2 EP0550810 A2 EP 0550810A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- diaphragm pump
- double diaphragm
- pump according
- product
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012528 membrane Substances 0.000 claims abstract description 32
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 239000011324 bead Substances 0.000 claims description 32
- 230000010349 pulsation Effects 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 7
- 239000002033 PVDF binder Substances 0.000 claims description 3
- 229920001971 elastomer Polymers 0.000 claims description 3
- 239000000806 elastomer Substances 0.000 claims description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 claims description 3
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 230000003068 static effect Effects 0.000 abstract description 2
- 239000002537 cosmetic Substances 0.000 abstract 1
- 210000004379 membrane Anatomy 0.000 description 31
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 230000036316 preload Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
- F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
- F04B43/0736—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
- F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
- F04B9/12—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air
- F04B9/129—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers
- F04B9/131—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers with two mechanically connected pumping members
- F04B9/135—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers with two mechanically connected pumping members reciprocating movement of the pumping members being obtained by two single-acting elastic-fluid motors, each acting in one direction
Definitions
- the invention relates to a double diaphragm pump with two diaphragms, a control slide which is displaceable as a function of the diaphragm movement and an actuating element which is dependent on the diaphragm movement.
- Such a double diaphragm pump is described in German Offenlegungsschrift 33 10 131.
- the two diaphragms are connected to each other by a coupling rod and the pressure medium chambers are in the area between the diaphragms, while the product chambers are outside.
- the actuating element is arranged parallel to the coupling rod and consists of an axially displaceable rod which protrudes from the control slide housing and is arranged coaxially in the control slide.
- This rod acts in both directions via a compression spring on the control slide, which is held in its end positions by spring-loaded locking balls until the force of the spring arranged coaxially on the actuating rod exceeds the locking force.
- the spool driven by spring force, then swings into the opposite control position and reverses the diaphragm movement. In this way, the control slide is moved back and forth between two stable end positions.
- the membrane is also sealed by a simple annular bead, which is intended to ensure both a radial mounting and a seal. This is unsatisfactory, since the membrane is highly stressed in this area and the bead does not guarantee perfect retention and sealing in the long term when using a flowable membrane material such as PTFE.
- the invention is therefore based on the object of creating a double diaphragm pump for conveying high-purity products which ensures the lowest possible amount of abrasion; it should also have the smallest possible surface in contact with the product and no sliding seal in the area of the flow and preferably also ensure improved retention and sealing of the membrane.
- the solution is a double diaphragm pump with a central housing, two product chambers and two product chambers against coaxial Diaphragms sealing pressure medium chambers, outwardly guided piston rods and a preferably bow-shaped external connection between the piston rods of the diaphragms, preferably an outer cross member, and a control block for the mutual, controlled loading of the pressure medium chambers with the conveyed medium, which can be provided with a control slide actuated by the diaphragm movement.
- the product chambers are located in the central housing, are sealed off from the outside by the diaphragm, and the diaphragms are acted upon alternately by pressure medium chambers which are sealed off from the product chambers.
- the two membranes are mechanically connected to one another via the bow-shaped outer cross member, so that there is no longer any connection between the membranes which is passed through the central housing to the product chambers.
- the product chambers are directly adjacent and only separated from one another by a wall of the central housing which resists the pressure difference between the product chambers and allows at least the suction and pressure channels to be accommodated.
- a pressurized pulsation damper can be connected to the pressure side of the pressure valves, which can be equipped with a diaphragm of the same type as the double diaphragm pump. This results in only two parts of the housing that come into contact with the product, namely the central housing and the pulsation damper housing, which have no sharp edges or dead spaces in which particles could be deposited.
- All parts that come into contact with the product can be made of solid PTFE-TFM, while all parts that do not come into contact with the product, such as the housing cover, control block, pulsation damper housing cover and end cover including the tie rod nuts, can be made of solid PVDF. Therefore, acidic or solvent-containing vapors cannot harm the outer parts, the entire double diaphragm pump is corrosion-resistant against all media that are used in the semiconductor industry.
- the inner parts of the double diaphragm pump which are not in contact with the product, can consist of PETP, POM, PTFE-PPS, while highly stressed components such as tie rods and the bow-shaped outer crossmember can consist of EP resin 60 GF.
- the membrane can have two opposite, radial directions on its outer circumference have staggered ring beads, one of which is designed as a groove bead with a clamping ring inserted into the groove. In this way, the surface in contact with the product can be made flat, flat and uniform and has no internal indentations in which particles could be deposited. There is also only one sealing surface to the central housing.
- the groove bead advantageously has a larger one Radius than the ring bead and the groove is open axially in the direction of the ring bead.
- a clamping ring is inserted into the groove, which preferably consists of an elastomer with a high Shore hardness, wherein the ring beads can preferably have a rectangular cross section.
- the tension ring can have an axial height corresponding to the depth of the groove in the groove bead and the height of the ring bead, wherein the ring bead and the tension ring can be arranged side by side in the same ring groove of the housing.
- the membrane is constantly pressed against the central housing by the clamping ring. Two of the three surfaces work radially; they are independent of the tension level of the tie rods, and one acts axially for the greatest possible safety. When the housing cover is removed, the membranes in the central housing remain firmly and sealingly and thus protect the product being conveyed.
- the sealing is done with the tension ring inserted in the groove and the two large concentric ring surfaces of the membranes to the housing. These ring surfaces are always pressed constant by the clamping ring arranged between them regardless of the axial preload of the pump. Even an axial gap of up to one millimeter between the housing parts does not lead to leaks or tearing out of the membranes. The maintenance and monitoring of the axial preload is no longer necessary.
- the double diaphragm pump has a central housing in which suction valves 2, pressure valves 3 and a suction connection 4 are arranged. Furthermore, coaxial product chambers 6 are arranged in the central housing 1 and are connected to the suction valves 2 and the pressure valves 3. Each product chamber 6 is closed by a membrane 7, which forms a pressure medium chamber 8 in relation to a housing 12 screwed to the central housing 1.
- annular beads 9, 10 are arranged, which are offset radially to one another.
- the annular bead 9 lies in a corresponding annular groove of the housing cover 12, while the annular bead 10 is arranged in a corresponding annular groove in the central housing 1 and has a circumferential open groove which is directed axially towards the annular bead 9 and into which a clamping ring 11 made of an elastomer with a high Shore Hardness is inserted.
- the housing cover 12 are braced against the central housing 1 by means of tie rods 23 and nuts 24.
- a piston rod 13 is screwed into the central central region of the membrane 7, which is guided in a guide 15 of the housing cover 12 by means of a bushing 14 and is sealed by means of a seal 16.
- the coaxial piston rods 13 of the adjacent coaxial membranes 7 are positively connected to one another via a bow-shaped cross member 17 connected. In the position shown, the membrane 7 bears against the housing cover 12, so that the piston rod 13 with the outer cross member 17 is in the extreme right position.
- the left diaphragm, not shown, is likewise moved to the right via the outer cross member 17 and practically fills the product chamber 6.
- the pressure medium chamber 8 is pressurized with compressed air via the compressed air channel 22
- the product located in the product chamber 6 is displaced and conveyed, while the left-hand product chamber, which is now enlarging, sucks in.
- the oscillating pump movement of the membranes 7 is alternately controlled by means of a control slide 20 arranged in a control block 19.
- This control slide 20 is controlled by the movement of the diaphragms 7 by means of an actuating rod 21, which is connected to the outer cross member 17 via an actuating pin 18.
- the control block 19 with the control slide 20 can be designed as described in the German patent application P 41 06 180.2-15.
- a pulsation damper housing 25 is screwed to the side of the central housing 1 and is sealed off from the pressure valves 3 by means of seals 26.
- a pressure chamber 27 which is closed by a membrane 28.
- This membrane 28 is designed like the membrane 7 and in the same way by annular beads 9, 10 between the pulsation damper housing 25 and a pulsation damper housing cover 30 clamped and sealed.
- a compressed air connection 31 leads to the pressure medium chamber 29.
- a piston rod 32 which is guided via seals 33 in the pulsation damper housing cover 30, serves to guide the diaphragm 28 when it moves to compensate for the fluctuations in the delivery rate under the action of the compressed air supplied via the connection 31.
- the pulsation damper housing cover 30 and the pulsation damper housing 25 are connected to the central housing 1 via tie rods 36 by means of sealed cap nuts 37.
- End covers 38 are placed over the bow-shaped outer cross member 17, and the control block 19 is supplied with compressed air as the conveying medium via a compressed air connection 34.
- the double diaphragm pump according to the invention can be designed to be completely metal-free, so that the formation of metal ions is reliably avoided and thus a risk to microcomponents in the electrical industry is excluded.
- the components in contact with the product are made of solid PTFE-TFM, while all the outer, non-product-contacting parts, such as the housing cover 12, control block 19, pulsation damper housing cover 30, end cover 38 solid PVDF are made.
- the inner parts that are not in contact with the product are made of PETP, POM or PTFE-PPS, while all highly stressed components such as tie rods 23, 36, piston rods 13, 32 and the outer cross member 17 are made of EP resin GF.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4136805A DE4136805A1 (de) | 1991-11-08 | 1991-11-08 | Doppelmembranpumpe |
DE4136805 | 1991-11-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0550810A2 true EP0550810A2 (de) | 1993-07-14 |
EP0550810A3 EP0550810A3 (enrdf_load_stackoverflow) | 1994-03-23 |
Family
ID=6444374
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92118863A Withdrawn EP0550810A2 (de) | 1991-11-08 | 1992-11-04 | Doppelmembranpumpe |
Country Status (4)
Country | Link |
---|---|
US (1) | US5261798A (enrdf_load_stackoverflow) |
EP (1) | EP0550810A2 (enrdf_load_stackoverflow) |
JP (1) | JPH05240161A (enrdf_load_stackoverflow) |
DE (1) | DE4136805A1 (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150085791A (ko) * | 2014-01-16 | 2015-07-24 | 잉 린 카이 | 압축 다이아프램 펌프에 대한 진동-저감 방법 |
CN105090006A (zh) * | 2014-05-20 | 2015-11-25 | 蔡应麟 | 五增压腔隔膜泵的减震构造 |
CN105090007A (zh) * | 2014-05-20 | 2015-11-25 | 蔡应麟 | 四增压腔隔膜泵的减震构造 |
CN105089988A (zh) * | 2014-05-20 | 2015-11-25 | 蔡应麟 | 四增压腔隔膜泵的减震构造与摆轮结构改良 |
KR20230031679A (ko) * | 2021-08-27 | 2023-03-07 | 주식회사 이노디스 | 벨로우즈 펌프 |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5699934A (en) * | 1996-01-29 | 1997-12-23 | Universal Instruments Corporation | Dispenser and method for dispensing viscous fluids |
DE19638722C1 (de) * | 1996-09-21 | 1998-04-16 | Almatec Maschinenbau Gmbh | Doppelmembranpumpe |
DE19738779C2 (de) * | 1997-09-04 | 2003-06-12 | Almatec Maschb Gmbh | Umsteuersystem für eine druckgetriebene Membranpumpe |
FR2768190B1 (fr) * | 1997-09-10 | 1999-10-08 | Peugeot | Dispositif de transmission de pression et/ou de volume pour une pompe |
US5957153A (en) * | 1998-09-18 | 1999-09-28 | Frey Turbodynamics, Ltd. | Oscillating dual bladder balanced pressure proportioning pump system |
US6695593B1 (en) | 1998-10-05 | 2004-02-24 | Trebor International, Inc. | Fiber optics systems for high purity pump diagnostics |
US6106246A (en) | 1998-10-05 | 2000-08-22 | Trebor International, Inc. | Free-diaphragm pump |
US6957952B1 (en) | 1998-10-05 | 2005-10-25 | Trebor International, Inc. | Fiber optic system for detecting pump cycles |
DE19915773A1 (de) * | 1999-04-08 | 2000-10-12 | Laing Oliver | Hydraulisch bewegtes Dreiwegeventil |
DE10044868A1 (de) * | 2000-09-12 | 2002-04-04 | Almatec Maschb Gmbh | System zum Kreislauffördern von Medien |
JP3542990B2 (ja) * | 2001-12-05 | 2004-07-14 | 株式会社ヤマダコーポレーション | ダイヤフラムポンプ装置 |
JP3749717B2 (ja) * | 2003-04-03 | 2006-03-01 | 株式会社ヤマダコーポレーション | 往復動式流体移送ポンプ |
US7134849B1 (en) | 2003-04-22 | 2006-11-14 | Trebor International, Inc. | Molded disposable pneumatic pump |
US8197231B2 (en) | 2005-07-13 | 2012-06-12 | Purity Solutions Llc | Diaphragm pump and related methods |
US20070134112A1 (en) * | 2005-12-14 | 2007-06-14 | Hupp Evan L | Button diaphragm piston pump |
DE102007005019A1 (de) * | 2006-05-18 | 2007-12-06 | Continental Teves Ag & Co. Ohg | Membranpumpe |
US8017409B2 (en) | 2009-05-29 | 2011-09-13 | Ecolab Usa Inc. | Microflow analytical system |
US8932031B2 (en) | 2010-11-03 | 2015-01-13 | Xylem Ip Holdings Llc | Modular diaphragm pumping system |
US9273686B2 (en) * | 2012-01-31 | 2016-03-01 | Schlumberger Technology Corporation | Pre-charging pump chamber by preemptively opening a valve |
US9610392B2 (en) | 2012-06-08 | 2017-04-04 | Fresenius Medical Care Holdings, Inc. | Medical fluid cassettes and related systems and methods |
DE102014222743A1 (de) * | 2014-11-06 | 2016-05-12 | Continental Automotive Gmbh | Pumpeneinheit für Reduktionsmittel einer Abgasreinigungsanlage |
CN107246376A (zh) * | 2017-07-12 | 2017-10-13 | 浙江卡韦德新能源科技有限公司 | 柴油发动机尾气处理尿素泵的膜片总成 |
US20190323625A1 (en) | 2018-04-23 | 2019-10-24 | Rain Bird Corporation | Valve With Reinforcement Ports And Manually Removable Scrubber |
DE102020209594B3 (de) * | 2020-07-30 | 2021-12-30 | Festo Se & Co. Kg | Fluidgerät |
US11746771B2 (en) * | 2021-04-16 | 2023-09-05 | Teryair Equipment Pvt. Ltd. | Actuator valve of an air operated double diaphragm pump |
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US2711134A (en) * | 1950-07-26 | 1955-06-21 | Infilco Inc | Chemical feeder |
US2667129A (en) * | 1952-06-19 | 1954-01-26 | Dorr Co | Twin diaphragm pump with stressrelieved diaphragms |
DE1017914B (de) * | 1955-09-03 | 1957-10-17 | Franz Schoettke | Membran fuer Foerderpumpen |
US2850981A (en) * | 1956-03-08 | 1958-09-09 | Tobin Arp Mfg Company | Hydraulic pump |
FR1418442A (fr) * | 1964-11-30 | 1965-11-19 | Annovi & Reverberi | Dispositif destiné à éviter la rupture de la membrane dans les pompes à circuit oléodynamique avec piston à étanchéité pour liquides de tous genres |
US3276389A (en) * | 1965-08-06 | 1966-10-04 | Panther Pump & Equipment Co In | Balanced pressure pump |
DE1503390C3 (de) * | 1965-12-31 | 1975-08-07 | Robert Bosch Gmbh, 7000 Stuttgart | Membranpumpe |
US3461808A (en) * | 1967-07-03 | 1969-08-19 | Wood John Co | Diaphragm hand pumps |
JPS5669444A (en) * | 1979-11-12 | 1981-06-10 | Mikuni Kogyo Co Ltd | Accelerating pump |
GB2079858A (en) * | 1980-07-09 | 1982-01-27 | Patay Pumps Ltd | Diaphragm pump |
JPS5857566A (ja) * | 1981-10-02 | 1983-04-05 | Asahi Organic Chem Ind Co Ltd | バタフライバルブ |
DE3310131A1 (de) * | 1983-03-21 | 1984-09-27 | DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf | Umsteuerventileinsatz fuer eine druckluftgetriebene doppelmembranpumpe |
JPS59185884A (ja) * | 1983-04-07 | 1984-10-22 | Yamada Yuki Seizo Kk | ダイアフラムポンプ |
JPS60501585A (ja) * | 1983-05-06 | 1985-09-19 | ミリコム・インコ−ポレイテツド | メツセ−ジメモリを有するメツセ−ジ通信システム |
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GB2162591B (en) * | 1984-08-02 | 1988-05-25 | Shoketsu Kinzoku Kogyo Kk | Fluid pressure booster |
JPS61160666A (ja) * | 1984-12-29 | 1986-07-21 | Nippon Valqua Ind Ltd | ダイアフラムおよびその製造方法 |
JPS61202685U (enrdf_load_stackoverflow) * | 1985-06-07 | 1986-12-19 | ||
JPS624967A (ja) * | 1985-06-28 | 1987-01-10 | Hino Motors Ltd | 薄膜成形ダイアフラムおよびエア・シリンダ |
DE8525733U1 (de) * | 1985-09-10 | 1987-01-15 | Becker, Erich, 7812 Bad Krozingen | Membranpumpe |
JPS62131988A (ja) * | 1985-12-04 | 1987-06-15 | Nippon Valqua Ind Ltd | ダイアフラムポンプ |
JPH0139920Y2 (enrdf_load_stackoverflow) * | 1986-04-04 | 1989-11-30 | ||
US4836756A (en) * | 1986-08-28 | 1989-06-06 | Nippon Pillar Packing Co., Ltd. | Pneumatic pumping device |
DE8702941U1 (de) * | 1987-02-26 | 1987-05-07 | DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf | Doppelmembranpumpe |
JP2518842B2 (ja) * | 1987-04-30 | 1996-07-31 | 富士通株式会社 | 高温薬液移送用圧縮空気駆動二連ダイヤフラムポンプ |
US4854832A (en) * | 1987-08-17 | 1989-08-08 | The Aro Corporation | Mechanical shift, pneumatic assist pilot valve for diaphragm pump |
JP2544399B2 (ja) * | 1987-09-22 | 1996-10-16 | 山田油機製造 株式会社 | ダイアフラムポンプの圧力チャンバ― |
FR2624922B1 (fr) * | 1987-12-17 | 1990-04-27 | Milton Roy Dosapro | Dispositif de detection de rupture d'une membrane de pompe a membrane |
DE3824780A1 (de) * | 1988-07-21 | 1990-01-25 | Lechler Elring Dichtungswerke | Kolben, insbesondere tauchkolben fuer kompressoren |
US4887516A (en) * | 1988-09-13 | 1989-12-19 | American Standard Inc. | Clamping arrangement for diaphragm piston assembly |
DE4003101A1 (de) * | 1990-02-02 | 1991-08-08 | Karl Eickmann | Hochdruck aggregat |
JPH04101078A (ja) * | 1990-08-17 | 1992-04-02 | Matsushita Electric Ind Co Ltd | 密閉型圧縮機 |
-
1991
- 1991-11-08 DE DE4136805A patent/DE4136805A1/de active Granted
-
1992
- 1992-10-29 US US07/968,095 patent/US5261798A/en not_active Expired - Fee Related
- 1992-11-04 EP EP92118863A patent/EP0550810A2/de not_active Withdrawn
- 1992-11-06 JP JP4297272A patent/JPH05240161A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150085791A (ko) * | 2014-01-16 | 2015-07-24 | 잉 린 카이 | 압축 다이아프램 펌프에 대한 진동-저감 방법 |
CN105090006A (zh) * | 2014-05-20 | 2015-11-25 | 蔡应麟 | 五增压腔隔膜泵的减震构造 |
CN105090007A (zh) * | 2014-05-20 | 2015-11-25 | 蔡应麟 | 四增压腔隔膜泵的减震构造 |
CN105089988A (zh) * | 2014-05-20 | 2015-11-25 | 蔡应麟 | 四增压腔隔膜泵的减震构造与摆轮结构改良 |
KR20150133635A (ko) * | 2014-05-20 | 2015-11-30 | 잉 린 카이 | 4개-압축-챔버 다이아프램 펌프에 대한 진동-저감 구조 |
CN105089988B (zh) * | 2014-05-20 | 2018-11-16 | 蔡应麟 | 四增压腔隔膜泵的减震构造与摆轮结构的组合 |
KR20230031679A (ko) * | 2021-08-27 | 2023-03-07 | 주식회사 이노디스 | 벨로우즈 펌프 |
KR102537942B1 (ko) | 2021-08-27 | 2023-05-31 | 주식회사 이노디스 | 벨로우즈 펌프 |
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US5261798A (en) | 1993-11-16 |
EP0550810A3 (enrdf_load_stackoverflow) | 1994-03-23 |
JPH05240161A (ja) | 1993-09-17 |
DE4136805C2 (enrdf_load_stackoverflow) | 1993-08-12 |
DE4136805A1 (de) | 1993-05-13 |
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