EP0537642B1 - Appareil de traitement d'information à mécanisme d'alignement de piste - Google Patents

Appareil de traitement d'information à mécanisme d'alignement de piste Download PDF

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Publication number
EP0537642B1
EP0537642B1 EP92117292A EP92117292A EP0537642B1 EP 0537642 B1 EP0537642 B1 EP 0537642B1 EP 92117292 A EP92117292 A EP 92117292A EP 92117292 A EP92117292 A EP 92117292A EP 0537642 B1 EP0537642 B1 EP 0537642B1
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EP
European Patent Office
Prior art keywords
voltage
probe
recording medium
scanning
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92117292A
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German (de)
English (en)
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EP0537642A2 (fr
EP0537642A3 (en
Inventor
Shunichi c/o Canon Kabushiki Kaisha Shido
Katsunori C/O Canon Kabushiki Kaisha Hatanaka
Kunihiro C/O Canon Kabushiki Kaisha Sakai
Takahiro C/O Canon Kabushiki Kaisha Oguchi
Akihiko C/O Canon Kabushiki Kaisha Yamano
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Canon Inc
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Canon Inc
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Publication date
Priority claimed from JP3293907A external-priority patent/JP3015978B2/ja
Priority claimed from JP16862092A external-priority patent/JPH05334737A/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0537642A2 publication Critical patent/EP0537642A2/fr
Publication of EP0537642A3 publication Critical patent/EP0537642A3/en
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Publication of EP0537642B1 publication Critical patent/EP0537642B1/fr
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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • G11B9/1454—Positioning the head or record carrier into or out of operative position or across information tracks; Alignment of the head relative to the surface of the record carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/88—Manufacture, treatment, or detection of nanostructure with arrangement, process, or apparatus for testing
    • Y10S977/881—Microscopy or spectroscopy, e.g. sem, tem
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/943—Information storage or retrieval using nanostructure
    • Y10S977/947—Information storage or retrieval using nanostructure with scanning probe instrument

Definitions

  • the present invention relates to an information processing apparatus for recording, reproducing or erasing information along a track groove provided on a recording medium, utilizing a physical phenomenon generated when a probe needle is maintained close to a specimen.
  • STM scanning tunnel microscope
  • a further recording medium for a scanning tunneling microscope (STM) is described in EP 0 412 850 A2.
  • EP 0 338 083 A1 discloses a scanning tunneling microscope (STM) for obtaining surface information of a sample by bringing a probe tip close to the sample and obtaining the surface information on the basis of physical parameters such as a current which occurs between the probe tip and the sample.
  • STM scanning tunneling microscope
  • An information process apparatus is generally designed to record information on the surface of a specimen by a certain electrical method while scanning said surface with a probe needle, and to reproduce the recorded information by measuring a physical phenomenon, such as the tunneling current generated by the close positioning of the probe needle and the specimen.
  • a physical phenomenon such as the tunneling current generated by the close positioning of the probe needle and the specimen.
  • Tracking is conducted by the detection of a track groove and the feedback control of the scanning area based on thus detected position, but the detection error of the tracking groove becomes an obstacle, particularly in a high-speed scanning required for example in the information processing apparatus, because said detection relies on a weak signal such as the tunneling current generated by the close positioning of the probe needle and the specimen.
  • a weak signal such as the tunneling current generated by the close positioning of the probe needle and the specimen.
  • the object of the present invention is to provide an information processing apparatus capable of avoiding the above-mentioned drawbacks and realizing stable feedback operation.
  • a predetermined voltage is applied by a bias circuit 3, and a tunneling current induced by said voltage is supplied to an image data generation unit 11 for image output, a Z-direction control unit 4, a data extraction unit 10 and an edge detection unit 8 for tracking.
  • the image data generation unit 11 generates image data from the received tunneling current signal and sends said image data to a monitor (CRT) 12.
  • the Z-direction control unit 4 effects feedback control on the distance between the probe electrode 2 and the specimen 1 in such a manner that the tunneling current becomes constant.
  • the data extraction unit 10 extracts, in digital or analog manner, the recorded information from the tunneling current signal.
  • the edge detection unit 8 compares the measured current with a predetermined current value determined in advance by a reference current setting unit 9, and sends a voltage pulse of predetermined duration and height to a holding circuit 13 at the instant when the measured current becomes smaller.
  • the scanning motion of the probe electrode 2 in the X and Y-directions on the specimen 1 with reference to the tracking groove is induced by application of predetermined voltages from X, Y-direction scanning voltage generation circuits 6, 7 to piezoelectric elements mounted on an XY-stage 5.
  • the scanning voltage is also held by the holding circuit 13 at the timing of edge detection, indicated by the pulse released from the edge detection unit 8, then converted into a digital value by an A/D converter 14 and is processed as tracking data.
  • the digitized voltage signal is compared with an average value by a noise detection unit 16, and is forwarded to a feedback amount generation unit 18 depending on the result of said comparison.
  • an average calculating module 17 There is also provided an average calculating module 17.
  • the voltage value supplied to the feedback amount generation unit 18 is converted therein into a difference signal from a target value which is set by the target value setting unit 19 (which is the desired voltage at the edge detection, namely the X-direction scanning voltage when the edge is detected at the normal position within the X-direction scanning area).
  • the offset generation unit 20 generates an offset value from said difference signal, and supplies the tracking voltage to the stage through the D/A converter 15, by adding said offset value to the scanning voltage.
  • the output voltage of the noise detection unit 16 is divided by a number n of averaging in a 1/n calculation unit 21, and the divided data is supplied to an adder 22 and a FIFO unit 23.
  • Said FIFO unit 23 stores n data in the past, and releases oldest data upon receipt of the new data.
  • the adder 22 adds the new data and old data stored in the buffer, and sends the sum to a subtractor 24, which subtracts the oldest data, outputted from the FIFO unit 23, from the sum outputted from the adder 22, and sends the obtained result to the buffer.
  • the average of n data is obtained by adding the new data to and subtracting the n-th old data from the average.
  • the average data in the buffer is referred to at the noise detection.
  • the edge detection unit 8 sends a pulse signal indicating the timing of edge detection (Fig. 3B) to the holding circuit 13, which samples the X-direction scanning voltage at the timing of said pulse signal (Fig. 3C) and holds the sampled voltage (Fig. 3D).
  • the difference signal is calculated from thus held voltage at the timing shown in Figs. 3A to 3D, and is added to the offset.
  • the detected position contains a large noise.
  • the drift resulting from temperature or vibration is much slower than the scanning frequency.
  • the shape of groove edge can now be made sharp in the order of nanometer, through the use of a semiconductor process.
  • the edge detection utilizing the method of STM may cause a perturbation in the edge detecting position independent from the edge shape.
  • the noise detection unit 16 is provided for eliminating the detection voltage, which is caused by the perturbation in the feedback in the Z-direction and is irrelevant from the edge shape.
  • Fig. 4A shows the input voltage
  • Fig. 4B shows the output of the noise detection unit
  • Fig. 4C shows the offset output value.
  • the noise detection unit 16 calculates the difference A from the average value (broken line) obtained from the average calculation unit, and compares said difference A with a predetermined limit variation. If said difference A is larger than the limit variation, the variation in the input voltage is identified as a noise, and the output of the noise detection unit 16 is set as the target voltage of the target value setting unit 19.
  • the feedback amount generation unit 18 provides a zero output, and the stage does not move because the offset amount is not varied.
  • the voltage in such state is not supplied to the average calculation unit 17, so that the noise signal is not included in the average calculation. It is therefore rendered possible to suppress the detection error resulting from a fast scanning, and to prevent the feedback based on the erroneous information.
  • the recording medium constituting the specimen 1, was composed of an Au film, formed on a glass substrate and provided with tracking grooves, in lines and spaces of 2 ⁇ m each by a semiconductor process.
  • the depth and length of the groove were respectively ca. 30 nm and 30 ⁇ m.
  • the scanning was conducted with a width of 1 ⁇ m, a length of 10 ⁇ m and a frequency of 500 Hz.
  • the tracking accuracy was about 15 nm.
  • the range of fluctuation in the edge of tracking grooves prepared by the semiconductor process was revealed as several Angstroms at maximum, as observed under an electron microscope, and the above-mentioned accuracy is significantly inferior to said fluctuation range.
  • a tracking control employing the noise detection unit 16 with a limit variation of ⁇ 5 nm with respect to the average of 10 scanning operations in the past provided a fluctuation range of about 0.5 nm, which was about same as the fluctuation range resulting from the groove structure. Thus a major improvement in the accuracy was confirmed.
  • the Au electrode was provided with tracking grooves prepared by a semiconductor process as in the foregoing embodiment.
  • the scanning motion of the probe electrode was conducted with a width of 1 ⁇ m and a length of 10 ⁇ m in the X and Y-directions, and the tracking was conducted with the apparatus of the configuration shown in Fig. 1.
  • the electrical information recording was conducted by the application, between the specimen and the probe electrode, of a voltage superposed by consecutive pulses of heights of -6 V and +1.5 V by the bias circuit 3.
  • Fig. 5 is a block diagram of an information processing apparatus, in which a probe electrode 102 mounted on a fine movement mechanism 101, movable in the Z-direction, is positioned opposite to a flat electrode substrate 103.
  • Said electrode 103 composed of gold, is supported by a stage 104 movably in the X, Y plane.
  • the surface of said electrode constitutes the recording medium, and is provided with tracking grooves 105 parallel to the Y-axis.
  • a bias circuit 106 is connected to apply a voltage between said substrate and the probe 102.
  • a current amplifier 107 is connected to the probe 102 for converting the tunneling current from the bias circuit 106 into a voltage.
  • the output of the current amplifier 107 is supplied to a Z-direction control circuit 108 for driving the fine movement mechanism 101, an information extraction circuit 109 for extracting the recorded information from the tunneling current data, an image data generation circuit 111 for generating image data for supply to a monitor 110, and a comparator 112.
  • a reference voltage Vt is supplied to the other input terminal of the comparator 112, of which output terminal is connected to an edge detection circuit 113. The output terminal thereof is connected to the timing input terminal of a sample hold circuit 114.
  • a stage drive circuit 115 is connected, through an X-direction buffer 116, to an unrepresented piezoelectric element of X-direction provided on the stage 104, also is connected, through an adder 117 and a Y-direction buffer 118, to an unrepresented piezoelectric element of Y-direction provided also on the stage 104, and releases such driving voltage as to cause a high-speed scanning motion of the electrode substrate 103 in the X-direction and a scanning motion in the Y-direction.
  • the X-direction output terminal of the stage drive circuit 115 is connected to an adder 117 and the input terminal of the sample hold circuit 114, of which output terminal is connected, through an output limiting circuit 119 and an integrating circuit 120, to the other input terminal of the adder 117.
  • the output terminal of the sample hold circuit 114 is connected through an input resistor R1 to a first input terminal of an amplifier A1, while a position reference voltage Vp is supplied through an input resistor R2 to a second input terminal of the amplifier A1, and the first input terminal of the amplifier A1 and the output terminal thereof are connected through a feedback resistor R3.
  • the output terminal of the amplifier A1 is connected, through a diode D1, to the positive side of an upper limit voltage Vh, and, through a diode D2, to the negative side of a lower limit voltage VL.
  • the output terminal of the amplifier A1 of the output limiting circuit 119 is connected through an input resistor R4 to a first input terminal of an amplifier A2.
  • Said input terminal is connected, through a parallel circuit of a resistor R5 and a capacitor C1, to the output terminal of said amplifier A2, and a second input terminal thereof is grounded.
  • the output terminal of said amplifier A2 is connected to the input terminal of the adder 117.
  • the electrode substrate 103 and the probe 102 are maintained in advance, by an unrepresented mechanism, to a distance generating a tunneling current therebetween, and a predetermined voltage is applied therebetween by the bias circuit 106.
  • a voltage converted from the tunneling current generated by the above-mentioned applied voltage between the electrode substrate 103 and the probe 102 is supplied to the image data generation circuit 111, the Z-direction control circuit 108, the information extraction circuit 109 and the comparator 112 for detecting the position of the tracking groove.
  • the image data generation circuit 111 generates image data from the obtained tunneling current signal and sends said image data to the monitor 110.
  • the Z-direction control circuit 108 effects feedback control on the distance between the probe 102 and the electrode substrate 103 in such a manner that the tunneling current becomes constant, by actuating the fine movement mechanism 101.
  • the information extraction circuit 109 extracts the recorded information, from the tunneling current data, in digital or analog form.
  • the comparator 112 compares the measured current with a reference current predetermined by the reference voltage Vt, and sends the result of comparison to the edge detection circuit 113, which sends a predetermined voltage pulse to the sample hold circuit 114 at the instant of edge detection of the tracking groove 105.
  • the scanning motion in the X, Y-directions is conducted by the supply of voltages from the stage drive circuit 115 to the unrepresented piezoelectric elements mounted on the stage 104.
  • the voltage held in the sample hold circuit 114 at the timing of the pulse signal from the edge detection circuit 113 is supplied through the output limiting circuit 119 and the integrating circuit 120 to generate the offset value, which is added in the adder 117 to the X-direction scanning voltage, and the obtained X-direction driving voltage is supplied, through the X-direction buffer 118, to the X-direction piezoelectric element of the stage 104.
  • the edge detection circuit 113 sends a pulse signal shown in Fig. 6B, indicating the timing of detection, to the sample hold circuit 114 which in response samples the X-direction scanning voltage shown in Fig. 6C and holds the sampled voltage, assuming a stepwise form as shown in Fig. 6D.
  • an error signal shown in Fig. 6E is outputted from the output limiting circuit 119.
  • an edge position detection and feedback are effected in each scanning operation.
  • the function becomes somewhat different in case the edge detection is not normal.
  • the drift resulting from temperature or vibration is much slower than the scanning frequency.
  • the linearity of groove edge has been improved to the level of nanometer by the use of semiconductor process. Consequently, an extreme variation in the position of edge detection cannot be expected within a scanning operation in case of a high-speed scanning in which the interval of edge detection is short.
  • the high-speed scanning operation generates a perturbation in the position of edge detection irrelevant from the edge shape, due to mismatching with the feedback operation in the Z-direction. This phenomenon is presumably ascribable to the influence of smoothness of the substrate electrode in the areas other than the tracking grooves 105, and such perturbation in the position of edge detection results in unstable function of the feedback system such as oscillation or overshoot.
  • the output limiting is conducted in the output limiting circuit 119.
  • Figs. 7A, 7B and 7C respectively show the edge detection pulse, the X-direction scanning voltage and the output of the output limiting circuit 119.
  • the output limiting circuit 119 compares the held voltage with a reference voltage, and, if the difference is larger than an upper limit voltage Vh or smaller than a lower limit voltage VL, the output limiting circuit 119 is adjusted to output said upper limit voltage Vh or said limit voltage VL. In this manner the feedback voltage cannot exceed a certain constant value, so that the overshooting etc. becomes less prone to occur.
  • the recording medium was composed of an Au film, formed on a glass substrate and provided with tracking grooves, in lines and spaces of 2 ⁇ m each by a semiconductor process.
  • the depth and length of the tracking groove 105 were respectively ca. 50 nm and 30 ⁇ m.
  • the scanning was conducted with a width of 1 ⁇ m in the X-direction and a length of 10 ⁇ m in the Y-direction, and with a speed of 500 Hz in the X-direction, and the edge detection and feedback were conducted once in each scanning operation in the X-direction.
  • a feedback control based solely on the difference signal without the above-mentioned output limiting circuit 119 was conducted by the replacing the output limiting circuit 119 and the integrating circuit 120, shown in Fig. 5 with the integrating circuit 130 shown in Fig. 8.
  • a first input terminal of an amplifier A3 is connected to an input resistor R6, while a second input terminal of said amplifier A3 is supplied with a position reference voltage Vp, and the first input terminal is connected to the output terminal through a parallel circuit of a resistor R7 and a capacitor C2.
  • the fluctuation of the track groove 105 on the output image on the monitor 110 was about 10 nm.
  • the range of fluctuation in the edge of tracking grooves prepared by the semiconductor process was revealed as several nanometers for a length of 1 ⁇ m, according to the observation under an electron microscope, and the above-mentioned fluctuation is apparently larger than the latter.
  • the circuit including the output limiting circuit 119 As the magnitude of ordinary temperature drift in the scanning operation of 500 Hz can be considered as 0.5 nm at maximum per scanning, and as the fluctuation in the edge shape can be considered as 1 nm or less per scanning, the upper and lower limit voltages were so determined as to correspond to ⁇ 1.5 nm with respect to the target position where the tracking groove 105 is to be fixed within the scanning area. Also the feedback gain determined from the resistors R1, R2, R3 of the output limiting circuit 119 was determined as 0.5. As a result, the tracking groove 105 could be stopped on the image, and the range of fluctuation in feedback was limited to 2 nm or less. A stable tracking operation without oscillation could therefore be confirmed.
  • this information processing apparatus was employed in an experiment of information recording, reproduction and erasure, utilizing a recording medium composed of an Au electrode and a two-layered langmuir-Blodgett (LB) film of squarelium-bis-6-octylazulene (SOAZ) laminated thereon, as disclosed in the Japanese Patent Application Laid-Open Nos. 63-161552 and 63-161553.
  • the Au electrode was provided with tracking grooves prepared by a semiconductor process as in the foregoing embodiment.
  • the scanning motion of the probe electrode was conducted with a width of 1 ⁇ m and a length of 10 ⁇ m in the X and Y-directions, and the tracking was conducted with the apparatus of the configuration shown in Fig. 5.
  • the electrical information recording was conducted by the application, between the specimen and the probe electrode 102, of a voltage superposed by consecutive pulses of heights of -6 V and +1.5 V by the bias circuit 3.
  • the reproduced information coincided with the recorded information, by extracting data from the obtained tunneling current and repeating such data reproduction plural times. It was also confirmed, from the result of image processing of the tunneling current, that the repeatedly reproduced image data mutually coincided with an error as small as 1 nm. It was furthermore confirmed, from the reproduced tunneling current image and the extracted information, that the recorded information could be erased by superposing a pulse voltage of a height of 3 V to the bias voltage when the probe electrode 102 was brought close to the recorded area.

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Radiation-Therapy Devices (AREA)
  • Control Of Position Or Direction (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Multi-Process Working Machines And Systems (AREA)

Claims (2)

  1. Appareil de traitement d'informations pour exécuter au moins l'un de l'enregistrement, la reproduction et l'effacement d'une information au moyen d'une électrode formant sonde (2) qui balaye un support d'enregistrement (1) équipé d'au moins une rainure de suivi, comprenant :
    une sonde (2);
    des moyens de déplacement (5) pour l'exécution d'un déplacement relatif entre ladite sonde et ledit support d'enregistrement;
    des moyens d'attaque (6,7) pour envoyer un signal d'attaque électrique prédéterminé auxdits moyens de déplacement de telle sorte que ladite sonde se déplace dans une direction sensiblement perpendiculaire à ladite rainure de suivi; et
    des moyens de détection (10) pour détecter un effet physique produit entre ladite sonde et ledit support d'enregistrement;
    caractérisé en ce que
    ledit appareil comporte en outre
    des moyens (8,9,13,14,18,19,20,15) de production d'une valeur de correction pour détecter la rainure de suivi formée dans le support d'enregistrement, sur la base du signal de sortie desdits moyens de détection et pour détecter ledit signal d'attaque sur la base du cadencement de ladite détection, et pour calculer une différence entre le signal d'attaque détecté et une valeur prédéterminée de manière à produire une valeur de correction pour corriger ledit déplacement relatif sur la base de la différence calculée, dans lequel lesdits moyens de déplacement sont commandés en fonction dudit signal d'attaque et de ladite valeur de correction.
  2. Appareil selon la revendication 1, comprenant en outre
    des moyens (16,17) pour comparer le dernier signal d'attaque détecté à une valeur moyenne de signaux d'attaque détectés auparavant, et pour commander lesdits moyens de déplacement en utilisant ladite valeur de correction uniquement lorsque le dernier signal d'attaque détecté est inférieur à ladite valeur moyenne.
EP92117292A 1991-10-15 1992-10-09 Appareil de traitement d'information à mécanisme d'alignement de piste Expired - Lifetime EP0537642B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP293907/91 1991-10-15
JP3293907A JP3015978B2 (ja) 1991-10-15 1991-10-15 情報処理装置
JP16862092A JPH05334737A (ja) 1992-06-02 1992-06-02 トラッキング方法及びそれを用いた情報処理装置
JP168620/92 1992-06-02

Publications (3)

Publication Number Publication Date
EP0537642A2 EP0537642A2 (fr) 1993-04-21
EP0537642A3 EP0537642A3 (en) 1995-02-15
EP0537642B1 true EP0537642B1 (fr) 1999-01-07

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EP92117292A Expired - Lifetime EP0537642B1 (fr) 1991-10-15 1992-10-09 Appareil de traitement d'information à mécanisme d'alignement de piste

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US (1) US5371727A (fr)
EP (1) EP0537642B1 (fr)
AT (1) ATE175515T1 (fr)
CA (1) CA2080251C (fr)
DE (1) DE69228103T2 (fr)

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Also Published As

Publication number Publication date
CA2080251A1 (fr) 1993-04-16
EP0537642A2 (fr) 1993-04-21
EP0537642A3 (en) 1995-02-15
DE69228103D1 (de) 1999-02-18
US5371727A (en) 1994-12-06
CA2080251C (fr) 1997-12-02
ATE175515T1 (de) 1999-01-15
DE69228103T2 (de) 1999-07-15

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