EP0550810A2 - Double diaphragm pump - Google Patents

Double diaphragm pump Download PDF

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Publication number
EP0550810A2
EP0550810A2 EP92118863A EP92118863A EP0550810A2 EP 0550810 A2 EP0550810 A2 EP 0550810A2 EP 92118863 A EP92118863 A EP 92118863A EP 92118863 A EP92118863 A EP 92118863A EP 0550810 A2 EP0550810 A2 EP 0550810A2
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EP
European Patent Office
Prior art keywords
diaphragm pump
double diaphragm
pump according
product
groove
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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EP92118863A
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German (de)
French (fr)
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EP0550810A3 (en
Inventor
Dirk Budde
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Almatec Technische Innovationen GmbH
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Almatec Technische Innovationen GmbH
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Publication of EP0550810A2 publication Critical patent/EP0550810A2/en
Publication of EP0550810A3 publication Critical patent/EP0550810A3/xx
Withdrawn legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/0736—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/12—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air
    • F04B9/129—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers
    • F04B9/131—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers with two mechanically connected pumping members
    • F04B9/135—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers with two mechanically connected pumping members reciprocating movement of the pumping members being obtained by two single-acting elastic-fluid motors, each acting in one direction

Definitions

  • the invention relates to a double diaphragm pump with two diaphragms, a control slide which is displaceable as a function of the diaphragm movement and an actuating element which is dependent on the diaphragm movement.
  • Such a double diaphragm pump is described in German Offenlegungsschrift 33 10 131.
  • the two diaphragms are connected to each other by a coupling rod and the pressure medium chambers are in the area between the diaphragms, while the product chambers are outside.
  • the actuating element is arranged parallel to the coupling rod and consists of an axially displaceable rod which protrudes from the control slide housing and is arranged coaxially in the control slide.
  • This rod acts in both directions via a compression spring on the control slide, which is held in its end positions by spring-loaded locking balls until the force of the spring arranged coaxially on the actuating rod exceeds the locking force.
  • the spool driven by spring force, then swings into the opposite control position and reverses the diaphragm movement. In this way, the control slide is moved back and forth between two stable end positions.
  • the membrane is also sealed by a simple annular bead, which is intended to ensure both a radial mounting and a seal. This is unsatisfactory, since the membrane is highly stressed in this area and the bead does not guarantee perfect retention and sealing in the long term when using a flowable membrane material such as PTFE.
  • the invention is therefore based on the object of creating a double diaphragm pump for conveying high-purity products which ensures the lowest possible amount of abrasion; it should also have the smallest possible surface in contact with the product and no sliding seal in the area of the flow and preferably also ensure improved retention and sealing of the membrane.
  • the solution is a double diaphragm pump with a central housing, two product chambers and two product chambers against coaxial Diaphragms sealing pressure medium chambers, outwardly guided piston rods and a preferably bow-shaped external connection between the piston rods of the diaphragms, preferably an outer cross member, and a control block for the mutual, controlled loading of the pressure medium chambers with the conveyed medium, which can be provided with a control slide actuated by the diaphragm movement.
  • the product chambers are located in the central housing, are sealed off from the outside by the diaphragm, and the diaphragms are acted upon alternately by pressure medium chambers which are sealed off from the product chambers.
  • the two membranes are mechanically connected to one another via the bow-shaped outer cross member, so that there is no longer any connection between the membranes which is passed through the central housing to the product chambers.
  • the product chambers are directly adjacent and only separated from one another by a wall of the central housing which resists the pressure difference between the product chambers and allows at least the suction and pressure channels to be accommodated.
  • a pressurized pulsation damper can be connected to the pressure side of the pressure valves, which can be equipped with a diaphragm of the same type as the double diaphragm pump. This results in only two parts of the housing that come into contact with the product, namely the central housing and the pulsation damper housing, which have no sharp edges or dead spaces in which particles could be deposited.
  • All parts that come into contact with the product can be made of solid PTFE-TFM, while all parts that do not come into contact with the product, such as the housing cover, control block, pulsation damper housing cover and end cover including the tie rod nuts, can be made of solid PVDF. Therefore, acidic or solvent-containing vapors cannot harm the outer parts, the entire double diaphragm pump is corrosion-resistant against all media that are used in the semiconductor industry.
  • the inner parts of the double diaphragm pump which are not in contact with the product, can consist of PETP, POM, PTFE-PPS, while highly stressed components such as tie rods and the bow-shaped outer crossmember can consist of EP resin 60 GF.
  • the membrane can have two opposite, radial directions on its outer circumference have staggered ring beads, one of which is designed as a groove bead with a clamping ring inserted into the groove. In this way, the surface in contact with the product can be made flat, flat and uniform and has no internal indentations in which particles could be deposited. There is also only one sealing surface to the central housing.
  • the groove bead advantageously has a larger one Radius than the ring bead and the groove is open axially in the direction of the ring bead.
  • a clamping ring is inserted into the groove, which preferably consists of an elastomer with a high Shore hardness, wherein the ring beads can preferably have a rectangular cross section.
  • the tension ring can have an axial height corresponding to the depth of the groove in the groove bead and the height of the ring bead, wherein the ring bead and the tension ring can be arranged side by side in the same ring groove of the housing.
  • the membrane is constantly pressed against the central housing by the clamping ring. Two of the three surfaces work radially; they are independent of the tension level of the tie rods, and one acts axially for the greatest possible safety. When the housing cover is removed, the membranes in the central housing remain firmly and sealingly and thus protect the product being conveyed.
  • the sealing is done with the tension ring inserted in the groove and the two large concentric ring surfaces of the membranes to the housing. These ring surfaces are always pressed constant by the clamping ring arranged between them regardless of the axial preload of the pump. Even an axial gap of up to one millimeter between the housing parts does not lead to leaks or tearing out of the membranes. The maintenance and monitoring of the axial preload is no longer necessary.
  • the double diaphragm pump has a central housing in which suction valves 2, pressure valves 3 and a suction connection 4 are arranged. Furthermore, coaxial product chambers 6 are arranged in the central housing 1 and are connected to the suction valves 2 and the pressure valves 3. Each product chamber 6 is closed by a membrane 7, which forms a pressure medium chamber 8 in relation to a housing 12 screwed to the central housing 1.
  • annular beads 9, 10 are arranged, which are offset radially to one another.
  • the annular bead 9 lies in a corresponding annular groove of the housing cover 12, while the annular bead 10 is arranged in a corresponding annular groove in the central housing 1 and has a circumferential open groove which is directed axially towards the annular bead 9 and into which a clamping ring 11 made of an elastomer with a high Shore Hardness is inserted.
  • the housing cover 12 are braced against the central housing 1 by means of tie rods 23 and nuts 24.
  • a piston rod 13 is screwed into the central central region of the membrane 7, which is guided in a guide 15 of the housing cover 12 by means of a bushing 14 and is sealed by means of a seal 16.
  • the coaxial piston rods 13 of the adjacent coaxial membranes 7 are positively connected to one another via a bow-shaped cross member 17 connected. In the position shown, the membrane 7 bears against the housing cover 12, so that the piston rod 13 with the outer cross member 17 is in the extreme right position.
  • the left diaphragm, not shown, is likewise moved to the right via the outer cross member 17 and practically fills the product chamber 6.
  • the pressure medium chamber 8 is pressurized with compressed air via the compressed air channel 22
  • the product located in the product chamber 6 is displaced and conveyed, while the left-hand product chamber, which is now enlarging, sucks in.
  • the oscillating pump movement of the membranes 7 is alternately controlled by means of a control slide 20 arranged in a control block 19.
  • This control slide 20 is controlled by the movement of the diaphragms 7 by means of an actuating rod 21, which is connected to the outer cross member 17 via an actuating pin 18.
  • the control block 19 with the control slide 20 can be designed as described in the German patent application P 41 06 180.2-15.
  • a pulsation damper housing 25 is screwed to the side of the central housing 1 and is sealed off from the pressure valves 3 by means of seals 26.
  • a pressure chamber 27 which is closed by a membrane 28.
  • This membrane 28 is designed like the membrane 7 and in the same way by annular beads 9, 10 between the pulsation damper housing 25 and a pulsation damper housing cover 30 clamped and sealed.
  • a compressed air connection 31 leads to the pressure medium chamber 29.
  • a piston rod 32 which is guided via seals 33 in the pulsation damper housing cover 30, serves to guide the diaphragm 28 when it moves to compensate for the fluctuations in the delivery rate under the action of the compressed air supplied via the connection 31.
  • the pulsation damper housing cover 30 and the pulsation damper housing 25 are connected to the central housing 1 via tie rods 36 by means of sealed cap nuts 37.
  • End covers 38 are placed over the bow-shaped outer cross member 17, and the control block 19 is supplied with compressed air as the conveying medium via a compressed air connection 34.
  • the double diaphragm pump according to the invention can be designed to be completely metal-free, so that the formation of metal ions is reliably avoided and thus a risk to microcomponents in the electrical industry is excluded.
  • the components in contact with the product are made of solid PTFE-TFM, while all the outer, non-product-contacting parts, such as the housing cover 12, control block 19, pulsation damper housing cover 30, end cover 38 solid PVDF are made.
  • the inner parts that are not in contact with the product are made of PETP, POM or PTFE-PPS, while all highly stressed components such as tie rods 23, 36, piston rods 13, 32 and the outer cross member 17 are made of EP resin GF.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Doppelmembranpumpe mit einem Zentralgehäuse (1), zwei koaxialen Produktkammern (6) im Zentralgehäuse, Saugventilen und Druckventilen für jede Produktkammer, zwei die Produktkammern gegen koaxiale Druckmittelkammern (8) abdichtenden Membranen (7), nach außen abgedichtet geführten Kolbenstangen (13), einer bügelförmigen, die Kolbenstangen der Membranen verbindenden Außentraverse (17) und einem Steuerblock (19) zum wechselseitigen Beaufschlagen der Druckmittelkammern mit Fördermedium mit einem durch die Membranbewegung betätigten Steuerschieber (20). Die Pumpe weist kürzeste, nur zwei Umlenkungen aufweisende Wege für den Förderstrom und nur statische Dichtungen auf. Sie läßt sich insgesamt aus Kunststoff herstellen und ist besonders geeignet für hochreine Produkte in der Halbleiterindustrie, Biotechnologie sowie in der Pharma-, Kosmetik- und Lebensmittelindustrie. <IMAGE>Double diaphragm pump with a central housing (1), two coaxial product chambers (6) in the central housing, suction valves and pressure valves for each product chamber, two membranes (7) sealing the product chambers against coaxial pressure medium chambers (8), piston rods (13) guided to the outside, one bow-shaped , the piston rods of the diaphragms connecting the outer crossmember (17) and a control block (19) for mutually acting on the pressure medium chambers with the conveyed medium with a control slide actuated by the diaphragm movement (20). The pump has the shortest paths with only two deflections for the flow and only static seals. It can be manufactured entirely from plastic and is particularly suitable for high-purity products in the semiconductor industry, biotechnology and in the pharmaceutical, cosmetics and food industries. <IMAGE>

Description

Die Erfindung betrifft eine Doppelmembranpumpe mit zwei Membranen, einem in Abhängigkeit von der Membranbewegung verschiebbaren Steuerschieber sowie einem von der Membranbewegung abhängigen Betätigungselement.The invention relates to a double diaphragm pump with two diaphragms, a control slide which is displaceable as a function of the diaphragm movement and an actuating element which is dependent on the diaphragm movement.

Eine derartige Doppelmembranpumpe ist in der deutschen Offenlegungsschrift 33 10 131 beschrieben. Bei dieser Doppelmembranpumpe sind die beiden Membranen durch eine Koppelstange miteinander verbunden und liegen die Druckmittelkammern im Bereich zwischen den Membranen, während die Produktkammern außerhalb liegen. Das Betätigungselement ist parallel zur Koppelstange angeordnet und besteht aus einer axial verschiebbaren, aus dem Steuerschiebergehäuse herausragenden, koaxial im Steuerschieber angeordneten Stange. Diese Stange wirkt in beiden Richtungen über eine Druckfeder auf den Steuerschieber, der durch federbeaufschlagte Rastkugeln in seinen Endstellungen solange festgehalten wird, bis die Kraft der koaxial auf der Betätigungsstange angeordneten Feder die Rastkraft übersteigt. Danach schnellt der Steuerschieber, durch Federkraft getrieben, in die entgegengesetzte Steuerstellung und bewirkt das Umsteuern der Membranbewegung. Auf diese Weise wird der Steuerschieber zwischen zwei stabilen Endstellungen hin- und herbewegt.Such a double diaphragm pump is described in German Offenlegungsschrift 33 10 131. In this double diaphragm pump, the two diaphragms are connected to each other by a coupling rod and the pressure medium chambers are in the area between the diaphragms, while the product chambers are outside. The actuating element is arranged parallel to the coupling rod and consists of an axially displaceable rod which protrudes from the control slide housing and is arranged coaxially in the control slide. This rod acts in both directions via a compression spring on the control slide, which is held in its end positions by spring-loaded locking balls until the force of the spring arranged coaxially on the actuating rod exceeds the locking force. The spool, driven by spring force, then swings into the opposite control position and reverses the diaphragm movement. In this way, the control slide is moved back and forth between two stable end positions.

Da sich bei der bekannten Doppelmembranpumpe bewegliche Saug- und Druckventile nur im Bereich der Produktkammern befinden, sonst aber nur statische Dichtungen vorhanden sind, ist sie wegen der geringen Gefahr des Entstehens von Abriebpartikeln gut für das Fördern von hochreinen Produkten wie Säuren, Laugen und Lösungsmitteln in der Halbleiterindustrie geeignet. Nachteilig ist jedoch der Strömungsverlauf, da das geförderte Produkt um den Steuerblock mit den Membranen, der Koppelstange und dem Steuerschieber herumgeführt werden muß, wodurch eine große produktberührte Oberfläche entsteht und zwischen Ein- und Auslaß vier Strömungsrichtungsänderungen notwendig sind. Des weiteren ist eine große Zahl von Dichtungen erforderlich. Schließlich besteht bei dieser Anordnung auch die Gefahr von Maßveränderungen bei Temperaturschwankungen. Treten dadurch Schwierigkeiten mit der Steuerung des Fördermediums auf, muß notwendigerweise die gesamte Pumpe demontiert werden, einschließlich der produktberührten Teile.Since, in the known double diaphragm pump, movable suction and pressure valves are only located in the area of the product chambers, but otherwise only static seals are present, it is due to the low risk of occurrence of abrasion particles well suited for conveying high-purity products such as acids, alkalis and solvents in the semiconductor industry. However, the flow path is disadvantageous because the product conveyed has to be guided around the control block with the membranes, the coupling rod and the control slide, which creates a large surface in contact with the product and four changes in flow direction are necessary between the inlet and outlet. A large number of seals are also required. Finally, with this arrangement there is also the risk of dimensional changes due to temperature fluctuations. If this causes difficulties with the control of the pumped medium, the entire pump must be dismantled, including the parts in contact with the product.

Die Membran ist bei der bekannten Doppelmembranpumpe des weiteren durch eine einfache Ringwulst abgedichtet, die sowohl eine radiale Halterung als auch eine Dichtung gewährleisten soll. Dies ist unbefriedigend, da die Membran in diesem Bereich hoch beansprucht ist und der Wulst bei der Verwendung eines fließfähigen Membranwerkstoffs wie PTFE auf Dauer keine einwandfreie Halterung und Abdichtung gewährleistet.In the known double diaphragm pump, the membrane is also sealed by a simple annular bead, which is intended to ensure both a radial mounting and a seal. This is unsatisfactory, since the membrane is highly stressed in this area and the bead does not guarantee perfect retention and sealing in the long term when using a flowable membrane material such as PTFE.

Der Erfindung liegt daher die Aufgabe zugrunde, eine Doppelmembranpumpe zum Fördern hochreiner Produkte zu schaffen, die eine geringstmögliche Abriebmenge gewährleistet; sie sollte zudem eine möglichst kleine produktberührte Oberfläche und keine Gleitdichtung im Bereich des Förderstroms aufweisen und vorzugsweise auch eine verbesserte Halterung und Abdichtung der Membran gewährleisten.The invention is therefore based on the object of creating a double diaphragm pump for conveying high-purity products which ensures the lowest possible amount of abrasion; it should also have the smallest possible surface in contact with the product and no sliding seal in the area of the flow and preferably also ensure improved retention and sealing of the membrane.

Ausgehend von dieser Aufgabenstellung wird als Lösung eine Doppelmembranpumpe mit einem Zentralgehäuse, zwei Produktkammern zwei die Produktkammern gegen koaxiale Druckmittelkammern abdichtende Membranen, nach außen abgedichtet geführten Kolbenstangen und einer vorzugsweise bügelförmigen Außenverbindung zwischen den Kolbenstangen der Membranen, vorzugsweise einer Außentraverse, und einem Steuerblock zum wechselseitigen, gesteuerten Beaufschlagen der Druckmittelkammern mit Fördermedium vorgeschlagen, der mit einem durch die Membranbewegung betätigten Steuerschieber versehen sein kann.Based on this task, the solution is a double diaphragm pump with a central housing, two product chambers and two product chambers against coaxial Diaphragms sealing pressure medium chambers, outwardly guided piston rods and a preferably bow-shaped external connection between the piston rods of the diaphragms, preferably an outer cross member, and a control block for the mutual, controlled loading of the pressure medium chambers with the conveyed medium, which can be provided with a control slide actuated by the diaphragm movement.

Bei der erfindungsgemäßen Doppelmembranpumpe liegen die Produktkammern im Zentralgehäuse, werden nach außen durch die Membrane abgedichtet, und die Membranen werden durch gegenüber den Produktkammern abgedichtete Druckmittelkammern wechselseitig beaufschlagt. Die beiden Membranen sind über die bügelförmige Außentraverse mechanisch miteinander verbunden, so daß zwischen den Membranen keinerlei Verbindung mehr besteht, die durch das Zentralgehäuse mit den Produktkammern hindurchgeführt ist. Die Produktkammern sind direkt benachbart und nur durch eine Wand des Zentralgehäuses voneinander getrennt, die der Druckdifferenz zwischen den Produktkammern widersteht und die Unterbringung zumindest der Saug- und Druckkanäle gestattet. Auf diese Weise werden kleinstmögliche produktberührte Oberflächen erreicht; zwischen Einlaß und Auslaß ergeben sich nur zwei Strömungsumlenkungen, die Anzahl der Dichtungen im produktberührten Bereich ist auf die Dichtungen der Saug- und Druckventile und die Membrandichtung beschränkt, und die Steuerungsteile für das Fördermedium, insbesondere Druckluft, lassen sich ohne Demontage produktberührter Teile austauschen.In the double diaphragm pump according to the invention, the product chambers are located in the central housing, are sealed off from the outside by the diaphragm, and the diaphragms are acted upon alternately by pressure medium chambers which are sealed off from the product chambers. The two membranes are mechanically connected to one another via the bow-shaped outer cross member, so that there is no longer any connection between the membranes which is passed through the central housing to the product chambers. The product chambers are directly adjacent and only separated from one another by a wall of the central housing which resists the pressure difference between the product chambers and allows at least the suction and pressure channels to be accommodated. In this way the smallest possible surfaces in contact with the product are achieved; There are only two flow deflections between inlet and outlet, the number of seals in the area in contact with the product is limited to the seals of the suction and pressure valves and the membrane seal, and the control parts for the pumped medium, especially compressed air, can be replaced without dismantling parts in contact with the product.

Um die bauartbedingte Pulsation des Förderstroms zu vermindern, kann an die Druckseite der Druckventile ein druckbeaufschlagter Pulsationsdämpfer angeschlossen sein, der mit einer gleichartigen Membran wie die Doppelmembranpumpe ausgestattet sein kann. Hierdurch ergeben sich lediglich zwei produktberührte Gehäuseteile, nämlich das Zentralgehäuse und das Pulsationsdämpfergehäuse, die keine scharfen Kanten oder Toträume besitzen, in denen sich Partikel ablagern könnten.In order to reduce the design-related pulsation of the flow, a pressurized pulsation damper can be connected to the pressure side of the pressure valves, which can be equipped with a diaphragm of the same type as the double diaphragm pump. This results in only two parts of the housing that come into contact with the product, namely the central housing and the pulsation damper housing, which have no sharp edges or dead spaces in which particles could be deposited.

Alle produktberührten Teile wie Zentralgehäuse, Ventile, Membranen und Pulsationsdämpfergehäuse können aus massiven PTFE-TFM bestehen, während alle nicht produktberührten Teile wie Gehäusedeckel, Steuerblock, Pulsationsdämpfergehäusedeckel und Abschlußdeckel einschließlich der Zugankermuttern aus massiven PVDF bestehen können. Daher können säure- oder lösungsmittelhaltige Dämpfe den äußeren Teilen nichts anhaben, die gesamte Doppelmembranpumpe ist korrosionsfest gegen alle Medien, mit denen in der Halbleiterindustrie gearbeitet wird.All parts that come into contact with the product, such as the central housing, valves, diaphragms and pulsation damper housing, can be made of solid PTFE-TFM, while all parts that do not come into contact with the product, such as the housing cover, control block, pulsation damper housing cover and end cover including the tie rod nuts, can be made of solid PVDF. Therefore, acidic or solvent-containing vapors cannot harm the outer parts, the entire double diaphragm pump is corrosion-resistant against all media that are used in the semiconductor industry.

Die nicht produktberührten Innenteile der Doppelmembranpumpe können aus PETP, POM, PTFE-PPS bestehen, während hochbelastete Bauteile wie Zuganker und die bügelförmige Außentraverse, aus EP-Harz 60 GF bestehen können.The inner parts of the double diaphragm pump, which are not in contact with the product, can consist of PETP, POM, PTFE-PPS, while highly stressed components such as tie rods and the bow-shaped outer crossmember can consist of EP resin 60 GF.

Um die Membran zwischen dem Zentralgehäuse und dem Gehäusedeckel einwandfrei abdichten zu können und dabei eine genaue Lagefixierung zu erreichen, was insbesondere bei Verwendung von Membranen aus massivem PTFE-PFM ohne Metallkern oder Stützplatten erforderlich ist, kann die Membran an ihrem Außenumfang zwei entgegengesetzt gerichtete, radial versetzte Ringwülste besitzen, von denen einer als Nutwulst mit einem in die Nut eingesetzten Spannring ausgebildet ist. Auf diese Weise läßt sich die produktberührte Oberfläche flach, eben und gleichförmig ausbilden und weist keine inneren Einbuchtungen auf, in denen sich Partikel ablagern könnten. Es ist zudem nur eine Dichtfläche zum Zentralgehäuse hin vorhanden.In order to be able to properly seal the membrane between the central housing and the housing cover and to achieve an exact position fixation, which is particularly necessary when using membranes made of solid PTFE-PFM without a metal core or support plates, the membrane can have two opposite, radial directions on its outer circumference have staggered ring beads, one of which is designed as a groove bead with a clamping ring inserted into the groove. In this way, the surface in contact with the product can be made flat, flat and uniform and has no internal indentations in which particles could be deposited. There is also only one sealing surface to the central housing.

Vorteilhafterweise besitzt die Nutwulst einen größeren Radius als die Ringwulst und ist die Nut axial in Richtung der Ringwulst offen. In die Nut wird ein Spannring eingelegt, der vorzugsweise aus einem Elastomer hoher Shore-Härte besteht, wobei die Ringwülste vorzugsweise einen rechteckigen Querschnitt aufweisen können. Der Spannring kann eine axiale Höhe entsprechend der Tiefe der Nut in dem Nutwulst und der Höhe des Ringwulstes aufweisen, wobei der Ringwulst und der Spannring nebeneinander in derselben Ringnut des Gehäuses angeordnet sein können.The groove bead advantageously has a larger one Radius than the ring bead and the groove is open axially in the direction of the ring bead. A clamping ring is inserted into the groove, which preferably consists of an elastomer with a high Shore hardness, wherein the ring beads can preferably have a rectangular cross section. The tension ring can have an axial height corresponding to the depth of the groove in the groove bead and the height of the ring bead, wherein the ring bead and the tension ring can be arranged side by side in the same ring groove of the housing.

Durch den Spannring wird die Membran ständig gegen das Zentralgehäuse gedrückt. Zwei der drei Oberflächen arbeiten radial; sie sind unabhängig vom Spannungsgrad der Zuganker, und eine wirkt axial für eine größtmögliche Sicherheit. Bei einer Demontage der Gehäusedeckel bleiben die Membranen im Zentralgehäuse fest und abdichtend sitzen und schützen so das geförderte Produkt.The membrane is constantly pressed against the central housing by the clamping ring. Two of the three surfaces work radially; they are independent of the tension level of the tie rods, and one acts axially for the greatest possible safety. When the housing cover is removed, the membranes in the central housing remain firmly and sealingly and thus protect the product being conveyed.

Auf diese Weise werden die Aufgaben Lagefixierung und Abdichtung getrennt, und die diese Aufgaben übernehmenden Elemente lassen sich jeweils optimal ausbilden. Die Abdichtung geschieht mit dem in die Nut eingelegten Spannring und die beiden großen konzentrischen Ringflächen der Membranen zum Gehäuse. Diese Ringflächen werden durch den zwischen ihnen angeordneten Spannring unabhängig von der axialen Vorspannung der Pumpe immer gleichbleibend angepreßt. Selbst ein axialer Spalt zwischen den Gehäuseteilen von bis zu einem Millimeter führt nicht zu Undichtigkeiten oder einem Ausreißen der Membranen. Die Wartung und Überwachung der axialen Vorspannung entfällt.In this way, the tasks of fixing the position and sealing are separated, and the elements taking over these tasks can be optimally trained. The sealing is done with the tension ring inserted in the groove and the two large concentric ring surfaces of the membranes to the housing. These ring surfaces are always pressed constant by the clamping ring arranged between them regardless of the axial preload of the pump. Even an axial gap of up to one millimeter between the housing parts does not lead to leaks or tearing out of the membranes. The maintenance and monitoring of the axial preload is no longer necessary.

Die Erfindung wird nachstehend anhand eines in der Zeichnung dargestellten Ausführungsbeispiels des näheren erläutert. In der Zeichnung zeigen:

Fig. 1
einen Querschnitt durch eine Doppelmembranpumpe,
Fig. 2
einen Schnitt entlang der Linie II - II in Fig. 1 und
Fig. 3
eine vergrößerte Darstellung einer Membran mit Ringwülsten.
Fig. 4
eine andere Ausführungsform einer Membran mit Ringwülsten.
The invention is explained below with reference to an embodiment shown in the drawing. The drawing shows:
Fig. 1
a cross section through a double diaphragm pump,
Fig. 2
a section along the line II - II in Fig. 1 and
Fig. 3
an enlarged view of a membrane with ring beads.
Fig. 4
another embodiment of a membrane with ring beads.

Die Doppelmembranpumpe besitzt ein Zentralgehäuse, in dem Saugventile 2, Druckventile 3 und ein Sauganschluß 4 angeordnet sind. Des weiteren sind im Zentralgehäuse 1 koaxiale Produktkammern 6 angeordnet, die mit den Saugventilen 2 und den Druckventilen 3 in Verbindung stehen. Jede Produktkammer 6 wird durch eine Membran 7 abgeschlossen, die zu einem mit dem Zentralgehäuse 1 verschraubten Gehäuse 12 eine Druckmittelkammer 8 bildet.The double diaphragm pump has a central housing in which suction valves 2, pressure valves 3 and a suction connection 4 are arranged. Furthermore, coaxial product chambers 6 are arranged in the central housing 1 and are connected to the suction valves 2 and the pressure valves 3. Each product chamber 6 is closed by a membrane 7, which forms a pressure medium chamber 8 in relation to a housing 12 screwed to the central housing 1.

Am äußeren Umfang der Membran sind Ringwülste 9, 10 angeordnet, die radial zueinander versetzt sind. Der Ringwulst 9 liegt in einer entsprechenden Ringnut des Gehäusedeckels 12, während der Ringwulst 10 in einer entsprechenden Ringnut im Zentralgehäuse 1 angeordnet ist und eine umlaufende, axial zur Ringwulst 9 hin gerichtete offene Nut aufweist, in die ein Spannring 11 aus einem Elastomer hoher Shore-Härte eingelegt ist. Die Gehäusedeckel 12 sind gegen das Zentralgehäuse 1 mittels Zugankern 23 und Muttern 24 verspannt. In den zentralen mittleren Bereich der Membran 7 ist eine Kolbenstange 13 eingeschraubt, die mittels einer Buchse 14 in einer Führung 15 des Gehäusedeckels 12 geführt und mittels einer Dichtung 16 abgedichtet ist. Die koaxiale Kolbenstangen 13 der benachbarten koaxialen Membranen 7 sind über eine bügelförmige Außentraverse 17 formschlüssig miteinander verbunden. In der gezeichneten Stellung liegt die Membran 7 am Gehäusedeckel 12 an, so daß sich die Kolbenstange 13 mit der Außentraverse 17 in der äußersten rechten Stellung befindet. Über die Außentraverse 17 wird die nicht dargestellte linke Membrane ebenfalls nach rechts bewegt und füllt praktisch die Produktkammer 6 aus.On the outer circumference of the membrane, annular beads 9, 10 are arranged, which are offset radially to one another. The annular bead 9 lies in a corresponding annular groove of the housing cover 12, while the annular bead 10 is arranged in a corresponding annular groove in the central housing 1 and has a circumferential open groove which is directed axially towards the annular bead 9 and into which a clamping ring 11 made of an elastomer with a high Shore Hardness is inserted. The housing cover 12 are braced against the central housing 1 by means of tie rods 23 and nuts 24. A piston rod 13 is screwed into the central central region of the membrane 7, which is guided in a guide 15 of the housing cover 12 by means of a bushing 14 and is sealed by means of a seal 16. The coaxial piston rods 13 of the adjacent coaxial membranes 7 are positively connected to one another via a bow-shaped cross member 17 connected. In the position shown, the membrane 7 bears against the housing cover 12, so that the piston rod 13 with the outer cross member 17 is in the extreme right position. The left diaphragm, not shown, is likewise moved to the right via the outer cross member 17 and practically fills the product chamber 6.

Wird die Druckmittelkammer 8 über den Druckluftkanal 22 mit Druckluft beaufschlagt, wird das in der Produktkammer 6 befindliche Produkt verdrängt und gefördert, während die sich nunmehr vergrößernde linke Produktkammer ansaugt.If the pressure medium chamber 8 is pressurized with compressed air via the compressed air channel 22, the product located in the product chamber 6 is displaced and conveyed, while the left-hand product chamber, which is now enlarging, sucks in.

Die oszillierende Pumpbewegung der Membranen 7 wird mittels eines in einem Steuerblock 19 angeordneten Steuerschiebers 20 wechselweise gesteuert. Dieser Steuerschieber 20 wird mittels einer Betätigungsstange 21, die über einen Betätigungszapfen 18 mit der Außentraverse 17 in Verbindung steht, von der Bewegung der Membranen 7 gesteuert. Der Steuerblock 19 mit dem Steuerschieber 20 kann, wie in der deutschen Patentanmeldung P 41 06 180.2-15 beschrieben, gestaltet sein.The oscillating pump movement of the membranes 7 is alternately controlled by means of a control slide 20 arranged in a control block 19. This control slide 20 is controlled by the movement of the diaphragms 7 by means of an actuating rod 21, which is connected to the outer cross member 17 via an actuating pin 18. The control block 19 with the control slide 20 can be designed as described in the German patent application P 41 06 180.2-15.

Die Funktionsweise der Doppelmembranpumpe ist somit dieselbe wie die der eingangs erwähnten bekannten Membranpumpe und braucht daher hier nicht im einzelnen erläutert zu werden.The mode of operation of the double diaphragm pump is thus the same as that of the known diaphragm pump mentioned at the outset and therefore does not need to be explained in detail here.

Seitlich am Zentralgehäuse 1 ist ein Pulsationsdämpfergehäuse 25 angeschraubt und gegenüber den Druckventilen 3 mittels Dichtungen 26 abgedichtet. Im Pulsationsdämpfergehäuse 25 befindet sich eine Druckkammer 27, die durch eine Membran 28 abgeschlossen ist. Diese Membran 28 ist wie die Membran 7 ausgebildet und in der gleichen Weise durch Ringwülste 9, 10 zwischen dem Pulsationsdämpfergehäuse 25 und einem Pulsationsdämpfergehäusedeckel 30 eingespannt und abgedichtet.A pulsation damper housing 25 is screwed to the side of the central housing 1 and is sealed off from the pressure valves 3 by means of seals 26. In the pulsation damper housing 25 there is a pressure chamber 27 which is closed by a membrane 28. This membrane 28 is designed like the membrane 7 and in the same way by annular beads 9, 10 between the pulsation damper housing 25 and a pulsation damper housing cover 30 clamped and sealed.

Ein Druckluftanschluß 31 führt zur Druckmittelkammer 29.A compressed air connection 31 leads to the pressure medium chamber 29.

Eine Kolbenstange 32, die über Dichtungen 33 in dem Pulsationsdämpfergehäusedeckel 30 geführt ist, dient dazu, die Membran 28 zu führen, wenn sie sich zum Ausgleich der Fördermengenschwankungen unter der Wirkung der über den Anschluß 31 zugeführten Druckluft bewegt. Der Pulsationsdämpfergehäusedeckel 30 und das Pulsationsdämpfergehäuse 25 sind mit dem Zentralgehäuse 1 über Zuganker 36 mittels abgedichteter Hutmuttern 37 verbunden.A piston rod 32, which is guided via seals 33 in the pulsation damper housing cover 30, serves to guide the diaphragm 28 when it moves to compensate for the fluctuations in the delivery rate under the action of the compressed air supplied via the connection 31. The pulsation damper housing cover 30 and the pulsation damper housing 25 are connected to the central housing 1 via tie rods 36 by means of sealed cap nuts 37.

Über die bügelförmige Außentraverse 17 sind Abschlußdeckel 38 gesetzt, und dem Steuerblock 19 wird Druckluft als Fördermedium über einen Druckluftanschluß 34 zugeführt.End covers 38 are placed over the bow-shaped outer cross member 17, and the control block 19 is supplied with compressed air as the conveying medium via a compressed air connection 34.

Die erfindungsgemäße Doppelmembranpumpe läßt sich völlig metallfrei gestalten, so daß das Entstehen von Metallionen sicher vermieden wird und damit eine Gefährdung von Mikrobauelementen der Elektroindustrie ausgeschlossen ist.The double diaphragm pump according to the invention can be designed to be completely metal-free, so that the formation of metal ions is reliably avoided and thus a risk to microcomponents in the electrical industry is excluded.

Die produktberührten Bauteile wie das Zentralgehäuse 1, die Ventile 2, 3, die Membranen 7, 28 und das Pulsationsdämpfergehäuse 25 bestehen aus massivem PTFE-TFM, während alle äußeren, nicht produktberührten Teile wie Gehäusedeckel 12, Steuerblock 19, Pulsationsdämpfergehäusedeckel 30, Abschlußdeckel 38 aus massivem PVDF gefertigt sind. Die inneren, nicht produktberührten Teile bestehen aus PETP, POM oder PTFE-PPS, während alle hochbelasteten Bauteile wie Zuganker 23, 36, Kolbenstangen 13, 32 und die Außentraverse 17 aus EP-Harz GF bestehen.The components in contact with the product, such as the central housing 1, the valves 2, 3, the membranes 7, 28 and the pulsation damper housing 25, are made of solid PTFE-TFM, while all the outer, non-product-contacting parts, such as the housing cover 12, control block 19, pulsation damper housing cover 30, end cover 38 solid PVDF are made. The inner parts that are not in contact with the product are made of PETP, POM or PTFE-PPS, while all highly stressed components such as tie rods 23, 36, piston rods 13, 32 and the outer cross member 17 are made of EP resin GF.

Die erfindungsgemäß gestalteten Membranen 7, 28 lassen sich in jeder Doppelmembranpumpe mit entsprechend gestalteten Nuten zur Aufnahme der Ringwülste verwenden.Leave the membranes 7, 28 designed according to the invention use in each double diaphragm pump with appropriately designed grooves for receiving the ring beads.

Bei der in Fig. 4 dargestellten Membran 7 ist nur der Spannring 11a verändert. Seine axiale Höhe ist gleich der Summe der Tiefe der Nut im Nutwulst 10 und der Ringwulst 9. Die Nut im Gehäuse 12 nimmt dementsprechend den Ringwulst 9 und den Spannring 11a nebeneinanderliegend auf, wodurch sowohl produktkammerseitig als auch druckmediumseitig eine rein radiale Abdichtung gegeben ist.In the membrane 7 shown in FIG. 4, only the clamping ring 11a is changed. Its axial height is equal to the sum of the depth of the groove in the groove bead 10 and the ring bead 9. The groove in the housing 12 accordingly accommodates the ring bead 9 and the clamping ring 11a next to one another, as a result of which a purely radial seal is provided both on the product chamber side and on the pressure medium side.

Claims (13)

Doppelmembranpumpe mit - einem Zentralgehäuse (1), - zwei Produktkammern (6) - zwei die Produktkammern gegen Druckmittelkammern (8) abdichtenden Membranen (7), - nach außen abgedichtet geführten Kolbenstangen (13), - einer Außenverbindung (17) zwischen den Kolbenstangen und - einem Steuerblock (19) zum wechselseitigen, gesteuerten Beaufschlagen der Druckmittelkammern mit Fördermedium. Double diaphragm pump with - a central housing (1), - two product chambers (6) - two membranes (7) sealing the product chambers against pressure medium chambers (8), - Piston rods (13) guided to the outside, - An external connection (17) between the piston rods and - A control block (19) for mutual, controlled loading of the pressure medium chambers with the pumped medium. Doppelmembranpumpe nach Anspruch 1, dadurch gekennzeichnet, daß die Produktkammern im Zentralgehäuse (1) angeordnet sind.Double diaphragm pump according to claim 1, characterized in that the product chambers are arranged in the central housing (1). Doppelmembranpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß an die Druckseite von Druckventilen (3) ein druckbeaufschlagter Pulsationsdämpfer (25, 27, 28, 29, 30, 31) angeschlossen ist.Double diaphragm pump according to claim 1 or 2, characterized in that a pressure-loaded pulsation damper (25, 27, 28, 29, 30, 31) is connected to the pressure side of pressure valves (3). Doppelmembranpumpe nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß alle produktberührten Teile aus massivem PTFE-TFM bestehen.Double diaphragm pump according to one of claims 1 to 3, characterized in that all of the products in contact with the product Parts are made of solid PTFE-TFM. Doppelmembranpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß alle äußeren, nicht produktberührten Teile aus massivem PVDF bestehen.Double diaphragm pump according to one of claims 1 to 4, characterized in that all outer parts not in contact with the product consist of solid PVDF. Doppelmembranpumpe nach einem oder mehreren der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß alle inneren, nicht produktberührten Teile aus PETP, POM oder PTFE-PPS und alle hochbelasteten Bauteile aus EP-Harz GF bestehen.Double diaphragm pump according to one or more of claims 1 to 5, characterized in that all internal parts not in contact with the product consist of PETP, POM or PTFE-PPS and all highly stressed components consist of EP resin GF. Doppelmembranpumpe, insbesondere nach einem oder mehreren der Ansprüche 1 bis 6, dadurch gekennzeichnet, daß die Membran (7, 28) an ihrem Außenumfang zwei entgegengesetzt gerichtete radial versetzte Ringwülste (9, 20) besitzt, von denen einer als Nutwulst mit einem in die Nut eingesetzten Spannring (11) ausgebildet ist.Double diaphragm pump, in particular according to one or more of claims 1 to 6, characterized in that the membrane (7, 28) has on its outer circumference two oppositely directed, radially offset annular beads (9, 20), one of which is a groove bead with one in the groove inserted clamping ring (11) is formed. Doppelmembranpumpe nach Anspruch 7, dadurch gekennzeichnet, daß die Ringwülste (9, 10) mit unterschiedlichen radialen Abständen angeordnet sind.Double diaphragm pump according to claim 7, characterized in that the annular beads (9, 10) are arranged with different radial distances. Doppelmembranpumpe nach Anspruch 8, dadurch gekennzeichnet, daß der Nutwulst (10) einen größeren Radius als der Ringwulst (9) besitzt und die Nut axial in Richtung des Ringwulstes offen ist.Double diaphragm pump according to claim 8, characterized in that the groove bead (10) has a larger radius than the ring bead (9) and the groove is open axially in the direction of the ring bead. Doppelmembranpumpe nach einem oder mehreren der Ansprüche 6 bis 9, dadurch gekennzeichnet, daß die Ringwülste (9, 10) einen rechteckigen Querschnitt besitzen.Double diaphragm pump according to one or more of claims 6 to 9, characterized in that the annular beads (9, 10) have a rectangular cross section. Doppelmembranpumpe nach einem oder mehreren der Ansprüche 6 bis 10, dadurch gekennzeichnet, daß der Spannring (11) aus einem Elastomer hoher Shore-Härte besteht.Double diaphragm pump according to one or more of claims 6 to 10, characterized in that the Tension ring (11) consists of an elastomer with a high Shore hardness. Doppelmembranpumpe nach einem oder mehreren der Ansprüche 6 bis 11, dadurch gekennzeichnet, daß der Spannring (11a) eine axiale Höhe entsprechend der Tiefe der Nut in dem Nutwulst (10) und der Höhe des Ringwulstes (9) aufweist.Double diaphragm pump according to one or more of claims 6 to 11, characterized in that the clamping ring (11a) has an axial height corresponding to the depth of the groove in the groove bead (10) and the height of the ring bead (9). Doppelmembranpumpe nach Anspruch 12, dadurch gekennzeichnet, daß der Ringwulst (9) und der Spannring (11a) nebeneinander in derselben Ringnut des Gehäuses (12) angeordnet sind.Double diaphragm pump according to claim 12, characterized in that the annular bead (9) and the clamping ring (11a) are arranged side by side in the same annular groove in the housing (12).
EP92118863A 1991-11-08 1992-11-04 Double diaphragm pump Withdrawn EP0550810A2 (en)

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DE4136805A DE4136805A1 (en) 1991-11-08 1991-11-08 DOUBLE DIAPHRAGM PUMP
DE4136805 1991-11-08

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EP0550810A2 true EP0550810A2 (en) 1993-07-14
EP0550810A3 EP0550810A3 (en) 1994-03-23

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KR20150085791A (en) * 2014-01-16 2015-07-24 잉 린 카이 Vibration-reducing method for compressing diaphragm pump
CN105089988A (en) * 2014-05-20 2015-11-25 蔡应麟 Improvement of damping structure and swing wheel structure of four-booster-cavity diaphragm pump
CN105090006A (en) * 2014-05-20 2015-11-25 蔡应麟 Damping structure for five-pressurization cavity diaphragm pump
CN105090007A (en) * 2014-05-20 2015-11-25 蔡应麟 Vibration reduction structure of four-booster-cavity membrane pump
KR20150133635A (en) * 2014-05-20 2015-11-30 잉 린 카이 Vibration-reducing structure for four-compression-chamber diaphragm pump
CN105089988B (en) * 2014-05-20 2018-11-16 蔡应麟 The combination of the vibration control structure and swing wheel structure of four booster cavity diaphragm pumps
KR20230031679A (en) * 2021-08-27 2023-03-07 주식회사 이노디스 Bellows pump
KR102537942B1 (en) 2021-08-27 2023-05-31 주식회사 이노디스 Bellows pump

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JPH05240161A (en) 1993-09-17
US5261798A (en) 1993-11-16
DE4136805C2 (en) 1993-08-12
EP0550810A3 (en) 1994-03-23

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