CA2031733C - Methode et appareil pour fabriquer une sonde - Google Patents

Methode et appareil pour fabriquer une sonde

Info

Publication number
CA2031733C
CA2031733C CA 2031733 CA2031733A CA2031733C CA 2031733 C CA2031733 C CA 2031733C CA 2031733 CA2031733 CA 2031733 CA 2031733 A CA2031733 A CA 2031733A CA 2031733 C CA2031733 C CA 2031733C
Authority
CA
Canada
Prior art keywords
probe
end portion
electrode
portion forming
forming part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA 2031733
Other languages
English (en)
Other versions
CA2031733A1 (fr
Inventor
Toshimitsu Kawase
Akihiko Yamano
Hiroyasu Nose
Toshihiko Miyazaki
Takahiro Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CA2031733A1 publication Critical patent/CA2031733A1/fr
Application granted granted Critical
Publication of CA2031733C publication Critical patent/CA2031733C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
CA 2031733 1989-12-08 1990-12-07 Methode et appareil pour fabriquer une sonde Expired - Lifetime CA2031733C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-317468 1989-12-08
JP31746889A JP2789244B2 (ja) 1989-12-08 1989-12-08 微小プローブの形成方法

Publications (2)

Publication Number Publication Date
CA2031733A1 CA2031733A1 (fr) 1991-06-09
CA2031733C true CA2031733C (fr) 1994-10-04

Family

ID=18088567

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2031733 Expired - Lifetime CA2031733C (fr) 1989-12-08 1990-12-07 Methode et appareil pour fabriquer une sonde

Country Status (2)

Country Link
JP (1) JP2789244B2 (fr)
CA (1) CA2031733C (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100736358B1 (ko) * 2004-11-12 2007-07-06 재단법인서울대학교산학협력재단 탐침 현미경의 탐침 끝 부분에 나노구조가 선택적으로흡착되는 방법 및 그 탐침이 장착된 탐침 현미경
KR100660189B1 (ko) * 2004-11-12 2006-12-21 한국과학기술원 전해에칭을 이용한 나노팁의 접착장치 및 접착방법

Also Published As

Publication number Publication date
JP2789244B2 (ja) 1998-08-20
CA2031733A1 (fr) 1991-06-09
JPH03179202A (ja) 1991-08-05

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Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed
MKEC Expiry (correction)

Effective date: 20121202