EP0542771A1 - Stabiles, stromloses, wässriges, saures goldbad zur abscheidung von gold und dessen verwendung. - Google Patents
Stabiles, stromloses, wässriges, saures goldbad zur abscheidung von gold und dessen verwendung.Info
- Publication number
- EP0542771A1 EP0542771A1 EP91913280A EP91913280A EP0542771A1 EP 0542771 A1 EP0542771 A1 EP 0542771A1 EP 91913280 A EP91913280 A EP 91913280A EP 91913280 A EP91913280 A EP 91913280A EP 0542771 A1 EP0542771 A1 EP 0542771A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- gold
- acid
- stable
- aqueous
- bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
- C23C18/44—Coating with noble metals using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
Definitions
- the invention relates to a stable, currentless, aqueous, acidic gold bath for the deposition of gold and its use.
- the bath according to the invention containing the anion tetracyano gold (III), a complexing agent or a mixture of several complexing agents, an acid or an acid mixture, is suitable for electroless deposition of gold on metals that are less noble than gold, as well as on alloys thereof Metals.
- Gold baths for the electroless deposition of gold are already known, for example from the documents DE-PS 3640028, US Pat. No. 4,830,668 and GB-PS 20 99 460. These are gold baths which predominantly contain an alkali metal dicyanoaurate - (I) or Contain Alkalitetracyanoaurat- (III), a complexing agent and a reducing agent. All these baths generally have an unsatisfactory stability and decompose with the deposition of metallic gold or gold (I) cyanide.
- the object of the present invention is to deposit in the acidic range from the tetracyano gold (III) gold onto metals or their alloys and at the same time to provide a more stable gold bath.
- REPLACEMENT LEAF N-bis (carboxymethylene) -1-aminoethane-l, 1-diphosphonic acid and 2-phosphonobutane-l, 2,4-tricartvonic acid have proven particularly useful as complexing agents in the baths according to the invention.
- a particular advantage of the bath according to the invention is that layers up to 0.5 ⁇ m are already obtained with gold contents in the bath of 1.0 g / 1 gold.
- the bath thus enables the gold-plating of alloys that are common in the semiconductor industry, for example iron-nickel-cobalt alloys and chemically reductively deposited nickel alloys such as nickel-phosphorus, nickel-boron and pure nickel.
- carboxymethylene-amino-alkyl-phosphenoic acids and / or phosphonalkyl carboxylic acids are used as complexing agents, which allow a substantial increase in the deposition rate and higher layer thicknesses, which was not foreseeable.
- the acids used are, for example, sulfuric acid or phosphoric acid or mixtures thereof.
- the basic composition of the bath according to the invention is, for example, as follows:
- the working temperature of the bath is usually between 70 and 90 ° C. It was found that there is no decomposition of the bath even at higher temperatures, e.g. for the precipitation of elemental gold. Another advantage of the bath is that it can be used repeatedly and that the gold salt can be replenished as required.
- the bath according to the invention has a constant deposition rate up to layer thicknesses of 0.5 ⁇ m, which is dependent on the gold content and the temperature.
- the bath according to the invention can be used for gold layers of soldered connections which result from crystal or wire bonding, which is of particular technical value.
- the high deposition speed also enables use in decorative gilding. A uniform yellow layer can be observed after seconds.
- the stable bath compositions listed below can be used to deposit very uniform and ductile coatings under the working conditions listed.
- the invention also relates to the use of the gold baths according to the invention for the deposition of gold on metals which are less noble than gold or on alloys of these metals.
- Potassium tetracyanoaurate-III 6.0 g / i complex 2-phosphonobutane-1,2,4-tricarboxylic acid 40.0 ml / 1 sulfuric acid / phosphoric acid 1 50.0 ml / 1 pH value less than 1 temperature 60 ° C
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4024764A DE4024764C1 (de) | 1990-08-02 | 1990-08-02 | |
DE4024764 | 1990-08-02 | ||
PCT/DE1991/000624 WO1992002663A1 (de) | 1990-08-02 | 1991-08-01 | Stabiles, stromloses, wässriges, saures goldbad zur abscheidung von gold und dessen verwendung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0542771A1 true EP0542771A1 (de) | 1993-05-26 |
EP0542771B1 EP0542771B1 (de) | 1995-01-25 |
Family
ID=6411638
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP91913280A Expired - Lifetime EP0542771B1 (de) | 1990-08-02 | 1991-08-01 | Stabiles, stromloses, wässriges, saures goldbad zur abscheidung von gold und dessen verwendung |
Country Status (7)
Country | Link |
---|---|
US (1) | US5322552A (de) |
EP (1) | EP0542771B1 (de) |
JP (1) | JPH05509360A (de) |
AT (1) | ATE117740T1 (de) |
DE (2) | DE4024764C1 (de) |
TW (1) | TW241312B (de) |
WO (1) | WO1992002663A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19745601C2 (de) * | 1997-10-08 | 2001-07-12 | Fraunhofer Ges Forschung | Lösung und Verfahren zum stromlosen Abscheiden von Goldschichten sowie Verwendung der Lösung |
DE19745602C1 (de) | 1997-10-08 | 1999-07-15 | Atotech Deutschland Gmbh | Verfahren und Lösung zur Herstellung von Goldschichten |
US5935306A (en) * | 1998-02-10 | 1999-08-10 | Technic Inc. | Electroless gold plating bath |
JP4116718B2 (ja) * | 1998-11-05 | 2008-07-09 | 日本リーロナール有限会社 | 無電解金めっき方法及びそれに使用する無電解金めっき液 |
DE102009041264A1 (de) | 2009-09-11 | 2011-03-24 | IPHT Jena Institut für Photonische Technologien e.V. | Verfahren zur Herstellung von optisch aktiven Nanostrukturen |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4374876A (en) * | 1981-06-02 | 1983-02-22 | Occidental Chemical Corporation | Process for the immersion deposition of gold |
US4474838A (en) * | 1982-12-01 | 1984-10-02 | Omi International Corporation | Electroless direct deposition of gold on metallized ceramics |
DE3614090C1 (en) * | 1986-04-25 | 1987-04-30 | Heraeus Gmbh W C | Bath for the currentless deposition of gold layers |
DE3640028C1 (de) * | 1986-11-24 | 1987-10-01 | Heraeus Gmbh W C | Saures Bad fuer das stromlose Abscheiden von Goldschichten |
DE3707817A1 (de) * | 1987-03-09 | 1988-09-22 | Schering Ag | Stabilisiertes alkalisches goldbad zur stromlosen abscheidung von gold |
US4919720A (en) * | 1988-06-30 | 1990-04-24 | Learonal, Inc. | Electroless gold plating solutions |
-
1990
- 1990-08-02 DE DE4024764A patent/DE4024764C1/de not_active Expired - Lifetime
-
1991
- 1991-08-01 JP JP3512501A patent/JPH05509360A/ja active Pending
- 1991-08-01 AT AT91913280T patent/ATE117740T1/de not_active IP Right Cessation
- 1991-08-01 US US07/978,690 patent/US5322552A/en not_active Expired - Fee Related
- 1991-08-01 EP EP91913280A patent/EP0542771B1/de not_active Expired - Lifetime
- 1991-08-01 DE DE59104436T patent/DE59104436D1/de not_active Expired - Fee Related
- 1991-08-01 WO PCT/DE1991/000624 patent/WO1992002663A1/de active IP Right Grant
-
1992
- 1992-09-04 TW TW081107004A patent/TW241312B/zh active
Non-Patent Citations (1)
Title |
---|
See references of WO9202663A1 * |
Also Published As
Publication number | Publication date |
---|---|
TW241312B (de) | 1995-02-21 |
ATE117740T1 (de) | 1995-02-15 |
EP0542771B1 (de) | 1995-01-25 |
WO1992002663A1 (de) | 1992-02-20 |
US5322552A (en) | 1994-06-21 |
DE4024764C1 (de) | 1991-10-10 |
DE59104436D1 (de) | 1995-03-09 |
JPH05509360A (ja) | 1993-12-22 |
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